Test device with multi-axis stage structure for analysis of mechanical properties and fatigue characteristics of micro-sized samples

Abstract

A multi-axis stage structure test apparatus for analyzing the mechanical properties and low / high cycle fatigue characteristics of a sample is disclosed. The multi-axis stage structure test apparatus for analyzing the mechanical properties and low / high cycle fatigue characteristics of a sample comprises a sample plate on which the sample is placed, a connecting part with an 'L' structure that rotates the sample plate, a sample plate control drive unit connected to the connecting part capable of translational movement in three axes, and a probe control drive unit capable of translational movement in one axis including a test probe for the sample. The connecting part includes a first rotating member that rotates the sample plate on one side of the 'L' structure, and the other side of the 'L' structure is connected to a second rotating member that rotates the connecting part. Accordingly, all-directional movement of the sample plate is possible, making it possible to test the behavioral characteristics of a microstructure sample under not only monotonic loads but also repetitive loads, particularly low / high cycle fatigue loads, and enabling free movement of the sample plate for processing, testing, and analysis of the sample.

Description

Technology Field

[0001] The present invention relates to a test apparatus with a multi-axis stage structure for analyzing the mechanical properties and low / high cycle fatigue characteristics of micro-sized samples, and more specifically, to a test apparatus with a multi-axis stage structure capable of omnidirectional movement for analyzing the mechanical properties and low / high cycle fatigue characteristics of a sample to acquire mechanical properties of a microstructure sample and to analyze changes in the crystal structure inside the sample due to fatigue loading. Background Technology

[0002] Typically, piezoelectric elements are used as actuators in stages with micro- or nano-level precision or higher. As high-precision stages, these piezoelectric stages are used when nano-level precision or higher is required for movement over small distances.

[0003] Furthermore, the use of stages in a vacuum is very limited. Stages utilizing standard rotary motors are restricted from use in a vacuum because they use lubricants, such as grease, in the rotary drive mechanism. Additionally, there are limitations regarding precise movement and miniaturization.

[0004] Up until now, when performing tests by mounting a sample processed using a focused ion beam device onto a test device, a drive unit with three axes or fewer is mainly configured on the sample holder to adjust the position of the sample during the test process.

[0005] However, there are limitations in moving and aligning the sample stage through a drive unit of three axes or less, and due to these limitations in the movement of the sample stage, there is a problem that the precision is reduced when processing, testing, or analyzing with a scanning electron microscope using a focused ion beam device.

[0006] Accordingly, there has been an increased need for a test device with a multi-axis stage structure equipped with a drive unit that enables omnidirectional movement. The problem to be solved

[0007] The objective of the present invention is to provide a test apparatus with a multi-axis stage structure capable of omnidirectional movement for analyzing the mechanical properties and low-cycle / high-cycle fatigue characteristics of a sample, in order to acquire mechanical properties of a microstructure sample and analyze changes in the crystal structure within the sample due to fatigue loading. means of solving the problem

[0008] A multi-axis stage structure test device for analyzing mechanical properties and low / high cycle fatigue characteristics of a sample according to one embodiment of the present invention for achieving the above purpose comprises a sample stand on which the sample is located, a connecting part having an 'L' structure that rotates the sample stand, a sample stand control driving part connected to the connecting part that is capable of translational movement in three axes, and a probe control driving part capable of translational movement in a single axis that includes a test probe for the sample, wherein the connecting part comprises a first rotating member that rotates the sample stand on one side of the 'L' structure and a second rotating member that rotates the connecting part on the other side of the 'L' structure.

[0009] Here, the first rotating member rotates about a first axis and the second rotating member rotates about a second axis, and the first axis and the second axis are different from each other.

[0010] In addition, the sample stage control drive unit is capable of translational movement along the X-axis, Y-axis, and Z-axis, and the connecting unit moves according to the translational movement of the sample stage control drive unit, while being rotatable with respect to each of the first axis and the second axis.

[0011] In addition, the probe control drive unit includes a load sensor connected to the test probe, and can perform compression and tensile tests on the sample using the test probe and the load sensor.

[0012] In addition, the probe control drive unit moves the test probe to apply a load to the sample when the test probe and the sample are aligned in a straight line, measures the stress of the sample generated during the application of the load through the load sensor, and can derive the mechanical properties of the sample based on the measured stress.

[0013] In addition, the probe control drive unit can perform translational motion for a monotonic load test or a low-cycle / high-cycle cyclic load test on the sample when the test probe and the sample are positioned in a straight line.

[0014] In addition, the sample stage control drive unit and connection unit may move differently depending on the test operation mode and the analysis / measurement mode. Effects of the invention

[0015] According to various embodiments of the present invention as described above, all-directional movement of the sample holder becomes possible, making it possible to test the behavioral characteristics of microstructure samples under not only monotonic loads but also repetitive loads, particularly low-cycle / high-cycle fatigue loads, and enabling free movement of the sample holder for processing, testing, and analysis of the sample. Brief explanation of the drawing

[0016] FIG. 1 is a diagram illustrating the configuration of a multi-axis stage structure test apparatus for analyzing mechanical properties and low / high cycle fatigue characteristics of a sample according to one embodiment of the present invention. FIG. 2 is a drawing for explaining a structure for moving a sample stand of a multi-axis stage structure according to one embodiment of the present invention. FIG. 3 is a diagram illustrating the configuration of a probe control driving unit according to one embodiment of the present invention. FIGS. 4 and FIGS. 5 are drawings for explaining the operation process of a probe control driving unit according to an embodiment of the present invention. FIGS. 6 and 7 are drawings illustrating a multi-axis stage structure test apparatus for analyzing mechanical properties and low-cycle / high-cycle fatigue characteristics of a sample that moves differently according to a test operation mode and an analysis / measurement mode according to an embodiment of the present invention. Specific details for implementing the invention

[0017] The present invention will be described in more detail below with reference to the drawings. Furthermore, in describing the present invention, detailed descriptions of related known functions or configurations are omitted if it is determined that such detailed descriptions would unnecessarily obscure the essence of the invention. Additionally, the terms described below are defined considering their functions in the present invention, and these may vary depending on the intentions or relationships of the user or operator. Therefore, their definitions should be based on the content throughout this specification.

[0018] FIG. 1 is a diagram illustrating the configuration of a multi-axis stage structure test apparatus for analyzing mechanical properties and low / high cycle fatigue characteristics of a sample according to one embodiment of the present invention.

[0019] Referring to FIG. 1, a multi-axis stage structure test device (100) for analyzing mechanical properties and low / high cycle fatigue characteristics of a sample according to one embodiment of the present invention includes a sample stand (110), a connecting part (120) with an 'L' structure, a sample stand control driving part (130), and a probe control driving part (140).

[0020] Here, the multi-axis stage structure test device (100) for analyzing the mechanical properties and low / high cycle fatigue characteristics of a sample refers to a test device that allows for precise movement of the sample stage where the sample is located or for performing tests on the sample when processing or analyzing a sample of a microstructure through a focused ion beam device (FIB) or a scanning electron microscope (SEM), and is installed within a vacuum chamber connected to the focused ion beam device or the scanning electron microscope.

[0021] Specifically, the sample stand (110) is on which the sample to be processed, tested, and analyzed is placed, and the connecting part (120) with an 'L' structure can rotate the sample stand (110).

[0022] Here, one side of the connecting part (120) of the 'ㄱ' structure includes a first rotating member (121) that rotates the sample stand (110), and the other side is connected to a second rotating member (122) that rotates the connecting part (120).

[0023] Through the connecting part (120) of this 'ㄱ' structure, the connecting part (120) itself can rotate as the sample stage (110) itself rotates, thereby enabling rotational movement of the sample stage (110) based on two axes.

[0024] Meanwhile, the sample stage control drive unit (130) is connected to the connecting unit (120) and is capable of translational movement in three axes. Accordingly, the three-axis translational movement of the sample stage control drive unit (130) and the two-axis rotational movement of the connecting unit (120) are combined, so that the sample stage (110) can perform translational and rotational movement in a total of five axes.

[0025] Additionally, the probe control drive unit (140) includes a test probe for the sample and is capable of single-axis translational motion. Accordingly, the test probe can be moved toward the sample or away from the sample through the probe control drive unit (140), and the movement period can also be controlled.

[0026] FIG. 2 is a drawing for explaining a structure for moving a sample stand of a multi-axis stage structure according to one embodiment of the present invention.

[0027] Referring to FIG. 2, a first rotating member (121) that rotates a sample stand (120) connected to one side of a connecting part (120) is capable of rotational movement (123) with respect to a first axis (126), and a second rotating member (122) that rotates the connecting part (120) itself connected to the other side of the connecting part (120) is capable of rotational movement (125) with respect to a second axis (124). Thus, the first axis (126) and the second axis (124) are different from each other.

[0028] Additionally, the sample stage control drive unit (130) is capable of translational movement along the X-axis (131), Y-axis (132), and Z-axis (133). Furthermore, the connecting unit (120) moves according to the translational movement of the sample stage control drive unit (130), and is capable of rotational movement along the first axis (126) and the second axis (124), respectively.

[0029] Accordingly, the sample stage (110) connected to the connecting part (120) moves by a combination of rotational movement (123) based on the first axis (126) of the connecting part (120), rotational movement (125) based on the second axis (124), and translational movement in the X-axis (131), Y-axis (132), and Z-axis (133) of the sample stage control drive part (130), and movement in all directions is made possible through rotational movement and translational movement based on a total of 5 axes.

[0030] Additionally, the probe control drive unit (140) is capable of single-axis translational movement in the Z-axis direction, and the translational movement of the sample stage control drive unit (130) and the probe control drive unit (140) can be implemented through a piezo element.

[0031] Meanwhile, the probe control drive unit (140) includes a load sensor connected to a test probe, and can perform compression and tensile tests on a sample using the test probe and the load sensor.

[0032] FIG. 3 is a diagram illustrating the configuration of a probe control driving unit according to one embodiment of the present invention.

[0033] Referring to FIG. 3, the probe control drive unit (140) includes a test probe (141) and a load sensor (142) connected to the test probe (141).

[0034] In addition, the probe control drive unit (140) can perform compression and tensile tests on a sample using a test probe (141) and a load sensor (142), and can derive a stress-strain relationship by measuring the stress generated during the test through the load sensor (142), and derive the mechanical properties of the sample based thereon.

[0035] Specifically, the probe control drive unit (140) moves the test probe to apply a load to the sample when the test probe and the sample are aligned in a straight line, measures the stress of the sample generated during load application through a load sensor, and can derive the mechanical properties of the sample based on the measured stress.

[0036] FIGS. 4 and FIGS. 5 are drawings for explaining the operation process of a probe control driving unit according to an embodiment of the present invention.

[0037] Referring to FIG. 4, the probe control drive unit (140) causes the test probe (141) to move toward the sample direction (410) when the test probe (141) and the sample are aligned in a straight line, thereby causing the test probe (141) to apply a load to the sample.

[0038] And, the stress of the sample generated during load application can be measured by the load sensor (142), and the mechanical properties of the sample can be derived based on the stress of the sample measured in this way.

[0039] Additionally, the probe control drive unit (140) can perform translational motion for a monotonic load test or a low-cycle / high-cycle repetitive load test on the sample when the test probe and the sample are aligned in a straight line.

[0040] Referring to FIG. 5, the probe control drive unit (140) can move the test probe (141) in a direction (510) away from the sample when the test probe (141) and the sample are aligned in a straight line, and can perform a repeated load test on the sample by repeatedly moving the test probe (141) toward the sample direction (410) as in FIG. 4 and moving the test probe (141) away from the sample direction (510) as in FIG. 5.

[0041] Additionally, the probe control drive unit (140) may control the movement cycle of the test probe (141) to perform a low-cycle / high-cycle repetitive load test, perform a low-cycle repetitive load test, and perform a monotonic load test by causing the test probe (141) to move continuously in the sample direction (410).

[0042] Meanwhile, the sample stage control drive unit (130) and the connection unit (120) can move differently depending on the test operation mode and the analysis / measurement mode.

[0043] FIGS. 6 and 7 are drawings illustrating a multi-axis stage structure test apparatus for analyzing mechanical properties and low-cycle / high-cycle fatigue characteristics of a sample that moves differently according to a test operation mode and an analysis / measurement mode according to an embodiment of the present invention.

[0044] Referring to FIG. 6, a test device (100) with a multi-axis stage structure for analyzing mechanical properties and low-cycle / high-cycle fatigue characteristics of a sample that moves differently depending on the test operation mode and analysis / measurement mode according to one embodiment of the present invention can be operated in a test mode and an analysis / measurement mode. The top of FIG. 6 shows the test device (100) with a multi-axis stage structure for analyzing mechanical properties and low-cycle / high-cycle fatigue characteristics of a sample that moves differently depending on the test operation mode and analysis / measurement mode operating in a test mode (610), and the bottom of FIG. 6 shows the test device (100) with a multi-axis stage structure for analyzing mechanical properties and low-cycle / high-cycle fatigue characteristics of a sample that moves differently depending on the test operation mode and analysis / measurement mode operating in an analysis / measurement mode (620).

[0045] Specifically, in the test operation mode, the sample stand control drive unit (130) and the connection unit (120) are moved so that the sample stand (120) can be positioned perpendicular to the test probe (141) so that the test probe (141) and the sample can be placed in a straight line.

[0046] In addition, in the analysis / measurement mode, the sample stage (120) is rotated so that it faces upward through the second rotating member (122) so that the sample is positioned at a location where an electron beam irradiated from the scanning electron microscope (SEM) can be irradiated as in FIG. 7, and the sample stage control drive unit (130) can be controlled to move in the Y-axis direction, that is, upward direction, so as to enter the electron beam irradiation range of the scanning electron microscope.

[0047] In this way, when positioning the sample stand (120) so that the sample is aligned with the test probe (141) in the test operation mode (610) and the analysis / measurement mode (620), or positioning the sample stand (120) so that the sample enters the electron beam irradiation range of the scanning electron microscope, translational movement on the X-axis, Y-axis, and Z-axis of the sample stand control drive unit (130) and rotational movement based on the first axis (126) and the second axis (124) of the connecting unit (120) can be performed.

[0048] Meanwhile, referring to FIG. 7, as described above, the sample stage (120) is positioned so that the sample enters the electron beam irradiation range of the scanning electron microscope in the analysis / measurement mode (620). To achieve this, translational movement on the X-axis, Y-axis, and Z-axis of the sample stage control drive unit (130) and rotational movement based on the first axis (126) and second axis (124) of the connecting unit (120) can be performed.

[0049] In addition, a multi-axis stage structure test device (100) for analyzing the mechanical properties and low / high cycle fatigue characteristics of a sample according to one embodiment of the present invention may be located in a vacuum chamber together with a scanning electron microscope or a focused ion beam device, and may control a connecting part (120) and a sample stage control driving part (130) to change the position of the sample in the vacuum chamber.

[0050] Meanwhile, although the processing mode is not separately described in FIG. 6 above, the multi-axis stage structure test device (100) for analyzing the mechanical properties and low / high cycle fatigue characteristics of a sample according to one embodiment of the present invention can control the sample control drive unit (130) and the connection unit (120) so that the sample is positioned at a position where processing is possible, and when the sample is positioned at a position where processing is possible, the sample can be processed through a focused ion beam device.

[0051] In this way, the sample can be controlled via a sample stage control drive unit (130) and a connection unit (120) so that the sample can be positioned at a location where processing is possible, a location where testing is possible, and a location where analysis / measurement is possible through a multi-axis stage structure test device (100) for analyzing the mechanical properties and low / high cycle fatigue characteristics of a sample according to one embodiment of the present invention within a single vacuum chamber.

[0052] Furthermore, although preferred embodiments of the present invention have been illustrated and described above, the present invention is not limited to the specific embodiments described above. It is understood that various modifications can be made by those skilled in the art without departing from the essence of the invention as claimed in the claims, and such modifications should not be understood individually from the technical spirit or perspective of the present invention. Explanation of the symbols

[0053] 100: Multi-axis stage structure test device for analysis of mechanical properties and low / high cycle fatigue characteristics of samples 110: Sample stand 120: Connection part 130: Sample stage control drive unit 140: Probe control drive unit

Claims

Claim 1 A multi-axis stage structure test apparatus for analyzing the mechanical properties and low / high cycle fatigue characteristics of a sample, comprising: a sample stand on which the sample is located; a connecting part having an 'L' structure for rotating the sample stand; a sample stand control drive unit connected to the connecting part and capable of translational movement in three axes; and a probe control drive unit including a test probe for the sample and capable of single-axis translational movement; wherein the connecting part comprises, one side of the 'L' structure including a first rotating member for rotating the sample stand, and the other side of the 'L' structure connected to a second rotating member for rotating the connecting part; and wherein the sample stand control drive unit and the connecting part control the sample to position the sample within a single vacuum chamber without removing the sample, such that the sample is positioned at a location where processing of the sample is possible, a location where mechanical testing of the sample is performed, and a location where analysis / measurement of the sample is performed. Claim 2 A multi-axis stage structure test apparatus for analyzing mechanical properties and low-cycle / high-cycle fatigue characteristics of a sample, wherein, in claim 1, the first rotating member rotates about a first axis and the second rotating member rotates about a second axis, and the first axis and the second axis are different from each other. Claim 3 A multi-axis stage structure test apparatus for analyzing mechanical properties and low-cycle / high-cycle fatigue characteristics of a sample, wherein, in paragraph 2, the sample stage control drive unit is capable of translational movement in the X-axis, Y-axis, and Z-axis, and the connecting unit moves according to the translational movement of the sample stage control drive unit and is rotatable with respect to each of the first axis and the second axis. Claim 4 A multi-axis stage structure test apparatus for analyzing the mechanical properties and low-cycle / high-cycle fatigue characteristics of a sample, wherein, in paragraph 3, the probe control drive unit includes a load sensor connected to the test probe, and performs compression and tensile tests on the sample using the test probe and the load sensor. Claim 5 A multi-axis stage structure test device for analyzing mechanical properties and low-cycle / high-cycle fatigue characteristics of a sample, wherein, in claim 4, the probe control drive unit moves the test probe to apply a load to the sample when the test probe and the sample are positioned in a straight line, measures the stress of the sample generated during the application of the load through the load sensor, and derives the mechanical properties of the sample based on the measured stress. Claim 6 In claim 5, the probe control drive unit is a multi-axis stage structure test device for analyzing the mechanical properties and low / high cycle fatigue characteristics of a sample, wherein the probe control drive unit performs translational motion for a monotonic load test or a low / high cycle cyclic load test on the sample when the test probe and the sample are positioned in a straight line. Claim 7 In claim 6, the test apparatus having a multi-axis stage structure for analyzing mechanical properties and low-cycle / high-cycle fatigue characteristics of a sample, wherein the sample stage control drive unit and the connection unit move differently depending on the test operation mode and the analysis / measurement mode.

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