Cooling water jacket device and single crystal furnace

Abstract

The present application relates to a cooling water jacket device and a single crystal furnace. The cooling water jacket device comprises a cylindrical body, and a control sleeve communicating with the interior of the cylindrical body is installed at the bottom portion of the cylindrical body. The control sleeve comprises a first portion connected to the cylindrical body and a second portion opposite to the first portion, wherein the cross-sectional area of ​​the control sleeve gradually decreases in the radial direction of the cylindrical body from the first portion to the second portion. By installing the control sleeve, heat from the lower portion of the cylindrical body is blocked from being transferred to the internal space of the cooling water jacket, and heat loss from below to above is effectively blocked. In addition, the cross-sectional area of ​​the control sleeve is gradually reduced in the radial direction of the cylindrical body, so that when an inert gas flow flows in from above the puller and passes through the control sleeve, the flow velocity increases, ensuring that the inert gas flow comes into sufficient contact with the crystal ingot, improving the cooling rate of the crystal ingot, and effectively controlling the radial / radial and radial temperature gradients of the crystal ingot, thereby controlling the reaction rate of defects in the crystal ingot and controlling the defect distribution to draw various types of crystal ingots.

Description

Technology Field

[0001] [Reference to related applications]

[0002] This application claims priority to Chinese patent application No. 202210544317.6 filed in China on May 18, 2022, and incorporates the entire contents thereof into this application.

[0003] This application relates to the field of manufacturing technology for single-crystal silicon products, and in particular to a cooling water jacket device and a single-crystal furnace. Background Technology

[0004] As advanced semiconductor manufacturing processes continue to improve, demands on semiconductor wafer quality are increasing. Regarding wafer quality, the growing process has a significant impact on critical wafer quality; for example, quality factors such as oxygen content, Bulk Micro Defects (BMD), stacking faults, Crystal Originated Particles (COPs), Flow Pattern Defects (FPDs), and Laser Scattering Tomography Defects (LSTDs) are all closely related to the growing process.

[0005] The thermal history experienced during the growth process of a crystal ingot has a significant impact on the overall quality of the crystal ingot. The thermal history is mainly influenced by the radial and axial temperature gradients of the crystal ingot, and structural components of the fuller have a significant impact on the temperature gradients. The most important component here is the cooling water jacket, which significantly changes the radial and transverse temperature gradients of the crystal ingot and improves the cooling rate of the crystal ingot, thereby affecting the growth rate and pulling rate of the crystal ingot.

[0006] In the related technology, the cooling water jacket is cylindrical, which significantly limits the temperature control in the axial and radial directions of the crystal ingot and fails to effectively control crystal defects in the crystal ingot. For example, due to the limited control capability, heat is not well conducted at the center of the crystal ingot, and internal stress accumulates excessively, causing alignment errors, which significantly affect the quality of the crystal ingot. In particular, for epitaxial products, stacking faults during the epitaxial deposition process can cause non-uniformity in deposition and even lead to deposition defects.

[0007] To solve the aforementioned technical problem, the present application provides a cooling water jacket device and a single crystal furnace to solve the problem of limited temperature control in the axial and radial / radial directions of a crystal ingot.

[0008] To achieve the above-mentioned objective, the technical solution applied in the embodiment of the present application provides a cooling water jacket device comprising a cylindrical body, wherein an adjustment sleeve communicating with the interior of the cylindrical body is installed at the bottom portion of the cylindrical body, and the adjustment sleeve comprises a first portion connected to the cylindrical body and a second portion opposite to the first portion, wherein the cross-sectional area of ​​the adjustment sleeve gradually decreases in the radial direction of the cylindrical body from the first portion to the second portion.

[0009] Optionally, the inner surface of the adjustment sleeve is curved.

[0010] Optionally, the cross-sectional shape of the adjustment sleeve in the axial direction of the tubular body is a parabolic shape.

[0011] Optionally, in the axial direction of the tubular body, the adjusting sleeve includes a first portion close to the tubular body and a second portion adjacent to the first portion, wherein the outer surface of the second portion is recessed inward to form a recess.

[0012] Optionally, an endothermic layer is installed on the inner surface of the control sleeve.

[0013] Optionally, the heat-absorbing layer comprises a first layer close to the control sleeve and a second layer far from the control sleeve, wherein the first layer is a transition layer formed by a chemical reaction between the graphite material and the inner wall of the control sleeve.

[0014] Optionally, the first layer is a C+SiC composite transition coating layer, and the second layer is a SiC coating layer.

[0015] Optionally, the thickness of the heat-absorbing layer is 130±15 microns.

[0016] Optionally, an insulating layer is installed on the outer surface of the adjustment sleeve.

[0017] Optionally, the insulation layer comprises a third layer close to the control sleeve and a fourth layer away from the control sleeve, wherein the third layer is a transition layer formed by a chemical reaction between the graphite material and the outer wall of the control sleeve.

[0018] Optionally, the third layer is a C+SiC composite transition coating layer, and the fourth layer is a SiC coating layer.

[0019] Optionally, the thickness of the insulation layer is 160±15 microns.

[0020] Optionally, the cylindrical body comprises an inner cylinder and an outer cylinder located outside the inner cylinder, and the bottom portion of the outer cylinder comprises a first region for bearing the inner cylinder and a second region adjacent to the first region, the first region being installed on a side wall close to the outer cylinder, and a flange being installed on the top portion of the adjustment sleeve, and the flange being connected to the second region.

[0021] An embodiment of the present application further provides a single crystal furnace including the cooling water jacket device described above.

[0022] The beneficial effects of the present application are as follows. By installing the control sleeve, the heat below the cylindrical body is blocked from being transferred to the internal space of the cooling water jacket, and heat loss from below to above is effectively blocked. In addition, the cross-sectional area of ​​the control sleeve is gradually reduced in the radial direction of the cylindrical body, so that when an inert gas flow flows in from above the puller and passes through the control sleeve, the flow velocity increases, ensuring that the inert gas flow comes into sufficient contact with the crystal ingot, improving the cooling rate of the crystal ingot, and effectively controlling the radial / radial and radial temperature gradients of the crystal ingot, thereby controlling the reaction rate of defects in the crystal ingot and controlling the defect distribution to draw various types of crystal ingots. Brief explanation of the drawing

[0023] FIG. 1 shows a schematic diagram of the structure of a cooling water jacket device according to an embodiment of the present application. FIG. 2 shows a schematic diagram of the structure of an adjustment sleeve according to an embodiment of the present application. Figure 3 shows a schematic diagram of the structure of an internal cylinder in an embodiment of the present application. Figure 4 shows a schematic diagram of the structure of an external cylinder in an embodiment of the present application. FIG. 5 shows a schematic diagram 1 of the structure of a lifting rod in an embodiment of the present application. FIG. 6 shows a schematic diagram 2 of the structure of a lifting rod in an embodiment of the present application. FIG. 7 shows a schematic diagram of the structure of the connecting part in an embodiment of the present application. Specific details for implementing the invention

[0024] In order to clarify the purpose, technical solution, and advantages of the embodiments of the present application, the technical solution according to the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. It is obvious that the described embodiments are only some embodiments of the present application and not all embodiments. All other embodiments obtained based on the described embodiments of the present application, under the premise that those skilled in the art do not perform creative labor, are all within the scope of protection of the present application.

[0025] In the description of this application, orientations or positional relationships indicated by terms such as "center," "up," "down," "left," "right," "vertical," "horizontal," "inside," "outside," etc., are based on the orientations or positional relationships illustrated in the accompanying drawings and are intended only to explain this application conveniently and simply. They do not indicate or imply that the device or element must have a specific orientation or be configured and operated in a specific orientation, and therefore should not be understood as a limitation to this application. The terms "first," "second," and "third" are used for illustrative purposes only and should not be understood as indicating or implying relative importance.

[0026] Referring to FIGS. 1 and 2, the present embodiment provides a cooling water jacket device comprising a cylindrical body, wherein a control sleeve (6) communicating with the interior of the cylindrical body is installed at the bottom portion of the cylindrical body, and the control sleeve (6) comprises a first portion connected to the cylindrical body and a second portion opposite to the first portion, wherein the cross-sectional area of ​​the control sleeve (6) in the radial direction of the cylindrical body gradually decreases from the first portion to the second portion.

[0027] By installing the above-mentioned control sleeve (6), heat from below the cylindrical body is blocked from being transferred to the internal space of the cooling water jacket, and heat loss from below to above is effectively blocked. In addition, the cross-sectional area of ​​the control sleeve (6) is gradually reduced in the radial direction of the cylindrical body, so that when an inert gas flow flows in from above the puller and passes through the control sleeve, the flow velocity increases, ensuring that the inert gas flow sufficiently contacts the crystal ingot, improving the cooling rate of the crystal ingot, and effectively controlling the radial / radial and radial temperature gradients of the crystal ingot, thereby controlling the reaction rate of defects in the crystal ingot and controlling the defect distribution to draw various types of crystal ingots.

[0028] For example, the inner surface of the adjustment sleeve (6) is curved.

[0029] For example, the cross-sectional shape of the adjustment sleeve (6) in the axial direction of the above-mentioned tubular body is a parabolic shape.

[0030] For example, in the axial direction of the cylindrical body, the adjustment sleeve (6) includes a first portion close to the cylindrical body and a second portion adjacent to the first portion, and the outer surface of the second portion is recessed inward to form a hollow (61).

[0031] The cooling water jacket is located above the crucible, and the setting of the above portion (61) reflects downward heat toward the graphite material or the liquid surface of the silicon melt below the cooling water jacket, thereby maintaining stability of the downward temperature field.

[0032] For example, an absorbent layer is installed on the inner surface of the above-mentioned control sleeve (6).

[0033] The above-mentioned heat-absorbing layer performs a heat-absorbing function, and the bonding strength between the heat-absorbing layer and the control sleeve (6) is high, so thermal stress at the heat-absorbing layer interface (the connection surface between the heat-absorbing layer and the control sleeve (6)) can be effectively relieved, and the thermodynamic performance is stable, and the control sleeve (6) effectively removes heat transferred to the crystal ingot in real time, thereby greatly improving the cooling rate of the crystal ingot and improving the growth rate / pulling rate, and thus improving growing efficiency.

[0034] For example, the heat-absorbing layer comprises a first layer close to the control sleeve (6) and a second layer away from the control sleeve, wherein the first layer is a transition layer formed by a chemical reaction between a graphite material and the inner wall of the control sleeve (6).

[0035] The material of the above-mentioned control sleeve is a carbon fiber composite, the first layer is a _C+SiC composite transition coating layer (thickness is 80±10 microns), and the second layer is a _SiC coating layer (thickness is 50±5 microns). This coating layer structure (the bonding method between the above-mentioned heat-absorbing layer and the above-mentioned control sleeve) has characteristics such as high bonding strength and high density. This effectively protects the matrix and can extend the service life.

[0036] For example, the thickness of the heat-absorbing layer is 130 ± 15 microns.

[0037] For example, an insulating layer is installed on the outer surface of the above-mentioned adjustment sleeve (6).

[0038] The above insulation layer acts to reflect and shield heat, preventing external heat from being transferred from the control sleeve (6) into the cooling water jacket and maintaining the temperature inside the cooling water jacket at a constant level.

[0039] For example, the insulation layer comprises a third layer close to the control sleeve (6) and a fourth layer away from the control sleeve, and the third layer is a transition layer formed by a chemical reaction between the graphite material and the outer wall of the control sleeve.

[0040] The material of the above-mentioned control sleeve is a carbon fiber composite, the third layer is a _C+SiC composite transition coating layer (thickness is 80±10 microns), and the fourth layer is a _SiC coating layer (thickness is 50±5 microns). This coating layer structure (the bonding method between the insulation layer and the control sleeve) has characteristics such as high bonding strength and high density. This effectively protects the matrix and can extend the service life.

[0041] For example, the thickness of the insulation layer is 160 ± 15 microns.

[0042] For example, the cylindrical body comprises an inner cylinder (2) and an outer cylinder (1) located outside the inner cylinder (2), and the bottom portion of the outer cylinder (1) comprises a first area for bearing the inner cylinder and a second area adjacent to the first area, the first area being installed on a side wall close to the outer cylinder (1), and a flange (third flange (62)) is installed on the top portion of the adjustment sleeve (6), and the flange is connected to the second area.

[0043] Referring to FIGS. 1, FIGS. 3 and FIGS. 4, for example, the inner cylinder (2) has a spindle-shaped structure.

[0044] Compared to a single straight structure, this embodiment adopts a double-layer structure of an inner cylinder and an outer cylinder. The outer cylinder adopts a straight structure and serves to block heat, while the inner cylinder adopts a convex structure to form a gradient water cooling effect in the radial direction. Since the temperature of the crystal ingot in the radial direction (i.e., the axial direction of the crystal ingot) changes in a gradient (the bottom is hot and the top is cold; the end closer to the silicon melt is the bottom, and the end further away from the silicon melt is the top), heat from the crystal ingot is transferred mainly by radiation to surrounding objects with lower temperatures. The intensity of radiative heat transfer is inversely proportional to the cube of the distance; that is, the closer the distance, the stronger the radiative heat transfer, and the resulting water cooling effect is good. The inner cylinder is convex, and along the radial direction, the distance between the inner wall of the inner cylinder and the crystal ingot in the radial direction is a gradient By changing, a gradient water cooling effect, that is, a radial / radial asymmetric effect, can be achieved, thereby achieving a change in the radial and axial temperature gradients, which significantly improves the axial and radial heat dissipation of the crystal ingot, reduces internal heat accumulation, alters the thermal history of the crystal ingot, reduces the occurrence of alignment errors and other crystal defects, and improves the quality of the crystal ingot. Depending on the requirements of the drawing process, the inclination angle of the inner wall of the inner cylinder can be adjusted to significantly control the radial / radial (i.e., axial) and radial temperature gradients of the crystal ingot, and the reaction rate of defects in the crystal ingot can be controlled to control the defect distribution.

[0045] For example, the inner diameter of the top portion of the inner cylinder is 450 mm and the inner diameter of the bottom portion of the inner cylinder is 390 mm, but is not limited thereto.

[0046] A second flange (22) is installed on the top of the inner cylinder, and a first flange (11) is installed on the top of the outer cylinder. A stepped concave groove (13) is installed on one side of the first flange (11) that is close to the inner cylinder, and the second flange (22) is in contact with the stepped concave groove (13).

[0047] The first surface of the second flange (22) moving away from the bottom of the inner cylinder is located in the same plane as the second surface of the first flange (11) moving away from the bottom of the inner cylinder.

[0048] A first via hole is provided in the bottom portion of the inner cylinder, and a second via hole (12) is provided in the bottom portion of the outer cylinder, and the centrifugal projection of the first via hole at the bottom portion of the outer cylinder (1) overlaps with the centrifugal projection of the second via hole (12).

[0049] For example, an annular projection (14) is protruded from the top of the edge of the second via hole (12) facing the outer cylinder (1), and the annular projection (14) acts as a barrier and is intended to limit the position of the inner cylinder (2).

[0050] For example, along the axial direction of the inner cylinder (2), a toothed corrugated structure (21) is installed on the inner wall of the inner cylinder (2).

[0051] Setting the toothed corrugated structure (21) can increase the surface area of ​​the inner wall of the inner cylinder, that is, the heat absorption area of ​​the cooling water jacket, and compared to a smooth surface, this surface has a better heat absorption effect and a better cooling effect on the crystal ingot.

[0052] The above-mentioned toothed corrugated structure (21) includes a plurality of annular teeth extending along the circumferential direction of the inner cylinder (2), and the plurality of annular teeth are arranged along the axial direction of the inner cylinder (2), and the cross-sectional shape of a single annular tooth may be triangular, trapezoidal, arc-shaped, etc.

[0053] For example, in the direction from the top end of the inner cylinder (2) to the bottom part of the inner cylinder (2), the thickness of the toothed corrugated structure (21) in the radial direction of the inner cylinder (2) gradually increases.

[0054] For example, an endothermic coating layer is installed on the inner wall of the inner cylinder (2).

[0055] The heat-absorbing coating layer is installed on one side of the toothed corrugated structure (21) away from the outer cylinder (1), and the shape of the heat-absorbing coating layer matches the shape of the toothed corrugated structure (21). That is, the connecting surface between the heat-absorbing coating layer and the inner cylinder (2) and the inner surface installed opposite the connecting surface are all toothed corrugated structures (21).

[0056] The above-mentioned heat-absorbing coating layer performs a heat-absorbing function, and the bonding strength between the above-mentioned heat-absorbing coating layer and the inner cylinder (2) is high, so thermal stress at the interface of the heat-absorbing coating layer (the connection surface between the above-mentioned heat-absorbing coating layer and the inner cylinder (2)) can be effectively relieved, and the thermodynamic performance is stable, and the inner cylinder (2) effectively removes heat transferred to the crystal ingot in real time, thereby greatly improving the cooling rate of the crystal ingot and improving the growth rate / pulling rate, and thus improving growing efficiency.

[0057] For example, in the direction from the top end of the inner cylinder (2) to the bottom part of the inner cylinder (2), the thickness of the heat-absorbing coating layer in the radial direction of the inner cylinder (2) gradually increases.

[0058] For example, the above-mentioned endothermic coating layer is manufactured using ceramic, but is not limited thereto.

[0059] For example, the thickness of the above-mentioned endothermic coating layer is 200±25 microns.

[0060] For example, an insulating coating layer is installed on the outer wall of the inner cylinder (2) and / or the inner wall of the outer cylinder (1).

[0061] The above thermal insulation coating layer acts to reflect and shield heat, thereby preventing external heat from being transferred from the outer cylinder (1) to the cooling water jacket (i.e., the inside of the inner cylinder (2)) and maintaining the temperature inside the cooling water jacket at a constant level.

[0062] For example, an insulating coating layer is installed on the outer wall of the inner cylinder (2), and the thickness of the insulating coating layer in the radial direction of the inner cylinder (2) gradually increases in the direction from the top end of the inner cylinder (2) to the bottom part of the inner cylinder (2).

[0063] For example, the thermal insulation coating layer is manufactured using high-temperature insulating zirconia oxide ceramic.

[0064] For example, the thickness of the thermal insulation coating layer is 100±25 microns, but is not limited thereto.

[0065] For example, along the axial direction of the inner cylinder (2), the water-cooling pipe (3) is spirally wrapped around the outer wall of the inner cylinder (2).

[0066] The above water-cooled pipe (3) may be installed on the outer wall of the inner cylinder (2) or on the inner wall of the outer cylinder (1).

[0067] The specific structural form of the above water-cooled pipe (3) is not limited thereto, for example, the above water-cooled pipe (3) may be slalom-shaped and may be distributed on the outer wall of the inner cylinder (2), and the above water-cooled pipe (3) may include a plurality of straight pipes (3) extending along the axial direction of the inner cylinder (2) in a slalom shape and a bent pipe (3) installed between two adjacent straight pipes (3).

[0068] For example, in the direction from the top end of the inner cylinder (2) to the bottom part of the inner cylinder (2), the diameter of the water-cooled pipe (3) gradually increases.

[0069] By adopting the above-described solution, the water cooling effect of the water cooling pipe (3) changes gradient along the axial direction of the inner cylinder (2), which is advantageous for controlling the radial and axial temperature gradients.

[0070] For example, the diameter of the above water-cooled pipe is 5mm-10mm, but is not limited thereto.

[0071] For example, in the direction from the top end of the inner cylinder (2) to the bottom part of the inner cylinder (2), the circumference of the water-cooled pipe is 48 mm.

[0072] Referring to FIGS. 1, 5 to 7, exemplarily, the cooling water jacket device according to the present embodiment further includes a lifting structure for controlling the lifting of the tubular body;

[0073] The above-mentioned cylindrical body includes an inner cylinder (2) and an outer cylinder (1) located outside the inner cylinder (2);

[0074] The lifting structure includes two lifters (4) installed oppositely on both sides of the cylindrical body, and each of the lifters (4) includes a driving member and a power transmission member, and the power transmission member is connected to the outer cylinder (1) through a connecting structure so that the two lifters (4) can be moved asynchronously to drive the cylindrical body to tilt at a preset angle.

[0075] By installing the lifting structure described above, the lifting of the cylindrical body is controlled, and by adopting a method in which two lifters (4) are driven independently, the two lifters (4) can be moved asynchronously, and the cylindrical body can be tilted within a preset angle range to form an asymmetric water cooling effect. A large gradient change accelerates the transfer of heat from the crystal ingot to the cooling water jacket, thereby improving heat transfer efficiency and accelerating heat dissipation in the axial and radial directions of the crystal ingot. Additionally, depending on the requirements of the drawing process, the radial / radial temperature gradient and the radial temperature gradient of the crystal ingot can be significantly adjusted to control the reaction rate of defects in the crystal ingot, control the defect distribution, and, with excellent cooling rate, draw crystal ingots of various defect types (e.g., crystal ingots without stacking faults, BMD crystal ingots).

[0076] Since the crystal ingots required for different process parameters must achieve different water cooling effects, an asynchronously moving cooling water jacket device can be adjusted accordingly as needed to obtain an appropriate cooling effect.

[0077] The purpose of asynchronous movement is to create an asymmetric effect in the radial direction to enhance the water cooling effect. The operation of the lifting mechanism is such that when drawing an epitaxial crystal ingot, the cooling water jacket is moved to the liquid surface to increase the cooling effect and thereby improve the drawing speed, as high drawing speeds are required; when drawing a defect-free polished crystal ingot, the cooling water jacket is moved upward to suppress the formation of COP; and when drawing a BMD crystal ingot, the nucleation and growth of BMD must be promoted, so the cooling water jacket is moved to control BMD nucleation at a low temperature of 650°C-700°C, and simultaneously, for the high temperature region, it is moved asynchronously to control the expansion of the crystal ingot section in the temperature range of 750°C-1100°C. This promotes high-temperature nucleation of BMD.

[0078] It needs to be explained that, depending on the operation of the lifting structure, the combination of the two lifters (4) installed opposite each other can lift the cylindrical body at an angle, that is, the two lifters (4) are moved asynchronously to tilt it at a preset angle, and then the two lifters (4) are controlled to move synchronously so that the cylindrical body is lifted and moved in an angled state.

[0079] It should be explained that the number of lifters (4) included in the lifting structure is not limited, and two lifters (4) are installed on opposite sides of the cylindrical body, and the two lifters (4) installed opposite each other form a set, and the lifting structure may include multiple sets of lifters (4), and each set of lifters (4) can tilt the cylindrical body in one direction, and thus, depending on actual demand, multiple sets of lifters (4) can be installed, and the tilting direction of the cylindrical body can be flexibly controlled to better control the water cooling effect.

[0080] It should be explained that the combination of two opposing lifters (4) can lift the cooling water jacket body at an angle, and the angle of inclination can be set according to actual demand, for example, 0°C-17°C, but is not limited thereto.

[0081] For example, the power transmission member comprises a lifting rod (41) and a power transmission gear (42),

[0082] The lifting rod (41) extends in the axial direction of the outer cylinder (1), and a gear rack structure (411) is installed on the outer surface of the lifting rod (41);

[0083] The power transmission gear (42) is connected to the gear rack structure (411) to transmit power to the lifting rod (41).

[0084] In this embodiment, a combination method of the power transmission gear (42) and the lifting rod (41) is adopted, and as the power transmission gear (42) rotates, power is transmitted to the lifting rod (41) to realize the lifting of the cylindrical body.

[0085] For example, the driving member of each of the above lifters (4) may be a driving motor.

[0086] For example, the outer surface of one of the lifting rods (41) has a first region installed away from the other lifting rod (41), the first region is recessed inward to form a connecting surface, and the gear rack structure (411) is installed on the connecting surface.

[0087] The above connecting surface is a plane parallel to the axial direction of the outer cylinder (1), and the gear rack structure (411) is installed on the connecting surface, which is advantageous for the combination of the gear rack structure (411) and the power transmission gear (42).

[0088] For example, the gear rack structure (411) includes a plurality of parallel gear racks protruding from the connecting surface, and the plurality of gear racks are arranged side by side along the axial direction of the outer cylinder (1), and a rack groove is formed between two adjacent gear racks.

[0089] The extension direction of the gear rack is perpendicular to the axial direction of the outer cylinder (1), and the axial direction of the power transmission gear (42) is parallel to the extension direction of the gear rack. The teeth of the power transmission gear (42) correspond to the rack grooves, so that as the power transmission gear (42) rotates, the lifting rod (41) is driven to lift and move, thereby driving the cylindrical body to lift and move.

[0090] For example, the gear rack is a threaded gear rack, and the threaded gear rack has the characteristics of high precision and high load.

[0091] For example, a limit position (43) is installed at one end of the lifting rod (41) away from the outer cylinder (1).

[0092] A limit position (43) is installed to prevent the power transmission gear (42) from disengaging from the lifting rod (41), and the limit position (43) may be circular in shape, and the area of ​​the limit position (43) in the radial direction of the lifting rod (41) is larger than the cross-sectional area of ​​the end surface of the lifting rod (41).

[0093] The limit position (43) and the lifting rod (41) may be an integral structure, may be connected through a process such as welding, or may be formed simultaneously when the connecting surface is formed, and the first area may be located in the center of the lifting rod (41), and the first area is sunken inward to form a concave groove, and the bottom surface of the concave groove is the connecting surface, and the limit position (43) is formed on the first side wall of the concave groove that is away from one end of the outer cylinder (1) in the axial direction of the lifting rod (41), and a position limiting barrier wall is formed on the second side wall of the concave groove opposite to the first side wall to limit the movement course of the power transmission gear (42).

[0094] For example, in the axial direction of the outer cylinder (1), the length of the first region is shorter than the length of the lifting rod (41), and the first region is located at one end of the lifting rod (41) away from the outer cylinder (1).

[0095] For example, in the axial direction of the outer cylinder (1), the length of the first region is more than half the length of the lifting rod (41).

[0096] For example, the connecting part (5) includes a hook (51) installed on the outside of the outer cylinder (1), and two protrusions (52) are formed convexly on opposite sides of the hook (51), and each of the protrusions (52) has a connecting via hole (521) installed to connect to the corresponding lifting rod (41).

[0097] For example, a connecting ring (44) is installed at one end of the lifting rod (41) near the outer cylinder (1), and the connecting ring (44) and the lifting rod (41) are threaded together, and the lifting rod (41) and the projection (52) are loosely spaced apart, which facilitates the tilting of the cooling water jacket when the two lifting rods (41) move asynchronously.

[0098] For example, a first flange (11) is installed on the top portion of the outer cylinder (1), and the catch ring (51) is installed on one side of the first flange (11) near the bottom portion of the outer cylinder (1).

[0099] The above-mentioned hook (51) is bonded to the first flange (11) by an adhesive layer, thereby improving the bonding strength between the connecting part (5) and the outer cylinder (1).

[0100] An embodiment of the present application further provides a single crystal furnace comprising the cooling water jacket device, a furnace body, and a crucible located within the furnace body, wherein the cylindrical body is fixed above the crucible under the lifting action of the lifting structure.

[0101] It will be understood that the above embodiments are merely exemplary embodiments used to explain the principles of the present application, and that the present application is not limited thereto. A person skilled in the art may make various modifications and improvements without departing from the spirit and essence of the present application, and such modifications and improvements should also be considered within the scope of protection of the present application.

Claims

Claim 1 A cooling water jacket device comprising a cylindrical body, wherein a control sleeve communicating with the interior of the cylindrical body is installed at the bottom portion of the cylindrical body, and the control sleeve comprises a first portion connected to the cylindrical body and a second portion opposite to the first portion, wherein the cross-sectional area of ​​the control sleeve gradually decreases in the radial direction of the cylindrical body from the first portion to the second portion; wherein an insulating layer is installed on the outer surface of the control sleeve, and the insulating layer comprises a third layer close to the control sleeve and a fourth layer far from the control sleeve, wherein the third layer is a transition layer formed by a chemical reaction between a graphite material and the outer wall of the control sleeve, wherein the third layer is a C+SiC composite transition coating layer and the fourth layer is a SiC coating layer, and the thickness of the insulating layer is 160 ± 15 microns. Claim 2 A cooling water jacket device according to claim 1, wherein the inner surface of the adjustment sleeve is a curved surface. Claim 3 A cooling water jacket device according to claim 2, wherein the cross-sectional shape of the adjustment sleeve in the axial direction of the cylindrical body is a parabolic shape. Claim 4 A cooling water jacket device according to claim 1, wherein, in the axial direction of the tubular body, the adjusting sleeve comprises a first portion close to the tubular body and a second portion adjacent to the first portion, and the outer surface of the second portion is recessed inward to form a hollow portion. Claim 5 A cooling water jacket device according to claim 1, wherein an endothermic layer is installed on the inner surface of the control sleeve. Claim 6 A cooling water jacket device according to claim 5, wherein the heat-absorbing layer comprises a first layer close to the control sleeve and a second layer far from the control sleeve, and the first layer is a transition layer formed by a chemical reaction between a graphite material and the inner wall of the control sleeve. Claim 7 A cooling water jacket device according to claim 6, wherein the first layer is a C+SiC composite transition coating layer and the second layer is a SiC coating layer. Claim 8 A cooling water jacket device according to claim 5, wherein the thickness of the heat-absorbing layer is 130 ± 15 microns. Claim 9 A cooling water jacket device according to claim 1, wherein the cylindrical body comprises an inner cylinder and an outer cylinder located outside the inner cylinder, the bottom portion of the outer cylinder comprises a first region for bearing the inner cylinder and a second region adjacent to the first region, the first region is installed on a side wall close to the outer cylinder, and a flange is installed on the top portion of the adjustment sleeve, and the flange is connected to the second region. Claim 10 A single crystal furnace comprising a cooling water jacket device according to any one of claims 1 to 9. Claim 11 delete Claim 12 delete Claim 13 delete Claim 14 delete

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