Member for process piping gas injection nozzle

Description

Draw 23 The item that is the subject of the design Member for process piping gas injection nozzle Description of the design 1. The material is metal or Teflon. 2. This design is for a component used in a process pipe gas injection nozzle that is installed inside a process pipe through which waste gas flows and which is connected to various equipment in a manufacturing line of an electronic industry process, and injects a gas into the process pipe to prevent reaction by-products caused by the reaction of the waste gas from accumulating inside the process pipe. 3. This design can be used in process piping connecting process equipment installed in semiconductor manufacturing processes, flat panel display manufacturing processes, LED manufacturing processes, solar cell manufacturing processes, etc. 4. The component for the process piping gas injection nozzle of the present design is installed in the process piping between the process equipment where the manufacturing process is carried out and the scrubber that processes the waste gas, and injects a carrier gas to prevent reaction by-products caused by the waste gas generated from the process equipment from accumulating inside the process piping. 5. Referring to Drawing 8, the member for the process piping gas injection nozzle of this design has a Teflon layer formed on the inner surface that comes into contact with the waste gas, thereby reducing the accumulation of reaction by-products of the waste gas. 6. [Drawing 1] is a perspective view showing the overall shape of the design. 7. [Drawing 2] is a front view showing the front shape of the present design. 8. [Drawing 3] is a rear view showing the rear shape of the present design. 9. [Drawing 4] is a left side view showing the shape of the left side of the design. 10. [Drawing 5] is a right-side view showing the shape of the right side of the design. 11. [Drawing 6] is a plan view showing the planar shape of the present design. 12. [Drawing 7] is a bottom view showing the bottom shape of the design. 13. [Drawing 8] is a cross-sectional view of AA of Drawing 4 of the present design. Key points of the design creation The key point of the design creation is the combination of the shape and form of the "component for process piping gas injection nozzles."

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