Expand apparatus and expand method

Abstract

(Problem) Provide an expand device that can suppress the possibility of an undivided area appearing in the workpiece. (Solution) An expand device for dividing a workpiece by expanding an expand sheet to which a workpiece, having a modified layer formed at the dividing point, is attached, comprises an expansion mechanism for expanding the expand sheet and a cooling unit for cooling the area between the inner edge of the annular frame of the expand sheet and the outer edge of the workpiece to a lower temperature than the area inside the outer edge of the workpiece of the expand sheet.

Description

Technology Field

[0001] The present invention relates to an expand device and an expand method for dividing a workpiece by expanding a sheet to which a workpiece with a dividing point formed thereon is attached. Background Technology

[0002] An expand device is used to divide a workpiece by attaching an expand sheet to the back of a workpiece where a dividing point is formed along a predetermined dividing line and expanding the expand sheet (see, for example, Patent Document 1).

[0003] The expand device described in Patent Document 1 improves the divisibility by cooling the workpiece during expansion when the workpiece includes a flexible material such as a DAF (die attach film) or a metal film. Prior art literature

[0004] Japanese Patent Publication No. 2019-186437 The problem to be solved

[0005] Meanwhile, the expand sheet attached to the workpiece also has ductility, and this ductility is suppressed by cooling. If only the expand sheet in the area where the workpiece is attached is cooled, and the expand sheet in the outer area of ​​the workpiece is not cooled, the area of ​​the expand sheet on the outer side of the workpiece expands, and the expand sheet in the area where the workpiece is attached is not sufficiently expanded, resulting in an area where the workpiece is not divided.

[0006] Accordingly, the objective of the present invention is to provide an expand device and an expand method that can suppress the possibility of an undivided area of ​​the workpiece occurring. means of solving the problem

[0007] According to one aspect of the present invention, an expand device for dividing a workpiece by expanding a sheet to which a workpiece having a dividing point is attached is provided, the expand device comprising an expansion mechanism for expanding the sheet and a cooling unit for cooling an area of ​​the sheet to which the workpiece is not attached to a lower temperature than the area to which the workpiece is attached to the sheet.

[0008] Preferably, the expansion mechanism comprises a sheet clamping unit having a first clamping portion and a second clamping portion facing each other with the workpiece in between in a first direction and clamping the sheet, and a third clamping portion and a fourth clamping portion facing each other with the workpiece in between in a second direction orthogonal to the first direction and clamping the sheet, respectively; a first moving unit for moving the first clamping portion and the second clamping portion in a direction diverging from each other in the first direction; and a second moving unit for moving the third clamping portion and the fourth clamping portion in a direction diverging from each other in the second direction. The cooling unit comprises a cooling table having a contact surface that contacts the sheet clamped by the sheet clamping unit and cooling the sheet, wherein the contact surface comprises a first region corresponding to an area where the workpiece is attached, and a region surrounding the first region and corresponding to an area between the workpiece and the first, second, third, and fourth clamping portions. It is composed of a second region, wherein the first region is set to a first temperature, and the second region is set to a second temperature lower than the first temperature.

[0009] According to another aspect of the present invention, an expand method for dividing a workpiece by expanding a sheet to which a workpiece having a dividing point is attached is provided, comprising: a sheet cooling step of cooling an area of ​​the sheet to which the workpiece is not attached to a lower temperature than an area of ​​the sheet to which the workpiece is attached; and a dividing step of expanding the sheet to divide the workpiece after performing the sheet cooling step.

[0010] Preferably, the sheet cooling step is performed by bringing a cooling table into contact with the sheet, and the cooling table has a contact surface comprising a first area corresponding to an area where the workpiece is attached, and a second area surrounding the first area and corresponding to an area between the workpiece and the first, second, third, and fourth clamping portions, wherein the first area is set to a first temperature and the second area is set to a second temperature lower than the first temperature, and in the splitting step, the sheet is expanded by moving the first clamping portion and the second clamping portion, which are opposite each other with the workpiece in between and clamp the sheet in a first direction, in a direction diverging from each other in the first direction, and moving the third clamping portion and the fourth clamping portion, which are opposite each other with the workpiece in between and clamp the sheet in a second direction orthogonal to the first direction, in a direction diverging from each other in the second direction. Effects of the invention

[0011] The present invention has the effect of being able to suppress the possibility of an undivided area forming in the workpiece to a low degree. Brief explanation of the drawing

[0012] FIG. 1 is a perspective view showing an example of the configuration of an expand device according to a first embodiment. FIG. 2 is a perspective view illustrating an example of a workpiece divided by the expand device shown in FIG. 1. FIG. 3 is a perspective view illustrating another example of a workpiece divided by the expand device shown in FIG. 1. FIG. 4 is a flowchart showing the flow of an expanded method according to a first embodiment. Figure 5 is a cross-sectional view schematically illustrating the sheet cooling step of the expand method shown in Figure 4. FIG. 6 is a cross-sectional view schematically illustrating the division step of the expand method illustrated in FIG. 4. FIG. 7 is a perspective view showing an example of the configuration of an expand device according to a second embodiment. FIG. 8 is a plan view illustrating the sheet clamping unit and cooling table of the expand device shown in FIG. 7. FIG. 9 is a cross-sectional view illustrating the configuration of the cooling table of the expand device shown in FIG. 7. FIG. 10 is a cross-sectional view schematically illustrating the cooling step of the expand method according to the second embodiment. FIG. 11 is a cross-sectional view schematically showing the state before the expansion sheet expansion of the splitting step of the expand method according to the second embodiment. FIG. 12 is a cross-sectional view schematically showing the expanded state of the expanded sheet in the dividing step of the expanding method according to the second embodiment. FIG. 13 is a cross-sectional view schematically showing a cooling table after the splitting step of the expand method according to the second embodiment. FIG. 14 is a cross-sectional view showing the configuration of a cooling table of an expand device according to a modified example of the second embodiment. Specific details for implementing the invention

[0013] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited by the contents described in the embodiments below. Furthermore, the components described below include those that can be easily conceived by those skilled in the art and are substantially identical. Additionally, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or changes to the configurations may be made within the scope of not departing from the essence of the present invention.

[0014] <First Embodiment>

[0015] An expand device and an expand method according to a first embodiment of the present invention will be described based on the drawings. FIG. 1 is a perspective view showing an example of the configuration of an expand device according to the first embodiment. FIG. 2 is a perspective view showing an example of a workpiece divided by the expand device shown in FIG. 1. FIG. 3 is a perspective view showing another example of a workpiece divided by the expand device shown in FIG. 1. FIG. 4 is a flowchart showing the flow of an expand method according to the first embodiment.

[0016] The expand device (1) shown in FIG. 1 according to the first embodiment is a device that expands an expand sheet (201), which is a sheet to which a workpiece (200) shown in FIG. 2 is attached, and divides the workpiece (200) into individual chips (202). The workpiece (200) to be processed by the expand device (1) according to the first embodiment is a wafer such as a disc-shaped semiconductor wafer or an optical device wafer, which includes a substrate (203) formed of silicon, sapphire, gallium arsenide, or SiC (silicon carbide), as shown in FIG. 2.

[0017] In the first embodiment, the workpiece (200) has a device (206) formed in each area divided by a plurality of mutually intersecting planned division lines (205) on the surface (204) of the substrate (203), as shown in FIG. 2. The device (206) is, for example, an integrated circuit such as an IC (Integrated Circuit) or LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor).

[0018] In the workpiece (200), a modified layer (207) (indicated by a dashed line in FIG. 2) which is a division point is formed inside the substrate (203) along the planned division line (205). The modified layer (207) refers to an area in which the density, refractive index, mechanical strength, or other physical properties are different from those of the surrounding area, and is a melting treatment area, a crack area, an dielectric breakdown area, a refractive index change area, and an area where these areas are mixed. In the first embodiment, the modified layer (207) has lower mechanical strength than other parts of the substrate (203).

[0019] In addition, in the first embodiment, as shown in FIG. 2, a Die Attach Film (DAF) (209) attached to an expanded sheet (201) is attached to the back side (208) of a substrate (203), an annular frame (210) is mounted on the outer edge of the expanded sheet (201), and the expanded sheet (201) is supported within an opening (211) on the inner side of the annular frame (210). The workpiece (200) is divided into individual chips (202) along the modified layer (207) together with the DAF (209) by an expanding device (1) while the DAF (209) and the expanded sheet (201) are attached to the back side (208) of the substrate (203).

[0020] The chip (202) is provided with a part of the substrate (203) and a device (206) formed on the surface (204) of the substrate (203), and a part of the DAF (209) is attached to the back surface (208). The DAF (209) is intended to fix the chip (202), which is divided individually from the workpiece (200), to the substrate, etc. In the first embodiment, the DAF (209) is formed in a disc shape with a larger diameter than the workpiece (200) and is attached to the back surface (208) of the substrate (203) and the expanded sheet (201).

[0021] The expanded sheet (201) has elasticity and, for example, is formed by stretching a heated synthetic resin along a first direction (212) and then stretching it in a second direction (213) that is orthogonal to the first direction (212). The expanded sheet (201) comprises a base layer composed of an elastic synthetic resin and an adhesive layer laminated to the base layer and composed of a synthetic resin that also has elasticity and adhesiveness. In the first embodiment, the first direction (212) is the so-called machine direction (MD), and the second direction (213) is the transverse direction (TD). Additionally, the expanded sheet (201) has reduced elasticity when cooled, and reduced elongation as the temperature becomes low.

[0022] Additionally, the workpiece (200) that is the processing target of the expand device (1) shown in FIG. 1 may be a wafer in which a metal film (214) is formed on the back surface (208) of a substrate (203) as shown in FIG. 3, an expand sheet (201) is attached to the metal film (214), an annular frame (210) is mounted on the outer edge of the expand sheet (201), and the expand sheet (201) is supported by the expand sheet (201) within the opening (211) on the inner side of the annular frame (210). In the workpiece (200) shown in FIG. 3, the substrate (203) and the metal film (214) are divided into individual chips (202) along the modified layer (207) by the expand device (1) while the expand sheet (201) is attached to the metal film (214) on the back surface (208) of the substrate (203). In addition, in the case of the workpiece (200) shown in FIG. 3, the chip (202) comprises a part of the substrate (203), a device (206) formed on the surface (204) of the substrate (203), and a part of the metal film (214) formed on the back surface (208). FIG. 3 uses the same reference numerals as FIG. 2 for the same parts and omits description.

[0023] The workpiece (200) illustrated in FIG. 2 is more difficult to divide into individual chips (202) than when a modified layer (207) is formed along the planned division line (205) and a DAF (209) is not attached to the back surface (208). Additionally, the workpiece (200) illustrated in FIG. 3 is more difficult to divide into individual chips (202) than when a modified layer (207) is formed along the planned division line (205) and a metal film (214) is not attached to the back surface (208). Thus, the workpiece (200) is, typically, a wafer that is difficult to divide into chips (202) by having a DAF (209) attached to the back surface (208) illustrated in FIG. 2 or a metal film (214) formed on the back surface (208) illustrated in FIG. 3.

[0024] Additionally, in the first embodiment, a modified layer (207) is formed on the workpiece (200) as a dividing point, but is not limited to the modified layer (207). For example, as a dividing point, a cutting groove formed by cutting from the surface (204) side with a cutting blade, or a laser processing groove formed by irradiating a laser beam of a wavelength having absorption properties with respect to the workpiece (200) from the surface (204) side may be formed on the workpiece (200).

[0025] The expand device (1) according to the first embodiment is a device that expands an expand sheet (201) to which a workpiece (200) having a modified layer (207) formed is attached, thereby dividing the workpiece (200) into individual chips (202) and dividing the DAF (209) into individual chips (202). As shown in FIG. 1, the expand device (1) according to the first embodiment comprises an expansion unit (10) which is an expansion mechanism, a cooling unit (20), and a control unit (30).

[0026] The expansion unit (10) expands the expand sheet (201). The expansion unit (10) is equipped with a disc-shaped base (11), a frame holding unit (12), an expansion drum (13), and a lifting unit (14).

[0027] The frame holding unit (12) holds the annular frame (210). The frame holding unit (12) has an annular frame holding member (15) installed on a base (11) and a plurality of clamps (16) disposed on the outer edge of the frame holding member (15). The inner diameter of the frame holding member (15) is smaller than the inner diameter of the annular frame (210) and larger than the outer diameter of the workpiece (200). The outer diameter of the frame holding member (15) is equal to the outer diameter of the annular frame (210). The upper surface of the frame holding member (15) is a mounting surface (17) on which the annular frame (210) is placed. The mounting surface (17) is flat along the horizontal direction. The clamps (16) clamp the annular frame (210) placed on the mounting surface (17) to fix the annular frame (210) to the frame holding member (15). In the first embodiment, four clamps (16) are arranged at equal intervals in the circumferential direction.

[0028] The expansion drum (13) is installed on the base (11) and is also formed in a cylindrical shape. The expansion drum (13) is positioned inside the frame retaining member (15) and is also coaxial with the frame retaining member (15). The inner diameter and outer diameter of the expansion drum (13) are smaller than the inner diameter of the annular frame (210) and the frame retaining member (15), and larger than the outer diameter of the workpiece (200).

[0029] The lifting unit (14) moves the frame holding unit (12) and the expansion drum (13) relative to each other along the vertical direction. In the first embodiment, the lifting unit (14) raises the frame holding unit (12) over a position where the mounting surface (17) is located on the same plane as the top of the expansion drum (13) and a position where the mounting surface (17) is located below the top of the expansion drum (13). In the first embodiment, the lifting unit (14) is an air cylinder having a cylinder (18) mounted on the base (11) and a piston rod (19) that is extendable from the cylinder (18) and has a frame holding member (15) mounted on its upper end. In the first embodiment, the lifting unit (14) is installed in multiple units spaced apart in the circumferential direction of the base (11).

[0030] The cooling unit (20) cools the expanded sheet (201) so that the area (215) (shown in FIG. 2 and 3), which is the area between the inner edge of the annular frame (210) and the outer edge of the expanded sheet (201) that is not attached to the annular frame (210) maintained by the frame holding unit (12), becomes lower in temperature than the area (216) (shown in FIG. 2 and 3) that is the area inside the outer edge of the expanded sheet (201) that is attached to the expanded sheet (201) (shown in FIG. 3). In the first embodiment, the cooling unit (20) is formed in a disc shape with an outer diameter equal to the inner diameter of the frame holding member (15). In the first embodiment, the cooling unit (20) is positioned above the expansion drum (13) and the frame retaining member (15), and also coaxial with the expansion drum (13) and the frame retaining member (15).

[0031] The cooling unit (20) is provided with a first cooling air ejection hole (21) facing along the vertical direction with the workpiece (200) attached to the expanded sheet (201) attached to the annular frame (210) maintained by the frame maintenance unit (12), in an area (216) that is inner than the outer edge of the workpiece (200) of the expanded sheet (201), and a second cooling air ejection hole (22) facing along the vertical direction with the area (215) between the inner edge of the annular frame (210) of the expanded sheet (201) attached to the frame maintenance unit (12) and the outer edge of the workpiece (200). The first cooling air ejection hole (21) and the second cooling air ejection hole (22) are each formed in multiple numbers.

[0032] The first cooling air ejection hole (21) sprays cooling air (23) (indicated by an arrow in FIG. 5) at a first temperature lower than room temperature (in the first embodiment, for example, -5°C) toward the area (216) inside the outer edge of the workpiece (200) of the expanded sheet (201) attached to the annular frame (210) held by the frame holding unit (12), i.e., toward the workpiece (200) attached to the expanded sheet (201). The first cooling air ejection hole (21) cools the area (216) inside the outer edge of the workpiece (200) of the expanded sheet (201) to the first temperature through the workpiece (200).

[0033] The second cooling air ejection hole (22) sprays cooling air (24) (indicated by an arrow in FIG. 5) at a second temperature (e.g., -10°C in the first embodiment) which is lower than the room temperature and the first temperature, toward the area (215) between the inner edge of the annular frame (210) of the expanded sheet (201) attached to the annular frame (210) maintained by the frame holding unit (12) and the outer edge of the workpiece (200). The second cooling air ejection hole (22) cools the area (215) between the inner edge of the annular frame (210) of the expanded sheet (201) and the outer edge of the workpiece (200) to the second temperature.

[0034] The control unit (30) controls each component of the expand device (1) to perform an expansion operation on the expand device (1) to expand the expand sheet (201). Additionally, the control unit (30) is a computer having an arithmetic processing unit having a microprocessor such as a CPU (central processing unit), a memory device having memory such as ROM (read only memory) or RAM (random access memory), and an input / output interface device. The arithmetic processing unit of the control unit (30) performs arithmetic processing according to a computer program stored in the memory device and outputs a control signal for controlling the expand device (1) to each component of the expand device (1) through the input / output interface device.

[0035] Additionally, the control unit (30) is connected to an unillustrated display unit, which is configured by a liquid crystal display device or the like to display the status of a processing operation or an image, and an unillustrated input unit used by an operator to register processing content information, etc. The input unit is configured by at least one of a touch panel installed in the display unit and an external input device such as a keyboard.

[0036] Next, an expanding method according to the first embodiment is described. The expanding method according to the first embodiment is a method of expanding an expanding sheet (201) to which a workpiece (200) having a modified layer (207) formed thereon is attached, thereby dividing the workpiece (200) into individual chips (202). The expanding method according to the first embodiment is implemented by a control unit (30) controlling each component of the expanding device (1), and, as shown in FIG. 4, comprises a holding step (1001), a sheet cooling step (1002), and a dividing step (1003).

[0037] (Maintenance phase)

[0038] The holding step (1001) is a step of holding the outer edge of the expanded sheet (201) to which the workpiece (200) is attached and the annular frame (210) attached to the outer edge of the expanded sheet (201) in the frame holding unit (12) of the expanded device (1). In the holding step (1001), the expanded device (1) extends the piston rod (19) of the lifting unit (14) to position the mounting surface (17) of the frame holding member (15) and the top of the expansion drum (13) on the same plane.

[0039] In the holding step (1001), the expanding device (1) places the annular frame (210) attached to the expanding sheet (201) and the outer edge of the expanding sheet (201) on the mounting surface (17) of the frame holding member (15). In the holding step (1001), the expanding device (1) clamps the annular frame (210) attached to the expanding sheet (201) and the outer edge of the expanding sheet (201) on the mounting surface (17) of the frame holding member (15) with a clamp (16) and fixes it to the frame holding member (15). At this time, the upper end of the expansion drum (13) is in contact with the area (215) between the inner edge of the annular frame (210) of the expand sheet (201) attached to the annular frame (210) maintained by the frame holding unit (12) and the outer edge of the workpiece (200).

[0040] (Sheet cooling stage)

[0041] FIG. 5 is a cross-sectional view schematically illustrating the sheet cooling step of the expand method illustrated in FIG. 4. The sheet cooling step (1002) is a step of cooling the region (215) between the inner edge of the annular frame (210) of the expand sheet (201) and the outer edge of the workpiece (200) so that the temperature becomes lower than the region (216) that is inside the outer edge of the workpiece (200) of the expand sheet (201).

[0042] In the first embodiment, during the sheet cooling step (1002), the expand device (1) sprays cooling air (23) of a first temperature from the first cooling air ejection hole (21) of the cooling unit (20) for a predetermined time, as shown in FIG. 5, toward the workpiece (200) attached to the annular frame (210) of the expand sheet (201) that is attached to the frame holding unit (12), i.e., the workpiece (200) attached to the expand sheet (201). In the first embodiment, during the sheet cooling step (1002), the expand device (1) cools the workpiece (200) to a first temperature through the workpiece (200), i.e., the workpiece (200) that is attached to the annular frame (210) that is attached to the expand sheet (201).

[0043] In addition, in the first embodiment, during the sheet cooling step (1002), the expand device (1), as shown in FIG. 5, simultaneously with the injection of cooling air (23) from the first cooling air injection hole (21) by the cooling unit (20), sprays cooling air (24) of a second temperature from the second cooling air injection hole (22) for a predetermined time toward the area (215) between the inner edge of the annular frame (210) of the expand sheet (201) attached to the annular frame (210) maintained by the frame holding unit (12) and the outer edge of the workpiece (200). In the first embodiment, during the sheet cooling step (1002), the expand device (1) cools the area (215) between the inner edge of the annular frame (210) of the expand sheet (201) and the outer edge of the workpiece (200) to a second temperature that is lower than the first temperature. Then, since the second temperature is lower than the first temperature, the area (215) inside the workpiece (200) is more likely to expand than the area (216) between the inner edge of the annular frame (210) and the outer edge of the workpiece (200).

[0044] (Division stage)

[0045] FIG. 6 is a cross-sectional view schematically illustrating the splitting step of the expand method illustrated in FIG. 4. The splitting step (1003) is a step of splitting the workpiece (200) into individual chips (202) by expanding the expand sheet (201) after performing the sheet cooling step (1002). In the first embodiment, in the splitting step (1003), the expand device (1) stops the injection of cooling air (23, 24) from the cooling unit (20), and as shown in FIG. 6, the piston rod (19) of the lifting unit (14) is retracted to lower the frame holding unit (12), thereby moving the frame holding unit (12) and the expansion drum (13) relative to each other in the vertical direction.

[0046] Then, because the area (215) between the inner edge of the annular frame (210) of the expand sheet (201) attached to the annular frame (210) maintained by the frame holding unit (12) and the outer edge of the workpiece (200) is in contact with the top of the expansion drum (13), the expand sheet (201) expands in the plane direction. In the splitting step (1003), as a result of the expansion, a radial tensile force is applied to the expand sheet (201).

[0047] In this way, when a radial tensile force is applied to the expanded sheet (201) attached to the back side (208) of the substrate (203) of the workpiece (200) via DAF (209), the area (216) inside the expanded sheet (201) is expanded more than the area (215) between the inner edge of the annular frame (210) of the expanded sheet (201) and the outer edge of the workpiece (200) because the second temperature is lower than the first temperature. In the first embodiment, in the splitting step (1003), the workpiece (200) is split into individual devices (206) with the modified layer (207) formed along the planned splitting line (205) as shown in FIG. 6, and is also split into individual chips (202), and the workpiece (200) is split along the modified layer (207), so the DAF (209) is also split along the modified layer (207).

[0048] In addition, in the first embodiment, the frame holding unit (12) is lowered to expand the expanded sheet (201) during the splitting step (1003), but the present invention is not limited thereto and may raise the expansion drum (13). In short, it is acceptable to raise the expansion drum (13) relative to the frame holding unit (12) and lower the frame holding unit (12) relative to the expansion drum (13). In this way, the first embodiment expands the expanded sheet (201) during the splitting step (1003) to divide the workpiece (200) into individual chips (202).

[0049] As described above, the expand device (1) according to the first embodiment is equipped with a cooling unit (20) that cools the region (216) inside the outer edge of the workpiece (200) of the expand sheet (201) to a first temperature, and cools the region (215) between the inner edge of the annular frame (210) of the expand sheet (201) and the outer edge of the workpiece (200) to a second temperature lower than the first temperature. For this reason, the expand device (1) according to the first embodiment can cool the region (215) between the inner edge of the annular frame (210) of the expand sheet (201) and the outer edge of the workpiece (200) at a low temperature, and can expand the expand sheet (201) while suppressing the elasticity of the region (215) between the inner edge of the annular frame (210) of the expand sheet (201) and the outer edge of the workpiece (200) more than the region (216) between the outer edge of the workpiece (200).

[0050] As a result, the expand device (1) according to the first embodiment can sufficiently expand the area (216) inside the workpiece (200) of the expand sheet (201) than the outer edge, thereby exhibiting the effect of suppressing the possibility of an undivided area being created in the workpiece (200) to a low degree.

[0051] In addition, the expanding method according to the first embodiment performs a sheet cooling step (1002) in which the area (216) inside the outer edge of the workpiece (200) of the expanded sheet (201) is cooled to a first temperature, and the area (215) between the inner edge of the annular frame (210) of the expanded sheet (201) and the outer edge of the workpiece (200) is cooled to a second temperature lower than the first temperature. This allows the area (216) inside the outer edge of the workpiece (200) of the expanded sheet (201) to be sufficiently expanded, thereby exhibiting the effect of suppressing the possibility of an undivided area being created in the workpiece (200) to a low level.

[0052] <Second Embodiment>

[0053] An expand device and an expand method according to a second embodiment of the present invention will be described based on the drawings. FIG. 7 is a perspective view illustrating an example of the configuration of an expand device according to the second embodiment. FIG. 8 is a plan view illustrating the sheet clamping unit and cooling table of the expand device shown in FIG. 7. FIG. 9 is a cross-sectional view illustrating the configuration of the cooling table of the expand device shown in FIG. 7. FIG. 10 is a cross-sectional view schematically illustrating the cooling step of the expand method according to the second embodiment. FIG. 11 is a cross-sectional view schematically illustrating the state before the expansion of the expand sheet in the division step of the expand method related to the second embodiment. FIG. 12 is a cross-sectional view schematically illustrating the state after the expansion of the expand sheet in the division step of the expand method according to the second embodiment. FIG. 13 is a cross-sectional view schematically illustrating the cooling table after the division step of the expand method according to the second embodiment. Additionally, FIG. 7 to FIG. 13 use the same reference numerals for parts identical to those in the first embodiment, so the description is omitted.

[0054] The expand device (1-2) according to the second embodiment is a device that expands the expand sheet (201) to which the workpiece (200) is attached in the first direction (212) and the second direction (213) to divide the workpiece (200) into individual chips (202) and divides the DAF (209) into individual chips (202). In addition, the expand device (1-2) is also a device that expands the expand sheet (201) to divide the workpiece (200) into individual chips (202), and then attaches an annular frame (210) to the expand sheet (201) to support the workpiece (200) within the opening (211) of the annular frame (210).

[0055] As shown in FIG. 7, the expand device (1-2) comprises a flat fixed base (31), a cooling unit (40), a workpiece conveying unit not shown, an expansion unit (60) which is an expansion mechanism, a frame conveying unit not shown, a sheet cutting unit not shown, and a control unit (100).

[0056] The cooling unit (40) is provided with a cooling table (41) installed in the center of a fixed base (31). As shown in FIG. 8, the cooling table (41) is formed with a planar shape that is rectangular (in the second embodiment, square), and an expanded sheet (201) with a DAF (209) attached is placed on the upper contact surface (42) which is clamped by the sheet clamping unit (61) of the expansion unit (60). That is, the cooling table (41) has a contact surface (42) that contacts the expanded sheet (201) clamped by the sheet clamping unit (61). The cooling table (41) is installed so as to be movable in the vertical direction by a moving mechanism. The contact surface (42) is formed flat along the horizontal direction and can accommodate a workpiece (200) through the expanded sheet (201). The workpiece (200) is placed on the contact surface (42) through the expanded sheet (201).

[0057] Additionally, in the second embodiment, the contact surface (42) of the cooling table (41) is composed of a first area (43) corresponding to the area where the workpiece (200) of the expanded sheet (201) is attached by the sheet clamping unit (61) as shown in FIGS. 8 and 9, and a second area (44) surrounding the first area (43) and corresponding to the area between the workpiece (200) of the expanded sheet (201) clamped by the sheet clamping unit (61) and the first clamping portion (62-1), second clamping portion (62-2), third clamping portion (62-3) and fourth clamping portion (62-4) of the sheet clamping unit (61) of the expansion unit (60).

[0058] The first region (43) is an area where the workpiece (200) of the expanded sheet (201) clamped by the sheet clamping unit (61) is attached to the area (217) (shown in FIG. 8), and in the second embodiment, it is formed at the center of the contact surface (42) and has a planar shape that is square (in the second embodiment, a square). In addition, the area (217) where the workpiece (200) of the expanded sheet (201) clamped by the sheet clamping unit (61) is attached corresponds to the area where the workpiece (200) of the expanded sheet (201) is attached.

[0059] The second area (44) is an area (217) to which the workpiece (200) of the expanded sheet (201) clamped by the sheet clamping unit (61) is attached, and an area (218) (shown in FIG. 8) between the first clamping portion (62-1), the second clamping portion (62-2), the third clamping portion (62-3), and the fourth clamping portion (62-4) of the sheet clamping unit (61) overlaps. In the second embodiment, it is installed on the outer edge of the contact surface (42) and is formed in the shape of a frame with inner and outer edges that are square (in the second embodiment, square). Additionally, the area (217) where the workpiece (200) of the expanded sheet (201) is attached by the sheet clamping unit (61), and the area (218) between the first clamping portion (62-1), the second clamping portion (62-2), the third clamping portion (62-3), and the fourth clamping portion (62-4) of the sheet clamping unit (61) are areas where the workpiece (200) of the expanded sheet (201) is not attached.

[0060] Additionally, as shown in FIG. 9, the cooling table (41) comprises a table base (45), a first Peltier element layer (46-1) disposed on the table base (45), a second Peltier element layer (46-2) disposed on the table base (45) and surrounding the outer edge of the first Peltier element layer (46-1), and a cooling plate (47) disposed on the Peltier element layers (46-1, 46-2). The planar shape of the table base (45) and the cooling plate (47) is the same as the planar shape of the cooling table (41). The upper surface of the cooling plate (47) is the aforementioned contact surface (42).

[0061] The first Peltier element layer (46-1) and the second Peltier element layer (46-2) each have at least one Peltier element to which power is supplied from the power circuit (48). The first Peltier element layer (46-1) is positioned below the first region (43) of the contact surface (42), and the second Peltier element layer (46-2) is positioned below the second region (44) of the contact surface (42).

[0062] The power circuit (48) is each equipped with a pair of polarity switching sections (49-1, 49-2). The power circuit (48), in which the polarity switching sections (49-1, 49-2) are equipped with a DC power source (50) and a switch (51), cools the contact surface (42), i.e., the region (43, 44), to a temperature lower than room temperature when power from the DC power source (50) of one polarity switching section (49-1) is supplied to the Peltier element layer (46-1, 46-2), and heats the contact surface (42), i.e., the region (43, 44), to a temperature higher than room temperature when power from the DC power source (50) of the other polarity switching section (49-2) is supplied to the Peltier element layer (46-1, 46-2).

[0063] One polarity switching unit (49-1) of the power circuit (48) that supplies power to the first Peltier element layer (46-1) supplies power of a first voltage to the first Peltier element layer (46-1) to cool the first region (43) to a first temperature. One polarity switching unit (49-1) of the power circuit (48) that supplies power to the second Peltier element layer (46-2) supplies power of a second voltage higher than the first voltage to the second Peltier element layer (46-2) to cool the second region (44) to a second temperature. In this way, the first region (43) of the contact surface (42) of the cooling table (41) is set to a first temperature, and the second region (44) is set to a second temperature lower than the first temperature.

[0064] The workpiece conveying unit is positioned above the sheet clamping unit (61) and also holds the workpiece (200) on its lower surface. The workpiece conveying unit is installed to be movable in the vertical direction by a lifting unit and is also installed to be movable in the horizontal direction by a horizontal movement unit. The workpiece conveying unit positions the workpiece (200) held on its lower surface to a position facing vertically with the first area (43) of the cooling table (41) by the horizontal movement unit. Additionally, the workpiece conveying unit is lowered by the lifting unit to attach the workpiece (200) to the DAF (209) on the expanded sheet (201) clamped by the sheet clamping unit (61).

[0065] The expansion unit (60) is equipped with a sheet clamping unit (61) that clamps the expand sheet (201) and a moving unit (70).

[0066] The sheet clamping unit (61) has a first clamping portion (62-1), a second clamping portion (62-2), a third clamping portion (62-3), and a fourth clamping portion (62-4). The first clamping portion (62-1), the second clamping portion (62-2), the third clamping portion (62-3), and the fourth clamping portion (62-4) clamp the outer side of the workpiece (200) of the expanded sheet (201) to which the workpiece (200) is attached.

[0067] The first clamping portion (62-1) and the second clamping portion (62-2) face each other with the workpiece (200) in between in the first direction (212) of the expanded sheet (201). The third clamping portion (62-3) and the fourth clamping portion (62-4) face each other with the workpiece (200) in between in the second direction (213) of the expanded sheet (201). Since the first clamping portion (62-1), the second clamping portion (62-2), the third clamping portion (62-3), and the fourth clamping portion (62-4) have roughly the same configuration, the same reference numerals are used to describe the same parts.

[0068] The first clamping section (62-1), the second clamping section (62-2), the third clamping section (62-3), and the fourth clamping section (62-4) each have a column-shaped movable base (63) installed on a fixed base (31), a pair of clamping members (64) installed to be movable in a vertical direction on the movable base (63), and a moving mechanism (65) that moves the pair of clamping members (64) in a direction that brings them closer together and in a direction that moves them apart from each other.

[0069] A moving mechanism (65) is installed on a moving base (63). The moving mechanism (65) comprises a motor that enables a pair of clamping members (64) to move vertically, a ball screw that rotates around an axis by the motor, and a nut that is screw-coupled to the ball screw and also connected to a pair of clamping members (64) and a support arm (66). The moving mechanism (65) moves the nut, the support arm (66), and the clamping members (64) vertically by the motor rotating the ball screw around an axis.

[0070] The moving mechanism (65) moves a pair of clamping members (64) in a direction that brings them closer together by rotating a ball screw around an axis by a motor, thereby clamping an expand sheet (201) between the pair of clamping members (64). The moving mechanism (65) releases the clamping of the expand sheet (201) between the pair of clamping members (64) by rotating a ball screw around an axis by a motor, thereby moving a pair of clamping members (64) in a direction that separates them from each other. Additionally, the moving mechanism (65) may move a pair of clamping members (64) in the same direction in the vertical direction by rotating a ball screw around an axis by a motor. Additionally, a moving base (63) having a pair of clamping members (64) and a moving mechanism (65) of each clamping part (62-1, 62-2, 62-3, 62-4) is installed on a fixed base (31) so as to be movable in a first direction (212) or a second direction (213).

[0071] The moving unit (70) is equipped with a first moving unit (71) and a second moving unit (72).

[0072] The first moving unit (71) moves the moving base (63) of the first clamping part (62-1) and the moving base (63) of the second clamping part (62-2) along the first direction (212), thereby moving the moving base (63) of the first clamping part (62-1) and the moving base (63) of the second clamping part (62-2) in a direction away from each other and in a direction closer to each other in the first direction (212). The first moving unit (71) also moves the moving base (63) of the first clamping part (62-1) and the moving base (63) of the second clamping part (62-2) along the first direction (212), thereby enabling the clamping member (64) of the first clamping part (62-1) and the clamping member (64) of the second clamping part (62-2) to move in close proximity and out of reach of each other in the first direction (212). The first moving unit (71) is equipped with a first moving mechanism (73-1) that moves the moving base (63) of the first clamping part (62-1) in the first direction (212), and a second moving mechanism (73-2) that moves the moving base (63) of the second clamping part (62-2) in the first direction (212).

[0073] The second moving unit (72) moves the moving base (63) of the third clamping part (62-3) and the moving base (63) of the fourth clamping part (62-4) along the second direction (213), thereby moving the moving base (63) of the third clamping part (62-3) and the moving base (63) of the fourth clamping part (62-4) in the second direction (213) in a direction away from each other and in a direction closer to each other. The second moving unit (72) also moves the moving base (63) of the third clamping part (62-3) and the moving base (63) of the fourth clamping part (62-4) along the second direction (213), thereby enabling the clamping member (64) of the third clamping part (62-3) and the clamping member (64) of the fourth clamping part (62-4) to move in close proximity and out of reach of each other in the second direction (213). The second moving unit (72) is equipped with a third moving mechanism (73-3) that moves the moving base (63) of the third clamping part (62-3) in the second direction (213), and a fourth moving mechanism (73-4) that moves the moving base (63) of the fourth clamping part (62-4) in the second direction (213).

[0074] The first moving mechanism (73-1), the second moving mechanism (73-2), the third moving mechanism (73-3), and the fourth moving mechanism (73-4) are described by assigning the same reference numerals to the same parts, as their configurations are roughly identical.

[0075] The first moving mechanism (73-1), the second moving mechanism (73-2), the third moving mechanism (73-3), and the fourth moving mechanism (73-4) each have a motor that enables the moving base (63) of the clamping portion (62-1, 62-2, 62-3, 62-4) to move in a first direction (212) or a second direction (213), and a ball screw that is rotated around the axis by the motor to move the moving base (63) in the first direction (212) or a second direction (213).

[0076] The first moving mechanism (73-1), the second moving mechanism (73-2), the third moving mechanism (73-3), and the fourth moving mechanism (73-4) expand the expand sheet (201) that is clamped by the clamping portions (62-1, 62-2, 62-3, 62-4) by moving the clamping portions (62-1, 62-2, 62-3, 62-4) in directions opposite to each other.

[0077] The frame conveyor unit is positioned above the sheet clamping unit (61) and holds the annular frame (210) on its lower surface. The frame conveyor unit is installed to be movable in the vertical direction by a lifting unit and is also installed to be movable in the horizontal direction by a horizontal movement unit not shown. The frame conveyor unit positions the annular frame (210) held on its lower surface by the horizontal movement unit so that the opening (211) of the annular frame (210) faces vertically the workpiece (200) attached to the expanded sheet (201) placed on the cooling table (41). Additionally, the frame conveyor unit attaches the annular frame (210) to the expanded sheet (201) by lowering it by the lifting unit.

[0078] The sheet cutting unit cuts the expanded sheet (201) attached to the annular frame (210) along the annular frame (210). After the annular frame (210) is attached to the expanded sheet (201), the sheet cutting unit cuts between the inner edge and the outer edge of the annular frame (210) of the expanded sheet (201).

[0079] The control unit (100) controls each component of the expand device (1-2) to perform the following operations on the expand device (1-2): the attachment of the workpiece (200) to the expand sheet (201), the expansion of the expand sheet (201), and the attachment of the annular frame (210) to the expand sheet (201). Additionally, the control unit (100) is a computer having an arithmetic processing unit having a microprocessor such as a CPU (central processing unit), a memory device having memory such as ROM (read only memory) or RAM (random access memory), and an input / output interface device. The arithmetic processing unit of the control unit (100) performs arithmetic processing according to a computer program stored in the memory device and outputs a control signal for controlling the expand device (1-2) to each component of the expand device (1-2) through the input / output interface device.

[0080] Additionally, the control unit (100) is connected to an unillustrated display unit, which is configured by a liquid crystal display device or the like to display the status of a processing operation or an image, and an unillustrated input unit used by an operator to register processing content information, etc. The input unit is configured by at least one of a touch panel installed in the display unit and an external input device such as a keyboard.

[0081] The expanding method according to the second embodiment is a method of expanding an expanding sheet (201) to which a workpiece (200) having a modified layer (207) formed is attached, thereby dividing the workpiece (200) into individual chips (202). The expanding method according to the second embodiment is implemented by a control unit (100) controlling each component of an expanding device (1-2), and, as in the first embodiment, comprises a holding step (1001), a sheet cooling step (1002), and a dividing step (1003).

[0082] In the second embodiment, the holding step (1001) is a step of holding the expanded sheet (201) by holding it with the sheet holding unit (61) of the expanded device (1-2). In the second embodiment, in the holding step (1001), the expanded sheet (201) with the DAF (209) attached is placed on the contact surface (42) of the cooling table (41), and the expanded device (1-2) holds the expanded sheet (201) placed on the contact surface (42) of the cooling table (41) with each holding part (62-1, 62-2, 62-3, 62-4) of the sheet holding unit (61). In the second embodiment, in the holding step (1001), the workpiece (200) is attached to the DAF (209) of the expanded sheet (201) which is clamped by each clamping part (62-1, 62-2, 62-3, 62-4) of the sheet clamping unit (61) by the workpiece conveying unit.

[0083] In the second embodiment, the sheet cooling step (1002) is performed by the expanded sheet (201) coming into contact with the contact surface (42) of the cooling table (41). In the second embodiment, during the sheet cooling step (1002), the expanded device (1-2), as shown in FIG. 10, has a polarity switching unit (49-1) of one side of the power circuit (48) supply power of a first voltage to the first Peltier element layer (46-1) to cool the first region (43) to a first temperature, and a polarity switching unit (49-1) of one side of the power circuit (48) supplies power of a second voltage to the second Peltier element layer (46-2) to cool the second region (44) to a second temperature.

[0084] Thus, in the second embodiment, in the sheet cooling step (1002), the expand device (1-2) cools the area (217) where the workpiece (200) of the expanded sheet (201) is attached to the first temperature, where the first area (43) of the contact surface (42) is set to the first temperature and the second area (44) is set to the second temperature, and cools the area (218) between the area (217) where the workpiece (200) of the expanded sheet (201) is attached to the sheet clamping unit (61) and the clamping portions (62-1, 62-2, 62-3, 62-4) to the second temperature. In this way, in the second embodiment, during the sheet cooling step (1002), the expand device (1-2) cools the area (218) between the area (217) where the workpiece (200) of the expanded sheet (201) is attached and the area (218) between the clamping portions (62-1, 62-2, 62-3, 62-4) and the area (217) where the workpiece (200) of the expanded sheet (201) is attached is lower than the area (217) where the workpiece (200) of the expanded sheet (201) is attached by the sheet clamping unit (61).

[0085] In the second embodiment, in the splitting step (1003), the expand device (1-2) expands the expand sheet (201) in the first direction (212) by moving the first clamping part (62-1) and the second clamping part (62-2) in a direction separated from each other in the first direction (212) by the first moving unit (71) in the state shown in FIG. 11, and expands the expand sheet (203) in the second direction (213) by moving the third clamping part (62-3) and the fourth clamping part (62-4) in a direction separated from each other in the second direction (213) by the second moving unit (72).

[0086] In this way, in the splitting step (1003), as a result of the expansion, the expanded sheet (201) is subjected to radial tensile force, and since the second temperature is lower than the first temperature, the area (217) to which the workpiece (200) of the expanded sheet (201) is attached is expanded beyond the area (218) between the area (217) to which the workpiece (200) of the expanded sheet (201) is attached and the clamping portions (62-1, 62-2, 62-3, 62-4) of the expanded sheet (201). In the second embodiment, in the splitting step (1003), since the modified layer (207) is formed along the planned splitting line (205), the workpiece (200) is split into individual devices (206) with the modified layer (207) as the starting point for the splitting, and is also split into individual chips (202). Since the workpiece (200) is split along the modified layer (207), the DAF (209) is also split along the modified layer (207).

[0087] After the splitting step (1003), the expand device (1-2) attaches an annular frame (210) to the expanded sheet (201) expanded by the frame return unit, and cuts between the inner edge and the outer edge of the annular frame (210) of the expanded sheet (201) by the sheet cutting unit, so that the workpiece (200) is discharged from each expanded sheet (201) and annular frame (210). After the workpiece (200) is removed, the expand device (1-2), as shown in FIG. 13, has the polarity switching unit (49-2) of the other side of the power circuit (48) supply power to the first Peltier element layer (46-1) to heat the first region (43) to room temperature, and the polarity switching unit (49-2) of the other side of the power circuit (48) supply power to the second Peltier element layer (46-2) to heat the second region (44) to room temperature.

[0088] The expand device (1-2) according to the second embodiment is equipped with a cooling unit (40) that cools the area (217) to which the workpiece (200) of the expand sheet (201) is attached to a first temperature, and cools the area (218) between the area (217) to which the workpiece (200) of the expand sheet (201) is attached and the clamping portion (62-1, 62-2, 62-3, 62-4) to a second temperature lower than the first temperature. For this reason, the expand device (1) according to the second embodiment can cool the area between the area where the workpiece (200) of the expand sheet (201) is attached and the clamping portion (62-1, 62-2, 62-3, 62-4) at a low temperature compared to the area where the workpiece (200) of the expand sheet (201) is attached.

[0089] As a result, the expand device (1-2) according to the second embodiment, just like the first embodiment, can sufficiently expand the area (217) to which the workpiece (200) of the expand sheet (201) is attached, thereby exhibiting the effect of suppressing the possibility of an undivided area on the workpiece (200) to be created.

[0090] In addition, the expanding method according to the second embodiment performs a sheet cooling step (1002) in which the area (217) to which the workpiece (200) of the expanded sheet (201) is attached is cooled to a first temperature, and the area (218) between the area (217) to which the workpiece (200) of the expanded sheet (201) is attached and the clamping portion (62-1, 62-2, 62-3, 62-4) is cooled to a second temperature lower than the first temperature. This allows the area to be sufficiently expanded so that the possibility of an undivided area of ​​the workpiece (200) being created on the expanded sheet (201) can be suppressed to a low level.

[0091] <Variation Example>

[0092] An expand device according to a modified example of the second embodiment of the present invention will be described based on the drawings. FIG. 14 is a cross-sectional view showing the configuration of a cooling table of an expand device according to a modified example of the second embodiment. In addition, FIG. 14 omits descriptions by assigning the same reference numerals to parts identical to those in the second embodiment.

[0093] The expand device (1-2) according to the second embodiment is identical to the second embodiment except that the configuration of the cooling table (41-1) is different. As shown in FIG. 14, the cooling table (41-1) of the expand device (1-2) according to the second embodiment has only one Peltier element layer (46) having at least one Peltier element supplied with power from a power circuit (48) placed on the table base (45), and the cooling plate (47) is composed of a first cooling plate (47-1) and a second cooling plate (47-2).

[0094] The planar shape of the Peltier element layer (46) is the same as the planar shape of the cooling table (41-1). The power circuit (48) has a pair of polarity switching sections (49-1, 49-2), as in the second embodiment.

[0095] The first cooling plate (47-1) has an upper surface that is the first region (43) and is composed of resin. The second cooling plate (47-2) has an upper surface that is the second region (44) and is composed of metal, which is a material with a higher thermal conductivity (i.e., easier to transfer heat) than the resin that constitutes the first cooling plate (47-1).

[0096] The cooling table (41-1) cools the contact surface (42), i.e., the region (43, 44), to a temperature lower than room temperature when the power circuit (48) supplies power from the DC power source (50) of the polarity switching section (49-1) to the Peltier element layer (46), and heats the contact surface (42), i.e., the region (43, 44), to a temperature higher than room temperature when the DC power source (50) of the polarity switching section (49-2) is supplied to the Peltier element layer (46-1, 46-2).

[0097] Additionally, when the power circuit (48) supplies power from the DC power source (50) of one polarity switching section (49-1) to the Peltier element layer (46), the cooling table (41-1) cools the first region (43) to a first temperature and cools the second region (44) to a second temperature. In this way, the first region (43) of the contact surface (42) of the cooling table (41-1) shown in FIG. 14 is set to a first temperature, and the second region (44) is set to a second temperature that is lower than the first temperature.

[0098] The expand device (1-2) according to the modified example has a cooling unit (40) that cools the area (217) to which the workpiece (200) of the expand sheet (201) is attached to a first temperature, and cools the area (218) between the area (217) to which the workpiece (200) of the expand sheet (201) is attached and the clamping portion (62-1, 62-2, 62-3, 62-4) to a second temperature lower than the first temperature. Therefore, as in the second embodiment, it has the effect of suppressing the possibility of an undivided area being created on the workpiece (200) to a low level.

[0099] In addition, in the present invention, the cooling table (41-1) of the modified example may be configured such that it is equipped with a cooling plate (47) similar to that of the first embodiment, and an insulating material is installed between the cooling plate (47) below the first region (43) and the Peltier element layer (46), and an insulating material is not installed between the cooling plate (47) below the second region (44) and the Peltier element layer (46).

[0100] Furthermore, the present invention is not limited to the above embodiments. That is, it can be implemented with various modifications within the scope of not deviating from the gist of the present invention. In the above embodiments, a workpiece (200) with a DAF (209) attached to the back surface (208) or a workpiece (200) with a metal film (214) formed on the back surface (208) is divided into individual chips (202), but it is not limited thereto. For example, the present invention may have a workpiece (200) attached to an expanded sheet (201) divided into individual chips (202) in advance and a DAF (209) attached to the back surface (208), and the expanded sheet (201) expanded to divide the DAF (209) into each chip (202). Explanation of the symbols

[0101] 1, 1-2 Expand device 10,60 expansion units (expansion mechanisms) 20,40 cooling units 41,41-1 Cooling table 42 contact surface 43 Area 1 44 Second Area 61 Sheet Clamping Unit 62-1 Section 1 62-2 Section 2 (Corner) 62-3 3rd Branch 62-4 Section 4 71 1st Mobile Unit 72 Second Mobile Unit 200 workpiece 201 Expand Seat (Seat) 207 Modified layer (dividing point) 212 First direction 213 Second direction Areas 215, 218 (areas where the workpiece is not bonded) Areas 216, 217 (areas where the workpiece is bonded) 1002 Sheet Cooling Stage 1003 Partitioning Step

Claims

Claim 1 An expand device for dividing a workpiece by expanding a sheet to which a workpiece is attached, wherein the outer edge of the workpiece is supported by a sheet mounted on the annular frame and a dividing point is formed, the device comprises: a frame retaining unit having a frame retaining member on which the annular frame is mounted on an upper surface; an expansion mechanism for expanding the sheet; and a cooling unit for cooling an area of ​​the sheet where the workpiece is not attached to the sheet to a lower temperature than the area where the workpiece is attached to the sheet. The cooling unit comprises a first cooling air ejection hole arranged facing the workpiece in a disc shape with an outer diameter equal to the inner diameter of the frame retaining member, which faces the workpiece attached to the sheet and sprays cooling air at a first temperature lower than room temperature toward the workpiece; and a second cooling air at a second temperature lower than the first temperature which faces the area of ​​the sheet where the workpiece is not attached. An expand device having a second cooling spray hole that sprays toward an area that is not adhered. Claim 2 An expand device for dividing a workpiece by expanding a sheet to which a workpiece having a dividing point formed thereon is attached, comprising: an expansion mechanism for expanding the sheet; and a cooling unit for cooling an area of ​​the sheet to which the workpiece is not attached to become lower in temperature than the area to which the workpiece is attached to the sheet. The expansion mechanism comprises: a sheet clamping unit having a first clamping part and a second clamping part that are opposite each other with the workpiece in between in a first direction and clamp the sheet, and a third clamping part and a fourth clamping part that are opposite each other with the workpiece in between in a second direction orthogonal to the first direction and clamp the sheet, respectively; a first moving unit for moving the first clamping part and the second clamping part in a direction diverging from each other in the first direction; and a second moving unit for moving the third clamping part and the fourth clamping part in a direction diverging from each other in the second direction. The cooling unit is to the sheet clamping unit An expand device having a cooling table that cools the sheet and has a contact surface that contacts the sheet that is clamped, wherein the contact surface comprises a first region corresponding to an area where a workpiece is attached, and a second region surrounding the first region and corresponding to an area between the workpiece and the first, second, third, and fourth clamping portions, and wherein the cooling table comprises a first Peltier element layer that overlaps the first region and a second Peltier element layer that overlaps the second region and is supplied with power independently of the first Peltier element layer, wherein power of a first voltage is supplied to the first Peltier element layer so that the first region is set to a first temperature, and power of a second voltage higher than the first voltage is supplied to the second Peltier element layer so that the second region is set to a second temperature lower than the first temperature. Claim 3 An expanding method for dividing a workpiece by expanding a sheet to which a workpiece is attached, wherein a dividing point is formed and the outer edge of the workpiece is supported by a sheet mounted on the annular frame, the expanding method comprises: a sheet cooling step of cooling the area of ​​the sheet where the workpiece is not attached to the sheet to a lower temperature than the area where the workpiece is attached to the sheet; and a dividing step of expanding the sheet to divide the workpiece after performing the sheet cooling step. The sheet cooling step comprises injecting cooling air at a first temperature lower than room temperature toward the workpiece from a first cooling air ejection hole facing the workpiece attached to the sheet of a cooling unit arranged facing the workpiece in a disc shape with an outer diameter equal to the inner diameter of a frame retaining member on which the annular frame is mounted on the upper surface, and a second cooling air at a second temperature lower than the first temperature from a second cooling ejection hole facing the area of ​​the sheet where the workpiece is not attached to the sheet of the cooling unit. An expanding method of spraying cooling air at a certain temperature toward an area of ​​the sheet where the workpiece is not adhered. Claim 4 An expanding method for dividing a workpiece by expanding a sheet to which a workpiece having a dividing point formed thereon is attached comprises: a sheet cooling step of cooling an area of ​​the sheet to which the workpiece is not attached so that it becomes lower in temperature than the area to which the workpiece is attached; and a dividing step of expanding the sheet to divide the workpiece after performing the sheet cooling step. The sheet cooling step is performed by contacting a cooling table to the sheet. The cooling table has a contact surface comprising a first area corresponding to the area to which the workpiece is attached, and a second area surrounding the first area and corresponding to the area between the workpiece and the first, second, third, and fourth clamping portions. The cooling table has a first Peltier element layer that overlaps the first area and a second Peltier element layer that overlaps the second area and is supplied with power independently of the first Peltier element layer. Power of a first voltage is supplied to the first Peltier element layer, so that the first area reaches a first temperature. An expanding method, wherein power of a second voltage higher than the first voltage is supplied to the second Peltier element layer, so that the second region is set to a second temperature lower than the first temperature, and in the dividing step, the first clamping part and the second clamping part, which are opposite each other with the workpiece in between in the first direction and clamp the sheet, are moved in a direction diverging from each other in the first direction, and the third clamping part and the fourth clamping part, which are opposite each other with the workpiece in between and clamp the sheet, are moved in a direction diverging from each other in the second direction orthogonal to the first direction, thereby expanding the sheet.

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