Cutting apparatus

Abstract

(Problem) A cutting device is provided that can check whether modification of the support surface is necessary or inspect whether the modification has been properly performed without contacting the support surface with a jig. (Solution) A cutting device for cutting a wafer using a cutting blade, comprising: a shape memory unit that stores the cross-sectional shape in the axial direction of the spindle of a support surface having a mount of a cutting unit as a stored cross-sectional shape; a shape measuring device that non-contactually measures the cross-sectional shape in the axial direction of the spindle of the support surface; a judgment unit that determines whether modification of the support surface is required by comparing the stored cross-sectional shape stored in the shape memory unit with the measured cross-sectional shape measured by the shape measuring device; and a cross-sectional modification device that modifies the shape of the support surface.

Description

Technology Field

[0001] The present invention relates to a cutting device for cutting a workpiece using a cutting blade. Background Technology

[0002] A cutting device that cuts a workpiece held on the holding surface of a holding table using a cutting blade cuts the workpiece by rotating the cutting blade and moving the workpiece in the cutting direction of the cutting blade.

[0003] The cutting blade has a blade with a shape similar to a toroidal washer and a hub blade formed on an aluminum base by electrocasting, and the cutting blade is secured by a mount fixed to the tip of the spindle and having a male screw at the tip, and a nut that screws into the male screw of the mount.

[0004] Consequently, when a toroidal cutting blade is fixed to a mount, the support surface of the mount in contact with the cutting blade is damaged, and the surface becomes uneven. Furthermore, when a cutting blade of the type in which an annular grinding wheel is formed on the outer circumference of an aluminum base by electrocasting is fixed to a mount, aluminum adheres to the support surface in contact with the aluminum base of the mount, preventing the support surface from achieving the desired shape. As a result of the support surface of the mount in contact with the cutting blade failing to achieve the desired shape, the cutting blade mounted on the mount rotates while wobbling in the thickness direction, leading to a problem where the width of the kerf formed on the workpiece widens.

[0005] Therefore, to prevent such problems from occurring, as disclosed in the following patent documents 1 to 6, the shape of the support surface of the mount that the cutting blade contacts is modified by grinding it with a grinding stone. In addition, as disclosed in the following patent document 7, it is also proposed to remove the cutting blade from the mount, modify the shape of the support surface, and then check whether the shape of the support surface has been properly modified. Prior art literature

[0006] Japanese Published Patent Application No. 2011-224666 Japanese Published Patent Application No. 2011-011299 Japanese Published Patent Application No. 2011-255458 Japanese Published Patent Application No. 2012-223848 Japanese Published Patent Application No. 2018-187694 Japanese Published Patent Application No. 2011-011299 Japanese Published Patent Application No. 2017-221994 The problem to be solved

[0007] However, in the method disclosed in Patent Document 7, since the cutting blade contacts the support surface by contacting the jig, there is a possibility of damaging the support surface.

[0008] Accordingly, the objective of the present invention is to provide a cutting device capable of verifying whether modification of a support surface is necessary or inspecting whether the modification has been properly performed without contacting a jig to the support surface. means of solving the problem

[0009] According to one aspect of the present invention, a cutting device for cutting a wafer using a cutting blade comprises: a holding table for holding a wafer on a holding surface; a male screw formed at the leading edge of a circumference extending in the axial direction of the spindle and disposed at the leading edge of a spindle; a mounting surface formed annularly in a concentric shape with respect to the male screw and supporting the cutting blade; a nut that is screw-coupled to the male screw and places the cutting blade between the supporting surface and the mounting surface; a cutting unit for cutting a wafer held on the holding surface with the cutting blade; a shape memory unit for storing a cross-sectional shape of the supporting surface in the axial direction of the spindle; a shape measuring device for non-contactually measuring the cross-sectional shape of the supporting surface in the axial direction of the spindle; a judgment unit for determining whether modification of the supporting surface is required by comparing the stored cross-sectional shape stored in the shape memory unit with the measured cross-sectional shape measured by the shape measuring device; and a cross-sectional correction device for modifying the shape of the supporting surface. The cross-sectional correction device comprises a correction grinding stone capable of contacting the supporting surface and a leading edge detection unit for detecting the leading edge of the correction grinding stone. A cutting device is provided that includes a movement control unit for moving the crystal grinding stone and the support surface in a direction relatively parallel to the support surface while the tip of the crystal grinding stone is in contact with the support surface.

[0010] Preferably, the shape measuring device comprises a light-emitting unit that emits a laser beam toward the support surface in the axial direction of the spindle, and an image sensor that receives reflected light of the laser beam reflected from the support surface, and measures the axial distance of the spindle from the light-emitting unit to the support surface by the receiving position where the image sensor receives the reflected light.

[0011] Additionally, preferably, the shape measuring device comprises an oscillator that emits ultrasonic vibrations toward the support surface in the axial direction of the spindle, and a receiver that receives vibrations reflected from the support surface by the ultrasonic vibrations emitted by the oscillator, and measures the axial distance of the spindle from the oscillator to the support surface by the time from when the oscillator emits ultrasonic vibrations until when the receiver receives vibrations reflected from the support surface. Effects of the invention

[0012] A cutting device related to one aspect of the present invention determines non-contactually whether it is necessary to modify the shape of the support surface of a mount, and if necessary, can modify the shape of the support surface. Accordingly, the support surface can be formed into a desired shape without damaging the support surface, and the kerf of the workpiece can be prevented from widening. Brief explanation of the drawing

[0013] FIG. 1 is a perspective view showing a first example of a cutting device. Figure 2 is an exploded perspective view showing an example of a cutting unit. Figure 3 is a schematic diagram showing a first example of a shape measuring device. FIG. 4 is a perspective view showing a first example of the cross-sectional shape of a support surface. FIG. 5 is a perspective view showing a second example of the cross-sectional shape of a support surface. FIG. 6 is a schematic diagram showing the measurement of the cross-sectional shape of the support surface in the cutting device of the first example. FIG. 7 is a schematic diagram showing the state of modifying the shape of the end face in the cutting device of the first example. FIG. 8 is a perspective view showing a second example of a cutting device. FIG. 9 is a schematic diagram showing the measurement of the cross-sectional shape of the support surface in the cutting device of the second example. FIG. 10 is a schematic diagram showing the state of modifying the shape of the end face in a cutting device of the second example. Specific details for implementing the invention

[0014] Hereinafter, embodiments of the present invention will be described with reference to the attached drawings.

[0015] 1. First embodiment

[0016] (1) Cutting device

[0017] The cutting device (1) shown in FIG. 1 is a cutting device that cuts a workpiece (101) held on a holding surface, which is the upper surface of a holding table (holding means) (2), using a first cutting unit (first cutting means) (3000) and a second cutting unit (second cutting means) (3001). For example, the workpiece (101) is a semiconductor wafer in the shape of a disc. On the upper surface of the workpiece (101), a plurality of intersecting planned division lines (104) are formed, and a device (105) is disposed in each area partitioned by the planned division lines (104).

[0018] The cutting device (1) is equipped with a base (10) having a rectangular shape.

[0019] On the base (10), an X-axis moving mechanism (X-axis moving means) (7) for moving the maintenance table (2) in the X-axis direction is provided. The X-axis moving mechanism (7) is provided with a ball screw (70) having a rotation axis (75) in the X-axis direction, an X-axis motor (72) that rotates the ball screw (70) around the rotation axis (75), a pair of guide rails (71) arranged parallel to the ball screw (70), and a movable plate (73) that can move in the X-axis direction along the guide rails (71) by screwing a nut on the bottom part to the ball screw (70).

[0020] A casing (26) having a cylindrical shape is disposed on the movable plate (73), and a rotating mechanism (rotating means), such as one not shown, is disposed inside the casing (26). In FIG. 1, a state is shown in which a holding table (2) is disposed above the casing (26).

[0021] By using an X-axis motor (72) to drive the ball screw (70) and rotating the ball screw (70) around the rotation axis (75), the movable plate (73) moves in the X-axis direction while being guided by the guide rail (71), and the holding table (2) supported by the movable plate (73) moves in the X-axis direction. Additionally, the holding table (2) can rotate around the rotation axis (24) by means of a rotation mechanism not shown. Furthermore, the holding surface of the holding table (2) is connected to the suction source (23). A plurality of clamps (27) (four in FIG. 1) are arranged around the holding surface of the holding table (2).

[0022] The workpiece (101) held on the holding table (2) is supported by the tape (103) on the frame (102) by being attached to the tape (103) together with the frame (102) from the lower side of the workpiece (101) while surrounded by the annular frame (102).

[0023] A door-type column (11) is disposed on the -X direction side of the base (10). The door-type column (11) is provided with a first column section (12) and a second column section (13) installed on both sides of the movement path (X-axis direction) of a maintenance table (2) that is detachably disposed on the base (10) via an X-axis movement mechanism (7), and a section (14) installed in the Y-axis direction between the upper portions of the first column section (12) and the second column section (13).

[0024] On the side of the first column part (12) in the +X direction, a first Y-axis moving mechanism (first Y-axis moving means) (4000) for moving the first cutting unit (3000) in the Y-axis direction is disposed, and on the side of the second column part (13) in the +X direction, a second Y-axis moving mechanism (second Y-axis moving means) (4001) for moving the second cutting unit (3001) in the Y-axis direction is disposed.

[0025] The first Y-axis moving mechanism (4000) comprises a ball screw (40) having a rotation axis (45) in the Y-axis direction, a pair of guide rails (41) arranged parallel to the ball screw (40), a Y-axis motor (42) connected to one end of the ball screw (40), and a moving base (43) in which an internal nut is screw-coupled to the ball screw (40) and its side surface slides in contact with the guide rail (41).

[0026] A first Z-axis moving mechanism (first Z-axis moving means) (5000) for moving the first cutting unit (3000) in the Z-axis direction is disposed on the moving base (43), and the moving base (43) supports the first cutting unit (3000) through the first Z-axis moving mechanism (5000).

[0027] By driving the ball screw (40) using the Y-axis motor (42) and rotating the ball screw (40) with the rotation axis (45) as the axis, the moving base (43) moves in the Y-axis direction while being guided by the guide rail (41), and at the same time, the first Z-axis moving mechanism (5000) and the first cutting unit (3000) move in the Y-axis direction.

[0028] The second Y-axis movement mechanism (4001) has the same configuration as the first Y-axis movement mechanism (4000), is assigned a common code, and its description is omitted.

[0029] The first Z-axis moving mechanism (5000) comprises a ball screw (50) having a rotation axis (55) in the Z-axis direction, a pair of guide rails (51) arranged parallel to the ball screw (50), a Z-axis motor (52) connected to one end of the ball screw (50) and rotating the ball screw (50) with the rotation axis (55) as the axis, and a lifting plate (53) having an internal nut screw-coupled to the ball screw (50) and a side that slides in contact with the guide rail (51). The lifting plate (53) supports the first cutting unit (3000).

[0030] When the ball screw (50) is driven using the Z-axis motor (52), the ball screw (50) rotates with the rotation axis (55) as the axis. Accordingly, as the lifting plate (53) moves in the Z-axis direction while being guided by the guide rail (51), the first cutting unit (3000) moves up and down in the Z-axis direction.

[0031] The second Z-axis movement mechanism (second Z-axis movement means) (5001) has the same configuration as the first Z-axis movement mechanism (5000), and a common symbol is assigned so that the description thereof is omitted.

[0032] The X-axis movement mechanism (7), the first Y-axis movement mechanism (4000) and the second Y-axis movement mechanism (4001), and the first Z-axis movement mechanism (5000) and the second Z-axis movement mechanism (5001) are controlled by the control unit (87).

[0033] The first cutting unit (3000) and the second cutting unit (3001) are provided with a blade cover (31) that covers the cutting blade (30) mounted on the first cutting unit (3000) and the second cutting unit (3001) from above.

[0034] On the +X direction side of the cutting blade (30), a cutting water nozzle is disposed to supply cutting water from the outer circumference side of the cutting blade (30) toward the cutting blade (30).

[0035] Since the second cutting unit (3001) is configured in the same way as the first cutting unit (3000), a common symbol is assigned and the description is omitted.

[0036] At a position adjacent to the first cutting unit (3000) and the second cutting unit (3001), an alignment unit (alignment means) (34) for detecting a planned division line (104) to be cut is disposed, respectively. The alignment unit (34) has a camera (340), and, for example, with the workpiece (101) positioned below the alignment unit (34), the planned division line (104) formed on the workpiece (101) can be detected based on the captured image by using the camera (340) to capture the planned division line (104).

[0037] The first cutting unit (3000) and the second cutting unit (3001) are each provided with a housing (36), and a motor, etc., not shown is housed inside the housing (36).

[0038] As shown in FIG. 2, the first cutting unit (3000) and the second cutting unit (3001) are equipped with a spindle (60), a mount (63) fixed to the tip of the spindle (60), a nut (66) and a fastener (67) that press a cutting blade (30) mounted on the mount (63) toward the mount (63).

[0039] The spindle (60) is formed in a cylindrical shape, for example. The spindle (60) is housed in a housing (36). The spindle (60) is connected to a motor (not shown) that rotates the spindle (60) around a rotation axis (65) in the Y-axis direction. A female screw (600) is formed at the tip of the spindle (60).

[0040] The cutting blade (30) is provided with an aluminum annular base (301) having an opening (300) in the center and a cutting edge (302) disposed on the outer circumference of the annular base (301). The cutting edge (302) is electroplated on the outer circumference of the annular base (301).

[0041] The mount (63) is provided with a disc-shaped flange portion (630) and a cylindrical boss portion (633) formed in the center of the flange portion (630) and protruding in the direction of the rotation axis (65) of the spindle (60) (-Y direction side).

[0042] The flange portion (630) has an annular support surface (631) that supports the surface on the +Y direction side of the cutting blade (30). Additionally, the flange portion (630) has a concave portion (632) that is concave in the +Y direction from the support surface (631) on the inner side in the diameter direction of the support surface (631).

[0043] A male screw (634) is formed at the tip of the outer surface of the boss (633), and the support surface (631) is formed in an annular shape concentric with respect to the male screw (634).

[0044] On the inner surface of the nut (66), a female screw (660) corresponding to the male screw (634) of the mount (63) is formed. Additionally, on the fixing member (67), a male screw (670) corresponding to the female screw (600) of the spindle (60) is formed.

[0045] By inserting the opening (300) of the cutting blade (30) into the boss portion (633) of the mount (63), bringing one side of the cutting blade (30) into contact with the support surface (631) of the mount (63), and screwing the nut (66) onto the male screw (634) of the boss portion (633), the cutting blade (30) is fitted by the support surface (631) and the nut (66) and fixed to the tip of the spindle (60).

[0046] For example, the workpiece (101) can be cut by inserting a cutting edge (302), which is in a rotating state driven by a motor not shown and housed inside the housing (36), into the workpiece (101) shown in FIG. 1.

[0047] Additionally, the second cutting unit (3001) is configured in the same way as the first cutting unit (3000), is assigned a common symbol, and its description is omitted.

[0048] As illustrated in FIG. 1, a first base (731) and a second base (732) are disposed on the movable plate (73). On the first base (731) and the second base (732), a cross-sectional corrector (cross-sectional corrector means) (80) is disposed to correct the cross-sectional shape in the Y-axis direction of the support surface (631) of each mount (63) provided in the first cutting unit (3000) and the second cutting unit (3001).

[0049] The cross-section rectifier (80) is provided with a rectifier stone (81) formed in a flat shape in the XY plane direction. The rectifier stone (81) protrudes from the side of the first base (731) in the +Y direction and the side of the second base (732) in the -Y direction toward the respective mount (63).

[0050] Additionally, the cross-section correction device (80) is equipped with a tip detection unit (82) that detects the tip of the correction stone (81). In the example of FIG. 1, the alignment unit (34) serves as the tip detection unit (82), but the tip detection unit may be provided separately from the alignment unit (34).

[0051] Additionally, the cross-section correction device (80) is equipped with a movement control unit (86) that moves the crystal stone (81) and the support surface (631) in an X-axis direction relatively parallel to the support surface (631) while the support surface (631) and the tip of the crystal stone (81) are in contact. In the example of FIG. 1, the crystal stone (81) and the support surface (631) can be moved in a direction relatively parallel to the support surface (631) by the movement control unit (86) controlling the X-axis movement mechanism (7).

[0052] A shape measuring device (shape measuring means) (83) is positioned at an adjacent location on the -X direction side of the cross-section corrector (80). As shown in FIG. 3, the shape measuring device (83) is equipped with a light-emitting part (831) that emits a laser beam (835) in the direction of the rotation axis (65) of the spindle (60) (Y-axis direction) toward the support surface (631) of the mount (63) equipped with the first cutting unit (3000) and the second cutting unit (3001), a lens (832) that forms an image of the reflected light (836) of the laser beam (835) reflected from the support surface (631), an image sensor (833) that receives the formed reflected light (837), and a calculation part (834) that calculates the distance from the light-emitting part (811) to the support surface (613) and obtains the cross-sectional shape of the support surface (631) based on the calculated value.

[0053] The lens (832) and image sensor (833) are positioned in the X-axis or Z-axis direction relative to the light-emitting part (831). FIG. 3 shows a shape measuring device (83) on the first base (731), and the lens (832) and image sensor (833) are positioned, for example, on the -X direction side relative to the light-emitting part (831). Meanwhile, the lens (832) and image sensor (833) of the shape measuring device (83) on the first base (731) are positioned, for example, on the +X direction side relative to the light-emitting part (831), although not shown.

[0054] The image sensor (833) is configured such that a plurality of light-receiving parts, which receive reflected light (837) formed by the lens (832), are arranged in alignment in the X-axis direction. The calculation unit (834) calculates the distance from the light-emitting part (831) to the support surface (631) based on which light-receiving part of the image sensor (833) receives the reflected light (837). By continuously performing this distance calculation while moving the image sensor (833) and the support surface (613) relative to each other in the X-axis direction or the Z-axis direction, the cross-sectional shape of the spindle (60) of the support surface (631) in the axial direction (Y-axis direction) is obtained.

[0055] The cutting device (1) is equipped with a shape memory unit (84) that stores a cross-sectional shape in the direction of the rotation axis (65) of the spindle (60) of the support surface (631) as a pre-stored cross-sectional shape, and a judgment unit (85) that determines whether modification of the shape of the support surface (631) is necessary by comparing the stored cross-sectional shape stored in the shape memory unit (84) with the measured cross-sectional shape, which is the actual cross-sectional shape measured by the shape measuring device (83).

[0056] In the case where the cutting blade (30) mounted on the first cutting unit (3000) and the second cutting unit is the hub blade (30) shown in FIG. 4, the support surface (6311) shown in FIG. 4 is formed in a cross-sectional arc shape in which the position in the Y-axis direction differs depending on the position in the diameter direction of the mount (63) on the support surface (6311).

[0057] In addition, when the cutting blade (30) mounted on the first cutting unit (3000) and the second cutting unit (3001) is a washer-type hubless blade (306) without a circular base as shown in FIG. 5, the support surface (6316) is formed in a shape that protrudes in the -Y direction as it faces outward in the diameter direction of the mount (63) and spreads outward toward the cross-sectional end that approaches the hubless blade (306).

[0058] In the shape memory unit (84), depending on whether the cutting blade mounted on the mount (63) is a hub blade (30) or a hubless blade (306), one of the shapes is pre-set and stored as either a cross-sectional arc shape or a shape that flares out toward the end of the cross section. For example, in the case of a cross-sectional arc shape, values ​​such as the distance in the Y-axis direction between the part protruding most in the -Y direction and the part located most in the +Y direction (outermost part or innermost part), the distance in the diameter direction between the outermost part and the innermost part (two locations located most in the +Y direction), and the radius of curvature of the arc are stored. On the other hand, in the case of a shape that flares out toward the end of the cross section, the distance in the Y-axis direction between the outermost part and the innermost part is stored.

[0059] Additionally, the shape memory unit (84) may have two shapes set and stored: a cross-sectional arc shape corresponding to the hub blade (30) and a cross-sectional shape that flares out toward the end corresponding to the hubless blade (306).

[0060] (2) Modification of the shape of the support surface

[0061] To replace the cutting blade (30) mounted on the first cutting unit (3000) or the second cutting unit (3001), the nut (66) shown in FIG. 2 is removed from the mount (63), and then the cutting blade (30) is removed from the mount (63). Then, the supporting surface (631) of the mount (63) is checked to see if it has a desired shape according to the type of cutting blade.

[0062] For example, when modifying the shape of the support surface (631) of the mount (63) equipped with the first cutting unit (3000), first, the X-axis moving mechanism (7) shown in FIG. 1 moves the movable plate (73) in the X-axis direction, and at the same time, the first Y-axis moving mechanism (4000) and the first Z-axis moving mechanism (5000) move the first cutting unit (3000) in the Y-axis direction and the Z-axis direction, thereby bringing the support surface (631) and the shape measuring device (83) into contact as shown in FIG. 6.

[0063] Then, while projecting a laser beam from the projection unit (831) toward the support surface (631), the first Z-axis movement mechanism (5000) changes the height position in the Z-axis direction of the first cutting unit (3000) and scans the laser beam in the diameter direction of the support surface (631), thereby the calculation unit (834) calculates the distance between the projection unit (831) and the support surface (631) for each position in the diameter direction of the support surface (631). In this way, based on the data calculated by the calculation unit (834), a distribution indicating the position in the Y-axis direction of the support surface (631) is created, and the shape of the support surface (631) in its current state is identified.

[0064] Additionally, while projecting a laser beam from the projection unit (831) onto the support surface (631), the X-axis movement mechanism (7) moves the movable plate (73) in the X-axis direction and projects the laser beam in the diameter direction of the support surface (631), thereby allowing the calculation unit (834) to calculate the distance between the projection unit (831) and the support surface (631) at each position in the diameter direction of the support surface (631) to determine the shape of the support surface (631).

[0065] Additionally, the mount (63) may be rotated around the rotation axis (65) to determine the shape of the support surface (631).

[0066] In the shape memory unit (84), the desired shape of the support surface (631) is stored. That is, if the cutting blade (30) is a hub blade, the cross-sectional arc shape shown in FIG. 4 is stored, and if the cutting blade (30) is a hubless blade, the cross-sectional shape that flares out toward the end shown in FIG. 5 is stored.

[0067] In addition, the shape of the support surface may be stored by measuring the mount mounted on the device as described above, or it may be stored as data such as image data or numerical data.

[0068] For example, when a hub blade (30) is mounted on a mount (63), the judgment unit (85) compares the cross-sectional arc shape stored in the shape memory unit (84) with the actual shape recognized by the shape measuring device (83). Then, if there is a difference between the two shapes, the cross-sectional corrector (80) corrects the shape of the support surface (631). The specific method is as follows.

[0069] First, the X-axis moving mechanism (7) shown in FIG. 1 moves the movable plate (73) in the X-axis direction, and the first Z-axis moving mechanism (5000) lowers the first cutting unit (3000) and positions the camera (340) above the crystal grinding stone (81) placed on the first base (731). Then, for example, when the tip of the crystal grinding stone (81) in the +Y direction is positioned at the center of the lens of the camera (340), the position of the first cutting unit (3000) is set as the tip position of the crystal grinding stone (81), and is recognized by the number of pulse signals for the Y-axis motor (42) at that time.

[0070] By this, it becomes possible to move the tip of the crystal stone (81) to a position in contact with the support surface (6311) by the distance in the Y-axis direction between the center of the camera (340) and the support surface (6311) that is stored in advance.

[0071] Next, the X-axis moving mechanism (7) moves the movable plate (73) in the X-axis direction, and as shown in FIG. 7, the support surface (6311) of the mount (63) is positioned on the -X direction side relative to the correction stone (81) provided by, for example, the cross-section correction device (80). Also, in the example of FIG. 7, the lowest part of the inner circumference of the support surface (6311) is positioned slightly lower than the correction stone (81).

[0072] Next, the first cutting unit (3000) is positioned so that the support surface (6311) of the mount (63) and the tip of the crystal grinding stone (81) in the +Y direction can come into contact. Here, for example, the distance between the position in the Y-axis direction of the camera (340) and the position in the Y-axis direction of the base part (6312) located at the far +Y direction side of the support surface (6311) of the mount (63) is recognized in advance by the control unit (87) shown in FIG. 1, and by positioning the first cutting unit (3000) at a position where the distance is subtracted from the position of the first cutting unit (3000) when the center of the lens of the camera (340) is located at the tip of the crystal grinding stone (81) in the +Y direction, the position in the Y-axis direction of the base part (6312) of the support surface (6311) and the position of the tip of the crystal grinding stone (81) in the +Y direction coincide.

[0073] In this way, the support surface (631) is made capable of being processed by the modification grinding stone (81). By rotating the spindle (60) and, under the control of the movement control unit (86), the X-axis movement mechanism (7) moves the movable plate (73) in the -X direction and the +X direction, thereby causing the modification grinding stone (81) to come into contact with the support surface (6311) and the support surface (6311) to be cut.

[0074] In order to process the support surface (6311) into a cross-sectional arc shape, the modification grinding stone (81) is moved in the -X direction and the support surface (6311) is traversed across the modification grinding stone (81). Next, the first Y-axis movement mechanism (4000) moves the first cutting unit (3000) by a predetermined amount in the -Y direction. Next, the modification grinding stone (81) is moved in the +X direction to traverse the support surface (6311) across the modification grinding stone (81). Next, the first Y-axis movement mechanism (4000) moves the first cutting unit (3000) by a predetermined amount in the -Y direction. In this way, whenever the modification grinding stone (81) is moved in the X-axis direction, the support surface (6311) is brought closer to the modification grinding stone (81). By utilizing the phenomenon in which the amount of grinding is large when the modified grinding stone (81) comes into contact with and is consumed by the support surface (6311), and the amount of grinding gradually decreases as the modified grinding stone (81) is consumed while traversing the support surface (6311), the cross-section of the support surface (6311) is formed into an arc.

[0075] In addition, the support surface (6311) may be modified using a modified stone (91).

[0076] After modifying the shape of the support surface (6311) in this manner, the shape measuring device (83) is positioned against the support surface (6311), and the shape of the modified support surface (6311) is recognized by the shape measuring device (83). The method is the same as before modifying the shape of the support surface (6311). Then, the judgment unit (85) compares the measured cross-sectional shape of the support surface (631) recognized by the shape measuring device (83) with the remembered cross-sectional shape stored in the shape memory unit (84), and if the shapes are different, the shape of the support surface (6311) is modified again. Meanwhile, if it is determined that the measured cross-sectional shape and the remembered cross-sectional shape match, the cutting blade (30) is mounted on the mount (63), and the nut (66) is screwed onto the male screw (634) of the mount (63). In this state, as illustrated in FIGS. 4 and 6, one side of the annular base (301) is supported in an arc shape centered on the rotation axis (65) of the mount (63) at the apex (6313) of the support surface (6311).

[0077] In addition, although the above example describes the case where the shape of the support surface (6311) of the mount (63) of the first cutting unit (3000) is modified, the method is the same when the shape of the support surface (6311) of the mount (63) of the second cutting unit (3001) is modified.

[0078] (3) Cutting of the workpiece

[0079] When cutting the workpiece (101) shown in FIG. 1, first, the workpiece (101), which is supported on the frame (102) via the tape (103), is held by suction by the holding surface of the holding table (2). Then, the holding table (2) is moved in the X-axis direction using the X-axis movement mechanism (7) to position the workpiece (101) held on the holding table (2) below the first cutting unit (3000) and the second cutting unit (3001).

[0080] Next, the alignment unit (34) uses a camera (340) to take an image of the line scheduled for division (104), and based on the image of the line scheduled for division (104), the first cutting unit (3000) or the second cutting unit (3001) is moved appropriately in the Y-axis direction using the first Y-axis moving mechanism (4000) or the second Y-axis moving mechanism (4001) to align the position of the first cutting unit (3000) and the second cutting unit (3001) in the Y-axis direction with respect to the line scheduled for division (104).

[0081] After that, the cutting blades (30) equipped in the first cutting unit (3000) and the second cutting unit (3001) are each rotated using a motor not shown, etc., housed inside the housing (36).

[0082] Then, the first cutting unit (3000) is moved in the -Z direction using the first Z-axis moving mechanism (5000) and the second Z-axis moving mechanism (5001) to bring the cutting edge (302) of each rotating cutting blade (30) into contact with the planned division line (104) of the workpiece (101), and the workpiece (101) held on the holding table (2) is moved in the X-axis direction using the X-axis moving mechanism (7). Accordingly, the workpiece (101) and the cutting blade (30) move relative to each other in the X-axis direction, and the workpiece (101) is cut along the two planned division lines (104).

[0083] After cutting two planned division lines (104), the first cutting unit (3000) and the second cutting unit (3001) can be moved in the Y-axis direction by using the first Y-axis moving mechanism (4000) and the second Y-axis moving mechanism (4001), for example, by the distance between adjacent planned division lines (104), and the cutting blade (30) can be cut into the planned division lines (104) in the same way.

[0084] In this way, after cutting all the division lines (104) of the same direction formed on the workpiece (101), the holding table (2) can be rotated, for example, by using a rotating mechanism not shown, and then the same cutting process can be performed, thereby cutting all the division lines (104) of the workpiece (101).

[0085] By performing cutting of the workpiece (101) with the shape of the support surface (6311) modified, the cutting edge (302) of the cutting blade (30) does not wobble in the Y-axis direction, and the width of the cutting groove (cuff) can be prevented from widening.

[0086] 2 Second embodiment

[0087] The cutting device (100) shown in FIG. 8 employs a first base (733) and a second base (734), a cross-section corrector (cross-section corrector means) (90), and a shape measuring device (shape measuring means) (93) in place of the first base (731) and the second base (732), the cross-section corrector (80), and the shape measuring device (83) shown in FIG. 1, and the other parts are configured in the same way as the cutting device (1) shown in FIG. 1. Hereinafter, common reference numerals with FIG. 1 will be assigned to parts configured in the same way as the cutting device (1), and their descriptions will be omitted.

[0088] The first base (733) is fixed to the first column part (12), and the second base (734) is fixed to the second column part (13).

[0089] The cross-section corrector (90) is positioned on the +X direction side on the upper side of the first base (733) and the second base (734). The correction stone (91) provided by the cross-section corrector (90) is similar to the correction stone (81) shown in FIG. 1 in that it protrudes from the side of the first base (733) on the +Y direction side and the side of the second base (734) on the -Y direction side toward the respective mount (63), but the direction of the correction stone (91) is different, and the correction stone (91) is formed in a flat shape and installed.

[0090] The shape measuring device (93) is positioned adjacent to the -X direction side of the cross-section corrector (90) on the first base (733) and the second base (734). As shown in FIG. 9, the shape measuring device (93) is provided with an oscillating unit (931) that emits an ultrasonic vibration (934) in the axial direction of the spindle (60) toward the support surface (6316), a receiving unit (932) that receives an ultrasonic reflected vibration (935) that is reflected from the support surface (6316) by the ultrasonic vibration (934) emitted by the oscillating unit (931), and a calculating unit (933) that calculates the time from when the oscillating unit (931) emits the ultrasonic vibration until the receiving unit (932) receives the vibration reflected from the support surface (6316), and calculates the distance from the oscillating unit (931) to the support surface (631) based on that time.

[0091] As illustrated in FIG. 9, a modification of the shape of the support surface (6316) in the case where the mount (63) has a support surface (6316) that opens toward the end of the cross section will be explained.

[0092] When replacing the cutting blade (306) shown in FIG. 5, the cutting blade (306) is separated from the mount (63). Then, just like the cutting device (1) shown in FIG. 1, the shape of the support surface (6316) of the mount (63) is recognized by the shape measuring device (93). Specifically, as illustrated in FIG. 9, while rotating the mount (63) around the rotation axis (65) of the spindle (60) and raising the first cutting unit (3000) with the first Z-axis moving mechanism (5000), an ultrasonic vibration (934) is emitted from the oscillator (931) toward the support surface (6316) in the axial direction of the spindle (60), and the ultrasonic reflected vibration (935) reflected from the support surface (631) by the receiver (932) is received, and the time from when the oscillator (931) emitted the ultrasonic vibration (934) until the receiver (932) received the ultrasonic reflected vibration (935) reflected from the support surface (6316) is calculated by the calculation unit (933). Then, based on the calculated time value at each point, the calculation unit (933) obtains the measured cross-sectional shape, and the judgment unit (85) compares the measured cross-sectional shape recognized by the shape measuring device (93) with the stored cross-sectional shape stored in the shape storage unit (84), and if it is determined that the shape of the support surface (6316) needs to be modified, the shape of the support surface (6316) is modified as follows.

[0093] When modifying the cross-sectional shape of the support surface (631), the movement control unit (86) controls the first Z-axis movement mechanism (5000) to move the first cutting unit (3000) in the Z-axis direction and controls the X-axis movement mechanism (7) to move the movable plate (73) in the X-axis direction, and as shown in FIG. 10, the modification grinding stone (91) is positioned, for example, inside the support surface (6316).

[0094] Next, the first cutting unit (3000) is moved in the Y-axis direction and positioned so that the support surface (6316) of the mount (63) and the tip of the crystal stone (91) can come into contact. For example, the distance between the position in the Y-axis direction of the camera (340) and the position in the Y-axis direction of the protruding end (6317) that protrudes most in the -Y direction of the support surface (6316) of the mount (63) is recognized in advance by the control unit (87), and by positioning the first cutting unit (3000) at a position where the distance is subtracted from the position of the first cutting unit (3000) when the center of the lens of the camera (340) is located at the tip of the crystal stone (91) in the +Y direction, the position in the Y-axis direction of the protruding end (6317) of the support surface (6316) and the position of the tip of the crystal stone (91) coincide.

[0095] In this way, the support surface (6316) is made capable of being processed by the modification grinding stone (91). By rotating the mount (63) around the rotation axis of the spindle (60) and raising the first cutting unit (3000) in the +Z axis direction by the first Z-axis moving mechanism (5000), the modification grinding stone (91) comes into contact with the inner circumference (6318) of the support surface (6316), and processing of the support surface (631) begins.

[0096] Then, after the first Z-axis movement mechanism (5000) raises the first cutting unit (3000) in the +Z-axis direction, the first Y-axis movement mechanism (4000) is controlled to move the first cutting unit (3000) in the +Y direction so that the tip of the crystal grinding stone (91) does not come into contact with the support surface (6316). Next, the first cutting unit (3000) is lowered in the -Z-axis direction and the crystal grinding stone (91) is positioned inside the support surface (6316). Next, the first Y-axis movement mechanism (4000) moves the first cutting unit (3000) in the -Y direction by a predetermined amount, and the support surface (6316) is made to come into contact with the tip of the crystal grinding stone (91). In addition, by repeating this movement several times, the amount of grinding on the support surface (6316) is large when the modified grinding stone (91) contacts the support surface (6316), and the amount of grinding on the support surface (6316) decreases as the modified grinding stone (91) is consumed, utilizing this phenomenon so that the support surface (6316) is formed in a shape that spreads out at the end of the cross section.

[0097] In addition, the support surface (6316) may be modified using a modification stone (81).

[0098] After modifying the shape of the support surface (6316) in this manner, the shape measuring device (83) is brought into contact with the support surface (6316), and the shape of the modified support surface (6316) is recognized by the shape measuring device (83). The method is the same as before modifying the shape of the support surface (6316).

[0099] The judgment unit (85) compares the measured cross-sectional shape of the support surface (6316) recognized by the shape measuring device (83) with the stored cross-sectional shape stored in the shape memory unit (84), and if the shapes are different, the shape of the support surface (6316) is modified again. Meanwhile, if it is determined that the measured cross-sectional shape and the stored cross-sectional shape match, the cutting blade (30) is mounted on the mount (63), and the nut (66) is screwed onto the male screw (634) of the mount (63). In this state, as shown in FIG. 5, one side of the hubless blade (306) is supported in an arc shape at the protruding part (6317) of the support surface (6316).

[0100] In addition, in the above example, although the case of modifying the shape of the support surface (6311) and support surface (6316) of the mount (63) of the first cutting unit (3000) was described, the method is the same when modifying the shape of the support surface (631) of the mount (63) of the second cutting unit (3001), except that the direction of the cross-section corrector (90), the shape measuring device, and the mount (63) is reversed.

[0101] In addition, in the first and second embodiments above, the cross-section corrector (80, 90) and the shape measuring device (83, 93) are fixed and the first cutting unit (3000) and the second cutting unit (3001) are configured to be movable, but the cross-section corrector (80, 90) and the shape measuring device (83, 93) may be movable. In addition, in the first and second embodiments above, a cutting device having two cutting units was described, but the cutting device may have only one cutting unit. Explanation of the symbols

[0102] 1, 100: Cutting device 10: Base 11: Door-type column 12: 1st Pillar Section 13: 2nd Pillar Section 14: Installation section 2: Maintenance table 23: Suction source 24: Suction path 26: Casing 27: Clamp 3000: 1st cutting unit 3000: 2nd cutting unit 30: Cutting blade (hub blade) 301: Base 302: Cutting edge 31: Blade Cover 34: Alignment unit 340: Camera 36: Housing 4000: 1st Y-axis movement mechanism 4000: 2nd Y-axis movement mechanism 40: Ball screw 41: Guide rail 42: Y-axis motor 43: Moving base 45: Rotation axis 5000: 1st Z-axis movement mechanism 5000: 2nd Z-axis movement mechanism 50: Ball screw 51: Guide rail 52: Z-axis motor 53: Lifting plate 55: Rotation axis 60: Spindle 600: Female thread 63: Mount 630: Flange 631, 6311, 6316: Support surface 632: Concave part 633: Boss part 634: Male screw 66: Nut 660: Female thread 67: Fixture 670: Male thread 7: X-axis movement mechanism 70: Ball screw 71: Guide rail 72: X-axis motor 73: Movable plate 75: Rotating axis 731, 733: 1st Bass 732, 734: 2nd Bass 80: Sectional corrector 81: Correction stone 82: Tip detector 83: Shape measuring instrument 831: Transmitter 832: Lens 833: Receiver 834: Outputter 835: Laser beam 836, 837: Reflected light 84: Shape memory unit 85: Judgment unit 86: Movement control unit 86: Movement control unit 90: Section corrector 91: Correction stone 93: Shape measuring device 931: Oscillator 932: Receiver 933: Output unit 934: Ultrasonic vibration 935: Ultrasonic reflection vibration 101: Workpiece 102: Frame 103: Tape 104: Line scheduled for splitting 105: Device

Claims

Claim 1 A cutting device for cutting a wafer using a cutting blade, comprising: a holding table for holding a wafer on a holding surface; a male screw formed at the tip of a circumference extending in the axial direction of the spindle and disposed at the tip of a spindle; a mount having a support surface formed annularly in a concentric shape with respect to the male screw to support the cutting blade; a nut screw-coupled to the male screw to place the cutting blade between the support surface and the mounting unit; a cutting unit for cutting a wafer held on the holding surface with the cutting blade; a shape memory unit for setting and storing a cross-sectional shape in the diameter direction of the mounting on the cross-sectional shape of the spindle on the support surface in the axial direction; a shape measuring device for non-contacting the cross-sectional shape in the diameter direction of the mounting on the cross-sectional shape of the spindle on the support surface in the support surface; a judgment unit for determining whether modification of the support surface is necessary by comparing the memory cross-sectional shape stored in the shape memory unit with the measured cross-sectional shape measured by the shape measuring device; and if the judgment unit determines that modification of the support surface is necessary, the A cutting device comprising a cross-section corrector for correcting the shape of a support surface, wherein the cross-section corrector includes a correction grinding stone capable of contacting the support surface, a tip detection unit for detecting the tip of the correction grinding stone, and a movement control unit for moving the correction grinding stone and the support surface in a direction relatively parallel to the support surface while the tip of the correction grinding stone is in contact with the support surface, and a cutting unit for correcting the shape of the support surface by moving the cutting unit in the axial direction of the spindle while moving the correction grinding stone and the support surface in a direction relatively parallel to the support surface. Claim 2 A cutting device according to claim 1, wherein the shape measuring device comprises a light-emitting unit that emits a laser beam toward the support surface in the axial direction of the spindle and an image sensor that receives reflected light of the laser beam reflected from the support surface, and measures the distance in the axial direction of the spindle from the light-emitting unit to the support surface by the receiving position where the image sensor receives the reflected light. Claim 3 A cutting device according to claim 1, wherein the shape measuring device comprises an oscillator that emits ultrasonic vibrations toward the support surface in the axial direction of the spindle, and a receiver that receives vibrations reflected from the support surface by the ultrasonic vibrations emitted by the oscillator, and measures the axial distance of the spindle from the oscillator to the support surface by the time from when the oscillator emits ultrasonic vibrations until when the receiver receives vibrations reflected from the support surface.

Images