Test socket

Abstract

The present invention relates to an inspection socket, and more specifically, to an inspection socket provided between a device to be inspected and an inspection device for electrically connecting a terminal of the device to be inspected and a pad of the inspection device, comprising: an anisotropic conductive sheet comprising a plurality of conductive parts arranged in an up-and-down direction within an insulating elastic material, wherein the conductive parts are arranged at each position corresponding to the terminal of the device to be inspected, and the conductive parts are arranged in an up-and-down direction within an insulating elastic material, and an insulating support part disposed around the conductive parts to support the conductive parts while insulating each conductive part from each other; and a guide means disposed on the upper side of the anisotropic conductive sheet to guide a terminal of the device to be inspected, which descends to a position away from the conductive parts, toward the conductive parts, wherein the guide means comprises: a guide sheet disposed on the upper side of the insulating support part and spaced apart from the insulating support part, and having a first through hole provided at each position corresponding to the second conductive part; and a plurality of intermediate elastic parts disposed around the first through hole, which are compressed and elastically deformed when a terminal contacts the guide sheet, and are made of a material softer than the guide sheet. The invention relates to an inspection socket comprising: a support sheet attached to the upper surface of the insulating support member, having a second through hole formed at each position corresponding to the conductive member, and supporting each intermediate elastic member.

Description

Technology Field

[0001] The present invention relates to an inspection socket, and more specifically, to an inspection socket that prevents damage to the terminals of a device under inspection and ensures a stable electrical connection. Background Technology

[0002] In order to test a device under test, such as a semiconductor device, a test socket is used that is positioned between a test device and the device under test. The test socket used for testing the device under test electrically connects the test device and the device under test. As a component of such a test socket (100), an anisotropic conductive sheet (conductive rubber sheet) capable of elastically deforming in response to pressure applied through the device under test (400) is known in the field.

[0003] The anisotropic conductive sheet (200) has a plurality of conductive portions (210) and an insulating portion (220) that insulates the plurality of conductive portions (210) from each other. A plurality of metal particles are assembled to be conductive in the vertical direction to form each conductive portion (210). Each conductive portion (210) performs signal transmission between the inspection device (500) and the device under inspection (400). The upper end of the conductive portion (21) contacts the terminal (410) of the device under inspection, and the lower end of the conductive portion (21) contacts the pad (510) of the inspection device (500). The insulating portion (220) is made of an elastic insulating material and holds the conductive portions (210) in the vertical direction.

[0004] When a device under inspection (400) is repeatedly inspected, foreign substances adhering to the device under inspection (400) may accumulate on the insulating part (220), thereby degrading the properties of the anisotropic conductive sheet (200). To prevent such degradation of properties, an inspection socket (100) in which a film sheet (300, conductive film sheet) is coupled to the upper side of the anisotropic conductive sheet is known in the field.

[0005] As the device under test becomes increasingly larger and has more terminals, it is becoming difficult to make precise contact between the device under test and the test socket. To address this, a downwardly inclined surface (310) is provided on the film sheet (300) to guide the terminal so that it can come into contact with the conductive part along the inclined surface (310) even if the terminal descends to a position away from the conductive part.

[0006] These conventional technologies have the following problems.

[0007] The film sheet (300) for protecting the anisotropic conductive sheet (200) is made of a hard material. As the terminal of the device under inspection moves along the inclined surface (310) of the film sheet, damage may occur to the surface. In particular, as shown in FIG. 2, if the device (400) cannot descend so that the terminal (410) of the device under inspection (400) and the conductive part (210) are aligned with each other, there is a problem in which the terminal (410) may come into contact with the upper corner of the inclined surface (310) and be damaged. If the damaged terminal (410) comes into contact with the conductive part (210) in this way, there is a problem in that the reliability of the inspection is reduced. The problem to be solved

[0008] The present invention was created to solve the aforementioned technical problem, and its technical objective is to provide an inspection socket that facilitates the positional alignment of a device under inspection and prevents damage to the terminals.

[0009] The technical objective of the present invention is to provide an inspection socket that prevents damage to the terminal through soft contact by providing an intermediate elastic part at the bottom of a guide sheet that guides the position of the inspection socket during the position alignment process.

[0010] The technical objective of the present invention is to provide an inspection socket in which an intermediate elastic part is supported on a rigid sheet, so as to be able to sufficiently absorb the pressure applied from the terminal by the pressure of the terminal.

[0011] The technical objective of the present invention is to provide an inspection socket in which the intermediate elastic part is supported on a rigid sheet, so that the durability of the intermediate elastic part is not reduced by the pressure applied from the terminal by the pressure of the terminal. means of solving the problem

[0012] The inspection socket of the present invention for achieving the aforementioned technical purpose is,

[0013] In a test socket provided between a device to be tested and a test device for electrically connecting a terminal of the device to be tested and a pad of the test device,

[0014] A plurality of conductive parts are arranged at each position corresponding to the terminal of the above-mentioned device under test, and a plurality of conductive particles are arranged in the vertical direction within an insulating elastic material, and

[0015] An anisotropic conductive sheet comprising insulating support members disposed around the conductive portions to support the conductive portions while insulating each conductive portion from one another; and

[0016] It includes a guide means for guiding a terminal of a device under test, which is positioned on the upper part of the above-mentioned anisotropic conductive sheet and descends to a position away from the conductive part, toward the conductive part,

[0017] The above guide means is,

[0018] A guide sheet spaced apart from the insulating support above the insulating support and having a first through hole provided at each position corresponding to the conductive part;

[0019] A plurality of intermediate elastic members provided at the lower part of the guide sheet and arranged around the first through hole, which are elastically deformed while being compressed when a terminal of the device to be tested contacts the guide sheet, and which are made of a material softer than the guide sheet; and

[0020] It includes a support sheet attached to the upper surface of the insulating support member, having a second through hole formed at each position corresponding to the conductive member, and supporting each intermediate elastic member.

[0021] In the above inspection socket,

[0022] The upper end of the above intermediate elastic part is attached to the lower surface of the guide sheet, and

[0023] The lower end of the above intermediate elastic part can be attached to the upper surface of the support sheet.

[0024] In the above inspection socket,

[0025] The above support sheet may be made of a material that is harder than the intermediate elastic part.

[0026] In the above inspection socket,

[0027] The above support sheet may be made of a material that is harder than the insulating support.

[0028] In the above inspection socket,

[0029] The above intermediate elastic part may have a thickness greater than the height of the terminal of the device under test.

[0030] In the above inspection socket,

[0031] The thickness of the guide sheet and the support sheet may be smaller than the thickness of the intermediate elastic part.

[0032] In the above inspection socket,

[0033] The above guide sheet and support sheet are made of polyimide material, and the above elastic bump may be made of silicone rubber material.

[0034] In the above inspection socket,

[0035] The first through hole and the second through hole may have the same diameter as each other.

[0036] In the above inspection socket,

[0037] The diameter of the first through hole may be larger than the diameter of the second through hole.

[0038] In the above inspection socket,

[0039] The contact area between the intermediate elastic part and the support sheet may be larger than the contact area between the intermediate elastic part and the guide sheet.

[0040] In the above inspection socket,

[0041] The above intermediate elastic part is,

[0042] The side facing the challenge section may be formed as a sloping surface that slopes toward the center of the challenge section as it moves from the top to the bottom.

[0043] In the above inspection socket,

[0044] The above inclined surface can connect the first through hole and the second through hole to each other.

[0045] The inspection socket of the present invention for achieving the above-described technical purpose is an inspection socket provided between a device to be inspected and an inspection device for electrically connecting a terminal of the device to be inspected and a pad of the inspection device to each other, wherein

[0046] A plurality of conductive parts are arranged at each position corresponding to the terminal of the above-mentioned device under test, and a plurality of conductive particles are arranged in the vertical direction within an insulating elastic material, and

[0047] An anisotropic conductive sheet comprising insulating support members disposed around the conductive portions to support the conductive portions while insulating each conductive portion from one another; and

[0048] It includes a guide means disposed on the upper part of the above anisotropic conductive sheet to guide a terminal of a device under test to the conductive part,

[0049] The above guide means is,

[0050] A support sheet attached to the upper surface of an insulating support member and having a second through hole formed therein into which a terminal of a device to be tested can be inserted;

[0051] A guide sheet spaced upward from the support sheet and having a first through hole formed therein into which a terminal of the device to be tested can be inserted; and

[0052] It includes an intermediate elastic member disposed between the support sheet and the guide sheet, attached to the support sheet, and made of a material softer than the support sheet and the guide sheet.

[0053] In the above inspection socket,

[0054] The above intermediate elastic part may have a cross-sectional area at the top that is smaller than the cross-sectional area at the bottom.

[0055] In the above inspection socket,

[0056] The above intermediate elastic part may be formed in a trapezoidal shape.

[0057] In the above inspection socket,

[0058] The above intermediate elastic members may be arranged in parallel between adjacent conductive members. Effects of the invention

[0059] The inspection socket according to the present invention includes a guide means for guiding a terminal of a device to be inspected, which descends to a position away from the conductive part, toward the conductive part, thereby ensuring secure contact between the terminal and the conductive part and increasing the reliability of the inspection.

[0060] The inspection socket according to the present invention has the advantage of minimizing damage to the terminal by enabling soft contact between the terminal and the guide sheet while the guide sheet, supported by an intermediate elastic part, guides the terminal to the conductive part.

[0061] The inspection socket according to the present invention has the advantage of being able to fully absorb the pressure applied by the terminal, as the intermediate elastic part is supported on a support sheet positioned at the bottom.

[0062] The inspection socket according to the present invention has the advantage of improving the durability of the intermediate elastic part by supporting the intermediate elastic part on a support sheet disposed at the bottom. Brief explanation of the drawing

[0063] FIG. 1 is a drawing showing a conventional inspection socket. Figure 2 is an operation diagram of the inspection socket of Figure 1. FIG. 3 is a drawing showing an inspection socket according to a first embodiment of the present invention. FIGS. 4 and 5 are drawings showing the operation of FIG. 3. Fig. 6 is an exploded view of the inspection socket of Fig. 3. FIG. 7 is a drawing showing an inspection socket according to a second embodiment of the present invention. FIG. 8 is a drawing showing an inspection socket according to a third embodiment of the present invention. FIG. 9 is a drawing showing an inspection socket according to a fourth embodiment of the present invention. FIG. 10 is a drawing showing an inspection socket according to a fifth embodiment of the present invention. Specific details for implementing the invention

[0064] The embodiments of the present disclosure are illustrative for the purpose of explaining the technical concept of the present disclosure. The scope of rights according to the present disclosure is not limited to the embodiments presented below or the specific description thereof.

[0065] All technical and scientific terms used in this disclosure, unless otherwise defined, have the meaning generally understood by those skilled in the art to which this disclosure pertains. All terms used in this disclosure are selected for the purpose of further clarifying this disclosure and are not selected to limit the scope of the rights under this disclosure.

[0066] Expressions such as 'comprising', 'comprising', 'having', etc. used in this disclosure should be understood as open-ended terms implying the possibility of including other embodiments, unless otherwise stated in the phrase or sentence containing such expressions.

[0067] Unless otherwise stated, singular expressions described in this disclosure may include a plural meaning, and this applies likewise to singular expressions described in the claims.

[0068] Expressions such as 'first', 'second', etc. used in this disclosure are used to distinguish multiple components from one another and do not limit the order or importance of said components.

[0069] In the present disclosure, where it is stated that a component is 'connected' or 'combined' to another component, it should be understood that the component may be directly connected or combined to the other component, or connected or combined through a new component.

[0070] As used in this disclosure, the direction indicator 'upward' is based on the direction in which the inspection socket is positioned relative to the inspection device, and the direction indicator 'downward' means the opposite direction of upward. As used in this disclosure, the direction indicator 'upward and downward direction' includes both upward and downward directions, but it should be understood that it does not mean any specific direction between the upward and downward directions.

[0071] Embodiments are described with reference to the examples illustrated in the attached drawings. In the attached drawings, identical or corresponding components are given the same reference numerals. Additionally, in the description of the following embodiments, the description of identical or corresponding components may be omitted. However, even if a description of a component is omitted, it is not intended that such component is not included in any embodiment.

[0072] The embodiments described below and the examples illustrated in the attached drawings relate to a test socket used for testing a device under test. The test socket of the embodiments may be placed between a test device and the device under test during testing of the device under test and used for testing the device under test. As an example, the test socket of the embodiments may be used for final testing of the semiconductor device in a post-process during the manufacturing process of the semiconductor device. However, the examples of testing to which the test socket of the embodiments is applied are not limited to the aforementioned testing.

[0073] FIG. 1 illustrates an example in which an inspection socket (10) according to one embodiment is used. FIG. 1 schematically illustrates the shapes of the inspection socket (10), the inspection device (50), and the device to be inspected (40). The shapes shown in FIG. 1 are merely one example selected for understanding the embodiment.

[0074] Referring to FIG. 1, an inspection socket (10) according to one embodiment is positioned between an inspection device (50) and a device to be inspected (40). For example, the inspection socket (10) may be configured to include an anisotropic conductive sheet (20). The anisotropic conductive sheet (20) may be attached to a socket housing and positioned on the inspection device (50) by the socket housing. The socket housing may have a socket guide, and a receiving hole may be formed in the socket guide in the vertical direction (VD). The socket housing may be removablely mounted to the inspection device (50) at the socket guide, and the anisotropic conductive sheet (20) may be removablely coupled to the socket guide. A device to be inspected (40), which is transported to the inspection device (50) by hand or by a transport device, is received in the receiving hole of the socket housing, and the socket housing aligns the device to be inspected (40) with respect to the inspection socket (10). When inspecting the device to be inspected (40), the anisotropic conductive sheet (20) comes into contact with the inspection device (50) and the device to be inspected (40) in the vertical direction (VD), thereby electrically connecting the inspection device (50) and the device to be inspected (40) to each other.

[0075] The device to be tested (40) may be a semiconductor device manufactured by packaging a semiconductor IC chip and a plurality of terminals (41) in a cuboid shape using a resin material. The device to be tested (40) may include a flat substrate and a plurality of terminals (41) protruding from the lower surface of the substrate. The terminals (41) of the device to be tested (40) shown in FIG. 1 are of the ball type. The terminals (41) of the device to be tested (40) are not limited to the ball type and may be, for example, of the land type or pin type.

[0076] The inspection device (50) can inspect various operational characteristics of the device to be inspected (40). The inspection device (50) may have a board on which inspection is performed, and the board may be equipped with an inspection circuit for inspecting the device to be inspected (40). Additionally, the inspection circuit has a plurality of pads (51) that are electrically connected to a terminal (41) of the device to be inspected (40) through an inspection socket (10). The pads (51) of the inspection device (50) can transmit an electrical test signal and receive a response signal.

[0077] The inspection socket (10) according to the present invention comprises an anisotropic conductive sheet (20) and a guide means (30).

[0078] The above anisotropic conductive sheet (20) includes a conductive portion (21) and an insulating support portion (22).

[0079] When the anisotropic conductive sheet (20) is placed on the inspection device (50), the conductive portion (21) is positioned in the vertical direction (VD). The conductive portion (21) can be in contact with the terminal (41) of the device to be inspected (40) at its upper end and with the pad (51) of the inspection device (50) at its lower end. The conductive portion (21) is configured to be conductive in the vertical direction (VD) and may have elasticity. When inspecting the device to be inspected (40), the conductive portion (21) of the inspection socket (10) electrically connects the terminal (41) of the device to be inspected (40) and the corresponding pad (51) of the inspection device (50) in the vertical direction (VD), and the inspection of the device to be inspected (40) is performed by the inspection device (50) through the conductive portion (21) of the inspection socket (10).

[0080] When inspecting the device to be inspected (40), a pressure is applied to the device to be inspected (40) by means of a mechanical device or manually. Due to the pressure, the terminal (41) of the device to be inspected (40) and the conductive part (21) of the inspection socket (10) may come into contact in the vertical direction (VD), and the conductive part (21) of the inspection socket (10) and the pad (51) of the inspection device (50) may come into contact in the vertical direction (VD). As the terminal (41) of the device to be inspected (40) receiving the pressure presses the conductive part (21) downward, the conductive part (21) may be elastically deformed by being compressed downward and expanding in the horizontal direction. When the pressure is removed from the conductive part (21) of the inspection socket (10), the conductive part (21) may be restored to its original shape.

[0081] The conductive parts (21) are arranged in a planar arrangement in the horizontal direction (HD). The planar arrangement of the conductive parts (21) may vary depending on the arrangement of the terminals (41) of the device under test (40). For example, the conductive parts (21) may be arranged in a single matrix form or in a pair or more matrix forms within the frame. Alternatively, the conductive parts (21) may be arranged in a zigzag form within the frame.

[0082] The conductive portion (21) is positioned at each location corresponding to the terminal (41) of the device under test (40), and a plurality of conductive particles (211) are densely arranged in the vertical direction within an insulating elastic material.

[0083] The insulating elastic material constituting the conductive part (21) is preferably a polymer material having a cross-linked structure. Various materials can be used as curable polymer material forming materials to obtain such insulating elastic material, and specific examples thereof include conjugated diene rubbers such as polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber and their hydrogenated derivatives, block copolymer rubbers such as styrene-butadiene-diene block copolymer rubber and styrene-isoprene block copolymer and their hydrogenated derivatives, chloroprene rubber, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, ethylene-propylene-diene copolymer rubber, etc.

[0084] When weather resistance is required for anisotropic conductive sheets (20), it is preferable to use materials other than conjugated diene rubber, and especially to use silicone rubber in terms of moldability and electrical properties.

[0085] The conductive particles (211) constituting the conductive part (21) are particles that exhibit magnetism. Specific examples of such conductive particles (211) include particles of a magnetic metal such as iron, cobalt, or nickel, particles of an alloy thereof, or particles containing these metals, or particles of these particles used as core particles and a metal with good conductivity such as gold, silver, palladium, or rhodium is plated on the surface of the core particles, or non-magnetic metal particles, inorganic material particles such as glass beads, or polymer particles used as core particles and a conductive magnetic metal such as nickel or cobalt is plated on the surface of the core particles.

[0086] As a means of coating a conductive metal on the surface of the core particles, although not particularly limited, examples such as chemical plating, electroplating, sputtering, and deposition methods are used.

[0087] The shape of the conductive particles (211) is not particularly limited, but it is preferable that they be spherical, star-shaped, or secondary particles aggregated therefrom, in that they can be easily dispersed within the polymer material forming material. In addition, it is also preferable that they be columnar in shape, with a length greater than the width, in that they can be easily erected by a magnetic field.

[0088] The insulating support member (22) is positioned around the conductive member (21) to support the conductive member (21) while insulating each conductive member (21) from one another. The insulating support member (22) can be formed from the same material as the elastic insulating material constituting the conductive member (21).

[0089] A plurality of conductive particles (211) are arranged in the vertical direction in the conductive part (21), but the insulating support part (22) contains no or almost no conductive particles (211). Accordingly, electrical signals passing through the conductive part (21) do not travel to the adjacent conductive part (21) through the insulating part.

[0090] The insulating support (22) can be manufactured together with the conductive part (21) in a mold and integrated, but is not limited thereto, and the conductive part (21) can also be inserted into the hole of the insulating support.

[0091] The above guide means (30) is positioned on the upper part of the anisotropic conductive sheet (20) and guides the terminal (41) of the device to be tested (40), which is descending to a position away from the conductive part (21), to the conductive part (21). Specifically, during the process of descending the device to be tested (40), there may be cases where each terminal (41) is not aligned with the conductive part (21) and is slightly misaligned in the horizontal direction due to mechanical tolerances, etc. In such cases, if the terminal (41) of the device to be tested (40) is misaligned and cannot descend while aligned with the conductive part (21), the device to be tested (40) cannot come into contact with the conductive part (21), thereby reducing the reliability of the electrical inspection.

[0092] The guide means (30) allows the device to be tested (40) to be moved to a desired position even when the device to be tested (40) cannot be lowered to a desired position in this way, thereby ensuring that the terminal (41) and the conductive part (21) make secure contact.

[0093] This guide means (30) is configured to include a guide sheet (31), an intermediate elastic part (32), and a support sheet (33).

[0094] The guide sheet (31) is positioned on the upper part of the anisotropic conductive sheet (20) and guides the terminal (41) of the device to be tested (40), which is descending to a position away from the conductive part (21), to the conductive part (21). The guide sheet (31) is in contact with the terminal (41) of the device to be tested (40) and is located at the top of the guide means (30). The guide sheet (31) is formed in the form of a thin sheet.

[0095] The guide sheet (31) may be a resin material such as a liquid crystal polymer, polyimide resin, polyester resin, polyaramid resin, polyamide resin, fiber-reinforced resin material such as glass fiber-reinforced epoxy resin, glass fiber-reinforced polyester resin, glass fiber-reinforced polyimide resin, or a composite resin material containing inorganic materials such as alumina and boron nitride as fillers in the epoxy resin.

[0096] The guide sheet (31) is made of a relatively hard material so that its durability does not decrease even with repeated contact with the device under inspection (40). In addition, it is preferable that its properties do not change even if foreign substances adhering to the device under inspection (40) accumulate. Considering these points, it is preferable that the guide sheet (31) be made of polyimide.

[0097] The thickness of the guide sheet (31) is preferably 10 to 200 μm, and more preferably 15 to 100 μm. If the guide sheet (31) is excessively thick, it does not deform easily even when pressure is applied by the device under inspection (40), making it difficult to guide the device under inspection (40) toward the conductive part. In addition, if the guide sheet (31) is excessively thin, the guide sheet (31) may easily tear or break due to external force, which is undesirable.

[0098] The guide sheet (31) is configured to have a plurality of first through holes (311). The first through holes (311) are arranged at positions corresponding to the terminals (41) of the device to be inspected (40). The terminals (41) of the device to be inspected (40) can be inserted into the first through holes (311). The first through holes (311) may have an inner diameter larger than that of the terminals (41) of the device to be inspected (40). The first through holes (311) are arranged at positions corresponding to the second through holes (331), so that the terminals (41) passing through the first through holes (311) can be connected to the conductive part (21) while passing through the second through holes (331).

[0099] An intermediate elastic member (32) is provided at the bottom of the guide sheet (31) and positioned around the first through hole (311). The intermediate elastic member (32) undergoes elastic deformation while being compressed when the terminal (41) of the device to be tested (40) contacts the guide sheet (31) and is pressed. To this end, the intermediate elastic member (32) is made of a material that is softer than the guide sheet (31).

[0100] Specifically, the intermediate elastic member (32) is positioned between the guide sheet (31) and the support sheet (33). The intermediate elastic member (32) elastically supports the guide sheet (31). When pressure is applied to the guide sheet (31), the intermediate elastic member (32) absorbs the pressure by elastically deforming. Due to the pressure, the intermediate elastic member (32) expands in the left and right directions. The lower end of the intermediate elastic member (32) is attached to the support sheet (33). Since the support sheet (33) firmly supports the intermediate elastic member (32), the intermediate elastic member (32) does not collapse due to the pressure and can sufficiently absorb the pressure applied to the guide sheet (31).

[0101] In addition, the intermediate elastic part (32) is restored to its original shape when the pressure applied by the device under test (40) is released.

[0102] The intermediate elastic part (32) is made of a material that is softer than the guide sheet (31) and the support sheet (33). The thickness (d2) of the intermediate elastic part (32) may be greater than the height (d1) of the terminal (41) of the device under inspection (40). Additionally, since the thickness of the intermediate elastic part (32) is greater than the thickness of the guide sheet (31) and the support sheet (33), it can sufficiently absorb the pressure applied by the device under inspection (40).

[0103] The intermediate elastic part (32) may be made of materials such as low-hardness silicone rubber, foamed silicone rubber, or urethane. When silicone rubber is used as the intermediate elastic part (32), the hardness of the silicone is in the range of 60A to 10A, and the load can be adjusted according to the test conditions.

[0104] The intermediate elastic part (32) has high elasticity, sufficient thickness, and low hardness, so the terminal (41) of the device to be tested (40) can be easily moved to the center of the conductive part (21) compared to the case where it is made only of a conventional film sheet, thereby increasing the device contact stability.

[0105] In addition, it can sufficiently absorb the pressure applied from the device under test (40), so that no damage occurs to the terminal (41) of the device under test (40).

[0106] In addition, as the intermediate elastic part (32) undergoes sufficient elastic deformation, the compression distance of the inspection socket (10) and the stroke of the terminal (41) can be sufficiently secured. Accordingly, all terminals (41) can be connected to the conductive part (21) even if the size of the terminals (41) is slightly different.

[0107] The support sheet (33) is attached to the upper surface of the insulating support member (22), and a second through hole (331) is formed at each position corresponding to the conductive member (21), and supports each intermediate elastic member (32).

[0108] Specifically, the support sheet (33) forms a guide means (30) together with the guide sheet (31) and the intermediate elastic part (32), and is configured to support the intermediate elastic part.

[0109] This support sheet (33) is configured to be attached to the upper surface of the anisotropic conductive sheet (20). The support sheet (33) is formed in the shape of a thin sheet and is made of a material that is harder than the intermediate elastic part (32). Since the support sheet (33) made of a hard material firmly supports the intermediate elastic part (32), the intermediate elastic part (32) does not collapse when pressure is applied. The intermediate elastic part (32) is supported by the support sheet (33) and can absorb sufficient pressure, and when the pressure is removed, the intermediate elastic part (32) can be restored to its original shape. Specifically, when the pressure is removed, the intermediate elastic part (32) can be set up in its original shape, allowing the support sheet (33) and the guide sheet (31) to maintain a sufficient distance from each other.

[0110] The support sheet (33) may be made of the same material as the guide sheet (31). The support sheet (33) may be made of resin materials such as liquid crystal polymer, polyimide resin, polyester resin, polyaramid resin, polyamide resin, fiber-reinforced resin materials such as glass fiber-reinforced epoxy resin, glass fiber-reinforced polyester resin, glass fiber-reinforced polyimide resin, or composite resin materials containing inorganic materials such as alumina and boron nitride as fillers in epoxy resin, etc.

[0111] The thickness of the support sheet (33) is preferably 10 to 200 μm, and more preferably 15 to 100 μm. If the support sheet (33) is too thick, the thickness of the intermediate elastic part (32) is reduced, which weakens the elastic force and is undesirable. If the support sheet (33) is too thin, it cannot sufficiently support the intermediate elastic part (32) and the durability is weakened, which is undesirable.

[0112] If necessary, the support sheet (33) may be made of a metal material, and in this case, it is also possible to form an insulating coating layer on the surface of the metal material for insulation.

[0113] The inspection socket (10) according to the present invention operates as follows.

[0114] First, as shown in FIG. 3, when the terminal (41) is lowered so as not to be aligned with the conductive part (21), it comes into contact with the upper surface of the guide sheet (31). In this state, if a pressure is continuously applied from the device under inspection (40), as shown in FIG. 4, the guide sheet (31) bends as the intermediate elastic part (32) undergoes elastic deformation. That is, as the pressure is applied, the edge of the guide sheet (31) bends downward, guiding the terminal (41) toward the conductive part (21).

[0115] Subsequently, as shown in FIG. 5, a terminal (41) moving along the surface of a downwardly curved guide sheet (31) is positioned in the center of the conductive part (21), and the conductive part (21) and the terminal (41) can be connected to each other.

[0116] After sufficiently pressurizing the conductive part (21), when a predetermined electrical signal is applied from the inspection device (50), an electrical inspection is performed on the device to be inspected (40).

[0117] Afterward, when the device to be tested (40) that has been tested is moved upward to remove the pressure applied to the test socket (10), the intermediate elastic part (32) is restored to its original shape, and the test socket (10) as shown in Fig. 3 takes on the shape shown in Fig. 3.

[0118] The inspection socket (10) according to the present invention can be modified as follows.

[0119] In the above-described embodiment, the first through hole (311) and the second through hole (331) have the same diameter as each other, and the intermediate elastic part (32) has a roughly square cross-sectional shape. Additionally, the intermediate elastic part (32) is configured to be spaced slightly inward from the edges of the first through hole (311) and the second through hole (331).

[0120] However, it is not limited to this, and as shown in FIG. 7, it is possible to form an inclined surface (321) on the intermediate elastic part (32).

[0121] In the inspection socket (10) according to the second embodiment, the intermediate elastic part (32) disposed between the guide sheet (31) and the support sheet (33) may have an inclined surface (321) formed so as to easily guide the terminal (41) around the first and second through holes.

[0122] The intermediate elastic part (32) is formed with an inclined surface (321) that slopes from the top to the bottom so that one side facing the conductive part (21) slopes toward the center of the conductive part (21). Additionally, the other side opposite to the one side is set vertically. Furthermore, the first through hole (311) has a larger inner diameter than the second through hole (331), allowing the terminal (41) to easily contact the inclined surface (321), thereby enabling a more effective guiding function. The upper end of the intermediate elastic part (32) is located at the edge of the first through hole (311), and the lower end of the intermediate elastic part (32) is located at the edge of the second through hole (331).

[0123] In addition, the contact area between the intermediate elastic part (32) and the support sheet (33) is larger than the contact area between the intermediate elastic part (32) and the guide sheet (31), so that the intermediate elastic part (32) is firmly supported by the support sheet (33), thereby further improving durability.

[0124] The inspection socket (10) according to the second embodiment has the advantage that the terminal (41) can easily move toward the conductive part (21) along the inclined surface (321) of the intermediate elastic part (32), and the intermediate elastic part (32) is firmly supported by the support sheet (33), thereby improving durability.

[0125] FIG. 8 illustrates an inspection socket (10) according to a third embodiment.

[0126] The inspection socket (10) according to the third embodiment has the same inner diameter for the first through hole (311) and the second through hole (331), and the intermediate elastic part (32) is formed in a trapezoidal shape. The upper end of the intermediate elastic part (32) is attached to the guide sheet (31), and the lower end of the intermediate elastic part (32) is attached to the support sheet (33) over a large area.

[0127] The upper end of the intermediate elastic part (32) is spaced slightly apart from the edge of the first through hole (311). Accordingly, when the terminal (41) comes down and comes into contact with the support sheet (33), it does not come into direct contact with the intermediate elastic part (32), but rather comes into contact with the bending guide sheet (31) and slides toward the conductive part (21), thereby increasing the durability of the inspection socket (10).

[0128] In addition, since the intermediate elastic part (32) is attached to the support sheet (33) over a large area, the intermediate elastic part (32) is firmly supported by the support sheet (33), so that damage to the intermediate elastic part (32) can be prevented.

[0129] FIG. 9 illustrates a different inspection socket (10) in the fourth embodiment.

[0130] As shown in FIG. 9(a), intermediate elastic members (32) can be arranged one by one between adjacent conductive members (21). Additionally, as shown in FIG. 9(b), three or more intermediate elastic members (32) can be arranged between adjacent conductive members (21). The number of intermediate elastic members (32) can be appropriately combined by the designer according to design conditions.

[0131] FIG. 10 illustrates a different inspection socket (10) in the fifth embodiment.

[0132] In the first embodiment, the thickness (d2) of the intermediate elastic part (32) is shown to be greater than the height (d1) of the terminal (41) of the device under inspection (40), but this is not limited thereto, and it is also possible for the thickness (d2) of the intermediate elastic part (32) to be smaller than the height (d1) of the terminal (41) of the device under inspection (40).

[0133] Although the technical concept of the present disclosure has been described by some embodiments and examples illustrated in the accompanying drawings, it should be understood that various substitutions, modifications, and changes may be made without departing from the technical concept and scope of the present disclosure as understood by those skilled in the art to which the present disclosure pertains. Furthermore, such substitutions, modifications, and changes should be considered to fall within the scope of the appended claims. Explanation of the symbols

[0134] 10...Test socket 20...Anisotropic conductive sheet 21...Challenge Section 211...Challenging Particle 22...Insulating support 30...Guiding means 31...Guide Sheet 311...First Through Hole 32...Intermediate elastic body 321...Inclined surface 33...Support sheet 331...Second penetration hole 40...blood test device 41...terminal 50...Inspection device 51...Pad

Claims

Claim 1 A test socket provided between a device to be tested and a test device for electrically connecting a terminal of the device to be tested and a pad of the test device, comprising: an anisotropic conductive sheet including a plurality of conductive parts arranged vertically within an insulating elastic material, each positioned at a location corresponding to a terminal of the device to be tested, and an insulating support part disposed around the conductive parts to support the conductive parts while insulating each conductive part from each other; and a guide means disposed on the upper side of the anisotropic conductive sheet to guide a terminal of the device to be tested, which descends to a position away from the conductive parts, toward the conductive parts, wherein the guide means comprises: a guide sheet spaced apart from the insulating support part on the upper side of the insulating support part and having a first through hole provided at a location corresponding to a conductive part; and a plurality of intermediate elastic parts disposed on the lower side of the guide sheet and disposed around the first through hole, which are compressed and elastically deformed when the terminal of the device to be tested contacts the guide sheet and are made of a material softer than the guide sheet. An inspection socket comprising: a support sheet attached to the upper surface of the insulating support member and having a second through hole formed at each position corresponding to the conductive member, and supporting each intermediate elastic member; wherein the guide sheet is separated from the conductive member and is located above the upper end of the conductive member. Claim 2 An inspection socket according to claim 1, characterized in that the upper end of the intermediate elastic member is attached to the lower surface of the guide sheet and the lower end of the intermediate elastic member is attached to the upper surface of the support sheet. Claim 3 An inspection socket according to claim 1, wherein the support sheet is made of a material harder than the intermediate elastic part. Claim 4 An inspection socket according to paragraph 3, wherein the support sheet is made of a material harder than the insulating support. Claim 5 A test socket according to claim 1, characterized in that the intermediate elastic part has a thickness greater than the height of the terminal of the device to be tested. Claim 6 In claim 5, the inspection socket is characterized in that the thickness of the guide sheet and the support sheet is smaller than the thickness of the intermediate elastic part. Claim 7 An inspection socket according to claim 1, characterized in that the guide sheet and support sheet are made of polyimide material, and the intermediate elastic part is made of silicone rubber material. Claim 8 An inspection socket according to claim 1, characterized in that the first through hole and the second through hole have the same diameter. Claim 9 An inspection socket according to claim 1, characterized in that the diameter of the first through hole is larger than the diameter of the second through hole. Claim 10 An inspection socket according to claim 9, characterized in that the contact area between the intermediate elastic part and the support sheet is larger than the contact area between the intermediate elastic part and the guide sheet. Claim 11 In claim 10, the inspection socket is characterized in that the intermediate elastic member is formed with an inclined surface such that the side facing the conductive part slopes toward the center of the conductive part as it goes from the top to the bottom. Claim 12 In claim 11, the inspection socket is characterized in that the inclined surface connects the first through hole and the second through hole to each other. Claim 13 A test socket provided between a device to be tested and a test device for electrically connecting a terminal of the device to be tested and a pad of the test device, comprising: an anisotropic conductive sheet including a plurality of conductive parts arranged vertically within an insulating elastic material, each positioned at a location corresponding to a terminal of the device to be tested, and an insulating support part disposed around the conductive parts to support the conductive parts while insulating each conductive part from each other; and a guide means disposed on the upper portion of the anisotropic conductive sheet to guide a terminal of the device to be tested to the conductive parts, wherein the guide means comprises: a support sheet attached to the upper surface of the insulating support part and having a second through hole formed therein into which a terminal of the device to be tested is inserted; and a guide sheet spaced upward from the support sheet and having a first through hole formed therein into which a terminal of the device to be tested is inserted. An inspection socket comprising an intermediate elastic member disposed between the support sheet and the guide sheet, attached to the support sheet, and made of a material softer than the support sheet and the guide sheet, wherein the guide sheet is separated from the conductive part and is positioned above the upper end of the conductive part. Claim 14 In Clause 13, the inspection socket is characterized in that the upper cross-sectional area of ​​the intermediate elastic part is smaller than the lower cross-sectional area. Claim 15 In claim 14, the inspection socket is characterized in that the intermediate elastic part is formed in a trapezoidal shape. Claim 16 In claim 13, the inspection socket is characterized in that the intermediate elastic members are arranged in a plurality of parallel between adjacent conductive members.

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