Panel Processing Equipment Capable of Monitoring Panel Alignment by Vision

Abstract

A panel processing device capable of verifying panel alignment by image analysis is disclosed. The panel processing device of the present invention includes a plurality of cameras and an image processor capable of verifying the panel alignment state by analyzing images captured by the cameras. The image processor can determine the panel alignment state by verifying the alignment state of a pre-set sight and a region of interest of the panel in the image captured by the cameras.

Description

Technology Field

[0001] The present invention relates to a panel processing device, and more specifically, to a panel processing device capable of determining whether a panel is aligned in place on the spindle stage of the panel processing device using vision technology. Background Technology

[0003] Panel Level Package (PLP) is a technology that mounts multiple integrated circuit (IC) chips onto a single panel and separates them into individual packages after processing.

[0004] A process for manufacturing a semiconductor package includes a development process in which a chemical solution is applied to the surface of a panel to be processed, dried, and then exposed to a required pattern, and a developer solution is sprayed onto the surface of the exposed panel to selectively remove the exposed and unexposed areas.

[0005] Conventional panel processing devices not only failed to verify whether a panel was introduced into the spindle stage installed inside the process chamber in the correct position, but also lacked a means to determine whether the panel had deviated from its correct position on the spindle stage after the process was completed. Consequently, if the process proceeded with the panel not properly positioned on the spindle stage, or if the panel was removed after the process was finished without being in the correct position on the spindle stage, process defects such as panel damage occurred.

[0006] Prior art related to a panel processing device is disclosed in Korean Registered Patent No. 10-2566766.

[0008] (Patent Document 1) KR 10-2566766 B

[0009] (Title of Invention: Substrate Processing Device and Substrate Processing Method) The problem to be solved

[0011] The present invention has been devised to solve the aforementioned problems, and its purpose is to provide a panel processing device capable of rapidly and accurately determining whether a panel is aligned in place on a spindle stage before and after the developing and drying processes using a vision means. means of solving the problem

[0013] The panel processing device of the present invention for implementing the purpose described above includes a main body (100), a spindle unit (200), a camera unit (500), and an image processor.

[0014] The main body (100) accommodates the panel in its internal space, and the spindle unit (200) is equipped with a spindle stage (210) that supports and rotates the panel. A camera unit (500) is provided within the main body (100) to photograph the panel and generate an image.

[0015] The image processor performs image processing on the image generated by the camera unit to determine whether the panel is aligned to the correct position of the spindle stage (210), and generates an alarm if there is an alignment error.

[0016] Image processing for checking panel alignment status

[0017] According to an embodiment, the image processor may include an image processing unit that determines the alignment error by pre-setting the pixel coordinates of a plurality of sights to be placed at a plurality of preset designated positions based on an image generated by the camera unit, and by determining whether the panel corners are aligned in the image generated by the camera unit. Here, the designated positions are positions on the image where the panel corners are captured in an aligned state from the orientation of the camera unit.

[0018] According to another embodiment, the camera unit (500) may include a first camera (500-1) and a second camera (500-2) positioned to photograph the panel from the side at an inclined angle and photographing the closest corner among the corners of the panel. In this case, instead of determining the alignment state of multiple designated positions in a single image, the image processing unit may determine the alignment state at multiple designated positions by determining whether one of the panel corners is aligned with a gauge set for the first camera image captured by the first camera (500-1), and determining whether another of the panel corners is aligned with a different gauge set for the second camera image captured by the second camera (500-2).

[0019] According to another embodiment, the panel processing device of the present invention may further include a display unit that displays the first camera image and the second camera image processed by the image processing unit so that they can be visually recognized, while also displaying the scale.

[0020] Panel alignment verification based on alignment verification request

[0021] According to another embodiment, the panel processing device of the present invention may further include a chamber control unit that sends an alignment verification request to the image processor when the panel is loaded onto the spindle stage and before it is unloaded. In this case, the image processor may receive the alignment verification request from the chamber control unit and perform the image processing on the image provided by the camera unit.

[0022] The chamber control unit may determine the loading and unloading status of the panel according to a schedule based on a control algorithm, but may determine the loading and unloading status of the panel by using the operation schedule of the robot (21) that loads and unloads the panel onto the spindle stage (210) or by using the operation of the panel support unit (23) connected to the robot arm (22). Effects of the invention

[0024] The panel processing device according to the present invention can verify the alignment status of panels by analyzing images captured by a smart vision camera of panels aligned inside a process chamber. Verification of the panel alignment status using a smart vision function is performed before the panel is loaded and the process begins, and after the process is completed, thereby not only preventing defects from occurring during the process but also enabling the early detection of process defects.

[0025] The panel processing device according to the present invention can prevent problems such as interference with process progress or panel damage caused by poor panel positioning by generating an alarm and notifying the manager when there is a problem with the alignment state of the panel. Brief explanation of the drawing

[0027] FIG. 1 is a plan view of the panel processing device of the present invention, FIG. 2 is a front external view of the process chamber of the panel processing device of the present invention. FIG. 3 is a rear external view of the process chamber of the panel processing device of the present invention. FIG. 4 is a plan view of the process chamber of the panel processing device of the present invention, FIG. 5 is a cross-sectional view of line AA of FIG. 4, FIG. 6 is a cross-sectional perspective view of line AA of FIG. 4, FIG. 7 is a cross-sectional view of the BB line of FIG. 4, FIG. 8 is a cross-sectional perspective view of line BB of FIG. 4, FIG. 9 is a plan view showing the internal structure of the process chamber of the panel processing device of the present invention. FIG. 10 is a perspective view of a shutter unit provided in a process chamber of a panel processing device of the present invention. FIG. 11 is a perspective view of a clamp rotating part of a spindle unit provided in a process chamber of a panel processing device of the present invention in a raised position. FIG. 12 is a front view and a partially enlarged cross-sectional view of FIG. 11, FIG. 13 is a plan view of FIG. 11, FIG. 14 is a perspective view of a clamp rotating part of a spindle unit provided in a process chamber of a panel processing device of the present invention in a downwardly moved state. FIG. 15 is a front view and a partially enlarged cross-sectional view of FIG. 14, FIG. 16 is a plan view of FIG. 14, FIG. 17 is a perspective view of a bowl unit provided in the process chamber of the panel processing device of the present invention. FIG. 18 is a plan view of FIG. 17, FIG. 19 is a cross-sectional perspective view of the CC line of FIG. 18, FIG. 20 is a cross-sectional view of the DD line of FIG. 18, FIG. 21 is a cross-sectional view showing a panel loaded in a process chamber of a panel processing device of the present invention, with the nozzle arm in a process standby position, the bowl cup lowered, and the clamp raised. FIG. 22 is a perspective view of a nozzle arm unit provided in a process chamber of a panel processing device of the present invention. FIG. 23 is a side view showing the rotation and lifting drive structure of a nozzle arm provided in the process chamber of the panel processing device of the present invention. FIG. 24 (a) and (b) are bottom views of a nozzle arm unit showing an example of a nozzle arrangement structure formed on the bottom surface of a nozzle arm provided in a process chamber of a panel processing device of the present invention. FIG. 25 is a side view showing (a) the appearance of a nozzle arm provided in a process chamber of a panel processing device of the present invention when it is in a process waiting position, and (b) the appearance of a nozzle arm when it is in a process progress position rotated at a predetermined angle after moving upward. FIG. 26 is a cross-sectional view showing the bowl cup moving upward and the clamp moving downward to support the panel. FIG. 27 is a cross-sectional view showing the nozzle arm rising and rotating from the state of FIG. 26 to move to the process progress position. FIG. 28 is a perspective view showing a smart vision camera equipped in the process chamber of the panel processing device of the present invention capturing an image of a loaded panel. FIG. 29 is a block diagram illustrating a process chamber controller of the present invention. FIG. 30 is a diagram illustrating an image processing method for determining the panel alignment state. Specific details for implementing the invention

[0028] The configuration and operation of a preferred embodiment of the present invention will be described in detail below with reference to the attached drawings.

[0029] Referring to FIG. 1, the panel processing device (1) includes an LPM (Loading Port Module) unit (10), an EFEM (Equipment Front End Module, 20), and a process chamber (30). The LPM unit (10) is equipped with a plurality of FOUPs (Front Opening Universal Pods, 11) in which panels (P) to be processed are stored. The EFEM (20) is equipped with a robot (21) that transfers panels (P) inside the FOUPs (11) to the process chamber (30). The robot (21) may include a multi-joint robot arm (22) and a panel support member (23) connected thereto that supports and transfers the panels (P). The panels (P) removed from the FOUPs (11) by the robot (21) are transferred into the process chamber (30), and a developing and drying process is performed.

[0030] A pair of process chambers (30) may be provided on both sides of the panel processing device (1), and a robot (21) moves back and forth and rotates to load a panel (P) into a pair of process chambers (30; 30-1, 30-2), and unloads the panel (P) after development and drying treatment is completed from the process chambers (30; 30-1, 30-2) and transfers it to the FOUP (11) of the LPM unit (10).

[0031] The panel processing device (1) may be configured to include an LPM unit (10), an EFEM (20), and a process chamber (30), but in the following specification, the panel processing device (1) is also used to refer to the process chamber (30) alone.

[0032] Referring to FIGS. 2 to 8, the process chamber (30) includes a main body (100), a spindle unit (200), a bowl unit (300), a nozzle arm unit (400), a camera unit (500), and a fan filter unit (700), and is controlled by a process chamber controller (31) described below.

[0033] The main body (100) has a space inside for receiving and processing a PLP (Panel Level Package) panel (P), and a shutter (110) is provided on the front of the main body (100) to open and close a passage (100b; FIG. 19) through which the panel (P) is received and received, and a door (100a) may be provided on one side of the main body (100) for a worker to enter and exit the main body (100).

[0034] The spindle unit (200) is configured to support and rotate the panel (P) for a development process of the panel (P), and includes a spindle stage (210) that supports and rotates the panel (P), a spindle rotation axis (220) that serves as the rotation center of the spindle stage (210), a spindle support member (230) that supports the spindle rotation axis (220) so as to be rotatable, a spindle rotation unit (240) that drives the spindle rotation axis (220) to rotate, and a clamp unit (250) that fixes the panel (P) mounted on the spindle stage (210).

[0035] The bowl unit (300) is configured to surround the periphery of the spindle stage (210) to prevent chemical liquid supplied to the surface of the panel (P) from scattering and moving during the development process of the panel (P). It includes a bowl body (310) protruding on the edge of the spindle stage (210), a bowl cup (320) movably mounted on the inner side of the bowl body (310), a spindle connection part (330) formed protruding from the center of the bottom surface of the bowl body (310) through which the spindle rotation axis (220) passes and is coupled, and a bowl cup lifting unit (340) for driving the bowl cup (320) up and down.

[0036] The nozzle arm unit (400) is configured to be vertically and rotatable to spray a chemical solution, pure water, and dry air onto the surface of the panel (P), and may be composed of a first nozzle arm unit (400-1) and a second nozzle arm unit (400-2) provided on both sides of the spindle unit (200) and the bowl unit (300).

[0037] The camera unit (500) generates still images at a preset frame rate, and may continue to generate images while the process chamber (30) is in operation, or may generate a preset number of images according to the control of the chamber control unit (301) described below. The camera unit (500) is connected to the image processor (33) via a wired cable or a wireless channel. Multiple camera units (500) may be distinguished by individual wired cable connections, or provided in the form of IP cameras and configured with individual identification codes.

[0038] The camera unit (500) is positioned on the inner side of the upper surface of the process chamber (30) to photograph the spindle stage (210) and generates an image of the panel (P) loaded on the spindle stage (210). The camera unit (500) may be equipped with at least one camera, and FIG. 3 is an example equipped with a first camera (500-1) and a second camera (500-2). The image captured by the camera unit (500) is received by an image processor (33), which performs image processing and then generates an alarm if there is a problem with panel alignment.

[0039] The fan filter unit (700) is configured to be provided on the upper part of the main body (100) to blow air toward the internal space of the process chamber (100) to form a downward airflow.

[0040] Hereinafter, the configuration and operation of the components provided in the process chamber (30) of the panel processing device (1) will be explained.

[0041] The main body (100) is formed in a roughly rectangular shape, and a space is provided inside in which a panel (P) is received for development and drying. A shutter (110) is provided on the front of the main body (100) to open and close a passage through which the panel (P) is received. Referring to FIGS. 9 and FIGS. 11, the shutter (110) may be composed of a shutter plate (111), a lifting connection part (112), and a shutter driving part (113).

[0042] The shutter plate (111) may be formed as a rectangular plate having a predetermined thickness, and in a downwardly moved state, it blocks the passage (100b) through which the panel (P) is inserted and removed, and in an upwardly moved state, it opens the passage (100b). The lifting connection part (112) is connected to each side of the shutter plate (111), and each lifting connection part (112) can be moved up and down by the driving of the shutter driving part (113). When the lifting connection part (112) and the shutter plate (111) connected thereto move upward by the driving of the shutter driving part (113), the passage (100b) is opened, and with the panel (P) supported on the robot arm (22) of the robot (21) and the panel support part (23) connected thereto, the panel (P) passes through the passage (100b) by the loading operation of the robot (21) and is placed on the spindle stage pin (211; FIG. 11) of the spindle unit (200). When the panel (P) is placed on the spindle stage pin (211), the robot arm (22) of the robot (21) and the panel support part (23) move through the passage (100b) to the outside of the process chamber (30), and the lifting connection part (112) and the shutter plate (111) move downward by the driving of the shutter driving part (113) to close the passage (100b).

[0043] Referring to FIGS. 5 to 9, the spindle unit (200) includes a spindle stage (210) that supports and rotates a panel (P), a spindle rotation axis (220) that serves as the rotation center of the spindle stage (210), a spindle support member (230) that supports the spindle rotation axis (220) so as to be rotatable, a spindle rotation unit (240) that drives the spindle rotation axis (220) to rotate, and a clamp unit (250) that fixes the edge portion of the panel (P) supported on the spindle stage (210).

[0044] The spindle stage (210) may be formed in the shape of a circular plate having a predetermined thickness. On the spindle stage (210), a plurality of spindle stage pins (211) are formed protruding at predetermined intervals to support a rectangular panel (P). The bottom surface of the panel (P) is in contact with and supported by the upper surfaces of the plurality of spindle stage pins (211).

[0045] A pair of guide pins (212; 212a, 212b) are formed protruding from the spindle stage (210) to support the sides of two adjacent to the four corners of the panel (P), so that the panel (P) can be seated in a fixed position on a plurality of spindle stage pins (211). The pair of guide pins (212; 212a, 212b) are provided at each of the four corners of the square panel (P).

[0046] The upper portions of the guide pins (212; 212a, 212b) are formed in a conical shape such that the cross-sectional area gradually decreases as it extends upward. Thus, the two sides adjacent to the four corners of the panel (P) are guided in contact with the conical sides formed at the upper portions of the pair of guide pins (212; 212a, 212b), thereby allowing the panel (P) to descend and be positioned in place. When the panel (P) is seated on the plurality of spindle stage pins (211), the sides of the two sides adjacent to the four corners of the panel (P) are each in contact with the sides of the pair of guide pins (212; 212a, 212b), thereby stably supporting the panel so that it does not deviate laterally.

[0047] A spindle rotation axis (220) is coupled to the central part of the spindle stage (210). The spindle rotation axis (220) is rotatably supported via a bearing (230a) inside a spindle support member (230) fixed to the bottom surface (101) of the main body (100).

[0048] The upper part of the spindle support member (230) is coupled to the inside of a cylindrical spindle connection part (330; FIG. 5, FIG. 6, FIG. 17) that is formed protruding from the center of the bottom surface of the bowl body (310). The spindle stage (210) on which the panel (P) is seated is rotated integrally with the spindle rotation axis (220) by driving the spindle rotation unit (240).

[0049] Referring to FIGS. 6 and FIGS. 8, a pure water spray nozzle (221) for spraying pure water (DIW: De-ionized Water) and a drying air spray nozzle (222) for spraying drying air (CDA) are formed penetratingly within the spindle rotation axis (220) toward the bottom surface of a panel (P) supported on a spindle stage (210). During the development and drying process of the panel (P), the liquid sprayed onto the upper surface of the panel (P) by the nozzle arm unit (400) can flow down to the bottom surface of the panel (P), and foreign substances remaining on the bottom surface of the panel (P) can be removed by sequentially spraying pure water and drying air toward the bottom surface of the panel (P) through the pure water spray nozzle (221) and the drying air spray nozzle (222) formed penetrating the spindle rotation axis (220).

[0050] Referring to FIG. 11, the spindle rotation unit (240) is configured to rotate the spindle rotation axis (220) and includes a servo motor (241), a motor pulley (241a) coupled to the shaft of the servo motor (241), a rotation axis pulley (242) coupled to the spindle rotation axis (220), and a belt (243) that transmits power between the motor pulley (241a) and the rotation axis pulley (242).

[0051] A protrusion (242a) is formed on one side of the rotation shaft pulley (242), and includes a home point sensor (244) for detecting whether the rotation shaft pulley (242) and the spindle rotation shaft (220) are located at the rotation origin by detecting the position of the protrusion (242a).

[0052] By controlling the drive of the servo motor (241) to stop at the position where the origin sensor (244) detects the protrusion (242a) of the rotational shaft pulley (242), the guide pin (212; 212a, 212b) protruding on the spindle stage (210) stops at the set initial position, thereby allowing the panel (P) to be positioned at the set position on the spindle stage pin (211).

[0053] Meanwhile, the spindle support member (230) is equipped with a spindle axis vibration sensor (810) that detects the intensity of vibration to determine whether the bearing (230a) is worn and whether the spindle rotation axis (220) is misaligned.

[0054] Additionally, the servo motor (241) is equipped with a motor vibration sensor (820) that detects the intensity of vibration to determine whether there is damage to the servo motor (241) parts and whether there is a change in the tension of the belt (243).

[0055] The vibration intensity measured by the spindle axis vibration sensor (810) and the motor vibration sensor (820), respectively, and the range of vibration intensity set based on the normal state of the spindle rotation axis (220) and the servo motor (241) are compared with each other, and if the vibration intensity measured by the spindle axis vibration sensor (810) and the motor vibration sensor (820) exceeds the vibration range set based on the normal state, an alarm is generated so that the operator can recognize that maintenance of the spindle unit (200) is required and take necessary measures.

[0056] With the configuration of the spindle shaft vibration sensor (810) and the motor vibration sensor (820) as described above, the normal operation of the components constituting the spindle unit (200) can be self-checked in real time, thereby providing convenience for maintenance work on the spindle unit (200) device.

[0057] Referring to FIGS. 11 to 16, the clamp unit (250) is configured to fix and support the edge portion of a panel (P) seated on a spindle stage pin (211) protruding on a spindle stage (210), and includes a clamp rotation part (251, magnet clamp), a clamp fixing part (252), a hinge part (253), a clamp fixing part support (254), FIG. 12, a clamp pin support (256), and a clamp pin lifting drive part (257).

[0058] FIGS. 11 to 13 show a state in which the clamp rotating part (251) rotates upward around the hinge part (253) so that the panel (P) is positioned outside the path of entering the spindle stage pin (211). FIGS. 14 to 16 show a state in which the clamp rotating part (251) rotates downward to press downward on the upper surface of the corner portion of the panel (P) that is seated on the spindle stage pin (211) and fix it.

[0059] A hinge portion (253) that serves as the rotation center of the clamp rotating portion (251) is provided at one end of the clamp rotating portion (251) and one end of the clamp fixing portion (252), and a pressing portion (251a) is formed on the bottom surface of the other end of the clamp rotating portion (251) to protrude downward for a predetermined length and press the upper surface of the panel (P) downward. By rotating the clamp rotating portion (251) downward so that the pressing portion (251a) presses the upper surface of the corner portion of the panel (P) that is seated on the spindle stage pin (211) downward and fixes it, the panel (P) can be supported in a horizontal state without warpage, thereby allowing the liquid medicine and pure water to be uniformly supplied to the entire surface of the panel (P).

[0060] The clamp fixing part (252) is connected to one end of the hinge part (253) and fixed in a horizontal state, and is provided to come into contact with the clamp rotating part (251) when the clamp rotating part (251) rotates downward, thereby supporting the clamp rotating part (251).

[0061] Referring to FIGS. 12 and 15, a first magnet (251b) and a second magnet (252b), which are made of magnets of different polarities and exert mutual attraction, are combined on the upper and lower surfaces of the clamp rotating part (251) and the clamp fixing part (252). When the clamp rotating part (251) is rotated downward and comes into contact with the clamp fixing part (252), they are attached to each other by the magnetic force of the first magnet (251b) and the second magnet (252b), and the clamp rotating part (251) is pressed against the clamp fixing part (252), thereby allowing the clamp rotating part (251) to press against the upper surface of the panel (P).

[0062] On the spindle stage (210), a clamp fixing part support (254) is provided to support the clamp fixing part (252) at a predetermined height, and through holes (252a, 254a) are formed in the interior of the clamp fixing part (252) and the clamp fixing part support (254) and are formed in the upward and downward direction, and the interior of the through holes (252a, 254a) is provided so as to be able to move up and down.

[0063] As shown in FIGS. 11 and 12, when the clamp pin (255) moves upward, the upper end of the clamp pin (255) contacts the lower surface of the clamp rotating part (251) and rotates the clamp rotating part (251) upward.

[0064] As shown in FIGS. 14 to 16, when the clamp pin (255) descends, the clamp rotating part (251) rotates downward due to its own weight, and the first magnet (251b) and the second magnet (252b) stick together to maintain the downwardly moved state of the clamp rotating part (251).

[0065] Referring to FIG. 12 and FIG. 15, a through hole (254a) formed in the clamp fixing part support (254) has a step (254b) formed therein to catch the lower end of the clamp pin (255) so as to limit the range of downward movement of the clamp pin (255).

[0066] Additionally, the clamp unit (250) includes a support pin (256a) that moves the clamp pin (255) up and down through the spindle stage (210), and a clamp pin lifting drive unit (257) that moves the support pin (256a) up and down. The support pin (256a) is supported by a clamp pin support (256), and the clamp pin support (256) and the support pin (256a) can be moved up and down as a single unit by the driving of the clamp pin lifting drive unit (257).

[0067] Referring to FIG. 15, when the support pin (256a) is lowered, the upper end of the support pin (256a) is positioned below the bottom surface of the spindle stage (210), so that it does not interfere with the support pin (256a) when the spindle stage (210) rotates. In this way, when the support pin (256a) is positioned below the bottom surface of the spindle stage (210), the spindle stage (210) can rotate without being obstructed by the support pin (256a).

[0068] A clamp unit (250) is provided at each of the four corners of the square of the panel (P) and supports the four corners of the panel (P) placed on the spindle stage pin (211) by pressing downwards, thereby preventing the panel (P) from bending and supporting the panel (P) to maintain a horizontal state.

[0069] Referring to FIGS. 17 to 20, the bowl unit (300) includes a bowl body (310) provided to protrude on the edge of a spindle stage (210), a bowl cup (320) provided to be vertically movable on the inner side of the bowl body (310), a cylindrical spindle connecting part (330) formed to protrude from the center of the bottom surface of the bowl body (310) through which a spindle rotation axis (220) passes in an upward and downward direction, and a bowl cup lifting unit (340) for driving the bowl cup (320) up and down.

[0070] The bowl body (310) may be structured such that it is assembled by means of a bowl body upper portion (311) and a bowl body lower portion (312), and is installed in a fixed manner on the bottom surface (101) of the main body (100). The bowl body upper portion (311) forms the upper side of the bowl body (310), and the bowl body lower portion (312) forms the lower side and bottom surface of the bowl body (310). A cylindrical inner flange portion (311a) protruding in an upward and downward direction is formed on the inner surface of the bowl body upper portion (311).

[0071] The bowl cup (320) includes a cylindrical bowl cup side portion (321) positioned to face the inner side of the inner flange portion (311a) of the bowl body (310) with a predetermined clearance, an upper outer flange portion (322) of the bowl cup extended radially outward from the top of the bowl cup side portion (321) for a predetermined length, and an upper inner flange portion (323) of the bowl cup extended radially inward from the top of the bowl cup side portion (321) for a predetermined length.

[0072] While the panel (P) is being loaded onto or unloaded from the spindle stage (210), the bowl cup (320) remains in a lowered state, so that the panel (P) being transported by the robot (21) does not interfere with the bowl cup (320). During the development and drying process of the panel (P), the bowl cup (320) remains in a raised state to prevent debris scattered from the panel (P) from spreading to the outside of the bowl unit (300).

[0073] On the upper outer flange portion (322) of the bowl cup, a plurality of bowl cup support seating portions (322a) are formed at predetermined intervals in the circumferential direction, and a bowl cup lifting unit (340) for lifting and moving the bowl cup (320) is connected to the lower side of the bowl cup support seating portions (322a).

[0074] The bowl cup lifting unit (340) includes a lifting servo motor (341), a vertically upright guide rail (342), a lifting member (343) that moves up and down along the guide rail (342) by driving the lifting servo motor (341), and a bowl cup support (345) that moves up and down in conjunction with the lifting member (343) and supports a bowl cup support seating portion (322a).

[0075] A bowl cup support (345) is provided by penetrating the bowl body (310) vertically. When the bowl cup support (345) moves up and down by driving the lifting server motor (341), the bowl cup (320) supported by the bowl cup support (345) moves up and down. The bowl cup lifting unit (340) includes a connecting member (344) coupled to a lifting member (343) that interconnects a pair of bowl cup supports (345) that support adjacent bowl cup support seating portions (322a). Thus, a pair of bowl cup supports (345) can be moved up and down simultaneously using a single lifting server motor (341). A pair of bowl cup support mounting portions (322a) are provided on each side of the bowl cup (320) at a predetermined interval, and a bowl cup lifting unit (340) is provided on each side of the bowl unit (300).

[0076] On the bottom surface of the lower part (312) of the bowl body, a plurality of drain ports (312c) are formed at predetermined intervals in the circumferential direction to allow the liquid medicine and pure water supplied to the panel (P) to be discharged to the outside of the main body (100). In this embodiment, four drain ports (312c) are formed at positions spaced apart in the circumferential direction.

[0077] Based on the position of a plurality of drain ports (312c), the bottom surface of the bowl body (310) has an upwardly inclined surface (312a) formed radially inward and an upwardly inclined surface (312b) formed radially outward, so that the chemical liquid and pure water sprayed from the nozzle arm (410) onto the surface of the panel (P) and falling onto the bottom surface of the bowl body (310) can be guided toward the drain ports (312c) and discharged.

[0078] Referring together with FIG. 21, a fan filter unit (700) is provided at the top of the main body (100) to blow air downward to form a downward airflow toward the inner space of the bowl unit (300). The fan filter unit (700) includes a fan filter main body (710) with a built-in fan filter and a diffuser (720) provided at the bottom thereof to evenly distribute air and discharge it downward. The downward airflow of air blown from the fan filter unit (700) prevents residue from scattering from the panel (P) and spreading to the outside of the bowl unit (300) while the processing process of the panel (P) is in progress, and at the same time, the residue is guided downward and discharged to the outside of the main body (100).

[0079] On the bottom surface of the bowl body (310), a plurality of exhaust ports (312d) are formed at predetermined intervals in the circumferential direction to allow air blown downward from the fan filter unit (700) and dry air sprayed from the nozzle arm (410) onto the surface of the panel (P) to be discharged to the outside of the main body (100).

[0080] The bottom surface of the bowl body (310) has a downward inclined surface (312a) formed from the radially inner side to the radially outer side, so that the airflow flowing through the bottom surface of the bowl body (310) is induced to change direction toward the radially outer side of the bottom surface of the bowl body (310), and a plurality of exhaust ports (312d) are formed in a plurality at positions spaced apart in the circumferential direction on the radially outer side of the bottom surface of the bowl body (310), so that the airflow can be dispersed to the plurality of exhaust ports (312d) and exhausted smoothly. In this embodiment, four exhaust ports (312d) are formed at positions spaced apart in the circumferential direction.

[0081] Referring to FIGS. 22 to 25, the nozzle arm unit (400) includes at least one nozzle arm (410) for spraying a chemical solution, pure water, and dry air onto the surface of a panel (P), a nozzle arm lifting unit (440) for driving the nozzle arm (410) up and down to move the nozzle arm (410) between a process waiting position and a process progress position, and a nozzle arm rotating unit (450) for driving the nozzle arm (410) around.

[0082] The nozzle arm (410) is provided horizontally, and a plurality of nozzles are formed on the bottom surface of the nozzle arm (410) to spray one or more of a chemical solution, pure water, and dry air. As shown in FIG. 24 (a), a two-row nozzle consisting of a first nozzle (411) and a second nozzle (412) may be formed on the bottom surface of the nozzle arm (410), or as shown in FIG. 24 (b), a three-row nozzle consisting of a third nozzle (413), a fourth nozzle (414), and a fifth nozzle (415) may be formed on the bottom surface of the nozzle arm (410).

[0083] The nozzle arm unit (400) may be composed of a first nozzle arm unit (400-1) provided on one side of the spindle unit (200) and the bowl unit (300), and a second nozzle arm unit (400-2) provided on the other side of the spindle unit (200) and the bowl unit (300).

[0084] In one embodiment, the nozzle arm unit (400) may be composed of a first nozzle arm unit (400-1) that sequentially sprays a chemical solution and pure water onto the surface of a panel (P), and a second nozzle arm unit (400-2) that sprays dry air onto the surface of a panel (P).

[0085] In another embodiment, the nozzle arm unit (400) may be composed of a first nozzle arm unit (400-1) that sequentially sprays different types of liquid medicines onto the surface of the panel (P), and a second nozzle arm unit (400-2) that sequentially sprays pure water and dry air onto the surface of the panel (P).

[0086] A nozzle arm shaft (420) is connected to one end of the nozzle arm (410) in a vertical direction and forms the rotation center of the nozzle arm (410), and the nozzle arm shaft (420) penetrates the nozzle arm shaft cover (430) vertically and is supported rotatably on the nozzle arm shaft cover (430).

[0087] Referring to FIG. 25 (a) and FIG. 26, when the nozzle arm unit (400-1, 400-2) is in the process standby position, the nozzle arm (410) is located outside the spindle unit (200) and the bowl unit (300) and is in the process standby position in a lowered state.

[0088] When the nozzle arm (410) is in a process standby position, a collection container (460; FIG. 7, FIG. 8) may be provided on the lower side of the nozzle arm (410) to collect liquid or pure water falling from the spray nozzle of the nozzle arm (410).

[0089] Referring to FIG. 25 (b) and FIG. 27, during the processing of the panel (P), the nozzle arm unit (400-1) moves upward from the process waiting position and rotates to the upper side of the panel (P) supported on the spindle stage (210), and then descends to the set process progress position.

[0090] During the processing of the panel (P), the nozzle arm (410) rotates alternately in one direction and opposite direction within a predetermined angle range by driving the nozzle arm rotation unit (450) and sprays one of the chemical solution, pure water, and dry air onto the surface of the panel (P). By configuring the nozzle arm (410) to rotate alternately in one direction and opposite direction within a predetermined angle range and spray in this manner, one of the chemical solution, pure water, and dry air can be uniformly supplied to the surface of the square-shaped panel (P) without any blind spots.

[0091] Referring to FIG. 22, the nozzle arm lifting unit (440) is configured to include a lifting servo motor (441), a vertically upright guide rail (442), a lifting member (443) that moves up and down along the guide rail (442) by driving the lifting servo motor (441), and a ball spline (454) connecting the lifting member (443) and the nozzle arm shaft (420).

[0092] Referring to FIG. 23, the nozzle arm rotation unit (450) includes a rotary servo motor (451), a motor shaft pulley (451a) coupled to the shaft of the rotary servo motor (451), a rotary shaft pulley (452) coupled to a ball spline (454), and a belt (453) that transmits power between the motor shaft pulley (451a) and the rotary shaft pulley (452).

[0093] The ball spline (454) moves up and down without interference with the rotation shaft pulley (452), causing the nozzle arm (410) and the nozzle arm shaft (420) to move up and down, and when the rotation shaft pulley (452) rotates, it rotates together with the nozzle arm (410) and the nozzle arm shaft (420) to rotate.

[0094] A rotating plate (455) is coupled to a rotating shaft pulley (452), and a protrusion (455a) is formed on one side of the rotating plate (455). A home position sensor (456) is included to detect whether the nozzle arm (410) and the nozzle arm shaft (420) are positioned at the rotation home position by detecting the position of the protrusion (455a). In an embodiment, the rotation servo motor (451) can be controlled to stop driving at the position where the home position sensor (456) detects the protrusion (455a) of the rotating plate (455), thereby setting the home position where the nozzle arm (410) and the nozzle arm shaft (420) are positioned at the process standby position.

[0095] With reference to FIGS. 21, 26, and 27, the operation of the clamp unit (250), bowl unit (300), and nozzle arm unit (400; 400-1, 400-2) during the process is described.

[0096] As illustrated in FIG. 21, prior to the process proceeding, the clamp rotation part (251) of the clamp unit (250) is rotated upward by the upward drive of the clamp pin lifting drive part (257), and the panel (P) transported by the robot (21) is placed on the spindle stage pin (211). At this time, the bowl cup (320) of the bowl unit (300) is moved downward to avoid interference with the robot (21) transporting the panel (P). When the panel (P) is placed on the spindle stage pin (211) and the robot (21) moves outside the main body (100), the clamp rotation part (251) moves downward by the downward drive of the clamp pin lifting drive part (257) and comes into contact with the clamp fixing part (252). By being attached by the magnetic force of the first magnet (251b) and the second magnet (252b), the corner part of the panel (P) is pressed downward and fixedly supported. Then, the fan filter unit (700) is activated to form a downward airflow inside the process chamber (300).

[0097] Next, as shown in FIG. 26, the bowl cup (320) is moved upward by the upward drive of the bowl cup lifting unit (340) to a position higher than the height at which the panel (P) seated on the spindle stage pin (211) is located, thereby blocking residue from scattering from the surface of the panel (P) and moving to the outside of the bowl unit (300) during the process.

[0098] And, as shown in FIG. 27, the nozzle arm unit (400; 400-1, 400-2) moves upward from the process waiting position by the upward drive of the nozzle arm lifting unit (440), moves to the upper side of the panel (P) by the drive of the nozzle arm rotating unit (450), and then moves downward to the set process progress position by the downward drive of the nozzle arm lifting unit (440).

[0099] FIG. 27 shows the first nozzle arm unit (400-1) moving from the process waiting position to the process progress position, and the second nozzle arm unit (400-2) waiting at the process waiting position. When the first nozzle arm unit (400-1) moves to the process progress position, the spindle stage (210) rotates together with the panel (P) by driving the spindle rotation unit (240) of the spindle unit (200), and the nozzle arm (410) of the first nozzle arm unit (400-1) rotates alternately in one direction and opposite direction within a set angle range, sequentially spraying the chemical solution and pure water onto the surface of the panel (P) to proceed with the development process.

[0100] When the chemical liquid spraying and pure water spraying processes by the first nozzle arm unit (400-1) are completed, the first nozzle arm unit (400-1) returns to its original process standby position, and in the next step, the second nozzle arm unit (400-2) moves from the process standby position to the process progress position and sprays dry air onto the surface of the panel (P) while rotating alternately in one direction and opposite direction within a set angle range to remove the chemical liquid and pure water remaining on the surface of the panel (P), and when the dry air spraying process is completed, the second nozzle arm unit (400-2) returns to its original process standby position.

[0101] The camera unit (500) generates an image of the panel (P) loaded on the spindle stage (210) by being positioned within the process chamber (30) so that it can be photographed while looking down from a vertical upward or inclined upward direction. Since the position of the camera unit (500) is fixed and the correct position of the panel (P) loaded on the spindle stage (210) is already set, the part of the image generated by the camera unit (500) where the correctly aligned panel is displayed is also fixed. Therefore, the image processor (33), which will be described below, can determine the alignment state of the panel (P) by determining whether a specific 'part of interest' of the panel (P) is located at a 'designated position' within the image. Here, the part of interest of the panel (P) is preferably a corner of the panel (P) considering the ease of image processing, and at least two corners must be checked to determine whether it is aligned. If the area of ​​interest is set to the corner of the panel (P), a designated location corresponding to the area of ​​interest within the image is automatically set according to the position of the camera unit (500).

[0102] The first camera (500-1) and the second camera (500-2) of FIG. 28 are installed facing the spindle stage (210) on the inner side of the upper rear of the process chamber (30), and the area of ​​interest of the first camera (500-1) is set to the upper right corner of the panel (P) based on FIG. 28, and the area of ​​interest of the second camera (500-2) is set to the upper left corner of the panel (P) based on FIG. 28. The area hatched with dots indicates the field of view of the camera unit (500), and shows that the first camera (500-1) is set to shoot centering on the upper right corner of the panel (P), which is the area of ​​interest, and the second camera (500-2) is set to shoot centering on the upper left corner of the panel (P), which is the area of ​​interest. As in the example of FIG. 28, when the camera unit (500) photographs the panel (P) at an inclined angle from the side, it is desirable to set the corner of the panel (P) close to the camera unit (500) as the region of interest so as to reduce positional distortion in the image.

[0103] Hereinafter, the image captured by the first camera (500-1) is referred to as the "first camera image," and the image captured by the second camera (500-2) is referred to as the "second camera image." Depending on the installation position and orientation of the first camera (500-1) and the second camera (500-2), the entire image of the panel (P) may not be displayed in the first camera image and the second camera image. Even when the entire panel (P) is displayed, the panel may be displayed with the panel shifted to one side of the image. Although the first camera (500-1) and the second camera (500-2) are positioned to be offset to the left and right sides of the panel (P), they are positioned so that their optical axes are directed toward the region of interest, thereby generating an image suitable for verifying panel alignment.

[0104] Hereinafter, the configuration and operation of the process chamber controller (31) will be explained with reference to FIGS. 29 and FIGS. 30. The process chamber controller (31) may be housed inside the process chamber (30) or provided outside the panel processing device (1).

[0105] The process chamber controller (31) includes a chamber control unit (301) that controls the entire process of the process chamber (30), and an image processor (33) that processes images from the first camera (500-1) and the second camera (500-2).

[0106] The chamber control unit (301) controls the overall operation of the spindle unit (200), bowl unit (300), nozzle arm unit (400), camera unit (500), and fan filter unit (700) regarding the operation of the process chamber (30) according to a preset schedule.

[0107] The chamber control unit (301) provides the loading state and the unloading waiting state to the image processor (33) when the panel (P) is loaded onto the spindle stage pin (211) and is in an unloading waiting state. The loading / unloading waiting state of the panel (P) can be determined according to a schedule based on a control algorithm managed by the chamber control unit (301), but specifically, it can be confirmed by using a separate sensor (not shown) to check the position of the panel (P), by the operation of the robot (21), or by the operation of the panel support (23) connected to the robot arm (22).

[0108] Unless the first camera (500-1) and the second camera (500-2) are configured to continuously generate images at a preset frame rate during the operation of the process chamber (30), the chamber control unit (301) may control the first camera (500-1) and the second camera (500-2) to generate a preset number of images when the loading and unloading waiting of the panel (P) is confirmed, and may request the image processor (33) to verify the panel alignment by providing a preset 'alignment confirmation request'. Additionally, the chamber control unit (301) may illuminate the inside of the main body (100) by turning on an LED light (620) for the camera unit (500) to take a picture.

[0109] The image processor (33) includes an image storage unit (303), an alarm generation unit (305), and an image processing unit (307), and can be connected to a display unit (309). The display unit (309) can be provided outside the process chamber (30) or outside the panel processing device (1).

[0110] The image storage unit (303) is a memory that receives and stores the first camera image and the second camera image from the first camera (500-1) and the second camera (500-2). The image storage unit (303) can display the first camera image and / or the second camera image on the display unit (309).

[0111] The alarm generation unit (305) generates an alarm when it is determined that there is an error in panel alignment based on the image processing performed by the image processing unit (307), and displays the alarm on the display unit (309) or outputs the alarm using an alarm light (not shown), a speaker, and a bell.

[0112] The image processing unit (307) performs image processing on an image captured by the camera unit (500). The image processing of the image processing unit (307) includes pre-setting multiple gauges at multiple designated positions and determining whether the panel corners are aligned in the image generated by the camera unit (500), thereby determining alignment errors. Since the alignment of the panel (P) must be checked at least two points or the alignment of at least one line / surface must be checked, multiple gauges are set.

[0113] In the example of FIG. 29, since the first camera (500-1) and the second camera (500-2) are used, comparisons at multiple points can be performed by setting and comparing each designated location. The image processing unit (307) performs image processing on the first camera image and the second camera image received by the image storage unit (303) to determine the alignment state of the panel (P) and provides the determination result to the alarm generation unit (305).

[0114] The image processing unit (307) determines whether the part of interest of the panel (P) is located at a designated location in the image, and if the part of interest of the panel (P) is located at a designated location in the image, the panel (P) is considered to be aligned in place, and if the part of interest of the panel (P) is not located at a designated location in the image, it determines that an error has occurred in panel alignment.

[0115] In order to determine whether the part of interest of the panel is located at a designated location, the image processing unit (307) may set a sight that indicates the designated location within the image. Since the positions of the first camera (500-1) and the second camera (500-2) are different, the sight in the first camera image and the sight in the second camera image may be set differently from each other. It is sufficient for the image processing unit (307) to have the pixel coordinates of the sight in the first camera image and the second camera image, and for the purpose of image processing, there is no need for the sight to be displayed in the first camera image and the second camera image, nor is there a need to separately generate an image in which the sight is displayed in the first camera image or the second camera image.

[0116] FIG. 30 (a) illustrates an example of a first camera image (P1) in which a sight (511, 512) is set, and (b) illustrates an example of a second camera image (P2) in which a sight (513, 514) is set. The image processing unit (307) recognizes panel edges (C1a, C1b) in the first camera image (P1) and then determines whether the panel edges (C1a, C1b) are in contact with the sight (511, 512), and recognizes panel edges (C2a, C2b) in the first camera image (P2) and then determines whether the panel edges (C2a, C2b) are in contact with the sight (513, 514).

[0117] In the first camera image (P1), the panel edge (C1a) of the panel image (S1) is in contact with the sight (511, 512), so the panel alignment is determined to be normal, and the panel edge (C1b) of the panel image (S2) is not in contact with the sight (511, 512) and is misaligned, so the panel alignment is determined to be an error. In the second camera image (P2), the panel edge (C2a) of the panel image (S1) is in contact with the sight (513, 514), so the panel alignment is determined to be normal, and the panel edge (C2b) of the panel image (S2) is not in contact with the sight (513, 514) and is misaligned, so the panel alignment is determined to be an error.

[0118] The image processing unit (307) determines that there is a panel alignment error in at least one of the first camera image (P1) and the second camera image (P2), and determines that the panel (P) is not properly aligned with the spindle stage (210), and provides the result of the determination to the alarm generation unit (305).

[0119] The image processing unit (307) can perform image analysis on the images provided by the first camera (500-1) and the second camera (500-2) when it receives an alignment verification request from the chamber control unit (301). The alignment verification request from the chamber control unit (301) is generated before and after the panel processing process of the process chamber (30). That is, panel alignment is verified when the panel (P) is loaded into the correct position on the spindle stage pin (211) before the panel processing process proceeds, and when the panel (P) is unloaded from the spindle stage pin (211) after the panel processing process is completed.

[0120] The image processing unit (307) can visually display the alignment status of the panel (P) by displaying an image in which the panel and the gauge (511, 512, 513, 514) are displayed together through the display unit (309), as shown in (a) and (b) of FIG. 30.

[0121] Meanwhile, the process chamber (30) may additionally be equipped with a CCTV (610, closed-circuit television) to monitor the situation of the process proceeding inside the main body (100).

[0123] As described above, although the present invention has been explained in detail with reference to preferred embodiments, the present invention is not limited to the aforementioned embodiments, and it is possible to implement it with various modifications within the scope of the claims, the detailed description of the invention, and the attached drawings, and such modifications are also included in the present invention. Explanation of the symbols

[0124] 1 : Panel processing unit P : PLP panel 10: LPM Unit 11: FOUP 20 : EFEM 21 : Robot 22: Robot arm 23: Panel support 30: Process chamber 100: Main body 101 : Bottom surface of the main body 110 : Shutter 111: Shutter plate 112: Lifting connection 113: Shutter drive unit 200: Spindle unit 210: Spindle Stage 211: Spindle Stage Pin 212, 212a, 212b: Guide pins 220: Spindle rotation axis 221: Pure air spray nozzle 222: Dry air spray nozzle 230, 231, 232: Spindle support members 240: Spindle rotation unit 241: Servo motor 241a: Motor pulley 242: Rotating shaft pulley 242a: Protrusion 243 : Belt 244 : Home sensor 250 : Clamp unit 251 : Clamp rotating part (magnet clamp) 251a : Pressing part 251b : First magnet 252: Clamp fixing part 252a: Through hole 252b : Second magnet 253 : Hinge part 254: Clamp fixing part support 254a: Through hole 254b : Shoulder 255 : Clamp pin 256 : Climb pin support 256a : Support pin 257 : Clamp pin lifting drive unit 300 : Bowl unit 310: Bowl body 311: Bowl body upper 311a: Inner flange portion of the bowl body 312: Lower part of the bowl body 312a, 312b: Bottom surface of bowl body 312c: Drain port 312d : Exhaust port 320 : Bowl cup 321: Side of the bowl cup 322: Upper outer flange of the bowl cup 322a: Bowl cup support seating portion 323: Upper inner flange portion of the bowl cup 330: Spindle connection 340: Bowl cup lifting unit 341: Lifting servo motor 342: Guide rail 343 : Lifting member 344 : Connecting member 345 : Bowl cup support 400 : Nozzle arm unit 400-1: 1st nozzle arm unit 400-2: 2nd nozzle arm unit 410: Nozzle arm 411: First nozzle (chemical nozzle) 412: 2nd Nozzle (DIW Nozzle) 413: 3rd Nozzle (CDA Nozzle) 414 : 4th nozzle 415 : 5th nozzle 420: Nozzle arm shaft 430: Nozzle arm shaft cover 440: Nozzle arm lifting unit 441: Lifting servo motor 442 : Guide rail 443 : Lifting member 450: Nozzle arm rotation unit 451: Rotary servo motor 451a: Motor shaft pulley 452: Rotating shaft pulley 453 : Belt 454 : Ball spline 455: Rotating plate 455a: Protrusion 456 : Origin sensor 460 : Collection box 500: Camera Unit 500-1: First Camera 500-2 : Second Camera 511, 512: Sights for the first camera image 513, 514: Sights for the second camera image 610 : CCTV 620 : LED lighting 700: Fan Filter Unit (EFU) 710: Fan Filter Body 720: Diffuser 810: Spindle axis vibration sensor 820: Motor vibration sensor

Claims

Claim 1 A panel processing device for processing a PLP (Panel Level Package) panel comprises: a main body (100) having an internal space for receiving and processing the panel; a spindle unit (200) having a spindle stage (210) that supports and rotates the panel; a bowl unit (300) having a bowl body (310) protruding on the edge of the spindle stage (210), a bowl cup (320) that is vertically movable above the bowl body (310), and a bowl cup lifting unit (340) that drives the bowl cup (320) to be vertically movable; and a camera unit (500) provided within the main body (100) to photograph the panel and generate an image. The image processor (33) performs image processing on an image generated by the camera unit (500) to determine whether the panel is aligned to the correct position of the spindle stage (210) and generates an alarm if there is an alignment error; wherein the bowl cup (320) is positioned in a lowered state while the panel is loaded onto or unloaded from the spindle stage (210), and the bowl cup (320) is positioned in a raised state while the processing process of the panel is in progress to prevent residue from scattering from the panel and spreading to the outside of the bowl unit (300); a cylindrical inner flange portion (311a) protruding in the vertical direction is formed on the inner surface of the bowl body (310), and the bowl cup (320) is positioned to face the inner flange portion (311a) of the bowl body (310) with a predetermined gap. A panel processing device characterized by including a cup side portion (321), a bowl cup upper outer flange portion (322) extended radially outward from the top of the bowl cup side portion (321) for a predetermined length, and a bowl cup upper inner flange portion (323) extended radially inwardly for a predetermined length at the top of the bowl cup side portion (321). Claim 2 In claim 1, the image processor (33) includes an image processing unit (307) that determines the alignment error by pre-setting the pixel coordinates of a plurality of gauges (511, 512, 513, 514) to be placed at a plurality of pre-set designated positions based on an image generated by the camera unit (500) and determining whether the panel corners are aligned in the image generated by the camera unit (500), and the designated positions are positions on the image where the panel corners are captured in an aligned state in the posture of the camera unit (500). Claim 3 In paragraph 2, the camera unit (500) is positioned to photograph the panel from the side at an inclined angle and includes a first camera (500-1) and a second camera (500-2) that photograph the closest corner among the corners of the panel, and the image processing unit (307) determines whether one of the panel corners is aligned with a first camera image captured by the first camera (500-1) and another camera image (513, 514) set for the second camera (500-2) and determines whether another of the panel corners is aligned with a plurality of designated positions. Claim 4 A panel processing device according to paragraph 3, further comprising a display unit (309) that displays the first camera image and the second camera image processed by the image processing unit (307) so that they can be visually recognized, and also displays the scale together. Claim 5 A panel processing device according to claim 1, further comprising a chamber control unit (301) that sends an alignment confirmation request to the image processor (33) when the panel is loaded onto the spindle stage (210) and before it is unloaded, wherein the image processor (33) receives the alignment confirmation request from the chamber control unit (301) and performs the image processing on the image provided by the camera unit (500). Claim 6 A panel processing device characterized in that, in claim 5, the chamber control unit (301) determines the loading and unloading status of the panel by using the operation schedule of a robot (21) that loads and unloads the panel onto the spindle stage (210) or by using the operation of a panel support unit (23) connected to a robot arm (22). Claim 7 A panel processing device according to claim 1, wherein the image processor (33) includes an alarm generation unit (305) that generates the alarm according to the alignment error and displays it on the display unit (309), and also displays the alignment status of the panel according to the image processor (33) on the display unit (309).

Images