Contact terminal, terminal assembly and device testing apparatus

Abstract

[Project] Provides a contact terminal that enables improved design freedom. [Solution] The contact terminal (50) is provided with a contact portion (70) that is unilaterally contactable with the pad (24), a pressing member (60) that presses the contact portion (70) relative to the pad (24), and an electrical connection member (80) having wiring (85)(86) connected to the contact portion (70), and the pressing member (60) and the electrical connection member (80) are independent members.

Description

Technology Field

[0001] The present invention relates to a contact terminal, a terminal assembly having the contact terminal, and a device test device having the terminal assembly. Background Technology

[0002] A signal contact connecting a balanced cable and a printed circuit board is known (see, for example, Patent Document 1). This signal contact has a contact portion that contacts the contact portion of the signal layer of the balanced cable and a terminal portion that connects to the connection portion of the printed circuit board. This signal contact is composed of a conductive metal and electrically connects the contact portion of the balanced cable and the connection portion of the printed circuit board, and also functions as a spring that presses the contact portion of the balanced cable. Prior art literature

[0003] Japanese Patent Publication No. 2014-225412 The problem to be solved

[0004] The above signal contact performs both electrical and mechanical functions as a single component. Consequently, there is a problem in that improving the mechanical performance of the signal contact may lead to a decrease in electrical performance, and electrical constraints may arise regarding the mechanical design.

[0005] The problem that the present invention aims to solve is to provide a contact terminal, a terminal assembly, and a device test device capable of improving the degree of design freedom. means of solving the problem

[0006] [1] The first aspect of the present invention is a contact terminal having a contact portion that is unilaterally contactable with a first conductive member, a pressing member that presses the contact portion relative to the first conductive member, and a first conductive path connected to the contact portion. The pressing member and the electrical connection member are independent members of each other.

[0007] [2] In the present invention, sun 2 may be a contact terminal of sun 1, wherein the pressing member may be a contact terminal having an elastic deformation part that is elastically deformed when the contact part is pressed relative to the first conductive member.

[0008] [3] The sun 3 of the present invention may be a contact terminal in which the electrical length of the first conductive path is constant when the elastic deformation part is deformed.

[0009] [4] In the contact terminal of the present invention, the contact terminal of the first conductive path may be a contact terminal having an insulator that surrounds the entire circumference of the first conductive path.

[0010] [5] In the contact terminal of the present invention, the insulator may be a contact terminal composed of a resin material.

[0011] [6] In the present invention, 6 is a contact terminal of any one of 2 to 5, the elastic deformation part may be a resin spring made of a resin material that is elastically deformed when the contact part is relatively pressed against the first conductive member, a metal spring made of a metal material that is elastically deformed when the contact part is relatively pressed against the first conductive member, or an air spring that is compressed by the relative pressure of the contact part against the first conductive member.

[0012] [7] In the present invention, 7 is a contact terminal of any one of 2 to 5, wherein the pressurizing member is made of a resin material, and the elastic deformation part may be a contact terminal having a resin spring that elastically deforms when the contact part is pressed relative to the first conductive member.

[0013] [8] The sun 8 of the present invention may be a contact terminal of a sun 7, wherein the contact terminal has a plurality of contact parts, the electrical connection member has a plurality of first conductive paths connected to the plurality of contact parts, and the pressure member has a plurality of elastic deformation parts corresponding to the plurality of contact parts, and the plurality of elastic deformation parts may be a contact terminal formed integrally.

[0014] [9] In the present invention, sun 9 is a contact terminal of any one of suns 1 to 8, wherein the contact terminal has a plurality of contact portions, and the electrical connection member includes a flexible printed circuit board having flexibility, and the flexible printed circuit board may be a contact terminal having a plurality of first conductive paths connected to the plurality of contact portions.

[0015]

[10] The sun 10 of the present invention may be a contact terminal of a sun 9, wherein the flexible printed circuit board may be a contact terminal having a first insulating layer, a plurality of first conductive paths provided on the first insulating layer, and a second insulating layer superimposed on the first insulating layer to cover the plurality of first conductive paths.

[0016]

[11] The sun 11 of the present invention may be a contact terminal in which the plurality of first conductive paths are spaced apart and arranged on the first insulating layer.

[0017]

[12] In the present invention, the contact terminal of the present invention 12 may be a contact terminal having a slit disposed between the plurality of first conductive paths.

[0018]

[13] In the contact terminal of the present invention, the slit may be a contact terminal that penetrates at least one of the first and second insulating layers.

[0019]

[14] In the present invention, sun 14 may be a contact terminal of sun 12 or 13, the slit may be a contact terminal that penetrates the flexible printed circuit board.

[0020]

[15] The sun 15 of the present invention may be a contact terminal in any one of suns 11 to 14, wherein the plurality of first conductive paths may be a contact terminal comprising a plurality of grounding wires and a plurality of signal wires each disposed between the grounding wires.

[0021]

[16] The sun 16 of the present invention may be a contact terminal of the sun 15, wherein the flexible printed circuit board is provided on the first insulating layer and may be a contact terminal having a first ground layer facing the signal line through the first insulating layer.

[0022]

[17] The sun 17 of the present invention may be a contact terminal of sun 15 or 16, wherein the flexible printed circuit board is provided on the second insulating layer and may be a contact terminal having a second ground layer facing the signal line through the second insulating layer.

[0023]

[18] The sun 18 of the present invention may be a contact terminal of any one of suns 15 to 17, wherein the contact part may be a contact terminal including a signal contact part connected to the signal line and a ground contact part connected to the ground line.

[0024]

[19] The present invention may be a contact terminal of

[0025]

[20] The present invention's 20 may be a contact terminal of any one of the 1 to 19, wherein the contact portion has a metal layer maintained in the pressurizing member, and the metal layer may be a contact terminal provided in the tip portion of the pressurizing member.

[0026]

[21] The sun 21 of the present invention is a contact terminal of sun 20, wherein the pressurizing member has an elastic deformation portion that is elastically deformed when the contact portion is pressed relative to the first conductive member, and the contact portion may be a contact terminal provided at the tip portion having the elastic deformation portion.

[0027]

[22] The sun 22 of the present invention may be a contact terminal of sun 20 or 21, wherein the metal layer extends linearly from the tip portion and satisfies the following (1) equation.

[0028] L b <L a ×1 / 10 … (1)

[0029] However, in the above equation (1), L a is the length of the first conductive path above, and L b is the length of the metal layer mentioned above.

[0030]

[23] In any one of the suns 20 to 22 of the present invention, the contact terminal may have a plurality of contact portions, and the plurality of contact portions may be contact terminals provided in a single tip portion.

[0031]

[24] In the present invention, sun 24 may be a contact terminal of any one of suns 1 to 23, wherein the pressurizing member may be a contact terminal having an elastic deformation part that is elastically deformed when the contact part is pressed relative to the first conductive member and a support part that supports the elastic deformation part.

[0032]

[25] The present invention's sun 25 may be a contact terminal in which the pressure member is made of a resin material and the elastic deformation part and the support part are integrally formed.

[0033]

[26] The sun 26 of the present invention may be a contact terminal that passes through the tip of the pressurizing member and is also a virtual straight line parallel to the centerline of the support member, which may be a contact terminal that is offset from the centerline.

[0034]

[27] In the present invention, sun 27, in any one of suns 1 to 26, the pressure member may be a contact terminal having an elastic deformation part that is elastically deformed when the contact part is pressed relative to the first conductive member, and a deformation limiting part that limits the elastic deformation of the elastic deformation part by coming into contact with the first conductive member.

[0035]

[28] The sun 28 of the present invention may be a contact terminal in which the pressure member is made of a resin material and the elastic deformation part and the deformation limiting part are integrally formed.

[0036]

[29] The present invention's sun 29 may be a contact terminal of sun 28, wherein the pressurizing member has a support member that supports the elastic deformation part and the deformation limiting part, and the elastic deformation part, the deformation limiting part, and the support member may be integrally formed.

[0037]

[30] The sun 30 of the present invention may be a contact terminal of any one of suns 1 to 29, wherein the contact portion may be a contact terminal that comes into contact with the first conductive member in conjunction with the relative movement of the contact terminal with respect to the first conductive member.

[0038]

[31] In the present invention, the contact terminal of the contact terminal of the sun 30 may be a contact terminal in which the direction of pressure applied by the pressure member is parallel to the direction of relative movement of the contact terminal with respect to the first conductive member.

[0039]

[32] The sun 32 of the present invention may be a contact terminal in which any one of suns 1 to 31, and the signal passing through the first conductive path is a high frequency signal of 1 GHz or higher.

[0040]

[33] In the present invention, sun 33 is a contact terminal of any one of suns 1 to 32, the contact terminal is a terminal that electrically connects the first conductive member and the second conductive member, and the first conductive path may be a contact terminal that is electrically connected to the second conductive member.

[0041]

[34] The sun 34 of the present invention is a terminal assembly having a plurality of contact terminals of any one of suns 1 to 33 and a support member that supports the plurality of contact terminals.

[0042]

[35] The sun 35 of the present invention may be a terminal assembly of sun 34, wherein the support member has a wiring board having a second conductive path, and the first conductive path is connected to the second conductive path.

[0043]

[36] The sun 36 of the present invention may be a terminal assembly in which a second conductive member is connected to the second conductive path in the terminal assembly of the sun 35.

[0044]

[37] The present invention's 37 may be a terminal assembly in which, in any one of the terminal assemblies of 34 to 36, the plurality of contact terminals are arranged such that the pressing members are facing each other.

[0045]

[38] The present invention is a device test device that tests a DUT, comprising a first conductive member, a second conductive member, and a terminal assembly of any one of the first and second conductive members, wherein the first conductive path of the contact terminal is electrically connected to the second conductive member, and the contact terminal is a device test device that electrically connects the first conductive member and the second conductive member. Effects of the invention

[0046] In the present invention, since the pressurizing member and the electrical connection member are independent of each other, mutual constraints between the design of the pressurizing member and the design of the electrical connection member can be reduced, and the degree of freedom in the design of the contact terminal can be improved. Brief explanation of the drawing

[0047] FIG. 1 is a schematic cross-sectional view showing the overall configuration of a device test apparatus according to an embodiment of the present invention. FIG. 2 is an exploded cross-sectional view showing the DSA and the motherboard in an embodiment of the present invention, corresponding to Part II of FIG. 1. FIG. 3 is a front perspective view of a terminal assembly in an embodiment of the present invention. FIG. 4 is a perspective view of a terminal assembly seen from the rear in an embodiment of the present invention. FIG. 5 is a cross-sectional view showing a terminal assembly in an embodiment of the present invention, following the VV line of FIG. 3. FIG. 6 is a plan view showing a contact terminal and a wiring board in an embodiment of the present invention. FIG. 7 is an exploded perspective view showing a contact terminal in an embodiment of the present invention. FIG. 8 is a side view showing a pressurizing member in an embodiment of the present invention. FIG. 9 is a bottom view showing an electrical connection member in an embodiment of the present invention. FIG. 10 is a partial cross-sectional view showing an electrical connection member in an embodiment of the present invention, and is a drawing along line XX of FIG. 9. FIG. 11 is a partial cross-sectional view showing a first modified example of an electrical connection member in an embodiment of the present invention. FIG. 12 is a plan view showing a second modified example of an electrical connection member in an embodiment of the present invention. FIG. 13 is a perspective view showing a contact portion formed at the tip of a pressurizing member in another embodiment of the present invention. FIG. 14 is a cross-sectional view of the tip portion of a pressure member in another embodiment of the present invention, taken along line XIV-XIV of FIG. 13. FIGS. 15(a) to FIGS. 15(c) are cross-sectional views showing first to third variations of a contact terminal in an embodiment of the present invention. Specific details for implementing the invention

[0048] Hereinafter, embodiments of the present invention will be described based on the drawings.

[0049] FIG. 1 is a schematic cross-sectional view showing the overall configuration of a device test device (1) according to an embodiment of the present invention, and FIG. 2 is an exploded cross-sectional view showing the DSA (20) and the motherboard (30) in the present embodiment, corresponding to Part II of FIG. 1.

[0050] In the present embodiment, the device test device (1) is a device for testing a device to be tested (hereinafter also simply referred to as “DUT”) (200). Although not specifically limited, specific examples of the DUT (200) to be tested may include, for instance, semiconductor devices such as memory devices, logic devices, or SoCs (System on chip). The device test device (1) tests the electrical characteristics of the semiconductor device (200).

[0051] As shown in FIG. 1, this device test device (1) is equipped with a tester (10) that performs a test of the DUT (200) and a handler (130) that handles the DUT (200) and presses the DUT (200) into the socket (21). The tester (10) is equipped with a DSA (20), a motherboard (30), a test head (110), and a main frame (120). In addition, the configuration of the tester (10) is not particularly limited to the following, provided that it is equipped with a terminal assembly (40) described later.

[0052] As shown in FIGS. 1 and 2, the DSA (Device Specific Adapter) (20) is equipped with a socket (21) and a wiring board (23). The DSA (20) is electrically connected to the test head (110) through the motherboard (30). The DSA (20) is detachable from the motherboard (30). The DSA (20) is designed according to the type of DUT (200) and is replaced with one corresponding to the type when the type of DUT (200) is changed. In addition, the number of DSAs (20) mounted on the motherboard (30) is not particularly limited, and multiple DSAs (20) may be mounted on the motherboard (30).

[0053] During testing of the DUT (200), the DUT (200) is pressed against the socket (21) by the handler (130), thereby electrically connecting the DUT (200) and the socket (21). The socket (21) is equipped with a plurality of contactors (22) that each contact the terminal (210) of the DUT (200). Although not specifically limited, specific examples of the contactors (22) may include, for instance, a POGO pin, a vertical probe needle, a cantilever probe needle, an anisotropic conductive rubber sheet, a bump provided on a membrane, or a contactor manufactured using MEMS technology.

[0054] The wiring board (23) is a rigid wiring board on which the socket (21) is mounted on its upper surface. Although not specifically illustrated, a socket guide for positioning the DUT (200) relative to the socket (21) may be mounted on the socket (21). The wiring board (23) has a plurality of pads (24) on the lower surface of the wiring board (23). These plurality of pads (24) are arranged on the lower surface of the wiring board (23) to correspond to a plurality of contact parts (70) (described later) of the terminal assembly (40) of the motherboard (30). The socket (21) and the pads (24) are electrically connected through a conductive path (not illustrated), such as a wiring pattern or through-hole formed on the wiring board (23).

[0055] In addition, in FIGS. 1 and 2, only one socket (21) is mounted on the wiring board (23), but in reality, multiple sockets (21) are mounted on a single wiring board (23). Accordingly, in this embodiment, tens of thousands of pads (24) are provided on the lower surface of the wiring board (23). Also, the wiring board (23) of this embodiment has a size of, for example, about 1200 mm × 500 mm. Furthermore, the number of pads (24) on the wiring board (23) and the size of the wiring board (23) are not particularly limited to the above.

[0056] The motherboard (30) is a relay that electrically connects the DSA (20) and the test head (110). The motherboard (30) is equipped with a housing (31), a terminal assembly (40), and a plurality of coaxial cables (100). One end of the coaxial cable (100) (the upper end in FIG. 2) is connected to the wiring board (90) (described later) of the terminal assembly (40). When the DSA (20) is mounted on the motherboard (30), the contact portion (70) of the terminal assembly (40) is pressed against the pad (24) of the DSA (20) described above, and the contact portion (70) comes into contact with the pad (24), thereby electrically connecting the wiring board (23) of the DSA (20) and the coaxial cable (100). Additionally, the configuration of the terminal assembly (40) will be described in detail later.

[0057] As shown in FIG. 1, the test head (110) houses a test module (Pin Electronic Card) (111) for testing the DUT (200). This test module (111) is a wiring board on which electronic components, such as test devices used for testing the DUT (200), are mounted. This test module (111) is electrically connected to the coaxial cable (100) through a connector (not shown) connected to the other end of the coaxial cable (100) of the motherboard (30). This test module (111) tests the DUT (200) by exchanging test signals with the DUT (200) through the DSA (20) and the motherboard (30). The test head (110) is connected to the main frame (120) via a cable (112).

[0058] The main frame (tester body) (120) is, for example, a computer that executes a program, and communicates with each test module (111) within the test head (110) according to the program to control each test module (111). Each test module (111) generates a test signal according to instructions from the main frame (120) and outputs the test signal to the DUT (200).

[0059] The handler (130) is equipped with, for example, a transfer device that transfers a test tray loaded with a DUT (200) to the upper side of a DSA (20), a pressurizing device that presses the DUT (200) into a socket (21) of the DSA (20), and a sorting device that removes the DUT (200) from the test tray and sorts it according to the test results.

[0060] Additionally, this handler (130) is equipped with a chamber (131) as a temperature control device for applying high or low temperature thermal stress to the DUT (200). This chamber (131) is configured as a constant temperature bath capable of maintaining the temperature inside the bath at a desired temperature. Accordingly, this device test device (1) is capable of testing the DUT (200) while applying thermal stress to the DUT (200), and is capable of performing so-called high temperature tests and low temperature tests.

[0061] The above-described DSA (20) is placed inside the chamber (131) through an opening (132) formed in the handler (130), and the socket (21) of the DSA (20) is placed inside the chamber (131). The DUT (200) is pressed against the socket (21) of the DSA (20) by the pressurizing device of the handler (130), thereby electrically connecting the DUT (200) and the socket (21).

[0062] In addition, the handler (130) may be of the type that moves the DUT (200) by adsorbing and holding it without using a test tray, and pressurizes the DUT (200) by the contact arm. In this case, the handler (130) may be equipped with a heater or heat sink provided at the tip of the contact arm instead of a chamber (131) as a temperature control device. Alternatively, the handler (130) may be equipped with a heater or heat sink provided at the tip of the contact arm in addition to the chamber (131) as a temperature control device.

[0063] Next, the configuration of the terminal assembly (40) provided by the above-described motherboard (30) will be explained in detail with reference to FIGS. 3 to FIGS. 10.

[0064] FIG. 3 is a front perspective view of the terminal assembly (40) in the present embodiment, and FIG. 4 is a rear perspective view of the terminal assembly (40) in the present embodiment. FIG. 5 is a cross-sectional view showing the terminal assembly (40) in the present embodiment, drawn along the VV line of FIG. 3. FIG. 6 is a plan view showing the contact terminal (50) and the wiring board (90) in the present embodiment, and FIG. 7 is an exploded perspective view showing the contact terminal (50) in the present embodiment. FIG. 8 is a side view showing the pressure member (60) in the present embodiment. FIG. 9 is a bottom view showing the electrical connection member (80) in the present embodiment. FIG. 10 is a partial cross-sectional view showing the electrical connection member (80) in the present embodiment, drawn along the XX line of FIG. 9.

[0065] As shown in FIGS. 3 to 5, the motherboard (30) is provided with a plurality of terminal assemblies (40). As described above, the terminal assemblies (40) electrically connect the pads (24) of the wiring board (23) of the DSA (20) and the coaxial cable (100) of the motherboard (30). The wiring board (23) corresponds to an example of a “first conductive member” in an embodiment of the present invention, and the coaxial cable (100) corresponds to an example of a “second conductive member” in an embodiment of the present invention. Each terminal assembly (40) is provided with a contact terminal (50) and a wiring board (90) that supports the contact terminal (50).

[0066] Additionally, FIGS. 3 to 5 show only two terminal assemblies (40), and each terminal assembly (40) is equipped with only one or two contact terminals (50). However, in reality, the motherboard (30) is equipped with multiple terminal assemblies (40), each equipped with multiple contact terminals (50), and consequently, the motherboard (30) has a number of contact parts (70) corresponding to the number of pads (24) of the DSA (20) (tens of thousands in this embodiment).

[0067] As shown in FIGS. 5 to 7, the contact terminal (50) is equipped with a pressure member (60), a contact portion (70), and an electrical connection member (80). The contact portion (70) is in a detachable contact with the pad (24) of the wiring board (23) of the DSA (20) described above. The pressure member (60) maintains the contact portion (70) at the tip portion (611) of the pressure member (60) and presses the contact portion (70) relative to the pad (24). In this embodiment, when the pad (24) is pressed against the contact portion (70), the pressure member (60) pushes the contact portion (70) back toward the pad (24). The electrical connection member (80) is connected to the contact portion (70) and is also electrically connected to the coaxial cable (100) through the wiring board (90). Since all contact terminals (50) provided by the motherboard (30) basically have the same configuration, the configuration of the central contact terminal (50) among the three contact terminals (50) shown in FIG. 5 will be described as a representative example.

[0068] As shown in FIGS. 7 and 8, the pressure member (60) is provided with an elastic deformation part (61), a deformation limiting part (62), and a support part (63). The pressure member (60) is composed of a material that is electrically insulating and elastically deformable. Although not specifically limited, specific materials constituting the pressure member (60) may be exemplified, for instance, as resin materials. The elastic deformation part (61), the deformation limiting part (62), and the support part (63) are integrally formed by resin molding. Additionally, the pressure member (60) may be composed of a metal material. In this case, an insulating layer is formed by performing an insulating treatment on the surface of the pressure member (60).

[0069] In this regard, as described below, the electrical connection member (80) is a flexible printed circuit board. Accordingly, in this embodiment, the pressure member (60) and the electrical connection member (80) are composed of completely independent members. By making the pressure member (60) and the electrical connection member (80) independent of each other in this way, electrical constraints on the mechanical design can be minimized, and the pressure member (60) can be freely designed. For example, the spring stroke (the amount of elastic deformation possible along the Z direction in the drawing) of the pressure member (60) can be extended while minimizing the impact on electrical performance, and accordingly, the range capable of absorbing the bending of the wiring board (23) of the DSA (20) or the height non-uniformity of the pad (24) caused by processing precision can be expanded.

[0070] In addition, when performing a low-temperature test (e.g., testing of the DUT at -50°C to -40°C) in a device test device, if the contact terminal is made of a metal material, heat is transferred into the motherboard through the conductor of the coaxial cable and this contact terminal, and there is a risk that the interior of the motherboard will cool down and condensation will form. In this regard, by configuring the pressure member (60) with a resin material, heat transfer from the chamber (131) of the handler (130) to the interior of the motherboard (30) can be suppressed, and the occurrence of condensation inside the motherboard (30) can be suppressed. Furthermore, since the resin material has a relatively low Young's modulus, a large spring stroke can be secured even in a narrow space.

[0071] The elastic deformation part (61) is a part that extends in the pressure direction (Z direction in the drawing) of the pressure member (60). The deformation limiting part (62) is also a part that extends in the pressure direction (Z direction in the drawing) of the pressure member (60). In addition, the rear end of the elastic deformation part (61) (the end on the -Z side in the drawing) is connected to the support part (63), and the rear end of the deformation limiting part (62) (the end on the -Z side in the drawing) is also connected. That is, the elastic deformation part (61) and the deformation limiting part (62) are supported by the support part (63). Furthermore, since the pad (24) side (the +Z direction side in the drawing) is the front of the contact terminal (50) and the coaxial cable (100) side is the rear (the -Z direction side in the drawing) of the contact terminal (50), the above pressure direction is also the front-rear direction of the contact terminal (50).

[0072] As shown in FIGS. 6 and 7, a plurality (seven in this embodiment) of contact portions (70) are provided at the leading portion (611) of the elastic deformation portion (61). Each contact portion (70) extends linearly from the leading portion (611b) of the leading portion (611) toward the rear of the elastic deformation portion (61), and has a length (L b It has (see FIG. 5). These multiple contact portions (70) are spaced apart from each other. In addition, the number of contact portions (70) provided by the contact terminal (50) is not specifically limited to the above.

[0073] Each contact portion (70) is a thin film formed on the tip region (611a), which is the surface of the tip portion (611). The tip region (611a) is an area that extends from the tip (611b) to the rear side at the tip portion (611) of the elastic deformation portion (61), and the tip (611b) is included in the tip region (611a). This thin film is composed of a conductive material. Although not specifically limited, metal materials such as copper can be exemplified as the material constituting this contact portion (70). This thin film is, for example, a plating layer formed by a plating method such as electrolytic plating or electroless plating. Furthermore, the method of forming the thin film of the contact portion (70) is not limited to the above plating method. For example, the contact portion (70) may be formed by a physical vapor deposition (PVD) method such as vacuum deposition or sputtering, or a chemical vapor deposition (CVD) method.

[0074] In addition, the contact portion (70) may be composed of a metal foil instead of the aforementioned thin film. Although not specifically limited, examples of metal foil constituting the contact portion (70) include copper foil and silver-plated foil. In this case, the pressure member (60) and the contact portion (70) are integrated by insert molding. Alternatively, the contact portion (70) may be fixed to the pressure member (60) by an adhesive.

[0075] In this embodiment, the plurality of contact parts (70) includes three signal contact parts (71) and four ground contact parts (72). Each signal contact part (71) is positioned between the ground contact parts (72). The signal contact part (71) is connected to the signal line (85) (described later) of the electrical connection member (80). Meanwhile, the ground contact part (72) is connected to the ground line (86) (described later) of the corresponding electrical connection member (80).

[0076] As shown in FIG. 8, the elastic deformation part (61) is a plate spring having a shape that is approximately arc-shaped (approximately circular) and protrudes in the +X direction of the drawing. This elastic deformation part (61) is provided with a spring part (612) that elastically deforms and presses the tip part (611) toward the pad (24) with the tip part (611) provided with the contact part (70). The tip part (611) and the spring part (612) are formed integrally. The tip part (611) maintains a plurality of contact parts (70). That is, a plurality of contact parts (70) are provided on a single tip part (611) (the same tip part (611)). Accordingly, the relative positional relationship between the contact parts (70) can be secured with high precision, and the occurrence of short circuits between adjacent pads (24) caused by the contact part (70) can be suppressed. As indicated by the dashed line in FIG. 8, the spring portion (612) of the elastic deformation part (61) is configured to be elastically deformed when the tip (611b) of the elastic deformation part (61) is pressed by the pad (24). That is, the elastic deformation part (61) is equipped with a resin spring. Meanwhile, if the pressing member (60) is made of a metal material, the elastic deformation part (61) is equipped with a metal spring. Additionally, the contact portion (70) is omitted in FIG. 8.

[0077] Here, as shown in FIG. 8, a virtual straight line (VL) passing through the tip (611b) of the elastic deformation part (61) is offset from the centerline (CL) of the support part (63). More specifically, the virtual straight line (VL) is offset from the centerline (CL) in the opposite direction (-X direction in the drawing) to the protruding direction of the bow shape of the elastic deformation part (61). Accordingly, the contact part (70) can be rubbed (scrubbed) hard against the pad (24), and a good electrical connection between the contact terminal (50) and the pad (24) can be secured. In addition, the above virtual straight line (VL) and the centerline (CL) are both straight lines parallel to the pressing direction (Z direction in the drawing) of the pressing member (60).

[0078] The deformation limiting part (62) has a contact part (621) at the leading edge of the deformation limiting part (62). This contact part (621) is located on the rear end side (the -Z direction side in the drawing) rather than the leading edge (611b) of the elastic deformation part (61). As shown by the dashed line in FIG. 8, when the leading edge (611b) of the elastic deformation part (61) is pressed by the pad (24), this contact part (621) comes into contact with the pad (24), thereby preventing damage to the elastic deformation part (61) due to excessive deformation.

[0079] In this embodiment, a plurality of pressure members that individually maintain a plurality of contact portions (70) are integrated into a single pressure member (60). Accordingly, the relative positional relationship between the contact portions (70) can be secured with high precision, and the occurrence of a short circuit between adjacent pads (24) caused by the contact portions (70) can be suppressed. In addition, by integrally forming a plurality of pressure members into a single pressure member (60) using a resin material, the cost of the contact terminal (50) can be reduced. Furthermore, the contact terminal (50) may be equipped with a plurality of pressure members that individually maintain a plurality of contact portions (70). Alternatively, for example, a pressure member may be provided with a plurality of elastic deformation parts that individually maintain a plurality of contact parts (70), a plurality of deformation limiting parts may be integrated into a single deformation limiting part (62), and a plurality of support parts may also be integrated into a single support part (63) so that a single support part (63) supports the plurality of elastic deformation parts and the single deformation limiting part (62).

[0080] The electrical connection member (80) is composed of a single flexible printed circuit board (FPC) having flexibility. In this embodiment, as described above, since the pressing member (60) and the electrical connection member (80) are independent members, an FPC can be adopted as the electrical connection member (80), and a transmission line having transmission performance for transmitting high-frequency signals can be designed independently of the design of the pressing member (60).

[0081] This electrical connection member (80) (hereinafter also simply referred to as “FPC (80)”) has first to fourth insulating layers (81 to 84), a plurality of signal lines (85) (three in the present embodiment), a plurality of ground lines (86) (four in the present embodiment), and first and second ground layers (87) (88), as shown in FIGS. 9 and 10.

[0082] The first to fourth insulating layers (81 to 84) are all flexible films composed of materials having electrical insulating properties. Specific examples of materials constituting the first to fourth insulating layers (81 to 84) may include, for instance, polyimide (PI), liquid crystal polymer (LCP), and polyethylene terephthalate (PET).

[0083] As shown in FIG. 10, a signal line (85) and a ground line (86) are provided on the lower surface of the first insulating layer (81). The signal line (85) functions as a transmission path for transmitting an electrical signal between the test head (110) and the DUT (200). Meanwhile, the ground line (86) is connected to ground and functions as an electromagnetic shield layer for shielding noise. In the device test apparatus (1) described above, the electrical signal flowing through the signal line (85) is a high-frequency electrical signal, and is an electrical signal of 1 GHz or higher or an electrical signal of 10 GHz or higher.

[0084] The signal line (85) and the ground line (86) are formed, for example, by etching a copper foil laminated on the first insulating layer (81) into a predetermined shape. As shown in FIGS. 6, 7 and 9, the signal line (85) and the ground line (86) extend linearly from the front end (the +Z direction side in the drawings) of the electrical connection member (80) toward the rear end (the -Z direction side in the drawings), and the length (L a Each has )(see Figs. 5 and 9).

[0085] In addition, the number of wirings (85)(86) provided by the FPC (80) is not specifically limited to the above, and can be set, for example, according to the number of contact parts (70) provided by the contact terminal (50). Also, the shape or arrangement of the wirings (85)(86) provided by the FPC (80) is not specifically limited to the above. Instead of replacing (swapping) the coaxial cable (100), the shape or arrangement of the wirings (85)(86) of the FPC (80) may be changed.

[0086] As shown in FIG. 10, a second insulating layer (82) is superimposed on the lower surface of the first insulating layer (81) to cover the signal line (85) and the ground line (86). The signal line (85) and the ground line (86) are spaced apart. Accordingly, the signal line (85) is surrounded by a resin material (insulator) over its entire circumference. Additionally, the first insulating layer (81) and the second insulating layer (82) may be bonded together by an adhesive having electrical insulating properties.

[0087] In this way, in the present embodiment, since the entire circumference of the signal line (85) is surrounded by a resin material, the dielectric constant or thickness of the insulator surrounding the signal line (85) does not change even if the spring stroke of the pressure member (60) is extended. Therefore, even when the pressure member (60) undergoes elastic deformation, the electrical length of the signal line (85) is always constant, and fluctuations in the impedance of the signal line (85) can be suppressed, thereby suppressing non-uniformity in transmission characteristics among multiple signal lines (85). In addition, since the entire circumference of the signal line (85) is surrounded by a resin material, the occurrence of leakage current between the signal line (85) and the ground line (86) can be suppressed.

[0088] The first ground layer (87) is positioned on the upper surface of the first insulating layer (81). Furthermore, a third insulating layer (83) is superimposed on the upper surface of the first insulating layer (81) to cover the first ground layer (87). Additionally, the first insulating layer (81) and the third insulating layer (83) may be bonded together by an adhesive having electrical insulating properties. This first ground layer (87) is a so-called beta pattern and is formed by etching a copper foil into a predetermined shape. This first ground layer (87) is positioned opposite the signal line (85) through the first insulating layer (81). This first ground layer (87) is electrically connected to the ground line (86) through the through-hole (871) and functions as an electromagnetic shield layer that shields noise.

[0089] Meanwhile, the second ground layer (88) is positioned on the lower surface of the second insulating layer (82). Furthermore, the fourth insulating layer (84) is placed on the lower surface of the second insulating layer (82) to cover the second ground layer (88). Additionally, the second insulating layer (82) and the fourth insulating layer (84) may be bonded together by an adhesive having electrical insulating properties. This second ground layer (88) is also a so-called beta pattern and is formed by etching a copper foil into a predetermined shape. This second ground layer (88) is positioned opposite the signal line (85) through the second insulating layer (82). Furthermore, this second ground layer (88) is electrically connected to the ground line (86) through the through-hole (881) and functions as an electromagnetic shield layer that shields noise.

[0090] As described above, the FPC (80) of the present embodiment has a strip line structure in which the signal line (85) is surrounded on all sides by a ground line (86) and a ground layer (87) (88). Accordingly, good shielding performance can be secured, and even if the spring stroke of the pressure member (60) is extended, the occurrence of cross-talk between signal lines (85) can be suppressed, and non-uniformity of transmission characteristics among multiple signal lines (85) can be suppressed. In addition, since the degradation of cross-talk characteristics can be suppressed even if the signal lines (85) are arranged at high density on the motherboard (30), it is possible to achieve both high density and wide bandwidth. Furthermore, in the present embodiment, since the electrical connection member (80) is an FPC, it is possible to achieve a low cost for the contact terminal (50) equipped with high-density wiring.

[0091] Here, as shown in equation (2) below, the length (L) of the signal contact part (71) described above b )(See FIG. 5) is the length (L) of the signal line (85) of this FPC (80). a (See FIG. 5 and FIG. 9) is less than 1 / 10. That is, in this embodiment, the strip line structure is maintained up to the nearest point of the pad (24), so good shielding performance can be secured.

[0092] L b <L a ×1 / 10 … (2)

[0093] In addition, the structure of the FPC (80) is not specifically limited to the above, and as shown in FIG. 11, the FPC (80) may have a microstrip line structure. FIG. 11 is a partial cross-sectional view showing a first modified example of the electrical connection member (80) in the present embodiment. The FPC (80) shown in FIG. 11 differs from the FPC (80) shown in FIG. 10 in that it does not have a fourth insulating layer (84), a second ground layer (88), and a through hole (881).

[0094] Additionally, as shown in FIG. 12, the FPC (80) may have a slit (89). FIG. 12 is a plan view showing a second variation of the electrical connection member (80) in the present embodiment. The slit (89) is positioned between the signal line (85) and the ground line (86) and penetrates the first to fourth insulating layers (81 to 84) in the thickness direction. Accordingly, the FPC (80) having a multilayer structure can be made more flexible. Furthermore, the slit (89) only needs to be formed in at least one of the first to fourth insulating layers (81 to 84). Also, the position of the slit (89) in the FPC (80) is not particularly limited to the above.

[0095] Additionally, as shown in FIGS. 13 and 14, a microstrip line structure may be formed in the contact portion (70). FIG. 13 is a perspective view showing the contact portion (70) formed in the tip portion (611) of the pressurizing member (60) in another embodiment of the present invention, and FIG. 14 is a cross-sectional view of the tip portion (611) of the pressurizing member (60) in another embodiment of the present invention, drawn along line XIV-XIV of FIG. 13.

[0096] Specifically, as shown in FIGS. 13 and 14, a through hole (613) is formed in the tip portion (611) of the pressure member (60), and a signal contact portion (71) is formed on the inner surface of one side (the side in the -Z direction of the drawing) of the through hole (613), and a third grounding layer (73) is formed on the inner surface of the other side (the side in the +Z direction of the drawing) of the through hole (613). Accordingly, the third grounding layer (73) is positioned opposite the signal contact portion (71) at a distance. The third grounding layer (73) is electrically connected to the signal contact portion (71) and adjacent grounding contact portions (72) through a connecting portion (74). Accordingly, good shielding performance can be secured up to a closer distance of the pad (24).

[0097] As shown in FIG. 9, the FPC (80) does not have the second and fourth insulating layers (82) (84) and the second ground layer (88) at both ends of the FPC (80) (both ends in the Z direction in the drawing), and the signal line (85) and ground line (86) are exposed toward the -X direction in the drawing.

[0098] And, as shown in FIGS. 5 to 7, the FPC (80) is attached to a pressure member (60) such that the fourth insulating layer (84) faces the elastic deformation part (61). At this time, the end (851) on one side (the +Z direction side in the drawing) of the signal line (85) faces the signal contact part (71), and the end (861) on one side (the +Z direction side in the drawing) of the ground line (86) faces the ground contact part (72). And, the end (851) of the signal line (85) and the signal contact part (71) are connected, for example, through a conductive film (ACF). Likewise, the end (861) of the ground line (86) and the ground contact part (72) are also connected, for example, through a conductive film (ACF). One end of the FPC (80) (the side in the +Z direction in the drawing) is fixed to the pressure member (60) through this conductive film.

[0099] In addition, the contact portion (71)(72) and the wiring (85)(86) may be connected by a conductive adhesive instead of a conductive film. Alternatively, the contact portion (71)(72) and the wiring (85)(86) may be connected by fixing the end of the FPC (80) to the pressure member (60) by mechanical means such as a screw or a clamp. Alternatively, the end of the FPC (80) may be fixed to the pressure member (60) and the contact portion (71)(72) and the wiring (85)(86) may be connected by depressurizing the inside of the tube surrounding the end of the FPC (80) and the pressure member (60). Alternatively, if the contact portion (71)(72) is a thin film, the contact portion (71)(72) and the wiring (85)(86) may be connected during the insert molding described above.

[0100] As described above, the pressure member (60) and the electrical connection member (80) are fixed only at the tip portion of the electrical connection member (80), and the pressure member (60) and the electrical connection member (80) are not fixed at portions other than the tip portion. Accordingly, the electrical connection member (FPC) (80) is made to deform relatively freely relative to the pressure member (60). In addition, the pressure member (60) and the electrical connection member (80) may be fixed at portions other than the tip portion of the electrical connection member (80) by means of an adhesive or the like.

[0101] The contact terminal (50) described above is supported on the wiring board (90). Although not specifically limited, the contact terminal (50) is supported on the wiring board (90) by fixing the support portion (63) of the pressure member (60) to the edge portion of the wiring board (90) through the fixing member (95). Furthermore, the method of fixing the contact terminal (50) to the wiring board (90) is not specifically limited to the above.

[0102] This wiring board (90) is a rigid wiring board equipped with a substrate (91), a signal line (92), and a ground line (93). The substrate (91) is composed of a material having electrical insulating properties, such as glass epoxy resin, for example. A signal line (92) and a ground line (93) are provided on the upper surface of this substrate (91). These signal lines (92) and ground lines (93) extend linearly from the end of the front end (the +Z direction side in the drawing) of the wiring board (90) toward the rear end (the -Z direction side in the drawing) and are arranged at intervals. These signal lines (92) and ground lines (93) are formed by etching copper foil into a predetermined shape. Although not specifically illustrated, this wiring board (90) has a ground layer inside. Additionally, the signal lines (92) and ground lines (93) may pass through the interior of the wiring board (90).

[0103] In addition, the number of wires (92)(93) provided by the wiring board (90) is not specifically limited to the above, and can be set, for example, according to the number of contact parts (70) provided by the contact terminal (50). Also, the shape or arrangement of the wires (92)(93) provided by the wiring board (90) is not specifically limited to the above. Instead of replacing (swapping) the coaxial cable (100), the shape or arrangement of the wires (92)(93) of this wiring board (90) may be changed.

[0104] And, the FPC (80) of the contact terminal (50) supported on the wiring board (90) is connected to the wiring board (90). Specifically, as shown in FIG. 6, the other end (852) of the signal line (85) of the FPC (80) (the -Z direction side in the drawing) is opposed to the end (921) of the signal line (92) of the wiring board (90) (the +Z direction side in the drawing), and the other end (862) of the ground line (86) of the FPC (80) (the -Z direction side in the drawing) is opposed to the end (931) of the ground line (93) of the wiring board (90) (the +Z direction side in the drawing). And, the ends (852) and (921) of the signal lines (85) and (92) are connected to each other, for example, through a conductive film (ACF). Likewise, the ends (862) (931) of the ground wires (86) (93) are also connected to each other, for example, through a conductive film (ACF).

[0105] In FIGS. 3 to 5, the lower terminal assembly (40) is provided with two contact terminals (50) each connected to the upper and lower surfaces of the wiring board (90), so the wiring board (90) is provided with wiring (92) (93) on the upper and lower surfaces. These two contact terminals (50) are arranged so that the deformation limiting portions (62) of the pressure member (60) come into contact with each other. Additionally, in FIGS. 3 to 5, the upper terminal assembly (40) may be provided with two upper and lower contact terminals (50). Furthermore, in FIGS. 3 and 4, only one contact terminal (50) is arranged in the longitudinal direction (Y direction in the drawings) of the wiring board (90), but in reality, a plurality of contact terminals (50) are arranged in the longitudinal direction (Y direction in the drawings) of the wiring board (90). Alternatively, one contact terminal (50) may have a width corresponding to the entire area in the longitudinal direction (Y direction in the drawing) of the wiring board (90).

[0106] A coaxial cable (100) is connected to the terminal assembly (40) described above. Specifically, as shown in FIGS. 5 and 6, the inner conductor (101) of the coaxial cable (100) is connected to the other end (922) of the signal line (92) of the wiring board (90) by soldering, etc. Additionally, the outer conductor (102) of the coaxial cable (100) (e.g., braided shield) is connected to the other end (932) of the ground line (93) of the wiring board (90) through a connecting member (105) by means of a connecting member (105).

[0107] Additionally, as shown in FIG. 2, the wiring board (23) of the DSA (20) is fixed to the wiring board (90) of the terminal assembly (40) by means of a bolt (25), thereby mounting the DSA (20) to the motherboard (30). With the fixation of the bolt (25), all pads (24) of the DSA (20) simultaneously come into contact with and are pressed against all contact parts (70) provided by all terminal assemblies (40), so that the contact parts (70) electrically connect the DSA (20) and the motherboard (30). Furthermore, the method of fixing the DSA (20) to the motherboard (30) is not specifically limited to the above, and may be, for example, a mechanical clamp.

[0108] As described above, in this embodiment, since the pressurizing member (60) and the electrical connection member (80) are independent members, mutual constraints between the design of the pressurizing member (60) and the design of the electrical connection member (80) can be reduced, and the degree of freedom in the design of the contact terminal (50) can be improved.

[0109] In addition, in this embodiment, since the pressure member (60) and the electrical connection member (80) are independent members, various pressure forces or spring strokes can be realized while maintaining electrical performance by changing the shape of the pressure member (60) without changing the electrical connection member (80).

[0110] In addition, in this embodiment, since the pressurizing member (60) and the electrical connection member (80) are independent members, an FPC can be adopted as the electrical connection member (80), and a transmission line can be designed that has transmission performance (such as the impedance matching or shielding performance described above) for transmitting a high-frequency signal independently of the design of the pressurizing member (60).

[0111] Furthermore, the embodiments described above are provided to facilitate understanding of the present invention and are not intended to limit the invention. Accordingly, each element disclosed in the above embodiments is intended to include all design modifications or equivalents that fall within the technical scope of the present invention.

[0112] For example, in the above-described embodiment, the elastic deformation part (61) of the pressure member (60) of the contact terminal (50) is provided with a resin spring, but the elastic deformation part (61) may be provided with a metal spring or an air spring. FIGS. 15(a) to 15(c) are cross-sectional views showing pressure members (60B to 60D) which are first to third modified examples of the pressure member in the present embodiment.

[0113] The elastic deformation portion (61B) of the pressure member (60B) shown in FIG. 15(a) is equipped with a tip member (tip portion) (614) and a leaf spring (spring portion) (615). The tip member (614) is fixed to the tip of the leaf spring (615). The tip member (614) is made of a material having electrical insulation properties. Although not specifically limited, specific materials constituting this tip member (614) may be exemplified, for instance, as resin materials. A contact portion (70) is provided in the tip region (611a) of this tip member (614). Similar to the elastic deformation portion (61) shown in FIG. 6 and FIG. 7 described above, a plurality of contact portions (70) are provided on a single tip member (614) (the same tip member (614)). Accordingly, the relative positional relationship between the contact portions (70) can be secured with high precision, and the occurrence of a short circuit between adjacent pads (24) caused by the contact portions (70) can be suppressed. Additionally, the electrical connection member (80) is connected to the contact portion (70) provided on the tip member (614).

[0114] Meanwhile, the leaf spring (615) is made of a metal material and is capable of elastically deforming when the front member (614) is pressed by the pad (24). That is, this pressing member (60B) is equipped with a metal spring. The rear end of this leaf spring (615) is supported by the support member (63).

[0115] The elastic deformation portion (61C) of the pressure member (60C) shown in FIG. 15(b) is equipped with a tip member (tip portion) (614), a shaft (616), and a coil spring (spring portion) (617). The tip member (614) is fixed to the tip of the shaft (616). Meanwhile, the rear end of the shaft (616) is supported by a support portion (63). The shaft (616) is made to be extendable in the pressure direction (Z direction in the drawing) of the pressure member (60C).

[0116] The coil spring (617) is made of a metal material, and a shaft (616) is inserted into the coil spring (617). The coil spring (617) is mounted interposed between the tip member (614) and the support member (63) while the coil spring (617) is compressed. That is, the pressure member (60C) is equipped with a metal spring. In addition, the coil spring (617) may be made of a resin material, in which case the pressure member (60C) is equipped with a resin spring.

[0117] The elastic deformation portion (61D) of the pressure member (60D) shown in FIG. 15(c) is equipped with a tip member (tip portion) (614) and an air spring (618) (spring portion). The air spring (618) is equipped with a front plate portion (618a), a rear plate portion (618b), and a bellows portion (618c). The bellows portion (618c) is a tubular body that can be extended in the pressure direction (Z direction in the drawing) of the pressure member (60C). This bellows portion (618c) is interposed between the front plate portion (618a) and the rear plate portion (618b), and forms an air chamber (sealed space) (618d) that hermetically contains air through the front plate portion (618a), the rear plate portion (618b), and the bellows portion (618c). The tip member (614) is fixed to the front plate (618a) of this air spring (618). When the tip member (614) is pressed by the pad (24), the air chamber (618d) of this air spring (618) is compressed, thereby pushing the contact portion (70) back toward the pad (24). In the example shown in FIG. 15(c), this air spring (618) is supported by the support portion (63) through the pipe (65), but is not particularly limited thereto, and the air spring (618) may be directly fixed to the support portion (63).

[0118] As shown in FIG. 15(c), an air supply device (66) may be connected to this air spring (618) through a pipe (65). A valve (67) is provided in the pipe (65), and by opening and closing this valve (67), it is possible to seal the air chamber (618d) of the air spring (618) or to connect the air chamber (618d) with the air supply device (66). By opening the valve (67) and supplying air from the air supply device (66), it is possible to adjust the pressure within the air chamber (618d). A pump may be exemplified as a specific example of the air supply device (66). Furthermore, if the air supply device (66) is not connected to the air spring (618), the air chamber (618d) is a sealed space filled with air.

[0119] In addition, in the above-described embodiment, the electrical connection member (80) is composed of a single FPC, but the electrical connection member (80) may be divided. In this case, the contact terminal (50) is provided with a plurality of FPCs. Alternatively, a fine-wire coaxial cable may be used as the electrical connection member (80) instead of an FPC. Explanation of the symbols

[0120] 1: Device test device 10: Tester 20: DSA 21: Socket 23: Wiring board 24: Pad 30: Motherboard 40: Terminal assembly 50: Contact terminal 60, 60B~60D: Pressure member 61, 61B~61D: Elastic deformation section 611: Tip section 612: Spring part 614: Tip member 615: Leaf spring 616: Shaft 617: Coil spring 618: Air spring 62: Deformation limiting part 621: Abutting part 63: Support part 70: Contact part 71: Signal contact 72: Ground contact 73: Third grounding layer 74: Connection part 80: Electrical connection member (FPC) 81~84: 1st to 4th insulating layers 85: Signal line 851, 852: End 86: Grounding wire 87, 88: First to second grounding layers 90: Wiring board 91: Inscription 92: Signal line 921, 922: End 93: Ground wire 931, 932: Ends 100: Coaxial cable 110: Test head 120: Main Frame 130: Handler 200: DUT

Claims

Claim 1 An electrical connection member comprising a contact portion that is capable of contacting a first conductive member, a pressing member that presses the contact portion relative to the first conductive member, and a first conductive path connected to the contact portion, wherein the pressing member and the electrical connection member are independent members, and the contact portion is a contact terminal provided in the pressing member at a portion protruding from the tip of the electrical connection member. Claim 2 In claim 1, the pressure member is a contact terminal having an elastic deformation portion that is elastically deformed when the contact portion is pressed relative to the first conductive member. Claim 3 A contact terminal in claim 2, wherein the electrical length of the first conductive path is constant when the elastic deformation part is deformed. Claim 4 In claim 2, the electrical connection member is a contact terminal having an insulator that surrounds the entire perimeter of the first conductive path. Claim 5 A contact terminal according to claim 2, wherein the elastic deformation portion comprises a resin spring made of a resin material that is elastically deformed upon relative pressure of the contact portion to the first conductive member, a metal spring made of a metal material that is elastically deformed upon relative pressure of the contact portion to the first conductive member, or an air spring that is compressed by relative pressure of the contact portion to the first conductive member. Claim 6 In claim 2, the pressurizing member is composed of a resin material, and the elastic deformation part is a contact terminal having a resin spring that elastically deforms when the contact part is pressed relative to the first conductive member. Claim 7 In claim 6, the contact terminal comprises a plurality of the contact portions, the electrical connection member comprises a plurality of the first conductive paths connected to the plurality of contact portions, the pressurizing member comprises a plurality of the elastic deformation portions corresponding to the plurality of contact portions, and the plurality of elastic deformation portions are integrally formed. Claim 8 In claim 1, the contact terminal comprises a plurality of the contact portions, the electrical connection member comprises a flexible printed circuit board having flexibility, and the flexible printed circuit board comprises a contact terminal having a plurality of the first conductive paths connected to the plurality of contact portions. Claim 9 In claim 8, the flexible printed circuit board comprises a first insulating layer, a plurality of first conductive paths provided below the first insulating layer, and a second insulating layer superimposed on the first insulating layer to cover the plurality of first conductive paths, forming a contact terminal. Claim 10 In claim 9, the plurality of first conductive paths are contact terminals arranged at intervals below the first insulating layer. Claim 11 In claim 9, the flexible printed circuit board has a contact terminal having a slit disposed between the plurality of first conductive paths. Claim 12 In claim 10, the plurality of first conductive paths comprises a plurality of grounding wires and a plurality of signal wires each disposed between the grounding wires, forming a contact terminal. Claim 13 In claim 12, the flexible printed circuit board is provided on the first insulating layer and has a contact terminal having a first ground layer facing the signal line through the first insulating layer. Claim 14 In claim 12, the flexible printed circuit board is provided on the lower surface of the second insulating layer and has a contact terminal having a second ground layer facing the signal line through the second insulating layer. Claim 15 In claim 12, the contact portion comprises a signal contact portion connected to the signal line and a ground contact portion connected to the ground line, forming a contact terminal. Claim 16 In claim 15, the contact terminal has a third ground layer electrically connected to the ground contact portion, the pressurizing member has a through hole through which the signal contact portion passes, and the contact terminal is disposed in the through hole so as to face the signal contact portion at a distance. Claim 17 In claim 1, the contact portion comprises a metal layer maintained in the pressurizing member, and the metal layer is a contact terminal provided in the tip portion of the pressurizing member. Claim 18 A contact terminal comprising a contact portion that is disengagedly contactable to a first conductive member, a pressing member that presses the contact portion relative to the first conductive member, and an electrical connection member having a first conductive path connected to the contact portion, wherein the pressing member and the electrical connection member are independent members, the contact portion comprises a metal layer maintained on the pressing member, the metal layer is provided at the tip portion of the pressing member, and the metal layer extends linearly from the tip portion, satisfying the following equation (1). b <L a ×1 / 10 … (1)wherein, in the above formula (1), L a is the length of the first conductive path above, and L b is the length of the metal layer mentioned above. Claim 19 In claim 17, the contact terminal comprises a plurality of the contact portions, and the plurality of contact portions are provided in a single tip portion. Claim 20 In claim 1, the pressure member comprises a contact terminal having an elastic deformation portion that is elastically deformed upon relative pressure of the contact portion to the first conductive member, and a support portion that supports the elastic deformation portion. Claim 21 In claim 20, the pressure member is composed of a resin material, and the elastic deformation part and the support part are integrally formed in a contact terminal. Claim 22 In claim 20, a virtual straight line passing through the tip of the pressurizing member and parallel to the centerline of the support member is a contact terminal that is offset from the centerline. Claim 23 A contact terminal having a contact portion that is capable of contacting a first conductive member, a pressing member that presses the contact portion relative to the first conductive member, and an electrical connection member having a first conductive path connected to the contact portion, wherein the pressing member and the electrical connection member are independent members, and the pressing member has an elastic deformation portion that is elastically deformed when the contact portion is pressed relative to the first conductive member, and a deformation limiting portion that limits the elastic deformation of the elastic deformation portion by contacting the first conductive member. Claim 24 In claim 23, the pressure member is composed of a resin material, and the elastic deformation portion and the deformation limiting portion are integrally formed in a contact terminal. Claim 25 In claim 24, the pressurizing member comprises a support member that supports the elastic deformation part and the deformation limiting part, and the elastic deformation part, the deformation limiting part, and the support member are integrally formed in a contact terminal. Claim 26 A terminal assembly having a plurality of contact terminals as described in any one of claims 1 to 25, and a support member that supports the plurality of contact terminals. Claim 27 In claim 26, the support member comprises a wiring board having a second conductive path, and the first conductive path is connected to the second conductive path, forming a terminal assembly. Claim 28 A device test apparatus for testing a DUT, comprising a first conductive member, a second conductive member, and a terminal assembly as described in claim 26, wherein the first conductive path of the contact terminal is electrically connected to the second conductive member, and the contact terminal electrically connects the first conductive member and the second conductive member.

Images