Handler

Abstract

The present invention relates to a handler. Specifically, according to one embodiment of the present invention, a handler may be provided comprising: a set plate module including a set plate capable of supporting a customer tray; a support frame having an opening formed therein for exposing at least a portion of the upper surface of the customer tray supported on the set plate to the outside; and a base plate having an opening formed therein communicating with the opening. The set plate is configured to be rotatable with respect to the base plate and capable of moving up and down around a plate rotation axis extending in the vertical direction.

Description

Technology Field

[0001] The present invention relates to a handler. Background Technology

[0002] Generally, a semiconductor device test handler (hereinafter referred to as "handler") is a device that supports testing of semiconductor devices manufactured through a defined manufacturing process, classifies electronic components by grade based on test results, and loads them onto customer trays. These customer trays are supplied by customer companies that wish to test electronic components.

[0003] Handlers are manufactured to be suitable for operating customer trays loaded with these electronic components. For example, such handlers have been designed to operate electronic components loaded on customer trays of the same size with all terminals oriented in the same unidirectional manner.

[0004] Meanwhile, as the development of semiconductor-related technologies has intensified in recent years, the shapes and arrangements of electronic components loaded onto customer trays are becoming increasingly diverse. For example, recent electronic components differ in their width and length, and terminals are manufactured with various orientations, either horizontal or vertical. Consequently, as the shapes and arrangements of the electronic components to be loaded onto customer trays become more diverse, the shapes of the customer trays themselves are also becoming more varied.

[0005] Conventional handlers must be remanufactured to fit customer trays of various shapes supplied by clients whenever the shape and arrangement of electronic components change. This requirement to remanufacture the handler every time the customer tray is modified presents a problem in that it results in losses due to the time and cost involved in such manufacturing. The problem to be solved

[0006] One embodiment of the present invention was developed based on the background described above, and aims to provide a handler that does not need to be remanufactured even if the shape of the customer tray is changed. means of solving the problem

[0007] According to one aspect of the present invention, a handler may be provided comprising: a set plate module including a set plate capable of supporting a customer tray; a support frame having an opening formed therein for exposing at least a portion of the upper surface of the customer tray supported on the set plate to the outside; and a base plate having an opening formed therein communicating with the opening. The set plate is configured to be rotatable with respect to the base plate and capable of moving up and down around a plate rotation axis extending in the vertical direction.

[0008] Additionally, the open hole may have a width and a length greater than the width, and the support frame may be detachably connected to the upper side of the base plate, and a handler may be provided such that when separated from the base plate, the longitudinal direction of the open hole may be placed in a target orientation state that is parallel to or offset from a direction parallel to the horizontal direction.

[0009] Additionally, the apparatus may further include a fastener that selectively fastens the support frame to the base plate so that the support frame is placed in a fastened state where it is fastened to the base plate, or in a detached state where it is detached from the base plate, and a handler may be provided such that when the support frame is placed in the detached state, it is placed in a state where it can rotate about a support frame rotation axis with respect to the base plate, and the support frame rotation axis passes through the center of the support frame and extends along the vertical direction.

[0010] In addition, the set plate may be provided with a handler configured to be rotatable around a virtual plate rotation axis that extends along the vertical direction and passes through the center of the support frame.

[0011] Additionally, the set plate module may further include a rotating part configured to fix and support the set plate and to be rotatable with respect to the base plate around the plate rotation axis; and an actuator connected to the set plate such that one end is spaced apart from the rotation center of the rotating part and rotatable with respect to the set plate in an up-and-down direction with respect to the set plate, wherein the actuator includes a cylinder; and a reciprocating shaft configured to be reciprocable in a horizontal direction with respect to the cylinder, and a handler may be provided such that the rotating part is rotated by the reciprocating movement of the reciprocating shaft.

[0012] Additionally, a handler may be provided such that the set plate when the reciprocating shaft is maximally advanced relative to the cylinder is oriented perpendicularly to the set plate when the reciprocating shaft is maximally withdrawn relative to the cylinder.

[0013] Additionally, a frame comprising a fixed frame and a lifting / lowering frame configured to be movable along the vertical direction relative to the fixed frame; and a hinge further comprising a hinge fixedly disposed on one side of the lifting / lowering frame and rotatably connected to the other end opposite to one end of the actuator, wherein the actuator is configured to be rotatable around a hinge rotation axis extending along the vertical direction provided by the hinge. Effects of the invention

[0014] A handler according to one embodiment of the present invention has the effect of reducing the time and cost required for manufacturing the handler because it does not need to be remanufactured even if the shape of the customer tray is changed. Brief explanation of the drawing

[0015] FIG. 1 is a perspective view of a handler according to one embodiment of the present invention. FIG. 2 is a perspective view of a handler showing the variable support part of FIG. 1 and the customer tray rotated by a predetermined angle. Figure 3 is an exploded perspective view of the set plate. Figure 4 is a plan view of the set plate. Figure 5 is a plan view of a set plate showing the base plate of Figure 4 rotated. FIG. 6 is a plan view of a set plate showing the base plate of FIG. 5 rotated to the maximum. Specific details for implementing the invention

[0016] Hereinafter, specific embodiments for implementing the technical concept of the present invention will be described in detail with reference to the drawings.

[0017] In addition, in describing the present invention, if it is determined that a detailed description of related known components or functions may obscure the essence of the invention, such detailed description is omitted.

[0018] Furthermore, when it is stated that one component is 'connected,' 'supported,' 'advanced,' or 'expelled' from another component, it should be understood that while it may be directly connected, supported, advanced, or expelled from that other component, there may also be other components present in between.

[0019] The terms used in this specification are used merely to describe specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise.

[0020] Additionally, terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but such components are not limited by such terms. These terms are used solely for the purpose of distinguishing one component from another.

[0021] The meaning of "comprising" as used in the specification is to specify certain characteristics, regions, integers, steps, actions, elements, and / or components, and does not exclude the existence or addition of other specific characteristics, regions, integers, steps, actions, elements, components, and / or groups.

[0022] In addition, it is noted in advance that expressions such as upper, lower, and upper surface in this specification are described based on the drawings, and may be expressed differently if the orientation of the object is changed.

[0023] Hereinafter, a specific configuration of a handler (1) according to an embodiment of the present invention will be described with reference to the drawings.

[0024] Referring to FIGS. 1 and FIGS. 2 below, a handler (1) according to one embodiment of the present invention can test an electronic component (D) manufactured through a manufacturing process, classify it by grade according to the test results, and load it onto a customer tray (CT). Additionally, the handler (1) can be detachably connected to a tester (not shown). Such a handler (1) may include a set plate module (10), a base plate (20), a support frame (30), a sensor unit (40), a picker hand (50), a stacker (60), a fastener (not shown), a motor (not shown), a transfer (not shown), and a controller (not shown).

[0025] Referring further to FIG. 3, the set plate module (10) can transport the customer tray (CT) so that the customer tray (CT) is placed in a loading position and an unloading position. For example, the set plate module (10) can raise and lower the customer tray (CT) or move it along a horizontal direction. Such a set plate module (10) may include a set plate (100), a fixed base (200), an actuator (300), a rotating part (400), a hinge (500), a frame (600), a stopper (700), a rotation detection part (800), and a lifting / lowering shaft (900).

[0026] The set plate (100) can support the customer tray (CT). The set plate (100) can be supported on the frame (600) so as to be able to move up and down relative to the base plate (20). For example, the set plate (100) can move up and down together with the customer tray (CT) while supporting the customer tray (CT). The set plate (100) can be configured to be rotatable relative to the base plate (20) around a plate rotation axis (L) extending in the vertical direction. For example, the plate rotation axis (L) may be an imaginary straight line extending along the vertical direction and passing through one or more of the center of the set plate (100), the center of the customer tray (CT) supported by the set plate (100), the center of the rotating part (400), and the center of the support frame (30). The set plate (100) can be positioned parallel to the ground. These set plates (100) may be positioned opposite to one or more of the base plate (20) and the support frame (30). Additionally, the lower surface of the set plate (100) may be connected to the top of the rotating part (400).

[0027] A fixed base (200) may be positioned adjacent to the bottom of a rotating part (400) and fixedly positioned on a lifting / lowering frame (620) to be described later. This fixed base (200) may be configured to be able to move up and down relative to a base plate (20), and may be fixed to the lifting / lowering frame (620) without rotating relative to the base plate (20). This fixed base (200) may be connected to the rotating part (400) through a bearing.

[0028] Referring further to FIGS. 4 through 6, the actuator (300) can rotate the set plate (100) relative to the lifting / lowering frame (620). The actuator (300) may be rotatably connected to the set plate (100) such that one end is spaced a predetermined distance from the center of the set plate (100). For example, a bearing may be provided at one end of the actuator (300). Through this bearing, the one end of the actuator (300) may be configured to extend along the vertical direction and rotate about a predetermined center of rotation passing through the one end of the actuator (300).

[0029] The other end of such an actuator (300) may be rotatably connected to a hinge (500). For example, the other end of the actuator (300) may be configured to be rotatable around a hinge rotation axis (R) that extends along the vertical direction provided by the hinge (500). The other end of the actuator (300) may be the opposite end of the first end of the actuator (300). Such an actuator (300) may be positioned above the lifting / lowering frame (620). Such an actuator (300) may include a cylinder (320) and a reciprocating shaft (310).

[0030] The cylinder (320) can provide driving force to the reciprocating shaft (310). For example, the cylinder (320) may be a pneumatic cylinder capable of providing driving force to the reciprocating shaft (310) through air pressure.

[0031] The reciprocating shaft (310) can be advanced or retracted (moved forward or backward) along the horizontal direction relative to the cylinder (320) by the driving force provided by the cylinder (320). For example, one end of the reciprocating shaft (310) can be moved relative to the cylinder (320) so as to move away from or closer to the cylinder (320). This end of the reciprocating shaft (310) can be connected to a bearing provided at one end of the actuator (300).

[0032] The rotating part (400) and the set plate (100) can be rotated by the reciprocating movement of the reciprocating shaft (310). For example, the set plate (100) when the reciprocating shaft (310) is maximally advanced relative to the cylinder (320) can be oriented perpendicularly to the set plate (100) when the reciprocating shaft (310) is maximally retracted relative to the cylinder (320). As a more detailed example, the set plate (100) when one end of the reciprocating shaft (310) is maximally far from the cylinder (320) and the set plate (100) when one end of the reciprocating shaft (310) is maximally close to the cylinder (320) can be oriented perpendicularly to each other. In other words, the set plate (100) can be rotated 90° from when one end of the reciprocating shaft (310) is maximally far from the cylinder (320) to when one end of the reciprocating shaft (310) is maximally close to the cylinder (320).

[0033] The rotating part (400) may be configured to be rotatable about a plate rotation axis (L). The rotation angle of this rotating part (400) may be determined by the reciprocating distance of the reciprocating shaft (310). The reciprocating distance may refer to the relative travel distance of the cylinder (320) at one end of the reciprocating shaft (310). The rotation angle, which is the angle at which this rotating part (400) can be rotatable, may be 90°, for example. This rotating part (400) may be connected to a fixed base (200) through a bearing. A set plate (100) may be fixedly supported on the top of this rotating part (400). For example, the rotating part (400) and the set plate (100) fixed to the top of the rotating part (400) may rotate together about the plate rotation axis (L) with respect to the fixed base (200).

[0034] The hinge (500) can provide a hinge rotation axis (R) to the actuator (300). This hinge (500) can be fixedly positioned on one side of the lifting / lowering frame (620). For example, the hinge (500) can be fixedly positioned on the front side of the lifting / lowering frame (620). The front can be defined as the direction in which the lifting / lowering frame (620) faces the fixed frame (610), and the rear can be defined as the opposite direction of the front. As a more detailed example, the hinge (500) can be positioned at a predetermined distance to the left or right from the center of the front side of the lifting / lowering frame (620).

[0035] The frame (600) may include a fixed frame (610) whose position is fixed relative to the base plate (20), and a lifting / lowering frame (620) configured to be movable (lifted / lowered) along the vertical direction relative to the fixed frame (610). The fixed frame (610) may support the lifting / lowering frame (620). This fixed frame (610) may be extended along the vertical direction.

[0036] The lifting / lowering frame (620) may be configured to be able to move up and down relative to the base plate (20). This lifting / lowering frame (620) may support the set plate (100), fixed base (200), actuator (300), rotating part (400), hinge (500), stopper (700), and lifting / lowering shaft (900). In other words, the lifting / lowering frame (620) may move up and down together with the set plate (100), fixed base (200), actuator (300), rotating part (400), hinge (500), stopper (700), and lifting / lowering shaft (900) while supporting them. This lifting / lowering frame (620) may be extended along the front-rear direction. Additionally, the lifting / lowering frame (620) may be positioned to face the base plate (20).

[0037] The stopper (700) can prevent the set plate (100) from rotating in a rotation direction that is not pre-set or beyond a predetermined rotation angle. A plurality of such stoppers (700) may be provided. One of the plurality of stoppers (700) may be placed on the rear side of the lifting / lowering frame (620), and another may be placed on the fixed base (200). For example, the stopper (700) placed on the fixed base (200) can prevent the set plate (100) from rotating in a direction opposite to the pre-set rotation direction while in a non-rotated state. The stopper (700) placed on the fixed base (200) can prevent the set plate (100) from rotating in a direction opposite to the pre-set rotation direction while in contact with the stop groove formed in the set plate (100).

[0038] Additionally, a stopper (700) positioned on the rear side of the lifting / lowering frame (620) can prevent the set plate (100) from rotating in a preset rotational direction to exceed a predetermined rotational angle. This stopper (700) can prevent the set plate (100) from rotating in a preset rotational direction to exceed a predetermined rotational angle while in contact with a stop protrusion protruding from the lower surface of the set plate (100).

[0039] The rotation detection unit (800) can detect whether the set plate (100) is rotated. This rotation detection unit (800) may include a detector (810) and a detection projection (820). The detector (810) can detect whether the set plate (100) is rotated through the detection projection (820). This detector (810) may include, for example, an infrared sensor, an ultrasonic sensor, a contact sensor, etc. This detector (810) may be positioned adjacent to the outer surface of the rotating part (400). This detector (810) may be provided in multiple numbers. For example, a virtual first straight line passing through the center of the rotating part with one of the multiple detectors (810) and a virtual second straight line passing through the center of the rotating part with another of the multiple detectors (810) may be perpendicular to each other. The angle formed by these first and second straight lines may be the rotation angle of the set plate (100). These multiple sensors (810) may be placed on a fixed base (200).

[0040] The sensing projection (820) can be connected to the outer surface of the rotating part (400). This sensing projection (820) can be rotated together with the rotation of the rotating part (400). This sensing projection (820) can be detected by the detector (810). The angle at which this sensing projection (820) is rotated around the plate rotation axis (L) can be the rotation angle of the set plate (100).

[0041] The lifting shaft (900) can guide the lifting and lowering movement of the lifting frame (620). This lifting shaft (900) can be extended in the vertical direction and accommodated inside the fixed frame (610).

[0042] The base plate (20) may provide a space for loading or unloading an electronic component (D). An opening (20a) may be formed in the base plate (20). For example, this opening (20a) may be a through hole formed vertically. Multiple openings (20a) may be formed on the base plate (20). For example, one of the multiple openings (20a) may be a space for loading the electronic component (D), and another may be a space for unloading the electronic component (D). The base plate (20) may extend along one direction. This one direction may be a direction perpendicular to the front-rear direction and the up-down direction, and for example, may be the left-right direction.

[0043] The support frame (30) can support the edge of the customer tray (CT) supported on the set plate (100). For example, when the set plate (100) is in a state of maximum elevation, the support frame (30) can press the edge of the customer tray (CT) supported on the set plate (100) to prevent the set plate (100) from rising further. This support frame (30) can be detachably connected to the base plate (20). Additionally, the support frame (30) can be facing the base plate (20). An opening hole (30a) may be formed in this support frame (30) to expose at least a portion of the upper surface of the customer tray (CT) supported on the set plate (100) to the outside. This opening hole (30a) may be a through hole formed vertically.

[0044] The opening hole (30a) may be in communication with the opening (20a). For example, this opening hole (30a) may be positioned above the opening (20a). Additionally, the size of the opening hole (30a) may be smaller than the size of the opening (20a). For example, the horizontal size of the overlapping area formed when the opening hole (30a) and the opening (20a) are projected toward each other along the vertical direction may be smaller than the opening (20a) and equal to the opening hole (30a). In other words, the overlapping area may be contained within the opening (20a). This opening hole (30a) may have a predetermined width and a predetermined length greater than the predetermined width. The longitudinal direction of this opening hole (30a) may be parallel or perpendicular to the direction in which the base plate (20) extends, depending on the arrangement of the support frame (30). Additionally, the width direction of the opening hole (30a) may be a direction offset from the length direction. For example, such an opening hole (30a) may have a polygonal prism shape. For example, when viewed from the upper side of the support frame (30), the shape of the opening hole (30a) may include a rectangle, a square, or a shape where the angle between two adjacent corners is acute or obtuse. When the shape of the opening hole (30a) is a rectangle when viewed from the upper side of the support frame (30), the direction in which the relatively longer corner of the rectangle extends may be defined as the length direction, and the direction in which the relatively smaller corner extends may be defined as the width direction. In this case, the length direction and the width direction may be perpendicular to each other. However, this is not limited to such examples, and if two adjacent corners are not perpendicular, the width direction may be an offset direction that is not perpendicular to the length direction.

[0045] When the support frame (30) is separated from the base plate (20), the longitudinal direction of the open hole (30a) may be placed in a target orientation state where it is parallel to or offset from a single direction. For example, the single direction may be a direction parallel to the horizontal direction. The target orientation state refers to a state in which the support frame (30) is oriented so that the open hole (30a) corresponds to the shape of the customer tray (CT). For example, the support frame (30) may be connected to the base plate (20) after being placed in a target orientation state by rotating it by a predetermined angle around the plate rotation axis (L) while separated from the base plate (20). Additionally, the separation of the support frame (30) from the base plate (20) may mean that the support frame (30) is spaced apart from the set plate module (10) and the base plate (20) and exposed to the outside. When the shape of the customer tray (CT) changes, the support frame (30) may be separated from the base plate (20) and placed in a target orientation state, or separated from the base plate (20) and replaced with a support frame (30) corresponding to the shape of the customer tray (CT).

[0046] A handle may be formed on such a support frame (30) for gripping by a user. For example, the rotation of the support frame (30) may be performed by a user. However, the concept of the present invention is not limited thereto, and as another example, the rotation of the support frame (30) may be performed automatically by a fastener, a motor, and a controller.

[0047] The fastener can selectively fasten the support frame (30) to the base plate (20). Through this fastener, the support frame (30) can be placed in a fastened state where it is connected to the base plate (20), or in an unfastened state where it is disconnected from the base plate (20). Additionally, when the support frame (30) is in the unfastened state, it can be placed in a state where it can rotate about the support frame rotation axis relative to the base plate (20). The support frame rotation axis may be a virtual straight line extending along the vertical direction passing through the center of the support frame (30).

[0048] This fastener can be fixedly supported on the base plate (20). This fastener can be configured to engage with the support frame (30). For example, a groove or protrusion that can engage with the fastener may be formed in the support frame (30). When this fastener and the support frame (30) engage with each other, the support frame (30) can be placed in a fastened state. Additionally, when the engagement between the fastener and the support frame (30) is released, the support frame (30) can be placed in an unfastened state. Furthermore, when the support frame (30) is placed in an unfastened state, the support frame (30) can be placed separated from the base plate (20) at a predetermined distance from the base plate (20). This fastener can be controlled by a controller.

[0049] The motor is connected to the support frame (30) and can rotate the support frame (30) around the support frame rotation axis. This motor can be controlled by a controller.

[0050] Information regarding multiple different types of customer trays (CT) can be pre-entered into the controller. This controller can control the fastener and the motor based on the pre-entered information regarding the customer trays (CT). When the type of customer tray (CT) changes, this controller can control the fastener so that the support frame (30) is placed in an unfastened state. Additionally, when the support frame (30) is placed in an unfastened state, the controller can control the motor to rotate the support frame (30) by a predetermined angle so that the support frame (30) is placed in a target orientation state.

[0051] The sensor unit (40) can detect the presence or absence of a customer tray (CT) supported by a support frame (30). Multiple sensor units (40) may be provided. These multiple sensor units (40) may be arranged adjacent to the support frame (30) connected to the base plate (20). Additionally, the sensor unit (40) can detect the orientation state of the support frame (30) connected to the base plate (20).

[0052] A picker hand (50) can load or unload multiple electronic components (D). For example, the picker hand (50) can load multiple electronic components (D) onto a customer tray (CT) placed at an unloading position by grasping them, transferring the electronic components (D) to a loading position, and then releasing the electronic components (D) from the customer tray (CT) placed at the loading position. This picker hand (50) can be controlled by a controller. This picker hand (50) may include a hand, a link, and a picker.

[0053] The hand can suck in or release fluid. For example, if the hand sucks in fluid, the semiconductor device can be adsorbed to the picker and placed in a gripped state. Additionally, if the hand releases fluid, the semiconductor device can be released from the gripped state, where it is adsorbed to the picker, and placed in a released state.

[0054] A link can be positioned between the hand and the picker. This link can transmit the suction force with which the hand draws in fluid and the spray force with which the hand discharges fluid to the picker. This link is detachably mounted on the hand and can be replaced as needed.

[0055] A picker can grasp or release semiconductor devices arranged in a spiral pattern. Multiple such pickers may be provided. Multiple pickers may be spaced apart along a predetermined direction. The spacing between these multiple pickers may change depending on the arrangement state of the semiconductor devices of the electronic component (D). Additionally, multiple pickers may be detachably mounted on a link, so that the number and position may be changed as needed.

[0056] The stacker (60) can load customer trays (CT) in the loading space along the vertical direction or discharge the loaded customer trays (CT) from the loading space along the vertical direction. This stacker (60) can be positioned below the lifting / lowering frame (620). Additionally, the stacker (60) can be controlled by a controller.

[0057] The transfer can transfer multiple customer trays (CTs) that are placed in a stacked state by being compressed together. This transfer can be configured to be movable along the horizontal and vertical directions. This transfer can be controlled by a controller.

[0058] The controller can control the set plate module (10), the picker hand (50), the stacker (60), and the transfer. For example, the controller can control the actuator (300) so that the set plate (100) rotates around the plate rotation axis (L). Additionally, the controller can determine whether the customer tray (CT) is supported on the support frame (30) based on the detection result of the sensor unit (40). Additionally, the controller can determine whether the set plate (100) rotates based on the detection result of the sensor. Such a controller can be implemented by a computing device including a microprocessor, and since the method of implementation is obvious to those skilled in the art, further detailed description is omitted.

[0059] The operation and effects of a handler (1) according to one embodiment of the present invention will be described below.

[0060] The loading process of the handler (1) is described. The transfer can grasp the customer tray (CT) placed at the top among a plurality of customer trays (CT) stacked vertically in a loading space using a compression fitting method. This transfer can transfer the grasped customer tray (CT) to the set plate module (10). The set plate module (10) that receives the customer tray (CT) can rotate the set plate (100) so that the terminals of the electronic component (D) scheduled to be loaded on the customer tray (CT) can be oriented in a predetermined direction. After the set plate (100) is rotated, the set plate (100) can be raised so that the customer tray (CT) is supported by the support frame (30). The electronic component (D) can be loaded onto the customer tray (CT) supported by the raised set plate (100) by the picker hand (50).

[0061] The following describes the unloading process performed after the loading process of the handler (1). A set plate (100) supporting a customer tray (CT) loaded with electronic components (D) can be lowered. Subsequently, the set plate (100) can be rotated in the opposite direction to the direction rotated during the loading process by the angle rotated during the loading process. A transfer can be moved toward this set plate module (10). Subsequently, the transfer can be raised after grasping the customer tray (CT) supported by the set plate module (10). This transfer can be returned to its original position while grasping the customer tray (CT). The transfer returned to its original position can unload the customer tray (CT) onto a stacker placed at the unloading position. After this unloading process, a loading process can be performed again.

[0062] The handler (1) can load the terminals of the electronic component (D) onto the customer tray (CT) having various shapes through the rotation of the set plate (100) so that they are oriented in the same direction, thereby enabling testing of the electronic component (D) loaded on the customer tray (CT) having various shapes.

[0063] Although embodiments of the present invention have been described above as specific forms, they are merely examples and the present invention is not limited thereto, but should be interpreted as having the broadest scope in accordance with the technical concept disclosed in this specification. Those skilled in the art may implement patterns of shapes not specified by combining or substituting the disclosed embodiments, and this also does not deviate from the scope of the present invention. Furthermore, those skilled in the art may easily modify or alter the disclosed embodiments based on this specification, and it is evident that such modifications or alterations also fall within the scope of the rights of the present invention. Explanation of the symbols

[0064] 1: Handler 10: Setplate Module 20: Baseplate 30: Support frame 40: Sensor 50: Picker hand 60: Stacker 100: Set Plate 200: Fixed base 300: Actuator 310: Reciprocating shaft 320: Cylinder 400: Rotating part 500: Hinge 600: Frame 610: Fixed Frame 620: Lifting / Lowering Frame 700: Stopper 800: Rotation detection unit 810: Detector 820: Sensing projection 900: Lifting / lowering shaft CT: Customer Tray D: Electronic Components

Claims

Claim 1 A handler comprising: a set plate module including a set plate capable of supporting a customer tray; a support frame having an opening formed therein for exposing at least a portion of the upper surface of the customer tray supported by the set plate to the outside; and a base plate having an opening formed therein communicating with the opening, wherein the set plate is configured to be rotatable with respect to the base plate and capable of moving up and down about a plate rotation axis extending in the vertical direction, and the opening and the opening are in communication in the direction of extension of the plate rotation axis. Claim 2 A handler comprising: a set plate module including a set plate capable of supporting a customer tray; a support frame having an opening formed therein for exposing at least a portion of the upper surface of the customer tray supported by the set plate to the outside; and a base plate having an opening formed therein communicating with the opening, wherein the set plate is configured to be rotatable with respect to the base plate and capable of moving up and down about a plate rotation axis extending in the vertical direction, and the opening has a width and a length greater than the width, and the support frame is detachably connected to the upper side of the base plate and, when separated from the base plate, can be placed in a target orientation state in which the longitudinal direction of the opening is parallel to or offset from a direction parallel to the horizontal direction. Claim 3 A handler comprising: a set plate module including a set plate capable of supporting a customer tray; a support frame having an opening formed therein for exposing at least a portion of the upper surface of the customer tray supported by the set plate to the outside; and a base plate having an opening formed therein communicating with the opening, wherein the set plate is configured to be rotatable about the base plate and capable of moving up and down about a plate rotation axis extending in the vertical direction, and further comprises a fastener that selectively fastens the support frame to the base plate so that the support frame is placed in a fastened state where it is fastened to the base plate or in an unfastened state where it is unfastened to the base plate, wherein when the support frame is placed in the unfastened state, it is placed in a state where it can rotate about the support frame rotation axis about the base plate, and the support frame rotation axis passes through the center of the support frame and extends along the vertical direction. Claim 4 A handler comprising: a set plate module including a set plate capable of supporting a customer tray; a support frame having an opening formed therein for exposing at least a portion of the upper surface of the customer tray supported by the set plate to the outside; and a base plate having an opening formed therein communicating with the opening, wherein the set plate is configured to be rotatable with respect to the base plate and capable of moving up and down about a plate rotation axis extending in the vertical direction, and the set plate is configured to be rotatable about a virtual plate rotation axis extending along the vertical direction and passing through the center of the support frame. Claim 5 In claim 4, the set plate module further comprises: a rotating part configured to fix and support the set plate and to be rotatable with respect to the base plate around the plate rotation axis; and an actuator connected to the set plate such that one end is disposed spaced apart from the rotation center of the rotating part and to be rotatable with respect to the set plate in the vertical direction, wherein the actuator comprises: a cylinder; and a reciprocating shaft configured to be reciprocable in the horizontal direction with respect to the cylinder, and the rotating part is rotated by the reciprocating movement of the reciprocating shaft, a handler. Claim 6 In claim 5, the set plate when the reciprocating shaft is maximally advanced relative to the cylinder is oriented perpendicularly to the set plate when the reciprocating shaft is maximally withdrawn relative to the cylinder, a handler. Claim 7 In claim 6, the frame comprises a fixed frame and a lifting / lowering frame configured to be movable along the vertical direction with respect to the fixed frame; and further comprises a hinge fixedly disposed on one side of the lifting / lowering frame and rotatably connected to the other end opposite to one end of the actuator, wherein the actuator is configured to be rotatable about a hinge rotation axis extending along the vertical direction provided by the hinge.

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