Circuit board storage container

Abstract

A substrate storage container is provided that has a valve body that improves assembly workability. The substrate storage container is provided that has a valve body (40) that controls the flow of gas to the container body (10). The valve body (40) has an elastic valve body (45) having a valve opening (454) that communicates a first passage (458) communicating with the outside and a second passage (459) communicating with the inside, a retaining member (41) that holds the elastic valve body (45), and a fastening cap (47) that is inserted into the elastic valve body (45) to fix the elastic valve body (45) to the retaining member (41), and the valve opening (454) is closed by being tightly closed by the elastic force of the elastic valve body (45).

Description

Technology Field

[0001] The present invention relates to a substrate storage container equipped with a valve body that controls the flow of gas to the container body. Background Technology

[0002] A substrate storage container for storing a substrate comprises a container body, a lid body for closing the opening of the container body, and a valve body for controlling the flow of gas into the container body. The valve body has a check valve function and comprises a valve body and a metal elastic member for opening and closing the valve body (see, for example, Patent Documents 1 and 2).

[0003] However, in order to store the substrate in a hermetic state, gas is supplied from the valve body and discharged through the valve body; yet, during the processing of the substrate, residual material attached to the substrate may also be discharged along with the supplied gas. Consequently, there have been cases where the metal elastic components of the valve body have corroded due to this residual material.

[0004] Therefore, the inventors proposed a valve body using an elastic valve body that opens and closes a gas passage without using a metal member (see Patent Document 3). This valve body has a valve opening and closing mechanism that closes a valve opening formed in the elastic valve body by its own elastic force and opens it by a gas pressure exceeding the elastic force. Prior art literature

[0005] Japanese Published Patent No. 2014-160783 Japanese Published Patent No. 2004-179449 Japanese Published Patent No. 2019-021736 The problem to be solved

[0006] However, in the valve body described in Patent Document 3, since it consists of a fixed tube, a retaining tube, an intermediate cover tube, and a plurality of O-rings, the number of parts increases and the assembly work requires time.

[0007] Accordingly, the present invention has been made in consideration of the above problems and aims to provide a substrate storage container equipped with a valve body that improves assembly workability. means of solving the problem

[0008] (1) One aspect related to the present invention is a substrate storage container comprising a container body for storing a substrate, a cover body for closing an opening of the container body, and a valve body for controlling the flow of gas to the container body, wherein the valve body comprises an elastic valve body having a valve opening that communicates a first passage communicating to the outside of the container body and a second passage communicating to the inside of the container body, a retaining member for holding the elastic valve body, and a fastening cap that is inserted into the elastic valve body to fix the elastic valve body to the retaining member, and the valve opening is closed by being tightly closed by the elastic force of the elastic valve body.

[0009] (2) In the above (1) example, the valve opening may be deformed when positive pressure is applied to the first passage to form a gap, thereby enabling the flow of gas into the container body, or it may be deformed when positive pressure is applied to the second passage to form a gap, thereby enabling the flow of gas into the container body.

[0010] (3) In the above (1) or (2) sun, the valve body may have a filter that filters the gas, and the retaining member may retain the filter. Effects of the invention

[0011] According to the present invention, a substrate storage container having a valve body that improves assembly workability can be provided. Brief explanation of the drawing

[0012] [Fig. 1] This is an exploded perspective view showing a substrate storage container of an embodiment related to the present invention. [Fig. 2a] This is an exploded perspective view showing a valve body for air supply. [Fig. 2b] This is a top view showing the air supply valve body. [Fig. 2c] This is a front view showing the air supply valve body. [Fig. 2d] This is a lower view showing the valve body for air supply. [Fig. 2e] This is a cross-sectional view taken along line AA of Fig. 2b, showing the air supply valve body. [Fig. 2f] This is a cross-sectional view taken along line BB of Fig. 2b, showing the air supply valve body. [Fig. 3a] This is a top view showing the retaining member of the valve body. [Fig. 3b] This is a front view showing the retaining member of the valve body. [Fig. 3c] This is a lower view showing the retaining member of the valve body. [Fig. 3d] This is a perspective view showing the retaining member of the valve body. [Fig. 4a] This is a perspective view showing the handle of the valve body. [Fig. 4b] This is a side view showing the handle of the valve body. [Fig. 5a] This is a top view showing the elastic valve body. [Fig. 5b] This is a front view showing the elastic valve body. [Fig. 5c] This is a lower view showing the elastic valve body. [Fig. 5d] This is a cross-sectional view showing the elastic valve body. [Fig. 6a] This is a top view showing the valve plug of the valve body. [Fig. 6b] This is a front view showing the valve plug of the valve body. [Fig. 6c] This is a lower view showing the valve plug of the valve body. [Fig. 6d] This is a side view showing the valve plug of the valve body. [Fig. 7a] This is a top view showing the cap of the valve body. [Fig. 7b] This is a front view showing the cap of the valve body. [Fig. 7c] This is a bottom view showing the cap of the valve body. [Fig. 7d] This is a perspective view showing the cap of the valve body. [Fig. 8a] This is an exploded perspective view showing an exhaust valve body. [Fig. 8b] This is a cross-sectional view taken at the same location as Fig. 2e, showing an exhaust valve body. [Fig. 8c] This is a cross-sectional view taken at the same location as Fig. 2f, showing the exhaust valve body. Specific details for implementing the invention

[0013] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiments of this specification, the same reference numerals are used throughout to denote identical components.

[0014] FIG. 1 is a schematic exploded perspective view showing a substrate storage container (1) of an embodiment related to the present invention.

[0015] It is equipped with a container body (10) for housing a substrate (W), a cover body (20) for closing an opening (11) of the container body (10), and an annular gasket (30) installed between the container body (10) and the cover body (20).

[0016] The container body (10) is a box-shaped body with an opening (11) formed on the front. The opening (11) is formed with a step and curved so as to widen outward, and the surface of the step portion is formed on the inner circumferential edge of the front of the opening (11) as a sealing surface (12) to which the gasket (30) contacts. Also, since the container body (10) makes it easy to perform insertion operations of a substrate (W) with a diameter of 300 mm or 450 mm, a front-open type is preferred.

[0017] Support members (13) are arranged on both the left and right sides inside the container body (10). The support members (13) have the function of mounting and positioning the substrate (W). A plurality of grooves are formed in the height direction on the support members (13), forming so-called groove teeth. The substrate (W) is mounted on the groove teeth at two locations on the left and right sides at the same height. The material of the support members (13) may be the same as that of the container body (10), but a different material may be used to improve cleaning ability or sliding ability.

[0018] Additionally, a rear retainer (not shown) is disposed at the rear (inside) of the interior of the container body (10). When the cover body (20) is removed, the rear retainer is paired with the front retainer described later to support the substrate (W). However, instead of having a rear retainer as in this embodiment, the support body (13) may support the substrate (W) by having, for example, a "ku" shaped or straight substrate support part inside the groove tooth, with the front retainer and the substrate support part. These support bodies (13) and the rear retainer may be installed in the container body (10) by insert molding or fitting.

[0019] The substrate (W) is supported by this support (13) and stored in the container body (10). As an example of the substrate (W), a silicon wafer may be used, but it is not particularly limited and may be, for example, a quartz wafer, a gallium arsenide wafer, etc.

[0020] A robotic flange (14) is detachably installed in the center of the ceiling of the container body (10). The substrate storage container (1), which holds the substrate (W) in a clean state, is grasped by the robotic flange (14) by a conveying robot in the factory and is conveyed to a processing device for each process of processing the substrate (W).

[0021] In addition, a manual handle (15) that is gripped by a worker is detachably mounted on the central part of the outer surface of both sides of the container body (10).

[0022] In addition, an air supply section (16) and an exhaust section (17) are formed on the inner bottom surface of the container body (10), and a valve body (40, 50) described later is mounted on the outer bottom surface of the container body (10). These are designed to maintain the cleanliness of the inside of the substrate storage container (1) by supplying an inert gas, such as nitrogen gas, or dry air from the air supply section (16) to the inside of the substrate storage container (1) closed by the cover body (20), and discharging it from the exhaust section (17) as needed, thereby replacing the gas inside the substrate storage container (1), maintaining a low-humidity airtight state, or blowing away impurities on the substrate (W). In addition, there are cases where gas is supplied from the air supply section (16), and the exhaust section (17) is connected to a negative pressure (vacuum) generating device to forcibly discharge gas from the exhaust section (17).

[0023] Additionally, by detecting the gas exhausted from the exhaust section (17), it is possible to verify whether the interior of the substrate storage container (1) has been replaced with the introduced gas. Furthermore, while it is preferable that the supply section (16) and the exhaust section (17) be located at a position away from the position where the substrate (W) is projected onto the bottom surface, the number and location of the supply section (16) and the exhaust section (17) are not limited to those shown and may be located at the four corners of the bottom surface of the container body (10). Additionally, the supply section (16) and the exhaust section (17) may be mounted on the side of the cover body (20).

[0024] Meanwhile, the cover body (20) is approximately rectangular and is mounted on the front of the opening (11) of the container body (10). The cover body (20) has a locking mechanism not shown and is designed to be locked by inserting a locking piece into a locking hole (not shown) formed in the container body (10).

[0025] Additionally, the cover body (20) has an elastic front retainer (not shown) attached to the central part in a way that allows it to be detachably fitted or fitted, or is integrally formed by insert molding, etc., to maintain the horizontal edge around the front part of the substrate (W). Since this front retainer is a part that comes into direct contact with the wafer, just like the groove teeth and substrate support part of the support body (13), a material with good cleaning and sliding properties is used.

[0026] Additionally, a mounting groove (21) for mounting a gasket (30) is formed in the cover body (20). For example, on the side of the cover body (20) facing the container body (10), a convex portion (22) smaller than the stepped portion of the opening (11) is formed in an annular shape, thereby forming a mounting groove (21) with a cross-section approximately U-shaped. This convex portion (22) is positioned so that it goes inward from the stepped portion of the opening (11) when the cover body (20) is mounted on the container body (10).

[0027] As materials for the container body (10) and the lid body (20), thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetheretherketone, and liquid crystal polymer may be used. In this thermoplastic resin, conductive agents composed of conductive carbon, conductive fibers, metal fibers, conductive polymers, etc., various antistatic agents, ultraviolet absorbers, etc. may be appropriately added.

[0028] Next, the gasket (30) is an annular shape corresponding to the front shape of the cover body (20) {and the shape of the opening (11) of the container body (10)}, and in this embodiment, it is a rectangular frame shape. However, the annular gasket (30) may be ring-shaped in the state before being mounted on the cover body (20).

[0029] The gasket (30) is positioned between the sealing surface (12) of the container body (10) and the cover body (20), and when the cover body (20) is mounted on the container body (10), it adheres to the sealing surface (12) and the cover body (20) to ensure airtightness of the substrate storage container (1), reduce the intrusion of dust, moisture, etc. from the outside into the substrate storage container (1), and also reduce the leakage of gas from the inside to the outside.

[0030] The gasket (30) can be formed using an elastic material such as a thermoplastic elastomer, fluororubber, ethylene propylene rubber, silicone rubber, etc., which is composed of a polyester-based elastomer, a polyolefin-based elastomer, a fluorine-based elastomer, a urethane-based elastomer, etc. Various additives may be added to these materials to add other functions.

[0031] Next, the air supply valve body (40) will be described.

[0032] FIG. 2 shows an air supply valve body (40), FIG. 2a is an exploded perspective view, FIG. 2b is a top view, FIG. 2c is a front view, FIG. 2d is a bottom view, FIG. 2e is a cross-sectional view cut along line AA of FIG. 2b, and FIG. 2f is a cross-sectional view cut along line BB of FIG. 2b. FIG. 2e and FIG. 2f also depict the bottom surface of the container body (10).

[0033] The valve body (40) controls the flow of gas to the container body (10) and, when mounted on the container body (10), communicates with the air supply unit (16) through an unillustrated gas flow path. As shown in FIGS. 2e and 2f, the valve body (40) has a retaining member (41) that is fitted into a through hole (18) formed by a rib of the bottom surface of the container body (10) {or a bottom plate mounted on the bottom surface of the container body (10)}. Additionally, a plurality of ventilation ribs (19) are formed on the lower end of the through hole (18) to secure the flow of gas to the container body (10).

[0034] FIG. 3 shows a retaining member (41) of a valve body (40), FIG. 3a is a top view, FIG. 3b is a front view, FIG. 3c is a bottom view, and FIG. 3d is a perspective view.

[0035] The retaining member (41) is formed with a cylindrical first tube (411) and a second tube (412) having a central axis eccentric from the central axis of the first tube (411) (see FIG. 3a and FIG. 3c).

[0036] The first tube (411) has a ring groove (414) formed on its outer surface. Additionally, the first tube (411) has a partition rib (413) installed on the upper surface of the container body (10) side, extending radially from the ventilation hole (416). The ventilation hole (416) is formed in the first tube (411) such that its central axis coincides with the central axis of the second tube (412).

[0037] In addition, a storage hole (417) communicating with the ventilation hole (416) is also formed in the first tube (411) (see FIG. 3C and FIG. 3D). This storage hole (417) has an inner diameter larger than the inner diameter of the ventilation hole (416).

[0038] Meanwhile, the second tube (412) has a pair of support shafts (415) protruding from its outer surface along a direction approximately orthogonal to the eccentric direction. The lower portion of these support shafts (415) is chamfered (see FIG. 3b).

[0039] Additionally, the second tube (412) has a fitting hole (418) formed in the center (see FIG. 3c and FIG. 3d). This fitting hole (418) has an inner diameter larger than the inner diameter of the storage hole (417). This fitting hole (418) has an inner diameter equal to or slightly larger than the outer diameter of the fitting body part (451) of the elastic valve body (45) described later.

[0040] And, the retaining member (41) is molded using a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, liquid crystal polymer, etc.

[0041] Here, a ring groove (414) of the retaining member (41) is equipped with an annular seal ring (42) (see FIG. 2a, FIG. 2e and FIG. 2f). This seal ring (42) ensures airtightness between the retaining member (41) and the through hole (18) when the retaining member (41) is inserted into the through hole (18) of the container body (10), and also has the function of fixing the retaining member (41) by fitting it into the through hole (18).

[0042] This sealing (42) is formed from materials such as fluororubber, natural rubber, urethane rubber, ethylene propylene rubber, etc.

[0043] Additionally, at the upper end of the first section (411) of the retaining member (41) {partition rib (413)}, one or more filters (43) are installed, for example, by bonding or welding (see FIG. 2a). These filters (43) filter the supplied or discharged gas and are selected from a porous membrane made of tetrafluoroethylene, polyester fiber, fluoropolymer, etc., a molecular filter made of glass fiber, etc., a chemical filter in which a chemical adsorbent is supported on a filter material such as activated carbon fiber.

[0044] In addition, when using multiple filters (43), they may be of the same type, but it is more preferable to combine those with different properties, as this can prevent contamination of organic matter in addition to particles. For example, when cleaning the container body (10), it may also perform the function of suppressing the retention of liquids such as water or cleaning solution, or suppressing the passage of liquids, so a hydrophobic or hydrophilic material may be used on one side of the filter (43) to suppress the permeation of liquids.

[0045] FIG. 4 shows the handle (44) of the valve body (40), FIG. 4a is a perspective view and FIG. 4b is a side view.

[0046] The handle (44) is formed in a U-shape and has an arc-shaped main body (441) and bearings (442) installed at both ends of the main body (441). The bearings (442) have a shaft hole (442a) formed therein into which the support shaft (415) of the retaining member (41) is inserted (see FIG. 2a).

[0047] Additionally, the bearing (442) has a protruding piece (443) formed on the side opposite to the side connected to the main body (441). This protruding piece (443) is used when mounting the valve body (40) to the container body (10), and by rotating the handle (44) into a storage state as shown in FIG. 2c, the valve body (40) is fitted into the through hole (18) by the principle of a lever with the mounting part of the container body (10) as the pivot point (for details, refer to Patent Document 1).

[0048] This handle (44) is molded using a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, liquid crystal polymer, etc.

[0049] FIG. 5 shows an elastic valve body (45) of a valve body (40), FIG. 5a is a top view, FIG. 5b is a front view, FIG. 5c is a bottom view, and FIG. 5d is a cross-sectional view.

[0050] The elastic valve body (45) has a cylindrical fitting body part (451) and a tubular part (452) extending from the recessed upper surface of the fitting body part (451) concentrically. The fitting body part (451) has an outer diameter equal to or slightly larger than the inner diameter of the fitting hole (418) of the retaining member (41), and a flange part (455) is formed at the bottom. Furthermore, it is preferable that the fitting body part (451) be fitted into the fitting hole (418) in a forced fit state.

[0051] Meanwhile, the tubular portion (452) includes a valve portion (453) with a valve opening (454) formed therein on its inner surface (see FIG. 5d). This valve portion (453) is formed in a beak shape with two inclined surfaces extending toward the valve opening (454) at the tip, so that it has a mountain-shaped cross-sectional shape toward the container body (10). Also, the mountain-shaped ridge is not limited to a straight shape as in the embodiment, but may be an arc shape.

[0052] The valve section (453) divides the inner space of the tubular section (452) into a first passage (458) communicating with the outside of the container body (10) and a second passage (459) communicating with the outside of the container body (10), and these first passage (458) and second passage (459) are connected through the valve opening (454).

[0053] The valve opening (454) is formed as an elliptical shape or an elliptical slit opening. When forming the valve opening (454), it can be formed simultaneously during molding with a mold or cut with a cutter after molding. The valve opening (454) depends on the thickness of the elastic valve body (45), but the length of the short axis should be, for example, 0.1 mm or more and 2.0 mm or less.

[0054] On the inner side of the fitted body part (451), a cylindrical ventilation opening (456) communicating with the first passage (458) is formed, and a fastening cap (47) to be described later can be inserted into this ventilation opening (456). In addition, on the inside of the ventilation opening (456) {the part connected to the valve part (453)}, a positioning convex part (457) for positioning a valve plug (46) to be described later is formed.

[0055] The elastic valve body (45) can be formed using various types of rubber or thermoplastic elastomer resins. For example, rubber such as fluororubber or ethylene propylene rubber, or thermoplastic elastomers such as polyester-based elastomers, polyolefin-based elastomers, fluorine-based elastomers, or urethane-based elastomers can be used.

[0056] FIG. 6 shows the valve plug (46) of the valve body (40), FIG. 6a is a top view, FIG. 6b is a front view, FIG. 6c is a bottom view, and FIG. 6d is a side view.

[0057] The valve plug (46) has a ring-shaped base (461), two legs (462) installed upright on the base (461), and a sealing plate (463) placed across the two legs (462). The base (461) has two chamfered portions (465) on the upper surface where the legs (462) are installed upright, and is designed to be fitted into the positioning convex portion (457) of the elastic valve body (45) (see FIG. 2e).

[0058] The sealing plate portion (463) has a cross-sectional shape identical to or similar to the shape of the valve opening (454). That is, the major axis of the sealing plate portion (463) is equal in length to the major axis of the elongated or elliptical shape of the valve opening (454), or has a length that is longer within the range of 1 mm or less. In other words, the sealing plate portion (463) has a perimeter length equal to or slightly longer than the perimeter length of the valve opening (454).

[0059] And, the space between the circular opening on the inner side of the base (461) and the two corner parts (462) is an opening (464) through which gas can pass.

[0060] And, this valve plug (46) is formed of a material that is difficult to attach to the material forming the elastic valve body (45), for example, cycloolefin polymer, polyetheretherketone, polyolefin methacrylate, polypropylene, polybutylene terephthalate, or polycarbonate.

[0061] FIG. 7 shows a fastening cap (47) of a valve body (40), FIG. 7a is a top view, FIG. 7b is a front view, FIG. 7c is a bottom view, and FIG. 7d is a perspective view.

[0062] A fastening cap (47) is inserted into the ventilation opening (456) of the elastic valve body (45) (see FIG. 2a, FIG. 2e and FIG. 2f). This fastening cap (47) has a circular portion (471) and a plurality (e.g., 4) of corner portions (473) extending in an L-shape toward the center from one side of the circular portion (471). The 4 corner portions (473) are connected to each other to form a cross shape.

[0063] The ring portion (471) has a plurality (e.g., 4) reinforcing ribs (474) formed on its inner surface and 4 locking claws (472) formed on its outer surface. Additionally, the ring portion (471) has an outer diameter equal to or slightly larger than the inner diameter of the ventilation opening (456) of the elastic valve body (45).

[0064] The catch claw (472) has a non-slip function that allows the elastic valve body (45) to be held in the ventilation opening (456) of the elastic valve body (45) and also to be held in close contact with the fitting hole (418) of the retaining member (41) by expanding the fitting body portion (451) on the outer side of the ventilation opening (456) (see FIG. 2e and FIG. 2f). In addition, if the fitting force between the fitting hole (418) of the retaining member (41) and the fitting body portion (451) of the elastic valve body (45) can be sufficiently large, the fastening cap (47) may be omitted.

[0065] The fastening cap (47) is formed using a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, liquid crystal polymer, etc.

[0066] Next, the exhaust valve body (50) will be described. Since the exhaust valve body (50) is composed of the same parts as the elastic valve body (45) of the air supply valve body (40), the description of each part is appropriately omitted.

[0067] FIG. 8 shows an exhaust valve body (50), FIG. 8a is an exploded perspective view, FIG. 8b is a cross-sectional view cut at the same position as FIG. 2e, and FIG. 8c is a cross-sectional view cut at the same position as FIG. 2f.

[0068] The valve body (50) controls the flow of gas to the container body (10) and, when mounted on the container body (10), communicates with the exhaust section (17) through an unillustrated gas flow passage. Furthermore, unlike the valve body (40), the valve body (50) is used as an exhaust section (17) that enables the exhaust of gas from the container body (10) to the outside but prevents the supply of gas into the container body (10).

[0069] In this valve body (50), the valve portion (553) of the elastic valve body (55) is formed in a valley shape with respect to the container body (10), and the valve plug (46) is maintained between the retaining member (41) and the elastic valve body (55).

[0070] Finally, the shape of the valve body (40) controlling the flow of gas is explained.

[0071] When positive pressure is not applied to the first passage (458) and the second passage (459) of the elastic valve body (45), the valve opening (454) is in close contact with the valve plug (46), thereby blocking the flow of gas on either side. Additionally, when positive pressure is applied to the second passage (459), the two oblique surfaces of the valve part (453) are pressurized toward the valve plug (46). However, even if different pressures are applied to each oblique surface, the valve opening (454) does not become distorted because it is centered on the valve plug (46), thus blocking the flow of gas on either side.

[0072] And, for example, when a positive pressure greater than a predetermined value is applied to the first passage (458), the elastic valve body (45) deforms to expand the valve opening (454) according to the magnitude of the positive pressure, thereby forming a gap between it and the valve plug (46). Then, gas supplied from the outside of the container body (10) passes through this gap, flows into the second passage (459), and is supplied to the inside of the container body (10).

[0073] Meanwhile, when a negative pressure greater than a predetermined value is applied to the second passage (459), it is relatively the same as when a positive pressure greater than a predetermined value is applied to the first passage (458), so the valve body (40) performs the same valve opening operation.

[0074] Conversely, when positive pressure is applied to the second passage (459), the valve portion (453) of the elastic valve body (45) bends downward in the reverse direction because it has a shape that tapers toward the apex (normal line), thereby deforming to close the valve opening (454) and adhering to the valve plug (46). Then, when the valve opening (454) and the valve plug (46) are in close contact, the flow of gas from the second passage (459) side is blocked, and it cannot flow to the first passage (458) side.

[0075] And, when a negative pressure greater than a predetermined value is applied to the first passage (458), it is relatively the same as when a positive pressure greater than a predetermined value is applied to the second passage (459), so the valve body (40) performs the same operation.

[0076] A predetermined value of pressure that enables the flow of gas can be adjusted by changing the material, hardness, shape, dimensions, thickness, valve opening (454), and the width or length of the valve plug (46) {the sealing plate portion (463)} of the elastic valve body (45).

[0077] And, regarding the state in which the valve body (50) controls the flow of gas, since it is basically in the opposite direction to the valve body (40), the explanation is omitted.

[0078] As described above, the substrate storage container (1) of an embodiment related to the present invention is a substrate storage container (1) comprising a container body (10) for storing a substrate (W), a cover body (20) for closing an opening (11) of the container body (10), and a valve body (40, 50) for controlling the flow of gas to the container body (10). The valve body (40, 50) comprises an elastic valve body (45, 55) having a valve opening (454) that communicates a first passage (458) communicating with the outside of the container body (10) and a second passage (459) communicating with the inside of the container body (10), a retaining member (41) for maintaining the elastic valve body (45, 55), and a fastening cap (47) that is inserted into the elastic valve body (45, 55) to fix the elastic valve body (45, 55) to the retaining member (41). The opening (454) is closed by being tightly closed by the elastic force of the elastic valve body (45, 55).

[0079] Thus, by mounting the fastening cap (47) on the elastic valve body (45, 55), the elastic valve body (45, 55) can be fixed to the retaining member (41), and the number of parts can be reduced compared to conventional products. Also, since the fitting force between the retaining member (41) and the elastic valve body (45) can be increased, gas leakage from the gap between them can be prevented.

[0080] In addition, since the substrate storage container (1) is equipped with a valve body (40, 50) that does not use a metallic member, even if there is a metallic corrosive residual material on the substrate (W) to be stored, the problem of metal corrosion does not occur, and it is difficult for the valve body (40, 50) to malfunction.

[0081] In addition, by replacing the elastic valve body (45, 55) and changing the position of the valve plug (46), gas can be flowed in the supply direction or the exhaust direction, and can be adapted to all gas supply and exhaust routes regardless of the position or number of the supply section (16) or exhaust section (17).

[0082] The valve plug (46) of the embodiment is clamped between the elastic valve body (55) and the retaining member (41). By inserting the fastening cap (47) into the elastic valve body (55) and mounting it on the retaining member (41), the valve plug (46) and the elastic valve body (55) can be fixed.

[0083] The valve plug (46) of the embodiment is clamped between the elastic valve body (45) and the fastening cap (47). By mounting the fastening cap (47) to the elastic valve body (45), the valve plug (46) and the elastic valve body (45) can be secured.

[0084] In addition, the opening (464) of the valve plug (46) and the ventilation opening (475) of the fastening cap (47) correspond to the “first passage” described in the patent claim in that they are connected to the first passage (458), and the ventilation hole (416) corresponds to the “second passage” described in the patent claim in that it is connected to the second passage (459).

[0085] The valve opening (454) of the embodiment is deformed when positive pressure is applied to the first passage (458) to form a gap, thereby enabling the flow of gas to the container body (10), or is deformed when positive pressure is applied to the second passage (459) to form a gap, thereby enabling the flow of said gas to the container body (10). Thus, for example, gas is introduced from one side of the valve body (40, 50) and becomes positive pressure, and when it reaches a predetermined pressure value, the valve opening (454) of the elastic valve body (45, 55) expands, and the introduced gas is supplied to the other side of the valve body (40, 50).

[0086] The valve body (40, 50) of the embodiment has a filter (43) that filters gas, and the retaining member (41) retains the filter (43). By doing so, gas passing through the valve body (40, 50) can be filtered. Additionally, by holding the filter (43) between the partition rib (413) of the retaining member (41) and the ventilation rib (19) of the container body (10), the filter (43) can be prevented from falling off.

[0087] Although preferred embodiments of the present invention have been described above, the present invention is not limited to the aforementioned embodiments, and various modifications and changes are possible within the scope of the gist of the present invention as described in the claims.

[0088] (Variation Example)

[0089] In the above embodiment, the first tube (411) and the second tube (412) of the retaining member (41) were eccentric to suit the positioning relationship between the existing substrate storage container (1) and the load port equipped with the supply and exhaust nozzles, but they may be concentric, for example, as shown in the conventional valve body described in Patent Document 3. In addition, in the structure of this conventional valve body, the valve plug (46) of the embodiment may be configured to be inserted into the slit of the elastic body {corresponding to the valve opening (454) of the elastic valve body (45)}.

[0090] In the above embodiment, the valve portion (453) of the elastic valve body (45) may be a cross shape in which two valve openings (454) are orthogonal. In this case, the sealing plate portion (463) of the valve plug (46) may also be formed so that its cross section is cross-shaped.

[0091] Alternatively, in the above embodiment, the valve body (40, 50) may not have a valve plug (46). In this case, the valve opening (454) of the elastic valve body (45, 55) is formed to be closed under normal conditions by its own elastic force, and when positive pressure is applied to the first passage (458) and exceeds the elastic force of the valve opening (454), the valve opening (454) is deformed to form a gap, thereby enabling the flow of gas to the container body (10), or when positive pressure is applied to the second passage (459), it is deformed to form a gap, thereby enabling the flow of gas to the container body (10).

[0092] In addition, in the above embodiment, the filter (43) may be placed separately from the valve body (40, 50) in the gas flow path from the gas supply source to the gas discharge port inside the container body (10).

[0093] In the above embodiments, the valve body (40, 50) is configured to be mounted in a through hole (18) formed in at least one of the container body (10) and the cover body (20), but it may also be configured to be mounted in the middle of a gas flow path (piping) that communicates with at least one of the gas supply section (16) or exhaust section (17), such as the valve body described in Patent Document 3. Explanation of the symbols

[0094] 1: Circuit board storage container 10: Container body, 11: Opening, 12: Sealing surface, 13: Support, 14: Robotic flange, 15: Manual handle, 16: Air supply section, 17: Air exhaust section, 18: Through hole, 19: Vent rib 20: Cover body, 21: Mounting groove, 22: Convex part 30: Gasket 40, 50: Valve body 41: Retaining member, 411: First tube, 412: Second tube, 413: Section rib, 414: Ring groove, 415: Support shaft, 416: Vent hole, 417: Reception hole, 418: Fit hole 42: Sealing 43: Filter 44: Handle, 441: Main body, 442: Bearing, 442a: Shaft hole, 443: Protruding piece 45, 55: Elastic valve body, 451: Fitted body part, 452: Tubular part, 453, 553: Valve part, 454: Valve opening, 455: Flange part, 456: Vent opening, 457: Positioning convex part, 458: First passage, 459: Second passage 46: Valve plug, 461: Base, 462: Corner, 463: Sealing plate, 464: Opening, 465: Chamfered section 47: Fastening cap, 471: Ring part, 472: Locking claw, 473: Corner part, 474: Reinforcing rib, 475: Ventilation opening W: Substrate

Claims

Claim 1 A container body for housing a substrate; a cover body for closing the opening of the container body; A substrate storage container comprising: a valve body for controlling the flow of gas to the container body; wherein the valve body comprises: an elastic valve body having a valve portion having a valve opening formed therein that communicates a first passage communicating with the outside of the container body and a second passage communicating with the inside of the container body; a retaining member for maintaining the elastic valve body; a fastening cap that is inserted into the elastic valve body to fix the elastic valve body to the retaining member; and a valve plug disposed on the upstream side of the gas flow direction of the elastic valve body and supporting the elastic valve body so as not to distort the valve opening when pressure is generated in a direction opposite to the gas flow direction, wherein the valve opening is formed at the tip of the valve portion located downstream of the gas flow direction, and the valve portion has a beak-shaped form in which two inclined surfaces come closer together from the upstream of the gas flow direction toward the tip, and the valve opening when pressure is generated in a direction opposite to the gas flow direction, A substrate storage container that is closed by being in close contact with the valve plug by the elastic force of the elastic valve body. Claim 2 A substrate storage container according to claim 1, wherein the valve opening is deformed when positive pressure is applied to the first passage to form a gap, thereby enabling the flow of the gas into the container body, or is deformed when positive pressure is applied to the second passage to form a gap, thereby enabling the flow of the gas into the container body. Claim 3 In claim 1 or 2, the valve body has a filter for filtering the gas, and the retaining member is a substrate receiving container that retains the filter.

Images