Deposition nozzle with head member and deposition apparatus with the same

Abstract

A deposition nozzle including a head portion used to manufacture an organic light-emitting diode that enables a high-resolution display by controlling the spraying of deposition particles, such as organic materials, is disclosed. A deposition nozzle including a head portion according to an embodiment of the present invention may include: a nozzle body having an internal space formed therein for spraying deposition particles; and a head portion disposed in the internal space and guiding the movement of the deposition particles.

Description

Technology Field

[0001] The present invention relates to deposition technology, and more specifically, to a deposition nozzle comprising a head portion for spraying particles such as organic material or metal onto a panel, and a deposition apparatus comprising the same. Background Technology

[0003] Recently, the demand for Organic Light Emitting Diodes (OLEDs) in the display market has been increasing significantly. In particular, the demand for high-resolution OLED displays is growing in the television and smartphone display markets.

[0004] Among the processes for manufacturing Organic Light-Emitting Diodes (OLEDs) to achieve high resolution in such displays, the core process is the deposition process for manufacturing RGB pixels. In the deposition process, organic material is heated at a deposition source located at the bottom of a chamber, and the heated organic material is sublimated. The sublimated organic material passes through a mask and is deposited onto a Thin Film Transistor (TFT). To achieve high resolution, the thickness of the mask must be reduced. However, as the mask thickness decreases, the difficulty of the process increases, leading to a problem where the yield of the OLED drops sharply. Additionally, the reduction in mask thickness increases the shadow effect, which in turn increases the defect rate of the OLED.

[0005] In addition, to realize high-resolution displays, a deposition device is being researched in which deposited particles are ejected to have a straight line without being emitted. The problem to be solved

[0007] The present invention aims to solve the above-mentioned problems by providing a deposition nozzle including a head portion used to manufacture an organic light-emitting diode that enables a high-resolution display by controlling the spraying of deposition particles, such as organic materials, and a deposition apparatus including the same.

[0008] The problems of the present invention are not limited to those mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below. means of solving the problem

[0010] To solve the above problem, a deposition nozzle including a head portion according to an embodiment of the present invention may include: a nozzle body in which an internal space is formed for spraying deposition particles; and a head portion disposed in the internal space and guiding the movement of the deposition particles.

[0011] The above head portion may be formed in a conical shape.

[0012] A guide groove may be formed on the outer surface of the head portion through which a portion of the deposited particles move.

[0013] The deposition nozzle including the head portion may further include a vortex prevention portion formed roundly on the upper side of the head portion to prevent the generation of vortices of the deposition particles.

[0014] The deposition nozzle including the head portion described above may further include a guide portion formed in a spiral shape on the inner surface of the nozzle body, through which at least a portion of the deposition particles are moved.

[0015] The above guide portion may be formed in the shape of a groove on the inner surface of the nozzle body.

[0016] The radius of the upper side of the guide portion may be larger than the radius of the lower side of the guide portion.

[0017] The inner diameter of the nozzle body can increase along the direction in which the deposition particles are ejected.

[0018] In addition, a deposition apparatus including a deposition nozzle including a head portion according to an embodiment of the present invention comprises: a deposition chamber maintaining a vacuum state; and a deposition source including a deposition nozzle accommodated in the deposition chamber and spraying deposition particles, wherein the deposition nozzle may include: a nozzle body having an internal space formed therein for spraying deposition particles; and a head portion disposed in the internal space and guiding the movement of the deposition particles. Effects of the invention

[0020] According to an embodiment of the present invention, the spreading of the sprayed deposition particles is minimized to ensure straightness, thereby preventing the occurrence of shadow effects and improving the reliability of the deposition process.

[0021] In addition, since the deposition particles are sprayed to have straight-line propulsion, the deposition process can be precisely controlled. Brief explanation of the drawing

[0023] FIG. 1 is a schematic diagram showing a deposition apparatus according to one embodiment of the present invention. FIG. 2 is a perspective view schematically showing a deposition nozzle including a head portion according to one embodiment of the present invention. FIG. 3 is a cross-sectional view schematically showing a deposition nozzle including a head portion according to one embodiment of the present invention. FIG. 4 is a drawing showing a deposition material being sprayed from a deposition nozzle including a head portion according to one embodiment of the present invention. FIGS. 5A and FIGS. 5B are cross-sectional views focusing on a guide portion according to one embodiment of the present invention. FIG. 6 is a cross-sectional view schematically showing a deposition nozzle including a head portion according to another embodiment of the present invention. FIGS. 7a and 7b are cross-sectional views focusing on a guide portion according to another embodiment of the present invention. Specific details for implementing the invention

[0024] Various embodiments are described in more detail below with reference to the attached drawings. Embodiments according to the present invention may be modified in various ways. Specific embodiments may be depicted in the drawings and described in detail in the detailed description. However, specific embodiments disclosed in the attached drawings are intended only to facilitate understanding of various embodiments. Accordingly, the technical scope is not limited by specific embodiments disclosed in the attached drawings and should be understood to include all equivalents or substitutions that fall within the spirit and scope of the invention.

[0025] Terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but these components are not limited by the aforementioned terms. The aforementioned terms are used solely for the purpose of distinguishing one component from another.

[0026] In embodiments of the present invention, terms such as "comprising" or "having" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the embodiments of the present invention, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof. When a component is described as being "connected" or "connected" to another component, it should be understood that it may be directly connected to or connected to that other component, or that there may be other components in between. On the other hand, when a component is described as being "directly connected" or "directly connected" to another component, it should be understood that there are no other components in between.

[0027] Meanwhile, a "module" or "part" for a component used in an embodiment of the present invention performs at least one function or operation. Furthermore, the "module" or "part" may perform the function or operation by hardware, software, or a combination of hardware and software. Additionally, a plurality of "modules" or a plurality of "parts," excluding a "module" or "part" that must be performed on specific hardware or on at least one processor, may be integrated into at least one module. A singular expression includes a plural expression unless the context clearly indicates otherwise.

[0028] In describing embodiments of the present invention, if it is determined that a detailed description of related known functions or configurations may unnecessarily obscure the essence of the present invention, such detailed description is abbreviated or omitted.

[0029] In the embodiments of this specification, the X-axis shown in the drawings is perpendicular to the Y-axis and perpendicular to the Z-axis. Also, the Y-axis shown in the drawings is perpendicular to the Z-axis. Also, the direction of the arrow of the Z-axis is referred to as the upper side. The lower side means the direction opposite to the upper side.

[0031] FIG. 1 is a schematic diagram showing a deposition apparatus according to one embodiment of the present invention.

[0032] Referring to FIG. 1, a deposition apparatus (100) according to one embodiment of the present invention may include a deposition chamber (110), a first frame (140), and a deposition source (150).

[0033] The deposition chamber (110) accommodates a substrate (115) for forming a thin film. The substrate (115) is positioned above the deposition chamber (110). The deposition chamber (110) is made of a metal material. The interior (111) of the deposition chamber (110) is in a vacuum state or vacuum atmosphere. Additionally, the deposition chamber (110) may be made of various materials capable of maintaining a vacuum state inside (111) of the deposition chamber (110) while having rigidity such as plastic.

[0034] Additionally, the deposition chamber (110) is connected to a vacuum pump (not shown) to maintain a vacuum state inside it. The vacuum pump is installed outside or inside the deposition chamber (110).

[0035] The first frame (140) is positioned below the deposition chamber (110). The first frame (140) accommodates a deposition source (150) to be described later. The first frame (140) is made of metal or plastic material.

[0036] The deposition source (150) is housed in the frame (140). Additionally, the deposition source (150) is composed of multiple sources. The multiple deposition sources (150) are positioned on the lower side of the deposition chamber (110) to face the substrate (115).

[0037] Additionally, the deposition source (150) sprays deposition particles toward the substrate (115). Here, the deposition particles may be organic materials or metals, and may be various materials that vaporize or sublimate to form a thin film.

[0038] In addition, the deposition source (150) is provided with a deposition nozzle (200). The deposition nozzle (200) will be described in detail later with reference to the drawings.

[0039] In addition, a second frame (120) is provided on the upper side of the first frame (140).

[0040] The second frame (120) is combined with the first frame (140). Additionally, the second frame (120) is positioned between the substrate (115) and the first frame (140). The second frame (120) is made of metal or plastic material. The second frame (120) prevents deposition particles sprayed from the deposition nozzle (200) from being deposited into an area other than the substrate (115).

[0041] In addition, a first heater (161) and a second heater (163) are provided that are accommodated in the first frame (140).

[0042] The first heater (161) wraps around the deposition source (150) along the outer surface of the deposition source (150). The first heater (161) may be an electric heater that receives power and converts electricity into heat.

[0043] The second heater (161) is spaced apart from the first heater (163). Additionally, the second heater (163) surrounds the deposition nozzle (200) along the outer surface of the deposition nozzle (200). The second heater (163) may be an electric heater that receives power and converts electricity into heat.

[0044] In addition, an angle adjustment plate (170) is provided on the first frame (140).

[0045] The angle adjustment plate (170) is positioned on the upper side of the first frame (140). Additionally, the angle adjustment plate (170) controls the direction of injection of deposition particles ejected from the plurality of deposition sources (150).

[0047] FIG. 2 is a perspective view schematically showing a deposition nozzle including a head portion according to one embodiment of the present invention, and FIG. 3 is a cross-sectional view schematically showing a deposition nozzle including a head portion according to one embodiment of the present invention.

[0048] Referring to FIGS. 2 and FIGS. 3, a deposition nozzle (200) including a head portion according to one embodiment of the present invention may include a nozzle body (210), a head portion (250), and a guide portion (230).

[0049] The exterior of the nozzle body (210) may be cylindrical in shape. Additionally, the nozzle body (210) may be made of metal or plastic material. An internal space (211) in which the deposition particles are sprayed is formed in the nozzle body (210).

[0050] The internal space (211) of the nozzle body (210) is formed in the shape of a truncated cone. The inner diameter of the nozzle body (210) increases along the direction (Z-axis) in which the deposition particles are ejected. For example, the inner diameter (R1) of the upper side (212) of the nozzle body (210) is larger than the inner diameter (R2) of the lower side (213) of the nozzle body (210).

[0051] The head portion (250) is positioned in the internal space (211). Additionally, a connecting portion (260) is provided on the side of the head portion (250) and connected to the inner surface of the nozzle body (210). The connecting portion (260) extends from the side of the head portion (250) and is fixed to the inner surface of the nozzle body (210). Furthermore, the head portion (250) includes a conical portion (251) formed in a conical shape and a vortex prevention portion (252) extending from the conical portion (251).

[0052] The conical portion (251) is formed with a pointed shape in the downward direction. As the conical portion (251) partially blocks the movement of the deposited particles into the central region of the internal space (211), it guides the flow pattern of the movement of the deposited particles in a spiral shape.

[0053] The above vortex prevention part (252) is formed in a rounded shape on the upper side of the conical part (251). The above vortex prevention part (252) prevents vortices that occur after the deposited particles pass through the conical part (251). Accordingly, it prevents the straightness of the deposited particles from being reduced by the vortices.

[0054] Additionally, a guide groove (253) is formed on the outer surface of the conical portion (251) through which a portion of the deposited particles move. The guide groove (253) is formed in a spiral shape along the outer surface of the conical portion (251). The guide groove (253) guides the flow pattern of the deposited particles' movement in a spiral shape.

[0055] The guide portion (230) is formed on the inner surface of the nozzle body (210). Additionally, the guide portion (230) is formed in the shape of a spiral. Additionally, the guide portion (230) is formed in the shape of a groove on the inner surface of the nozzle body (210). At least a portion of the deposited particles are moved through the guide portion (230).

[0056] The radius of the upper side (232) of the guide portion (230) is larger than the radius of the lower side (233) of the guide portion (230). Additionally, the radius of the guide portion (230) increases along the direction (Z-axis) in which the deposited particles are ejected.

[0058] Meanwhile, [Equation 1] for implementing a high-resolution display is as follows.

[0059]

[0060] Here, N represents the maximum number of collisions of deposition particles inside the deposition source, Na represents the total number of deposition particles inside the deposition source, Nb represents the average number of deposition particles inside the deposition source, Fn represents the actual number of particles represented by one DSMC (Direct Simulation Monte Carlo) particle, (σCr) represents the product of the collision cross-section inside the deposition source and the maximum value of the relative velocity, and V represents the volume inside the deposition source.

[0061] If the length (L) of the nozzle body (210) is increased to increase the straightness of the deposited particles, there is a problem in that the V value increases and the N value decreases.

[0062] However, a deposition nozzle (200) including a head portion according to one embodiment of the present invention improves the straightness of the deposition particles by increasing the N value by the head portion (250) without increasing the length (L) of the nozzle body (210). The straightness of the deposition particles will be explained in detail later with reference to the drawings.

[0064] FIG. 4 is a drawing showing a deposition material being sprayed from a deposition nozzle including a head portion according to one embodiment of the present invention.

[0065] Referring to FIG. 4, the deposition particles are sprayed through the internal space (211) of the nozzle body (210).

[0066] As the deposition particles pass through the internal space (211), they collide with each other and collide with the inner surface of the nozzle body (210). As the number of collisions of the deposition particles increases, the deposition particles lose their straightness and are emitted as they pass through the deposition nozzle (200). Furthermore, the straightness of the deposition particles is determined by the inclination (θ) of the deposition particles with respect to the central axis (P) of the nozzle body (210).

[0067] The deposition particles are moved in a spiral shape by the head portion (250) while passing through the internal space (211). This spiral flow of the deposition particles reduces collisions between the deposition particles in the internal space (211) or collisions between the deposition particles and the inner surface of the nozzle body (210).

[0068] Accordingly, the head portion (250) reduces collisions of the deposition particles in the internal space (211) of the nozzle body (210), thereby increasing the straightness of the deposition particles ejected from the deposition nozzle (200).

[0069] In addition, since the internal space (211) is formed in the shape of a truncated cone, the collision of the deposited particles in the internal space (211) is reduced compared to the cylindrical shape, thereby improving the straightness of the deposited particles.

[0071] FIGS. 5A and FIGS. 5B are cross-sectional views focusing on a guide portion according to one embodiment of the present invention.

[0072] Referring to FIGS. 5a and 5b, the upper side (232) of the guide portion is formed as a groove having a first depth (D1) from the inner surface (211a) of the nozzle body. The lower side (233) of the guide portion is formed as a groove having a second depth (D2) from the inner surface (211a) of the nozzle body. The second depth (D1) is the same as the first depth (D1).

[0073] In addition, according to various embodiments of the present invention, the first depth (D1) is smaller than the second depth (D2). Accordingly, the deposited particles are formed in a spiral flow as they pass through the guide portion (230, FIG. 2).

[0075] FIG. 6 is a cross-sectional view schematically showing a deposition nozzle including a head portion according to another embodiment of the present invention, and FIG. 7a and FIG. 7b are cross-sectional views focusing on a guide portion according to another embodiment of the present invention.

[0076] Referring to FIGS. 6, 7a, and 7b, a deposition nozzle (200') according to another embodiment of the present invention may include a nozzle body (210) and a guide part (230'). If the components according to another embodiment of the present invention are identical or similar to the components of the previously described embodiment, the description will be replaced with the previously described description, and the guide part (230') will be described in detail.

[0077] The guide portion (230') is formed protruding from the inner surface (211'a) of the nozzle body (210). The deposited particles are formed in a spiral flow between the guide portions (230').

[0078] The upper side (232') of the guide portion is formed by a projection that protrudes a first length (H1) from the inner surface (211'a) of the nozzle body. The lower side (233') of the guide portion is formed by a projection that protrudes a second length (H2) from the inner surface (211'a) of the nozzle body. The first length (H1) is the same as the second length (H2).

[0079] Additionally, according to various embodiments of the present invention, the second length (H2) is smaller than the first length (H2). Accordingly, the deposited particles are formed in a spiral flow as they pass through the guide portion (230').

[0081] As described above, preferred embodiments according to the present invention have been examined. It is obvious to those skilled in the art that, in addition to the embodiments described above, the present invention may be embodied in other specific forms without departing from its spirit or scope. Therefore, the embodiments described above should be regarded as illustrative rather than restrictive, and accordingly, the present invention is not limited to the description above but may be modified within the scope of the appended claims and their equivalents. Explanation of the symbols

[0082] 100: Deposition apparatus 200: Deposition nozzle 210: Nozzle body 250: Head section

Claims

Claim 1 A deposition nozzle comprising: a nozzle body having an internal space formed for spraying deposition particles; and a head portion disposed in the internal space and guiding the movement of the deposition particles; and further comprising a vortex prevention portion formed to protrude roundly in the direction of travel of the deposition particles on the upper side of the head portion to prevent the generation of vortices of the deposition particles. Claim 2 A deposition nozzle comprising a head portion, wherein, in claim 1, the head portion is formed in a conical shape. Claim 3 A deposition nozzle comprising a head portion, wherein, in claim 1, a guide groove is formed on the outer surface of the head portion for moving a portion of the deposition particles. Claim 4 delete Claim 5 A deposition nozzle according to claim 1, comprising a head portion further including a guide portion formed in a spiral shape on the inner surface of the nozzle body and through which at least a portion of the deposition particles are moved. Claim 6 In claim 5, the guide portion is a deposition nozzle formed in the shape of a groove on the inner surface of the nozzle body. Claim 7 In claim 5, a deposition nozzle in which the radius of the upper side of the guide portion is larger than the radius of the lower side of the guide portion. Claim 8 In claim 5, the inner diameter of the nozzle body increases along the direction in which the deposition particles are ejected. Claim 9 A deposition apparatus comprising: a deposition chamber maintaining a vacuum state; and a deposition source including a deposition nozzle accommodated in the deposition chamber and spraying deposition particles; wherein the deposition nozzle includes: a nozzle body having an internal space formed therein for spraying deposition particles; and a head portion disposed in the internal space and guiding the movement of the deposition particles; and a vortex prevention portion formed to protrude roundly in the direction of travel of the deposition particles on the upper side of the head portion to prevent the generation of vortices of the deposition particles.

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