Winding unit

Abstract

(Problem) Provision of a winding unit capable of reliably extracting and disposing of a roll of film from a winding unit. (Solution) A winding mechanism (20, 20'), a rotating mechanism (30, 30'), and a reciprocating mechanism (40, 40') are provided. One winding mechanism (20) is provided with a release mechanism for releasing a roll film (120) from the winding section (20). The release mechanism is provided with a plate (pressing section) (51) and a moving mechanism (reciprocating mechanism (40)). The gripping section of the other winding mechanism (20') places the film (12), and the reciprocating mechanism (40, 40') moves the winding mechanism (20, 20') in a direction that separates them relatively, thereby releasing the roll film (120) from the other winding mechanism (20'). Afterward, the plate (40) moves the side edge of the roll film (120) by the moving mechanism (reciprocating mechanism (40)). Press to extract the tube film (120).

Description

Technology Field

[0001] The present invention relates to a winding unit for winding a strip-shaped film from which an adhesive tape has been peeled off in a tape adhesive device. Background Technology

[0002] When processing plate-shaped workpieces such as semiconductor wafers, a tape bonding device is used to integrate the workpiece and a ring frame surrounding it with adhesive tape to form a workpiece set, and this workpiece set is set on the chuck table of a processing device (for example, see Patent Document 1).

[0003] The adhesive tape used in the tape attachment device is configured by forming an adhesive layer on a circular substrate sized to block the opening of a ring frame. The adhesive tape is formed in multiple equal intervals along the extension direction of the film by the adhesive layer being adhered to a strip-shaped film, and the film on which the multiple adhesive tapes are adhered is set in the tape attachment device in a rolled state.

[0004] In a tape attachment device, the adhesive tape is peeled off from the film and attached to the ring frame and the workpiece to integrate the two as a work set. The film from which the adhesive tape has been peeled off is wound by a winding unit provided in the tape attachment device. When the winding unit winds a certain amount of film, the attachment of the adhesive tape to the workpiece and the ring frame is temporarily stopped, and the film wound in a roll (hereinafter referred to as "roll film") is separated from the winding unit by an operator and discarded. Afterward, the tape roll, in which the adhesive tape and film are wound in a roll, is mounted on the tape attachment device by an operator, and the attachment of the adhesive tape to the workpiece and the ring frame is resumed.

[0005] As described above, when disposing of a roll of film wound in a roll by a winding unit, it is necessary to temporarily stop the tape application device and then have a worker separate the roll of film from the winding unit. This has the problem of requiring a great deal of effort and time in addition to worsening the efficiency of the adhesive tape application process.

[0006] Therefore, Patent Document 2 proposes a winding unit that can pull out and dispose of a roll of film wound in a roll without requiring manual work by a worker.

[0007] The above-described winding unit is configured to have a pair of winding sections arranged facing each other and equipped with a gripping section for gripping a strip-shaped film, a rotating mechanism for rotating these winding sections, and a forward / backward means for moving one winding section closer to or further apart from the other winding section. According to this winding unit, when winding a film, the film is gripped by the gripping section, and the film is wound by the winding section by rotating the rotating mechanism. When discarding the rolled film, each gripping section places the film, and the winding section is separated by the forward / backward means so that the distance between them becomes greater than the width of the film, thereby allowing the rolled film to be retrieved and discarded. Prior art literature

[0008] Japanese Published Patent Application No. 2015-220365 Japanese Published Patent Application No. 2019-104563 The problem to be solved

[0009] However, in the winding unit proposed in Patent Document 2, when disposing of a roll film, a pair of winding parts are separated from each other by means of a forward and backward movement, so it cannot be said that the pair of winding parts necessarily detach from the roll film simultaneously, and in some cases, one winding part may detach from the roll film before the other winding part. In such cases, since the roll film moves together with the other winding part while being supported by it, a problem arises in that the roll film cannot be reliably removed from the pair of winding parts and disposed of.

[0010] Therefore, there is a task to reliably extract the film from the winding section of the winding unit and dispose of it. means of solving the problem

[0011] The present invention, for solving the above problem, comprises a winding unit for winding a film in a strip shape along an axis extending parallel to the width direction of the film, and comprises two winding mechanisms arranged so as to face each other, gripping portions for gripping a side end portion of the film, two rotating mechanisms for rotating each of the winding mechanisms, and a reciprocating mechanism for moving the two winding mechanisms closer together and further apart in the axial direction relative to each other. Each winding mechanism comprises a cylindrical winding portion that accommodates the gripping portion and winds the film on its outer surface, and an entry portion formed in the winding portion for introducing the film to grip the film in the gripping portion. One of the winding mechanisms comprises an extraction mechanism for extracting a cylindrical film formed in a cylindrical shape by winding the film in the winding portion from the winding portion. The extraction mechanism comprises a pressing portion that presses the side end of the cylindrical film in the axial direction to detach the cylindrical film from the gripping portion, and a moving portion that moves the gripping portion on which the film is placed and the pressing portion relative to each other in the axial direction. It is a winding unit equipped with a mechanism, wherein the extraction mechanism has a gripping part of the other winding mechanism that places the film, moves the one winding mechanism and the other winding mechanism in a direction that separates them relatively using the advance / retreat mechanism to extract the film from the other winding mechanism, and then extracts the film by pressing the side edge of the film using the moving mechanism.

[0012] The pressing part may be a plate having an opening through which the winding part can pass, and the base on which the reciprocating mechanism is arranged may be provided with a plate holding part that holds the plate, and the winding mechanism may be provided with a guide part that enables the plate to move in its axial direction, and by moving the winding mechanism in its axial direction, the plate is held in the plate holding part, the winding part is pulled out from the opening of the plate held in the plate holding part, and the plate presses the side edge of the film wound in the winding part, thereby pulling the film out from the winding part. The winding unit may be configured in such a way that the pressing part is a plate having an opening through which the winding part can pass, and the winding unit is configured such that the film is pulled out from the winding part.

[0013] In addition, the pressing part may be a plate having an opening through which the winding part can pass, and may be equipped with a moving mechanism disposed in the winding part to move the plate in its axial direction, and the winding unit may be configured such that the plate is moved in its axial direction by the moving mechanism to pull the winding part out from the opening of the plate, and the plate presses the side edge of the roll film wound in the winding part to extract the roll film from the winding part. Effects of the invention

[0014] According to the present invention, when a roll film is removed from a pair of winding mechanisms and disposed of, the gripping part of the other winding mechanism releases the film, and then moves the two winding mechanisms apart by means of a forward / backward mechanism to remove the roll film from the other winding mechanism. After that, the one winding mechanism and the roll film held therein are moved apart by means of a moving mechanism formed in the removal mechanism, so that the side end of the roll film held by the one winding mechanism is pressed in the removal direction by means of a pressing part. Because of this, the roll film held by the other winding mechanism is forcibly and reliably removed from the one winding mechanism as well, and the roll film removed from both winding mechanisms falls by its own weight and is disposed of. Brief explanation of the drawing

[0015] FIG. 1 is a broken side view showing the basic configuration of a tape adhesive device having a winding unit related to the present invention. FIG. 2 is a perspective view showing the state of a winding unit during film winding related to a first embodiment of the present invention. FIG. 3 is a perspective view showing the state of a roll film extraction of a winding unit related to the first embodiment of the present invention. FIG. 4 is a perspective view showing the state of a winding unit during film winding related to a second embodiment of the present invention. FIG. 5 is a perspective view showing the state of a film extraction of a winding unit related to a second embodiment of the present invention. FIG. 6 is a perspective view showing the state of a film winding unit related to a third embodiment of the present invention. FIG. 7 is a perspective view showing the state of a roll film extraction of a winding unit related to the third embodiment of the present invention. Specific details for implementing the invention

[0016] [Tape Adhesion Device]

[0017] The tape attachment device (100) shown in FIG. 1 is configured to form work units (200) in succession by integrating a wafer (201), which is a workpiece, and a ring frame (202) placed around it using an adhesive tape (11), and is provided with, for example, a box-shaped housing (300). Inside this housing (300), a chuck table (400) that supports the wafer (201) and the ring frame (202), a support roller (410) that supports a tape roll (10) wound on a cylindrical winding tube (13), a peeling plate (420), a pressure roller (430), and a winding unit (1) related to the present invention are arranged and formed. In addition, details of the winding unit (1) will be described later.

[0018] A wafer (201), which is a workpiece placed on the upper surface of a chuck table (400), is, for example, a disc-shaped semiconductor wafer and is placed in a circular opening in the center of a ring frame (202) formed into a ring shape by a metal such as SUS. Here, a first support surface (401) for supporting the wafer (201) is formed in the center of the upper surface of the chuck table (400), and a second support surface (402) for supporting the ring frame (202) surrounding the wafer (201) is formed around the first support surface (401). Since the thickness of the wafer (201) is thinner than the thickness of the ring frame (202), the height of the first support surface (401) is set to be slightly higher than the height of the second support surface (402) by the difference in thickness between the two. Because of this, the upper surface of the wafer (201) placed on the chuck table (400) and the upper surface of the ring frame (202) become the same plane (same height position). Additionally, a moving mechanism not shown is formed on the lower side of the chuck table (400), so that the chuck table (400) can move in a horizontal direction (X-axis direction) by the moving mechanism.

[0019] The tape roll (10) wound on the coil (13) is configured by attaching a plurality of circular adhesive tapes (11) at predetermined equal intervals along the extension direction (length direction) of the film (12) to the outer surface of a strip-shaped film (12) made of a resin such as polyester. Here, the adhesive tape (11) is composed of a resin base layer and an adhesive layer formed on one side of the base layer (all omitted from illustration), and as the adhesive layer is attached to one side (outer surface) of the film (12), a plurality of adhesive tapes (11) are attached to the outer surface of the film (12) at equal intervals along the extension direction of the film (12) as described above. Accordingly, the adhesive layer of the adhesive tape (11) before being attached to the wafer (201) and the ring frame (202) is protected by the film (12). Additionally, the inner diameter of the opening of the ring frame (202) is set to be larger than the outer diameter of the wafer (201), and the outer diameter of the adhesive tape (11) is set to be larger than the inner diameter of the opening of the ring frame (202) and smaller than the width of the film (12).

[0020] A support roller (410), which is mounted via a support member (440) on the ceiling of a housing (300), is inserted and penetrates the winding tube (13) of the tape roll (20), and the tape roll (10) is rotatably supported by the support roller (410) positioned in the vertical direction (Y-axis direction) of FIG. 1. In addition, a rotational driving source not shown, such as a motor, is connected to one end of the support roller (410) in the axial direction (Y-axis direction), so that the support roller (410) and the tape roll (10) rotate around the axis of the support roller (410) in the Y-axis direction.

[0021] Near the obliquely downward chuck table (400) of the support roller (410), a peeling plate (420) extending in the vertical direction (Y-axis direction) of the ground in FIG. 1 is disposed, and a pressure roller (430) is rotatably disposed near this peeling plate (420).

[0022] The above peeling plate (420) is intended to peel the film (12) from the adhesive tape (11), and is positioned at an angle with respect to the XY plane (horizontal plane) such that its +X axis direction end (right end in FIG. 1) is positioned downward. Additionally, the +X axis direction end (right end in FIG. 1) of the peeling plate (420) is formed so that the end tapers toward the tip. Furthermore, the width of the peeling plate (420) in the Y axis direction is set to be larger than the outer diameter of the adhesive tape (11). And, a pressure roller (430) is rotatably positioned near the tip of the peeling plate (420).

[0023] In addition, a winding unit (1) related to the present invention is formed and arranged at a position below the tape roll (10) in the housing (300) and at a distance from the peeling plate (420) in the -X axis direction (left side of FIG. 1).

[0024] In the tape attachment device (100) configured as described above, the leading edge of the film (12) is drawn out from the tape roll (10) toward an oblique downward direction by a film drawing mechanism not shown. Then, the drawn-out film (12) is caught on the leading edge of the peeling plate (420), returned toward the -X axis direction, and guided to the winding unit (1). Then, when the film (12) and a plurality of adhesive tapes (11) attached to the outer surface of the film are unwound from the tape roll (10) rotating in the direction of the arrow (10a) of FIG. 1 (clockwise) toward the peeling plate (420) and the pressure roller (430), the film (12) is peeled from the adhesive tapes (11) by the peeling plate (420). That is, the film (12) is returned from the leading edge of the peeling plate (420) and wound onto the winding unit (1) in the direction of the arrow (1a), thereby peeling the film (12) from the adhesive tape (11), and the adhesive tape (11) from which the film (12) has been peeled is sequentially attached from the end to the upper surface of the ring frame (202) and the wafer (201) by a pressure roller (430) rotating in the direction of the arrow (430a) (counterclockwise). And, when the chuck table (400) is moved horizontally in the +X direction (right side of FIG. 1) as indicated by the dashed line in FIG. 1, the adhesive tape (11) from which the film (12) has been peeled is adhered across the entire surface of the ring frame (202) and the wafer (201), so the wafer (201) and the ring frame (202) are combined and integrated by the adhesive tape (11) to form a work unit (200).

[0025] Additionally, although not shown, a pair of anti-loosening rollers extending in the Y-axis direction are formed at a position located at least greater than the outer diameter of the ring frame (202) in the X-axis direction from the peeling plate (420), and the film (12) from which the adhesive tape (11) has been peeled is supported by being sandwiched between the pair of anti-loosening rollers from above and below, thereby being wound onto the winding unit (1) without looseness.

[0026] As described above, the work unit (200), in which the wafer (201) and the ring frame (202) are integrated by the tape adhesive device (100), is conveyed to a processing device not shown, such as a grinding device, for example, and the wafer (201), which is the workpiece, is provided for processing such as grinding.

[0027] [Wind-up Unit]

[0028] Next, an embodiment of the winding unit (1) related to the present invention will be described.

[0029] <First Embodiment>

[0030] The winding unit (1) related to the present embodiment is equipped with a pair of winding mechanisms (20, 20') arranged in the width direction (Y-axis direction) of a strip-shaped film (12) as shown in FIG. 2, a pair of rotating mechanisms (30, 30') that rotate each of the winding mechanisms (20, 20'), and a reciprocating mechanism (40, 40') that moves the pair of winding mechanisms (20, 20') closer together and further apart along the Y-axis direction.

[0031] For example, one winding mechanism (20) has a gripping portion (21) formed therein for gripping one side end portion of the film (12), and the other winding mechanism (20') also has a gripping portion not shown formed therein for gripping the other side end portion, and both winding mechanisms (20, 20') are arranged so that the gripping portions (21) formed therein (the other one is omitted from illustration) face each other. Furthermore, since the configuration of both winding mechanisms (20, 20') is identical, only the configuration of one winding mechanism (20) will be illustrated and described below.

[0032] In the winding mechanism (20), a roughly cylindrical winding section (22) is formed to accommodate a gripping section (21) and to wind the film (12) on the outer surface. The winding section (22) is equipped with a gripping section (21), a rotation axis (23), a casing (24) that accommodates the gripping section (21) inside, and a support member (25) fixed to the tip of the rotation axis (23). Additionally, the support member (25) is a member that is bent into an L-shape when viewed from the side, is fixed to the casing (24) by a fixing bolt not shown, and supports the gripping section (21) inside the casing (24).

[0033] The casing (24) is formed into a roughly cylindrical shape, and the side end of the film (12) is wound around its outer surface. The front end is formed into a tapered cylinder in which the outer diameter is reduced from the middle of the longitudinal direction (Y-axis direction) toward the front end (-Y-axis direction). Additionally, a pair of entry portions (26) are formed at the front end of the casing (24) through which the film (12) passes when gripped by the gripping portion (21). Here, the entry portions (26) are formed as slits cut from the front end of the casing (24) to the middle of the longitudinal direction.

[0034] Additionally, the gripping part (21) is equipped with a clamp plate (27) fixed to a support (25), a clamp plate (28) supported vertically on the support (25), and a cylinder mechanism not shown that moves the clamp plate (28) vertically, and grips the side end of the film (12) that has entered between the two clamp plates (27, 28) by the two clamp plates (27, 28).

[0035] One rotation mechanism (30) that rotates one winding part (22) is equipped with a driving source motor (31), and this motor (31) is mounted on the inner surface of the end of the support plate (32). The output shaft (motor shaft) (311) of this motor (31) penetrates an unillustrated circular hole formed in the support plate (32) and protrudes toward the outer surface of the support plate (32), and a driving pulley (33) is mounted on the protruding end.

[0036] Additionally, the winding section (22) is disposed on the inner side of the support plate (32), and the rotation axis (23) of the winding section (22) protrudes toward the outer side of the support plate (32) by penetrating an unillustrated circular hole formed in the support plate (32), and a driven pulley (34) is mounted on the protruding end. Furthermore, a stepless power belt (35) is wound between the driven pulley (34) and the driving pulley (33). Accordingly, when the motor (31) is driven, the rotation of the output shaft (311) of the motor (31) is transmitted from the driving pulley (33) through the power belt (35) to the driven pulley (34), and the driven pulley (34), the rotation axis (23), and the winding section (22) are driven to rotate at a predetermined speed.

[0037] In addition, the rotation mechanism (30') that rotates the other winding part (22') has the same configuration as the rotation mechanism (30) of one side. That is, as shown in FIG. 2, the rotation mechanism (30') is composed of a motor (31') mounted on a support plate (32'), a driving pulley (33'), a driven pulley (34'), and a drive belt (35').

[0038] Next, the above-mentioned advance / retreat mechanism (40, 40') will be explained.

[0039] The forward / backward mechanism (40) on one side (right side (+Y axis side) of FIG. 2) moves the winding section (20) on the east side closer to or further apart from the winding section (20') on the other side (left side (-Y axis side) of FIG. 2) in the Y-axis direction, and is formed by being arranged on the front side of a plate-shaped support base (41) that extends in the Y-axis direction. Specifically, this forward / backward mechanism (40) is configured to include a rotatable ball screw shaft (42) that extends horizontally along the Y-axis direction on the front side of the support base (41), a pair of upper and lower guide rails (43) arranged parallel to each other along the Y-axis direction above and below the ball screw shaft (42) on the front side of the support base (41), a motor (44) which is a driving source, and a sliding block section (321) that can slide along the guide rail (43) in the Y-axis direction. Additionally, the sliding block portion (321) is integrally formed on the base portion of the support plate (32), and a ball screw shaft (42) is inserted and passed through the sliding block portion (321).

[0040] One axial end of the ball screw shaft (42) (left end in FIG. 2) is rotatably supported by a bearing (46), and a motor (44) is connected to the other end (right end in FIG. 2) of the ball screw shaft (42).

[0041] Additionally, the reciprocating mechanism (40') of the other side (left side of FIG. 2) moves the winding section (22') on the same side closer to or further apart from the winding section (22) of the other side (right side of FIG. 2) in the Y-axis direction relative to it, and its basic configuration is the same as that of the reciprocating mechanism (40) of the other side. That is, the reciprocating mechanism (40') is configured to include a ball screw shaft (42'), a guide rail (43'), a motor (44'), a sliding block section (321'), a bearing (46'), etc.

[0042] However, in the winding unit (1) related to the present embodiment, one winding mechanism (20) has a extraction mechanism formed to forcibly extract a tubular film (120) (shown by a dashed line in FIG. 3) formed by winding a film (12) with a pair of winding parts (22, 22') from the winding part (22) of the winding mechanism (20). This extraction mechanism is composed of a disc-shaped plate (51) which is a pressing part that presses the side end of the tubular film (120) in the -Y direction to detach the tubular film (120) from the winding part (22), and a moving mechanism that moves the plate (51) and the gripping part (21) on which the film (12) is placed in the relative Y-axis direction. In the present embodiment, the moving mechanism is composed of one reciprocating mechanism (40).

[0043] As shown in FIG. 2, a circular opening (511) is formed in the center of the plate (51) through which one winding portion (22) can pass, and the position of the plate (51) in the Y-axis direction is fixed. That is, the plate (51) is held by a magnet (54) by an upper and lower pair of plate holding portions (52, 53) mounted on a support base (41). More specifically, the upper and lower pair of plate holding portions (52, 53) are members that are bent into an L-shape, and a magnet (54) is mounted on each of their respective ends. The plate (51) is held by adsorption to the plate holding portions (52, 53) by the magnetic force of the upper and lower pair of magnets (54) and can rotate freely relative to the plate holding portions (52, 53).

[0044] Additionally, as shown in FIG. 2, a plate (51') with the same diameter as the plate (51) is formed in the winding portion (22') of the other winding mechanism (20'), and this plate (51') can move in the Y-axis direction together with the winding portion (22').

[0045] Next, the operation of the winding unit (1) configured as described above will be explained.

[0046] As shown in FIG. 2, when the leading edge of the film (12) is guided to the winding unit (1), one winding part (22) moves in the -Y direction by the forward / backward mechanism (40) so as to approach the side edge of the film (12), and the side edge of the film (12) enters into the entry part (26). Additionally, the other winding part (22') moves in the +Y direction by the forward / backward mechanism (40') so as to approach the side edge of the film (12), and the side edge of the film (12) enters into the entry part not shown. After that, for example, in one winding mechanism (20), an unillustrated cylinder mechanism lowers the clamp plate (28), and as both ends of the film (12) are sandwiched between the clamp plates (27, 28), the gripping part (21) of the winding part (22) supports one side end of the film (12) by sandwiching it between them. Likewise, in the other winding mechanism (20'), the unillustrated gripping part of the winding part (22') supports the other side end of the film (12) by sandwiching it between them.

[0047] Next, one reciprocating mechanism (40) moves the winding part (22) in the +Y direction, and the other reciprocating mechanism (40') moves the winding part (22') in the -Y direction, thereby moving the two winding parts (22, 22') away from each other. This is to prevent the occurrence of a situation where, when the film extraction mechanism guides the leading side of the film (12) to the winding unit (1), the film (12) is not properly positioned relative to the winding unit (22, 22'), so that each gripping part (21, 22') of the winding unit (22, 22') does not grip the side end portion of the film (12), thereby preventing the problem of the winding unit (22, 22') starting to rotate while each gripping part (21) (the other part is not shown) of the winding unit (22, 22') is not gripping the side end portion of the film (12).

[0048] When the gripping portion (21) (the other side is omitted) of the two winding portions (22, 22') is gripping the side portion of the film (12), and each motor (31, 31') of the rotating mechanism (30, 30') is started, the rotation of each motor (31, 31') is transmitted to each winding portion (22, 22') through the driving pulley (33, 33'), the driving belt (35, 35'), and the driven pulley (34, 34'), and these winding portions (22, 22') are driven to rotate at the same speed in the same direction (winding direction of the film (12)) as indicated by the arrow in FIG. 3. Then, a film (12) with a side end gripped by each gripping part (21) (the other side is omitted from the drawing) of the winding part (22, 22') is wound onto each winding part (22, 22'), and as the film (12) is wound in this way, a roll-shaped film (120) is formed. Also, at this time, since plates (51, 51') are arranged on both sides in the axial direction of the film (120), these plates (51, 51') serve as guides for winding the film (12), and the meandering of the film (12) in the Y-axis direction is prevented when winding.

[0049] Then, when the winding of the film (12) by the winding unit (1) begins, the support roller (410) shown in FIG. 1 rotates in conjunction with this, and the film (12) and a plurality of adhesive tapes (11) attached to the outer surface thereof are unwound from the tape roll (10) supported by the support roller (410) toward the peeling plate (420) and the pressure roller (430), and as described above, the film (12) is peeled from the adhesive tapes (11) and wound onto the winding unit (1), and the adhesive tapes (11) peeled from the film (12) are attached to the wafer (201) and the ring frame (202) to form a work unit (200).

[0050] For example, when all the film (12) is unwound from the tape roll (10) supported by the support roller (410) shown in FIG. 1, a film (12) of a predetermined length is wound onto the winding section (22, 22') of the winding unit (1) to form a solid film (120) of a predetermined outer diameter as shown in FIG. 3, and this solid film (120) is separated from the winding section (22, 22') and discarded in the following order.

[0051] That is, first, after the gripping of the side end of the film (12) by the unillustrated gripping part of the winding part (22') of the other side (left side of FIG. 2) is released, the forward / backward mechanism (40, 40') is driven so that the winding mechanism (20) of one side and the winding mechanism (20') of the other side move in a direction in which they are relatively separated (the direction in which the winding part (22, 22') is removed from the through film (120). That is, the winding mechanism (20) of one side moves in the +Y direction, and the winding mechanism (20') of the other side moves in the -Y direction. At this time, as described above, since the gripping of the side end of the film (12) by the unillustrated gripping part of the other side is released, when the winding mechanism (20') of the other side moves in the -Y direction, the winding part (22') of the other side is removed from the through film (120) first.

[0052] In the above state, the film (120) moves in the +Y direction together with the winding part (22) while being held in one winding part (22), but since the plate (51) does not move, the film (120) moving together with the winding part (22) has its side surface collide with the plate (51) and is pressed in the -Y direction by the plate (51). Because of this, the film (120) is forcibly pulled out from one winding part (22) and falls due to its own weight and is discarded.

[0053] As described above, according to the winding unit (1) related to the present embodiment, when a winding film (120) is removed from a pair of winding mechanisms (20, 20') and disposed of, after the unillustrated gripping part of the other winding mechanism (22') places the film (12), the two winding mechanisms (20, 20') are moved apart by the forward / backward mechanism (40, 40') to first remove the film (120) from the other winding mechanism (20'), and then, because the one winding part (22) and the film (120) held therein are moved apart by the forward / backward mechanism (40) in the present embodiment by the moving mechanism formed in the removal mechanism, the side end of the film (120) held by the one winding mechanism (20) is a plate (51). It is pressed in the direction of extraction by means of. Because of this, the film (120) held in one winding mechanism (20) is also extracted from that one winding mechanism (20), and the film (120) extracted from both winding mechanisms (20, 20') falls and is discarded by its own weight as shown in FIG. 3.

[0054] <Second Embodiment>

[0055] Next, a winding unit (1') related to a second embodiment of the present invention will be described based on FIGS. 4 and 5. In FIGS. 4 and 5, the same reference numerals are used for elements identical to those shown in FIGS. 2 and 3, and further descriptions of them will be omitted below.

[0056] In the winding unit (1') related to the present embodiment, as shown in FIG. 4, a guide plate (60) is mounted between the plate (51) and the support plate (32) in the Y-axis direction, on the outer circumference of the winding mechanism (20) on one side (right side of FIG. 4). Then, on the surface of the plate (51) facing the guide plate (60), four guide pins (61) (only three are shown in FIG. 4) are formed to protrude horizontally toward the guide plate (60), and these guide pins (61) are each slidably inserted and passed through an unillustrated circular hole formed in the guide plate (60). Here, the guide plate (60) and the guide pins (61) constitute a guide part that guides movement along the Y-axis direction of the winding mechanism (20).

[0057] In the winding unit (1') related to the present embodiment, when the film (120) is removed from a pair of winding mechanisms (20, 20') and disposed of, after the unillustrated gripping part of the other winding part (22') places the film (12), the two winding mechanisms (20, 20') are moved apart by the forward / backward mechanism (40, 40') as indicated by the arrow in FIG. 5, thereby removing the film (120) from the other winding part (22') first, and then, the one winding part (22) and the film (120) held therein are moved apart by the moving mechanism (in the present embodiment, the forward / backward mechanism (40)) in the direction in which the two winding mechanisms (20, 20') are separated. Accordingly, in the winding unit (1') related to the present embodiment, when the film (120) (see FIG. 5) wound on the winding section (22, 22') is pulled out, the movement of one winding mechanism (20) in the +Y axis direction is guided by the guide plate (60) and guide pin (61) constituting the guide section and is carried out smoothly.

[0058] Then, the roll film (20) first extracted from the other winding section (22') is pressed in the direction of being pulled out (-Y axis direction) by the plate (51), and the roll film (120) held in one winding section (22) is also extracted from that one winding section (22), and the roll film (120) extracted from both winding sections (22, 22') falls by its own weight and is discarded as shown in FIG. 5. In addition, in this embodiment, the number of guide pins (61) constituting the guide section is set to 4, but the number of guide pins (61) is optional if multiple.

[0059] <Third Embodiment>

[0060] Next, a winding unit (1) related to the third embodiment of the present invention will be described based on FIGS. 6 and 7. Also, in FIGS. 6 and 7, the same reference numerals are given to elements identical to those shown in FIGS. 2 and 3, and further descriptions of them will be omitted below.

[0061] In the above embodiments 1 and 2, a forward / backward mechanism (40) was used in combination as a moving mechanism to move one winding mechanism (20) holding the film (120) in the +Y axis direction relative to the plate (51), but in the winding unit (1) related to the present embodiment, the moving mechanism is composed of an air cylinder (70), and the plate (51) constituting the pressing part is maintained so as to be movable in the Y axis direction relative to the winding part (22). Here, on the outer circumference of one winding part (22), three air cylinders (70) are formed in a circumferential direction at an equal angle pitch (120° pitch), and each end of a rod (71) extending from each air cylinder (70) in the -Y axis direction is connected to the plate (51).

[0062] In the winding unit (1) related to the present embodiment, when a roll film (120) is removed from a pair of winding sections (22, 22') and disposed of, after the unillustrated gripping section of the other winding section (22') places the film (12), the two winding sections (20, 20') are moved apart from each other by the forward / backward mechanism (40, 40') as indicated by the arrow in FIG. 7, so that the roll film (120) is removed first from the other winding section (22'), and then each rod (71) of the three air cylinders (70) which are moving mechanisms is extended in the direction of the arrow in FIG. 7 (-Y axis direction). Then, the plate (51) moves in the direction of the arrow (-Y axis direction), and the roll film (120) with its side surface in contact with this plate (51) is one of The film (120) is forcibly removed from the winding section (22) and removed from both winding sections (22, 22'), and then falls and is discarded by its own weight as shown in FIG. 7. In addition, in this embodiment, the number of air cylinders (70) constituting the moving mechanism is set to three, but the number of air cylinders (70) is optional. Also, in this embodiment, the moving mechanism is composed of air cylinders (70), but any other object, such as a hydraulic cylinder, may be used instead of the air cylinders (70).

[0063] In addition, although the above description describes a form in which the present invention is applied to a winding unit for winding a film peeled from an adhesive tape that integrates a wafer and a ring frame, which are workpieces, as a work unit in a tape adhesive device, the present invention can be similarly applied to a winding unit for winding a film in any device other than a tape adhesive device.

[0064] Furthermore, the application of the present invention is not limited to the embodiments described above, and it is understood that various modifications are possible within the scope of the technical concept described in the claims, specification, and drawings. Explanation of the symbols

[0065] 1, 1', 1" : Winding unit, 10 : Tape roll, 11 : Adhesive tape 12: Film, 13: Ream tube 20, 20': Winding mechanism, 21: Grip section, 22, 22': Winding section 23: Rotating shaft, 24: Casing, 25: Support, 26: Entry part 27, 28: Clamp plate, 30, 30': Rotating mechanism, 31, 31': Motor 311: Output shaft (motor shaft), 32, 32': Support plate 321, 321': Sliding block section, 33, 33': Driving pulley 34, 34': Driven pulley, 35, 35': Drive belt 40, 40': Advance / Retreat Mechanism, 41: Support Reliever, 42, 42': Ball Screw Shaft 43, 43' : Guide rail, 44, 44' : Motor, 45, 45' : Bearing 51: Plate (pressing part), 511: Opening, 52, 53: Plate retaining part 54: Magnet, 60: Guide plate, 61: Guide pin, 70: Air cylinder (movement mechanism) 71: Load, 100: Tape adhesive, 200: Work unit 201: Wafer, 202: Ring frame, 300: Housing 400: Chuck table, 401: First support surface, 402: Second support surface 410: Support roller, 420: Peeling plate, 430: Pressure roller 440 : Support member

Claims

Claim 1 A winding unit for winding a film in the shape of a strip along an axis extending parallel to the width direction of the film, comprising: two winding mechanisms arranged so as to face each other, gripping portions that grip the side end portion of the film; two rotating mechanisms for rotating each of the winding mechanisms; and a reciprocating mechanism for moving the two winding mechanisms closer together and further apart in the axial direction relative to each other; wherein the winding mechanism comprises a tubular winding portion that accommodates the gripping portion and winds the film from its outer surface, and an entry portion formed in the winding portion for introducing the film to grip the film in the gripping portion; wherein one of the winding mechanisms comprises an extraction mechanism for extracting the tubular film formed in the tubular shape by the winding portion winding the film from the winding portion; wherein the extraction mechanism comprises a pressing portion that presses the side end of the tubular film in the axial direction to detach the tubular film from the gripping portion, and a moving mechanism for moving the gripping portion on which the film is placed and the pressing portion relative to each other in the axial direction; and wherein the extraction A winding unit, wherein the mechanism has a gripping part of the other winding mechanism that places the film, moves the one winding mechanism and the other winding mechanism in a direction that separates them relatively using the forward and backward mechanism to extract the film from the other winding mechanism, and then extracts the film by pressing the side edge of the film using the moving mechanism. Claim 2 A winding unit according to claim 1, wherein the pressing part is a plate having an opening through which the winding part can pass, and the base on which the reciprocating mechanism is arranged is provided with a plate holding part that holds the plate, and the winding mechanism is provided with a guide part that enables the plate to move in its axial direction, and by moving the winding mechanism in its axial direction, the plate is held in the plate holding part, the winding part is pulled out from the opening of the plate held in the plate holding part, and the plate presses the side edge of the roll film wound in the winding part, thereby pulling out the roll film from the winding part. Claim 3 A winding unit according to claim 1, wherein the pressing portion is a plate having an opening through which the winding portion can pass, and is provided with a moving mechanism disposed in the winding portion and moving the plate in its axial direction, and by moving the plate in its axial direction by the moving mechanism, the winding portion is pulled out from the opening of the plate, and the plate presses the side edge of the roll film wound in the winding portion, thereby pulling the roll film out from the winding portion.

Images