Apparatus and method for self-assembly of probes for semiconductor inspection

Abstract

The present invention relates to a self-assembly device and method for a semiconductor inspection probe. The semiconductor inspection probe self-assembly device according to the present invention comprises a chamber forming a flow space, a probe guide fixed to one side of a flow path within the chamber and having a plurality of holes into which a probe is inserted, and a flow supply unit that generates a flow of a liquid mixed with the probe within the chamber. The flow of the liquid mixed with the probe is formed toward the probe guide by the flow supply unit, and the probe is inserted into the holes and self-assembled while the liquid flows through the holes.

Description

Technology Field

[0001] The present invention relates to a self-assembly apparatus and method for semiconductor testing probes, and more specifically, to a self-assembly apparatus and method for semiconductor testing probes in which a plurality of probes are inserted into holes of a probe guide and assembled to produce a probe card in which a plurality of probes that contact pads or bumps on a wafer for testing the electrical characteristics of a semiconductor chip are fixedly arranged. Background Technology

[0002] Semiconductor chips must be inspected for defects at every process stage to increase yield, and electrical testing is performed using probe cards on the wafer before packaging. Based on the inspection results, only good chips are packaged, and after packaging, electrical testing is performed using sockets.

[0003] A probe card contains multiple probes that contact pads or bumps on a wafer to test the electrical characteristics of a semiconductor chip, and these probes are supported and aligned by precision-machined probe guides. With recent advancements in chiplet technology that have reduced the pitch between probes to the micrometer level, the importance of the process for precisely assembling probes to the probe guides is increasing.

[0004] Conventionally, for probe assembly, operators have manually inserted fine probes into holes in probe guides using tweezers or utilized automated equipment employing robot arms and grippers. However, conventional methods have the following problems.

[0005] With the advancement of chiplet technology, the pitch between probes is at the level of 5μm to 10μm, and the length of one side of the hole in the probe guide is also extremely fine, at the level of approximately 3μm to 8μm. Although the probes have a fine pitch, their length is very long relative to one side of their cross-section (even for probes with a pitch of 5 to 10μm, i.e., a side length of 3 to 8μm, they have a maximum length of 1mm). Consequently, it is virtually impossible to precisely grasp a probe of this size and accurately insert it into the hole of the probe guide using human hands or general tools, and there is a very high risk of damage to the probe or probe guide during operation.

[0006] Even when using a robotic gripper, ultra-precision control technology is required to stably grasp probes at the level of several micrometers, align them at precise positions and angles, and insert them into the minute holes of probe guides. Minor misalignment or failure in force control can cause probe buckling, breakage, or damage to the probe guide holes, thereby reducing assembly yield.

[0007] Since the probe is not perfectly symmetrical, it must be inserted and aligned in a consistent direction; however, due to the probe's minute size, it may be assembled differently horizontally or vertically. To prevent this, the probe's cross-section is made rectangular rather than square, allowing it to be assembled into a rectangular hole in a consistent direction. In this case, the aforementioned problems may be exacerbated when the task is performed by human hands or a robot.

[0008] Furthermore, probe cards must be assembled in a form where hundreds to tens of thousands of probes are arranged. Assembling each probe individually by robot results in excessively long process times, while attempting parallel assembly can lead to interference issues between multiple robot grippers and the accumulation of alignment errors, potentially causing complexity to increase exponentially.

[0009] Furthermore, high-precision probe cards often use two probe guides—an upper probe guide and a lower probe guide—to increase the alignment accuracy and stability of the probe. In this case, the probe must accurately pass through both the hole in the upper probe guide and the hole in the lower probe guide simultaneously. This is an extremely difficult task for manual or robot-based assembly methods, and even a minute alignment error between the two probe guides can make assembly impossible or damage the probe. Prior art literature

[0010] Republic of Korea Registered Patent No. 10-1712367 The problem to be solved

[0011] The problem that the present invention aims to solve is to provide a semiconductor inspection probe self-assembly device and method that align probes by self-assembling them in parallel into holes of a probe guide in a non-contact manner using the flow of a liquid mixed with probes.

[0012] The problems that the present invention aims to solve are not limited to those mentioned above, and other unmentioned problems will be clearly understood by those skilled in the art to which the present invention belongs from the description below. means of solving the problem

[0013] The above objective can be achieved by a semiconductor inspection probe self-assembly device according to the present invention, comprising: a chamber forming a flow space; a probe guide fixed on one side of a flow path within the chamber and having a plurality of holes into which a probe is inserted; and a flow supply unit that generates a flow of a liquid mixed with the probe within the chamber, wherein the flow of the liquid mixed with the probe is formed toward the probe guide by the flow supply unit, and the probe is inserted into the holes and self-assembled while the liquid flows through the holes.

[0014] Here, a stopper may be formed at one end of the probe that protrudes radially outward and hooks onto the top of the hole to secure it.

[0015] A semiconductor testing probe self-assembly device characterized in that, here, the center of gravity of the probe is formed on the side of the probe's other end that contacts the semiconductor electrode.

[0016] Here, a hole may be formed in the probe or the cross-sectional structure may be changed in the axial direction so that the center of gravity of the probe is formed on the other end of the probe.

[0017] Here, a flow supply port into which the liquid mixed with the probe is introduced is formed on one side of the chamber, and a discharge port into which the liquid passing through the hole is discharged can be formed on the other side of the chamber.

[0018] Here, the fluid supply unit may include a syringe pump that supplies liquid into the chamber to generate flow.

[0019] Here, a probe supply unit may be further included to inject and mix the probe into a path through which liquid is supplied from the syringe pump toward the chamber.

[0020] Here, the probe guide may be formed with an upper probe guide and a lower probe guide spaced apart vertically.

[0021] Here, the chamber is separably coupled to a lower chamber and an upper chamber, and a support projection is formed on one side of the interior of the lower chamber to protrude inward and support the edge of the lower probe guide, and further includes a ring-shaped gap-forming jig positioned on the upper side of the lower probe guide to form a gap between the lower probe guide and the upper probe guide, and a pressure projection may be formed on one side of the interior of the upper chamber to protrude inward and press the edge of the upper probe guide when the lower chamber and the upper chamber are coupled.

[0022] Here, it is preferable that the liquid is an organic solvent with low surface tension and volatility.

[0023] Here, the liquid may be any one of acetone, toluene, or isopropyl alcohol.

[0024] In addition, the above objective can be achieved by a method for self-assembling a probe for semiconductor testing, characterized in that, according to the present invention, the method comprises the steps of: mounting a probe guide having a plurality of holes formed therein, into which a probe is inserted through, on one side of a flow path within a chamber forming a flow space; and forming a flow of a liquid mixed with the probe within the chamber toward the probe guide, such that while the liquid flows through the holes, the probe is inserted into the holes and self-assembled.

[0025] Here, the probe can be pre-mixed into the liquid to form a flow of the liquid mixed with the probe.

[0026] Here, the probe can be injected into the path where the liquid flows to form a flow of the liquid mixed with the probe. Effects of the invention

[0027] As described above, according to the semiconductor inspection probe self-assembly apparatus and method of the present invention, an extremely fine probe for a probe card having a pitch of 5 μm to 10 μm can be effectively inserted into a hole of a probe guide in a self-assembly manner without damage by utilizing the flow of a liquid, thereby having the advantage of overcoming the limitations of existing manual or robotic methods.

[0028] In addition, the probe propelled by fluid flow can be inserted through the holes of two aligned probe guides, which has the advantage of solving the difficult probe assembly problem associated with dual probe guides.

[0029] In addition, since the probe is inserted and assembled using a non-contact method utilizing liquid, it has the advantage of minimizing micro-damage and contamination of the probe or probe guide caused by mechanical contact.

[0030] In addition, it is possible to self-assemble multiple probes in parallel simultaneously, which has the advantage of significantly improving the productivity of probe card manufacturing.

[0031] In addition, it has the advantage of being easy to automate the entire assembly process and enabling the establishment of an unmanned self-assembly system.

[0032] In addition, it has the advantage of increasing probe card manufacturing yield and reducing costs by decreasing the defect rate that occurs during self-assembly.

[0034] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description of the invention or the claims. Brief explanation of the drawing

[0035] FIG. 1 is a configuration diagram of a semiconductor inspection probe self-assembly device according to one embodiment of the present invention. Figure 2 is a separated cross-sectional view of the chamber and probe guide in Figure 1. FIG. 3 is a side view of a probe according to one embodiment of the present invention. FIG. 4 is a drawing illustrating the process of a probe being inserted into a hole of a probe guide and assembled by the flow of a liquid according to the present invention. Figure 5 is a drawing illustrating the assembled appearance with the probe inserted into the hole of the probe guide according to Figure 4. Figure 6 is a configuration diagram illustrating a variation of Figure 1. FIG. 7 is a flowchart of a method for self-assembling a semiconductor test probe according to one embodiment of the present invention. Specific details for implementing the invention

[0036] Specific details of the embodiments are included in the detailed description and drawings.

[0037] The advantages and features of the present invention and the methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but may be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Throughout the specification, like reference numerals refer to like components.

[0038] Hereinafter, the present invention will be described with reference to the drawings illustrating a semiconductor inspection probe self-assembly apparatus and method according to embodiments of the present invention.

[0039] FIG. 1 is a configuration diagram of a semiconductor inspection probe self-assembly device according to an embodiment of the present invention, FIG. 2 is a separated cross-sectional view of the chamber and probe guide in FIG. 1, FIG. 3 is a side view of a probe according to an embodiment of the present invention, FIG. 4 is a diagram illustrating the process of a probe being inserted into a hole of a probe guide and assembled by the flow of a liquid according to the present invention, FIG. 5 is a diagram illustrating the appearance of a probe inserted into a hole of a probe guide and assembled according to FIG. 4, and FIG. 6 is a configuration diagram illustrating a modified example of FIG. 1.

[0040] For reference, the shape illustrated in the drawing is intended to explain the concept of the present invention and may differ from the actual implemented configuration and the ratio of its size. For example, the size of the hole (122) of the probe guide (120) may be much smaller than illustrated, and the number of holes (122) may be much greater than illustrated. Furthermore, the capacity and size of the syringe pump (132) relative to the size of the chamber (110) may also be much larger than illustrated.

[0041] A semiconductor inspection probe self-assembly device (100) according to one embodiment of the present invention may be configured to include a chamber (110), a probe guide (120), and a fluid supply unit (130).

[0042] The chamber (110) forms a flow space through which the liquid mixed with the probe (200) flows. As illustrated, a flow supply port (116) is formed at the top, which is one side of the chamber (110), through which liquid is introduced, so that liquid is introduced into the chamber (110) at a predetermined speed and pressure, and a discharge port (117) is formed at the bottom, which is the other side of the chamber (110), so that the liquid introduced into the chamber (110) can be discharged to the outside of the chamber (110). Accordingly, in this embodiment, as the liquid introduced into the chamber (110) through the flow supply port (116) formed at the top is discharged through the discharge port (117) formed at the bottom of the chamber (110), a flow of liquid from the top to the bottom can be formed inside the chamber (110).

[0043] In this embodiment, the chamber (110) can be separated into an upper chamber (110a) and a lower chamber (110b).

[0044] A probe guide (120) is fixed to one side of the flow path within the chamber (110), and a plurality of holes (122) into which a probe (200) is inserted may be formed across the front surface at a predetermined pitch. For example, the pitch between the holes (122) may be 5 μm to 10 μm, and the length of the side forming the holes (122) may be 3 μm to 8 μm, but is not necessarily limited thereto. For reference, the holes (122) may be rectangular in shape, and as described below, the cross-section of the probe (200) inserted into the holes (122) may also be rectangular in shape, but is not necessarily limited thereto. For example, the number of holes (122) formed in the probe guide (120) may be hundreds to tens of thousands.

[0045] The probe guide (120) may be formed as a single unit. Alternatively, as illustrated, it may be formed as two units, an upper probe guide (120a) and a lower probe guide (120b) spaced apart vertically. Thus, since the probe guides (120a, 120b) support the probe (200) at two points spaced apart vertically, the probe (200) can be supported more stably.

[0046] Below, we will describe the structure for fixing the upper and lower probe guides (120a, 120b) inside the chamber (110).

[0047] A discharge port (117) is formed at the bottom of the lower chamber (110b), and the top may be open. A support ridge (112) protruding inward may be formed on one side of the flow direction of the inner surface of the lower chamber (110b). Thus, a lower probe guide (120b) can be inserted into the lower chamber (110b) and seated on the support ridge (112).

[0048] The gap forming jig (115) can be inserted into the lower chamber (110b) and positioned above the lower probe guide (120b). An upper probe guide (120a) can be positioned above the gap forming jig (115). Thus, since the upper probe guide (120a) and the lower probe guide (120b) are positioned above and below the gap forming jig (115), the gap forming jig (115) can form a gap between the upper and lower probe guides (120a, 120b). The gap forming jig (115) is formed in a ring shape so that liquid can pass through the hollow.

[0049] It is preferable to place a ring-shaped O-ring (not shown) on the upper or lower surface of the gap forming jig (115) to block liquid from flowing downward through a path other than the hollow of the gap forming jig (115).

[0050] Accordingly, since the probe guides (120a, 120b) are arranged to fill one cross-section of the chamber (110) in the direction of flow, when liquid flows from the top to the bottom inside the chamber (110), the liquid can pass through only the holes (122) of the probe guides (120).

[0051] A pressure projection (114) may be formed on one side of the interior of the upper chamber (110a), protruding inward to press the upper edge of the upper probe guide (120a) when the lower chamber (110b) and the upper chamber (110a) are joined together.

[0052] Accordingly, when the upper chamber (110a) is coupled to the lower chamber (110b), the pressure jaw (114) presses the upper edge of the upper probe guide (120a), so that the upper probe guide (120a) and the lower probe guide (120b) can be fixedly positioned inside the chamber (110) while maintaining a certain gap by means of the gap forming jig (115).

[0053] The flow supply unit (130) generates a flow of liquid mixed with probes (200) within the chamber (110). For example, the flow supply unit (130) may be configured to include a syringe pump (132) that supplies liquid into the chamber (110) to generate a flow. At this time, a liquid in which a plurality of probes (200) are pre-mixed is supplied into the syringe pump (132), and the syringe pump (132) can generate a flow of liquid toward the probe guide (120) inside the chamber (110) at a predetermined pressure and speed.

[0054] A tube through which liquid flows may be formed between the syringe pump (132) and the flow supply port (116) of the chamber (110). Additionally, although not illustrated, the flow supply unit (130) may further include a mass flow controller (MFC) or a pressure regulator to precisely control flow characteristics.

[0055] Additionally, the flow supply unit (130) may further include a liquid storage tank (134) that stores liquid discharged outside the chamber (110) through the discharge port (117) by the flow.

[0056] In the drawing, the liquid mixed with the probe (200) is supplied into the chamber (110) through a single number of flow supply ports (116), but it may also be configured to supply the liquid mixed with the probe (200) simultaneously or selectively through multiple flow supply ports (116).

[0057] When the probe (200) generates a flow of mixed liquid toward the probe guide (120), as shown in FIG. 4, the orientation of the probe (200) is aligned and accelerated by the flow of the liquid passing through the hole (122) formed in the probe guide (120), so that it can be inserted into the hole (122) and self-assembled as if an arrow were embedded in a target. Therefore, in the present invention, the probe (200) can be self-assembled in parallel into the hole (122) of the probe guide (120) in a non-contact manner using the flow of liquid.

[0058] As shown in FIG. 3, a stopper (205) protruding radially outward can be formed at one end of the probe (200). Accordingly, when the probe (200) is inserted into the hole (122) of the probe guide (120) and self-assembled by the flow of liquid, the stopper (205) catches on the top of the hole (122) and serves to mechanically fix the probe (200).

[0059] Additionally, the stopper (205) can serve to enable stable movement without disturbance within the flow, similar to the fletching of an arrow. Therefore, it is preferable that the stopper (205) be formed symmetrically on both sides of the body of the probe (200). The probe (200) may have a rectangular cross-section, and when the length of one side of the cross-section of the probe (200) is about 3 to 8 μm, the stopper (205) may protrude to a size of about 0.5 to 1 μm.

[0060] Additionally, the probe (200) has a long shape in one direction, and it is preferable that the center of gravity be formed on the other end side (head portion) of the probe (200) that contacts the semiconductor electrode. The other end side of the probe (200) may be formed to be relatively heavier than the end side where the stopper (205) is formed. To this end, so that the weight of the end side where the stopper (205) is formed can be relatively lighter, a hole (202) for reducing weight may be formed on the end side of the probe (200) where the stopper (205) is formed, or the cross-sectional structure may be changed in the axial direction. The hole (202) may be formed in the axial direction inside the probe (200) or may be formed on the outer surface of the probe (200).

[0061] The center of gravity characteristic of such a probe (200) functions like the arrowhead of an arrow, allowing the probe (200) to stably align itself in a specific direction (so that the head faces forward) within the flow and to be advantageously self-assembled by the flow of the liquid.

[0062] The other end of the probe (200) may be a curved shape that is slightly bent to one side rather than a straight line so that it can be easily deformed in one direction when in contact with the electrode. However, since the center of gravity of the probe (200) is located towards the head, it does not significantly affect the movement of the probe (200) like an arrow within the flow of liquid.

[0063] At this time, it is preferable that the liquid forming the flow be an organic solvent with low surface tension and volatility. For example, the liquid may be any one of acetone, toluene, or isopropyl alcohol. Thus, the low surface tension allows the liquid to easily pass through the micro-hole (122) formed in the probe guide (120) to generate flow, the surface tension of the liquid prevents the probe (200) from sticking to the surface of the probe guide (120), and the volatility allows the liquid to be easily removed after assembly of the probe (200).

[0064] FIG. 6 illustrates a modified example of the semiconductor inspection probe self-assembly device (100) described above with reference to FIG. 1 to 5. In the above embodiment, the probe (200) is supplied in a state mixed with liquid inside the syringe pump (132) to form a flow, but in this embodiment, the remaining configuration is the same except that the probe (200) is supplied along the path where the liquid is supplied inside the chamber (110) by the syringe pump (132) and mixed with the liquid.

[0065] Accordingly, in this embodiment, the flow supply unit (130) may further include a probe supply unit (140) for injecting a probe (200) into a path where liquid is supplied from a syringe pump (132) toward the chamber (110) and flows. The probe supply unit (140) may be connected to one side of a tube connecting the syringe pump (132) and the flow supply port (116) to supply the probe (200) to the flowing liquid.

[0066] In this case, the probe (200) can be supplied to and mixed with the liquid while the liquid is supplied by the flow of the liquid by the series pump (132) to wet the probe guide (120).

[0067] FIG. 7 is a flowchart of a method for self-assembling a semiconductor test probe according to one embodiment of the present invention.

[0068] A method for self-assembling a semiconductor inspection probe according to one embodiment of the present invention may include the step (S310) of mounting a probe guide (120) on one side of a flow path within a chamber (110) that forms a flow space, and the step (S310) of forming a flow of a liquid mixed with a probe (200) toward the probe guide (120) within the chamber (110).

[0069] When mixing the probe (200) with the liquid and supplying it into the chamber (110), the probe (200) may be mixed with the liquid in advance and supplied, or the probe (200) may be injected into the path where the liquid flows toward the chamber (110) to supply the liquid mixed with the probe (200).

[0070] At this time, the number of probes (200) to be assembled is ideally equal to the number of holes (122) of the probe guide (120), but it is desirable to add about 10% more to account for yield or margin.

[0071] As described with reference to FIG. 4, while the probe (200) forms a flow of mixed liquid toward the probe guide (120) within the chamber (110) and the liquid flows through the hole (122) formed in the probe guide (120), the probe (200) is aligned by the flow and inserted into the hole (122) so as to be self-assembled in parallel, just like an arrow being fixed in a target (S330). At this time, the degree of insertion in the hole (122) of the probe guide (120) is limited by a stopper (205) formed at one end of the probe (200), so that the insertion position can be fixed.

[0072] As described above, the center of gravity of the probe (200) is formed towards the head, and due to the shape features of the stopper (205), stable self-aligning flight and insertion can be facilitated by the principle of an arrow.

[0073] In this way, the present invention allows probes (200) to be inserted and fixed in parallel at once into a plurality of holes (122) by self-assembly through the flow of liquid. At this time, if probes (200) are not inserted into some holes (122) despite the above process, the above process can be repeated to assemble probes (200) to the probe guide (120) for all holes (122).

[0075] Although embodiments of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention may be implemented in other specific forms without changing its technical concept or essential features. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. Explanation of the symbols

[0076] 100: Semiconductor testing probe self-assembly device 110: Chamber 110a: Upper chamber 110b: Lower chamber 112: Support jaw 114: Pressure jaw 115: Spacing forming jig 116: Flow supply port 117: Discharge port 120: Probe Guide 120a: Upper probe guide 120b: Lower probe guide 122a, 122b: Hole 130: Fluid supply unit 132: Syringe pump 134: Liquid storage tank 200: Probe 202: Hall 205: Stopper

Claims

Claim 1 A semiconductor inspection probe self-assembly device comprising: a chamber forming a flow space; a probe guide fixed to one side of a flow path within the chamber and having a plurality of holes into which a probe is inserted; and a flow supply unit that generates a flow of a liquid mixed with the probe within the chamber, wherein the flow of the liquid mixed with the probe is formed toward the probe guide by the flow supply unit, and the probe is inserted into the holes and self-assembled while the liquid flows through the holes. Claim 2 A semiconductor inspection probe self-assembly device according to claim 1, characterized in that a stopper is formed at one end of the probe, protruding radially outward and hooking onto the top of the hole to secure it. Claim 3 A semiconductor testing probe self-assembly device according to claim 1, characterized in that the center of gravity of the probe is formed on the side of the probe's other end that contacts the semiconductor electrode. Claim 4 A semiconductor inspection probe self-assembly device characterized in that, in claim 2, a hole is formed in the probe or the cross-sectional structure is changed in the axial direction so that the center of gravity of the probe is formed on the other end side of the probe. Claim 5 A semiconductor inspection probe self-assembly device according to claim 1, characterized in that a flow supply port is formed on one side of the chamber for receiving a liquid mixed with the probe, and a discharge port is formed on the other side of the chamber for discharging a liquid that has passed through the hole. Claim 6 A semiconductor testing probe self-assembly device according to claim 1, characterized in that the fluid supply unit includes a syringe pump that supplies liquid into the chamber to generate fluid. Claim 7 A semiconductor inspection probe self-assembly device according to claim 6, further comprising a probe supply unit for injecting and mixing the probe into a path through which liquid is supplied from the syringe pump toward the chamber. Claim 8 A semiconductor testing probe self-assembly device according to claim 1, characterized in that the probe guide is formed of an upper probe guide and a lower probe guide spaced apart vertically. Claim 9 A semiconductor inspection probe self-assembly device according to claim 8, wherein the chamber is separably coupled to a lower chamber and an upper chamber, and a support projection is formed on one side of the interior of the lower chamber to protrude inward and support the edge of the lower probe guide, and further includes a ring-shaped gap-forming jig disposed on the upper side of the lower probe guide and having the upper probe guide disposed on the upper side to form a gap between the lower probe guide and the upper probe guide, and a pressure projection is formed on one side of the interior of the upper chamber to protrude inward and press the edge of the upper probe guide when the lower chamber and the upper chamber are coupled. Claim 10 A semiconductor inspection probe self-assembly device according to claim 1, characterized in that the liquid is an organic solvent having low surface tension and volatility. Claim 11 A semiconductor test probe self-assembly device according to claim 10, characterized in that the liquid is any one of acetone, toluene, or isopropyl alcohol. Claim 12 A method for self-assembling a probe for semiconductor inspection, characterized by comprising: a step of mounting a probe guide having a plurality of holes formed on one side of a flow path within a chamber forming a flow space, through which a probe is inserted; and a step of forming a flow of a liquid mixed with the probe within the chamber toward the probe guide, so that while the liquid flows through the holes, the probe is inserted into the holes and self-assembled. Claim 13 A method for self-assembling a semiconductor inspection probe, characterized in that, in claim 12, the probe is pre-mixed into the liquid to form a flow of the liquid mixed with the probe. Claim 14 A method for self-assembling a semiconductor inspection probe, characterized in that, in claim 12, the probe is injected into a path where the liquid flows to form a flow of the liquid mixed with the probe.

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