Asymmetric Dual End Effector Robot Arm

Abstract

The device comprises: a first arm including an unequal link connection having a first end effector; a second arm including an equal link connection having a second end effector; and a driving unit coupled to the first arm and the second arm and configured to move the first arm and the second arm. The first end effector is asymmetric with respect to the second end effector. The first end effector is angled with respect to the second end effector such that a first substrate support section on the first end effector is not positioned above or below a second substrate support section on the second end effector.

Description

Technology Field

[0001] The exemplary and non-limiting embodiments disclosed in this specification relate collectively to a robot arm, and more specifically to a robot having two or more arms in which end effectors on the arms are offset from each other. Background Technology

[0002] Manufacturing processes for semiconductors, LEDs, solar power, MEMS, or other devices utilize robotics and other forms of automation to transport substrates and carriers associated with said substrates to and from storage locations, processing locations, or other locations. This transport of substrates may involve moving individual substrates or groups of substrates using single arms that transport one or more substrates, or multiple arms, each of which transports one or more substrates. For example, most manufacturing related to semiconductor production is performed in vacuum environments where footprint and volume are critical. Furthermore, most automated transport is performed to achieve maximum efficiency of substrate movement within the workspace. Therefore, there is a desire to provide substrate transport automation that utilizes minimum footprint and workspace volume for a given range of transport applications while maximizing transport efficiency. The problem to be solved

[0003] The objective of the present invention is to provide a robot arm that improves upon the disadvantages of the prior art. means of solving the problem

[0004] The following summary is for illustrative purposes only. The summary is not intended to limit the scope of the claim.

[0005] According to one aspect, an exemplary device comprises: a first arm having an unequal link connection having a first end effector; a second arm having an equal link connection having a second end effector; and a driving unit coupled to the first arm and the second arm and configured to move the first arm and the second arm. The first end effector is asymmetric with respect to the second end effector. The first end effector is angled with respect to the second end effector such that a first substrate support section on the first end effector is not positioned above or below a second substrate support section on the second end effector.

[0006] According to another aspect, an exemplary substrate transport device for transporting at least two substrates comprises: a lower arm comprising two links of unequal lengths and a lower end effector; an upper arm comprising two links of equal lengths and an upper end effector; and a driving unit coupled to the lower arm and the upper arm and configured to rotate and extend the lower arm and the upper arm. The lower end effector is asymmetrical with respect to the upper end effector and angled with respect to the upper end effector so that the end of the lower end effector is not positioned below the end of the upper end effector, and so that when the lower arm or the upper arm moves, the end of the lower end effector does not move below the end of the upper end effector.

[0007] In another aspect, an exemplary method for transporting a first substrate and a second substrate comprises: a step of rotating a first arm having a first connecting portion having a first end effector about a shaft of a driving unit, wherein the first end effector is configured to transport the first substrate; and a step of extending the first connecting portion with respect to a second arm having a second connecting portion having a second end effector, wherein the second end effector is asymmetric with respect to the first end effector and forms an angle with respect to the first end effector, and the second end effector is configured to transport the second substrate. In a resting position, the first substrate is not positioned above or below the second substrate. When the first connecting portion is extended, the first substrate does not move above or below the second substrate.

[0008] According to another aspect, an exemplary method for assembling a substrate transfer device comprises: connecting an upper link of a first connecting arm to a rotatable shaft of a driving unit; connecting a lower link of a first connecting arm to an upper link of a first connecting arm at a first elbow joint; connecting a first end effector to a lower link of a first connecting arm at a first wrist joint; connecting an upper link of a second connecting arm to a rotatable shaft of a driving unit; connecting a lower link of a second connecting arm to an upper link of a second connecting arm at a second elbow joint; and connecting a second end effector to a lower link of a second connecting arm at a second wrist joint. At least the upper link of the first connecting arm and the lower link of the first connecting arm are not of the same length. The first end effector is angled with respect to the second end effector such that the first substrate support section at the distal end of the first end effector is not above or below the second substrate support section at the distal end of the second end effector.

[0009] According to another aspect, an exemplary device comprises: at least one processor; and at least one non-transitory memory containing computer program code; wherein the at least one memory and the computer program code enable the device, having at least one processor, to rotate a first arm having a first connecting portion having a first end effector about a shaft of a drive unit, wherein the first end effector is configured to transport a first substrate; and extend the first connecting portion with respect to a second arm having a second connecting portion having a second end effector, wherein the second end effector is asymmetric with respect to the first end effector and forms an angle with respect to the first end effector, and the second end effector is configured to transport a second substrate. In a resting position, the first substrate is not positioned above or below the second substrate. When the first connecting portion is extended, the first substrate does not move above or below the second substrate. Brief explanation of the drawing

[0010] The above aspects and other features are described in the following description taken in connection with the attached drawings: FIG. 1a is a perspective view of a robot for moving a substrate, wherein the robot has an equal-link linkage arm and an unequal link linkage arm, and end effectors on the arms are arranged in a stacked configuration. Fig. 1b is a side view of the robot in Fig. 1a. FIGS. 1C and FIGS. 1D illustrate examples of substrate movement in a substrate processing system including features as described in the present specification. FIG. 2a is a perspective view of a substrate transfer device of a robot shown in FIG. 1a and FIG. 1b, showing an end effector that is stacked and in a rest position. FIGS. 2B and 2C are perspective views of the substrate transfer device of the robot of FIG. 2A, showing one end effector moving relative to another end effector. Figure 3 is a perspective view of a substrate transfer device in which the end effector is not stacked. Figure 4 is a plan view of the substrate transfer device of Figure 3. FIG. 5a is a perspective view of the substrate transfer device of FIG. 5 in the resting position. FIGS. 5B and FIGS. 5C are perspective views of the device of FIG. 5A, illustrating extensions of an unequal-link linkage of the device. FIG. 6a is a perspective view of the substrate transfer device of FIG. 3 in the resting position. FIGS. 6B and FIGS. 6C are perspective views of the device of FIG. 6A, illustrating extensions of an equal-link linkage of the device. Figure 7 is a schematic diagram of a transfer device in a retracted position using non-circular pulleys with asymmetric double arms. FIGS. 8a to 8c are schematic diagrams showing the extension of a non-skewed end effector of a transfer device from a contracted position to an extended position. FIGS. 9a to 9c are schematic diagrams showing the extension of a skewed end effector of a transfer device from a contracted position to an extended position. Specific details for implementing the invention

[0011] Referring to FIGS. 1a and 1b, a device for transferring substrates may include a robot, generally denoted as 10. The robot (10) includes a substrate transfer device (12) (hereinafter referred to as "transfer device (12)") configured to transfer substrates (14a, 14b) between, for example, a substrate processing chamber and load locks. The robot (10) also includes a drive unit (16) (e.g., may include one or more motors or any other suitable drive means) configured to drive arms of the transfer device (12) and multiple effectors to cause the transfer of the substrates. For example, a robot with multiple end effectors is described in U.S. Patent Application No. 15 / 897,374, filed February 15, 2018, titled "Robot for material handling with multiple end effectors," the entirety of which is incorporated herein by reference.

[0012] The transfer device (12) comprises a plurality of arms, each having an arm that is extendable and rotatable via a drive unit (16). In an exemplary embodiment, the plurality of arms comprises at least one unequal-link linkage (20) that is driveable by non-circular pulleys. The unequal-link linkage (20) has an upper arm (31) and a lower arm (32), the upper arm (31) is connected to the drive unit (16) at the shoulder, and the lower arm (32) is connected to the upper arm (31) at the elbow. A first end effector (22) is connected to the lower arm (32) at the wrist, and the first end effector (22) has a leg section and a substrate support section at the end of the leg section to support a lower substrate (14a). A plurality of arms also include at least one equivalent link connection (24) having an upper arm (33) and a lower arm (34), the upper arm (33) is connected to a drive unit at the shoulder, and the lower arm (34) is connected to the upper arm (33) at the elbow. A second end effector (22) is connected to the lower arm (34) at the wrist, and the second end effector (26) has a leg section and a substrate support section at the end of the leg section to support the upper substrate (14b).

[0013] The first end effector (22) and the second end effector (26) are asymmetrical. As illustrated, the leg section of the first end effector (22) is bent, angled differently, or curved, whereas the leg section of the second end effector (26) is straight. However, in some exemplary embodiments, both the leg section of the first end effector (22) and the leg section of the second end effector (26) may be bent. The leg section of each end effector (22, 26) connects a substrate support section to the wrist joint of the end effector in relation to the corresponding connection (22, 24), wherein the leg has a first section connected to the wrist joint and a second section connected to the substrate support section. In the first end effector (22) with the leg bent, the first and second sections are connected to each other at an angle between approximately 90 degrees and approximately 120 degrees. For example, a robot having arms in which the legs of an end effector are bent or angled is described in U.S. Patent No. 9,149,936 granted on October 6, 2015, which is a “robot having arms with unequal link lengths,” the entirety of which is incorporated herein by reference.

[0014] As illustrated in FIG. 1b, the unequal link connection (20) is located at a distance (D) from the bottom surface (28) or further away. The configuration of the transfer device (12) provides maximum radial reach from a given containment diameter. For example, a robot equipped with arms having unequal link lengths is described in U.S. Patent No. 9,149,936, issued October 6, 2015, which is incorporated herein by reference in its entirety as “robot equipped with arms having unequal link connections”.

[0015] Referring to FIG. 1c and FIG. 1d, an exemplary substrate processing system or semiconductor wafer processing system is generally denoted as 1000 and is referred to hereinafter as "system (1000)". The system (1000) may include, for example, one or more radial stations (1012) and one or more offset stations (1014). A robot (10) may be provided to move one or more substrates (S) between or among other modules / stations (not shown) or stations (1012, 1014) connected to an environment chamber (1013). The environment chamber (1013) may provide, for example, a vacuum environment and allow the robot (10) to extend through the bottom wall of the chamber (1013) into an environment at least partially defined by the chamber (1013). The robot (10) and the stations (1012, 1014) are connected to at least one controller (1015) including at least one processor (1017) and at least one memory (1019) including software (1021) to control the operation of the system (1000). The system (1000) may provide, for example, the following wafer handling operations: (a) picking up and placing (1016) a single wafer or substrate (S) from / to the station of a single radial station (1012) as schematically illustrated in FIG. 1c; (b) picking up and placing (1018) a pair of wafers or substrates (S) simultaneously from / to the station of a pair of stacked radial stations (1012) as schematically illustrated in FIG. 1d. Other operations including offset stations (1014) are possible.

[0016] Referring to FIGS. 2a through 2c, the initial position of the transfer device (12) is such that a part of the second end effector (26) is positioned on a part of the first end effector (22) (Fig. 2a) so that the upper substrate (14b) is positioned in a stacked configuration on the lower substrate (14a). When the first end effector (22) supporting the lower substrate (14a) is extended (Fig. 2b), the wrist (30) on the unequal link connection (20) (lower arm) passes through the shoulder (40) of the equal link connection (24) (upper arm). A similar movement occurs while the same end effector is retracted. When the first end effector (22) supporting the lower substrate (14a) is fully extended, without movement of the equal link connection (24) (Fig. 2c), the length of the equal link connection (24) allows for containment and maximum movement of the wrist.

[0017] Referring to FIG. 3, a substrate transfer device for substrate processing is generally denoted by drawing number 112 and hereinafter referred to as "transfer device (112)", wherein the substrate transfer device has at least one end effector that is angled or bent, so that the substrate support sections on the end effectors are inclined relative to each other or offset from each other in a resting position. In an exemplary embodiment, the transfer device (112) comprises a lower arm comprising an unequal link connection (120) and a first end effector (122), and an upper arm comprising an equal link connection (124) and a second end effector (126), wherein the arms are extendable and rotatable by, for example, a drive unit (116) (motor or motors). The first end effector (122) is asymmetric with respect to the second end effector (126), but by being angled, bent, or curved with respect to the second end effector (126), the substrate support sections are skewed (not stacked) relative to each other or offset from each other in the resting position. As described above, the leg sections of each end effector (122, 126) connect the substrate support sections to the wrist joint, wherein the leg has a first section connected to the wrist joint and a second section connected to the substrate support section. When the end effector is angled or bent, the first and second sections of the leg are connected to each other at an angle between approximately 90 degrees and approximately 120 degrees. As illustrated in the specification, the first end effector (122) is angled with respect to the second end effector (126), so that during the initial resting position, the upper substrate (114b) supported on the substrate support section of the equal link connection (124) of the upper arm is not positioned on the lower substrate (114a) supported on the substrate support section of the unequal link connection (120).Additionally, during the movement of one or both of the lower arm defined by the equivalent link connection (120) and the upper arm defined by the equivalent link connection (124), the upper substrate (114b) does not move over the lower substrate (114a). The transfer device (112) or the robot including the transfer device (112) may be connected to at least one controller including at least one memory including software for controlling the operation of the system and at least one processor, similar to the robot (10).

[0018] Referring to FIG. 4, the linkages rotate about the shaft of the drive unit (116) to move the wafer (substrate (114b)) on the second end effector (126) away from the wafer (substrate (114a)) on the first end effector (122). Parts of the equal linkage (124) are articulated to move the elbow of the equal linkage (124) away from the wrist of the unequal linkage (120). The linkages of the unequal linkage (120) can be extended or otherwise moved by one or more pulleys (121) located at the joints of the unequal linkage (120), such as the wrist, elbow, and / or shoulder connection of the unequal linkage (120) to the drive unit (116), said pulleys are circular or non-circular. In some exemplary embodiments, the linkages of the equivalent linkage (124) may be similarly moved with circular or non-circular pulleys (125).

[0019] Referring to FIG. 5a, in the resting position, the configuration of asymmetric end effectors (122, 126) having offset or inclined substrate support sections prevents the wafer (substrate (114b)) carried on the second end effector (126) from being placed on the wafer (substrate (114a)) on the first end effector (122).

[0020] Referring to FIG. 5b, as the unequal link connection (120) is rotated by the driving unit (116), the unequal link connection (120) is extended, and the first end effector (122) moves away from the second end effector (126).

[0021] As illustrated in FIG. 5c, as the unequal link connection (120) is further extended, the first end effector (122) moves further away from the second end effector (126).

[0022] Referring to FIG. 6a, in the resting position, the configuration of asymmetric end effectors having offset or inclined substrate support sections prevents the wafer (substrate (114b)) carried on the second end effector (126) from being placed on the wafer (substrate (114a)) on the first end effector (122) (see FIG. 5a).

[0023] Referring to FIG. 6b, as the equivalent link connecting part (124) is rotated by the driving unit (116), the equivalent link connecting part (120) is extended, and the second end effector (126) moves away from the first end effector (122).

[0024] Referring to FIG. 6c, as the equivalent link connection (124) is further extended, the second end effector (126) moves much further away from the first end effector (122).

[0025] Referring to FIG. 7, the unequal link connection (120) and the equal link connection (124) can move as circular or non-circular pulleys. The end effectors (122, 126) are rotated from radial orientations to achieve additional clearance between each end effector (122, 126) and between at least the elbows of each connection (120, 124).

[0026] Referring to FIGS. 8a through 8c, for the extension of the equivalent-link connection (124), in the initial aspect (Fig. 8a, contracted position), the substrate (114b) is not positioned on the substrate (114a).

[0027] As illustrated in FIG. 8b, in the link-over-link position, the orientation of the end effectors (122, 126) changes as the end effector (126) moves along the straight line (127). More specifically, when the wrist of the equivalent link connection (124) is positioned just above the point where the equivalent link connection (124) is connected to the drive unit (116) (shoulder), the orientation of the end effectors (122, 126) changes as the center of the substrate (114b) moves along the straight line (127).

[0028] As illustrated in FIG. 8c, in the final stage where the end effector (126) (and thus the substrate (114b)) is in an extended position, the orientation of the end effector (122, 126) is constant, and the center of the substrate (114b) continues to move along the straight line (127).

[0029] Referring to FIGS. 9a through 9c, for the extension of the unequal-link connection (120), in the initial phase (Fig. 9a, contracted position), the substrate (114b) is not positioned again on the substrate (114a). As shown in FIG. 9b, in the link-over-link position, the orientation of the end effectors (122, 126) changes as the center of the substrate (114a) moves along a straight line. As shown in FIG. 9c, in the final stage where the substrate (114a) is in the extended position, the orientation of the end effectors (122, 126) is constant, and the center of the substrate (114a) continues to move along a straight line.

[0030] In any embodiment, the upper arms of the robot arm described herein (e.g., upper arm (31) and upper arm (33)) may be directly attached to the first shaft of the drive unit. The lower arms (e.g., lower arm (32) and lower arm (34)) may be coupled to the corresponding upper arms via a rotary elbow joint and actuated by the second shaft of the drive unit, the second shaft being positioned coaxially with the first shaft using a belt configuration. The belt configuration may include a shoulder pulley that may be attached to the third shaft of the drive unit, an elbow pulley that may be attached to the upper arm, and a band, belt, or cable (or any other suitable means) capable of transmitting movement between the two pulleys. The belt configuration may feature a constant or variable transmission ratio. As an example, a variable transmission ratio may be selected so that the orientation of the upper arm with the end effector changes in a predefined manner as a function of the relative position of the upper arms and the drive shaft of the drive unit. However, any other suitable configuration may be used.

[0031] In an exemplary embodiment, the device comprises: a first arm having an unequal link connection having a first end effector; a second arm having an equal link connection having a second end effector; and a driving unit coupled to the first arm and the second arm and configured to move the first arm and the second arm. The first end effector is asymmetric with respect to the second end effector. The first end effector is angled with respect to the second end effector such that a first substrate support section on the first end effector is not positioned above or below a second substrate support section on the second end effector.

[0032] When the first arm or the second arm moves, one of the first substrate support section on the first end effector or the second substrate support section on the second end effector may not move above or below the other of the first substrate support section on the first end effector or the second substrate support section on the second end effector. Linkages of one or both of the equal link connections and the unequal link connections may move as at least one non-circular pulley. The first arm and the second arm may be configured such that the first end effector moves away from the second end effector when the first arm extends. The first arm and the second arm may be configured such that the second end effector moves away from the first end effector when the second arm extends. In the link-over-link position of the equal link connection, the orientation of the first end effector and the second end effector may change as the second end effector moves along a straight line. When the second end effector is in the extended position, the orientation of the first end effector and the second end effector may remain constant, and the second end effector may continue to move along a straight line. In the link-over-link position of the unequal link connection, the orientation of the first end effector and the second end effector may change as the first end effector moves along a straight line. When the first end effector is in the extended position, the orientation of the first end effector and the second end effector may remain constant, and the first end effector may continue to move along a straight line.

[0033] In another exemplary embodiment, a substrate transfer device for transporting at least two substrates comprises: a lower arm comprising two links of unequal lengths and a lower end effector; an upper arm comprising two links of equal lengths and an upper end effector; and a driving unit coupled to the lower arm and the upper arm and configured to rotate and extend the lower arm and the upper arm. The lower end effector is asymmetric and angled with respect to the upper end effector, so that the end of the lower end effector is not located below the end of the upper end effector, and when there is movement of the lower arm or the upper arm, the end of the lower end effector does not move below the end of the upper end effector.

[0034] The substrate transfer device may further include pulleys located at the joints of the links of the lower arm and the joints of the links of the upper arm, and the pulleys of each arm are operably coupled to a drive unit and other pulleys of the same arm, so that the operation of the drive unit causes movement of the lower arm and / or movement of the upper arm. At least one of the pulleys may be a non-circular pulley. The lower arm and the upper arm may each be configured such that when there is an extension movement of the lower arm, the lower end effector moves away from the upper end effector, and when there is an extension movement of the upper arm, the upper end effector moves away from the lower end effector. In the link-over-link position, the orientation of the upper end effector and the lower end effector may change as the lower end effector moves along a straight line, and in the link-over-link position, the orientation of the lower end effector and the upper end effector may change as the upper end effector moves along a straight line.

[0035] In another exemplary embodiment, a method for transporting a first substrate and a second substrate comprises: a step of rotating a first arm having a first connecting portion having a first end effector about a shaft of a driving unit, wherein the first end effector is configured to support and transport the first substrate; and a step of extending the first connecting portion with respect to a second arm having a second connecting portion having a second end effector, wherein the second end effector is asymmetric with respect to the first end effector and forms an angle with respect to the first end effector, and the second end effector is configured to support and transport the second substrate. In a rest position, the first substrate is not positioned above or below the second substrate. When the first connecting portion is extended, the first substrate does not move above or below the second substrate.

[0036] The first linkage can be extended using at least one non-circular pulley. The first arm and the second arm can be configured so that the first end effector moves away from the second end effector when the first linkage is extended. At the link-over-link position of the linkage, the orientation of the first end effector and the second end effector may change as the first end effector moves along a straight line. When the first end effector moves to the extended position, the orientation of the first end effector and the second end effector may remain constant, and the first end effector may continue to move along a straight line.

[0037] In another exemplary embodiment, a method for assembling a substrate transfer device comprises: connecting an upper link of a first connecting arm to a rotatable shaft of a driving unit; connecting a lower link of a first connecting arm to an upper link of a first connecting arm at a first elbow joint; connecting a first end effector to a lower link of a first connecting arm at a first wrist joint; connecting an upper link of a second connecting arm to a rotatable shaft of a driving unit; connecting a lower link of a second connecting arm to an upper link of a second connecting arm at a second elbow joint; and connecting a second end effector to a lower link of a second connecting arm at a second wrist joint. At least the upper link of the first connecting arm and the lower link of the first connecting arm have unequal lengths. The first end effector is angled with respect to the second end effector such that the first substrate support section at the distal end of the first end effector is not above or below the second substrate support section at the distal end of the second end effector.

[0038] In another exemplary embodiment, the device comprises: at least one processor; and at least one non-transitory memory containing computer program code; wherein the at least one memory and the computer program code enable the device, having at least one processor, to rotate a first arm including a first connecting portion having a first end effector about a shaft of a drive unit, wherein the first end effector is configured to support and transport a first substrate; and to extend the first connecting portion with respect to a second arm including a second connecting portion having a second end effector, wherein the second end effector is asymmetric with respect to the first end effector and forms an angle with respect to the first end effector, and the second end effector is configured to support and transport a second substrate. In a rest position, the first substrate is not positioned above or below the second substrate. When the first connecting portion is extended, the first substrate does not move above or below the second substrate.

[0039] It should be understood that the foregoing description is merely illustrative. Various alternatives and modifications may be made by those skilled in the art. For example, the features described in various dependent claims may be combined with one another in any suitable combination(s). Additionally, the features of the different embodiments described above may be optionally combined with new embodiments. Accordingly, the description of the invention is intended to encompass all such alternatives, modifications, and variations. Explanation of the symbols

[0040] 10. Robot 12. Transfer device 20. Unequal link connection 31. Upper arm 22. 1st End Effector 26. 2nd End Effector

Claims

Claim 1 As a device, the device comprises: at least one wall defining a chamber; at least two substrate processing stations defined within the at least one wall and inside the chamber; and a robot extending at least partially through the at least one wall of the chamber; and the robot comprises: a first arm having a link connection portion having two links of unequal lengths and a first end effector; and a second arm having a link connection portion having two links of equal lengths and a second end effector. A device comprising: a driving unit coupled to the first arm and the second arm and configured to move the first arm and the second arm; wherein the first end effector is asymmetric with respect to the second end effector, and the first end effector is angled with respect to the second end effector such that the first substrate support section on the first end effector is not positioned above or below the second substrate support section on the second end effector; and at least one controller is connected to the robot and the at least two substrate processing stations, and the at least one controller comprises at least one processor and at least one memory equipped with software for controlling the coordinated operation of the first arm with respect to the second arm of the device. Claim 2 A device according to claim 1, wherein a vacuum environment is formed in the chamber. Claim 3 A device according to claim 1, wherein the inlet into the first substrate processing station among the at least two substrate processing stations has an orientation perpendicular to the inlet into the second substrate processing station among the at least two substrate processing stations. Claim 4 A device according to claim 1, wherein when the first arm of the robot or the second arm of the robot moves, one of the first substrate support section on the first end effector or the second substrate support section on the second end effector does not move above or below the other of the first substrate support section on the first end effector or the second substrate support section on the second end effector. Claim 5 A device according to claim 1, wherein one or both of the link connecting parts having two links of equal length and two links having two links of unequal length are moved by at least one non-circular pulley. Claim 6 A device according to claim 1, wherein the first arm of the robot and the second arm of the robot are configured such that the first end effector moves away from the second end effector when there is an extension movement of the first arm. Claim 7 A device according to claim 1, wherein the first arm of the robot and the second arm of the robot are configured such that the second end effector moves away from the first end effector when there is an extension movement of the second arm. Claim 8 A device according to claim 1, wherein a link connecting portion having two links of equal length, wherein one of the two links of equal length is positioned above the other of the two links of equal length, and the orientation of the first end effector and the second end effector changes as the second end effector moves along a straight line. Claim 9 A device according to claim 1, wherein a link connecting portion having two links of unequal lengths, in a position where one of the two links of unequal lengths is above the other of the two links of unequal lengths, and the orientation of the first end effector and the second end effector changes as the first end effector moves along a straight line. Claim 10 A method for transferring at least one substrate between a first station and a second station, wherein the substrate transfer method comprises: a step of providing a chamber defined by at least one wall, wherein at least the first station and the second station are formed inside the chamber; and a step of providing a robot that extends at least partially into the chamber; wherein the robot comprises: a first arm having a link connection portion having two links having unequal lengths and a first end effector; and a second arm having a link connection portion having two links having equal lengths and a second end effector. A substrate transfer method comprising: a driving unit coupled to the first arm and the second arm and configured to move the first arm and the second arm; wherein the first end effector is asymmetrical with respect to the second end effector, and the first end effector is angled with respect to the second end effector such that a first substrate support section on the first end effector is not positioned above or below the second substrate support section on the second end effector; and the substrate transfer method further comprises the step of rotating at least one of the first arm and the second arm in a cooperative manner around the shaft of the driving unit so that the first end effector and the second end effector pick up at least one substrate from the first station and place the at least one substrate at the second station.

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