METHOD FOR MANUFACTURING A GROUP III NITRIDE SEMICONDUCTOR DEVICE WITH AN INTERCONNECTION HOLE THROUGH THE SUBSTRATE

MA44708AUndetermined Publication Date: 2021-03-24INFINEON TECHNOLOGIES AG

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Patent Information

Application Number: MA44708
Authority / Receiving Office: MA · MA
Patent Type: Applications
Current Assignee / Owner
Priority Date: 2016-12-06
Filing Date: 2017-12-04
Publication Date: 2021-03-24

Application Information

Patent Timeline

06 Dec 2016

Priority

04 Dec 2017

Application

MA44708

24 Mar 2021

Publication

MA44708A

IPC: H01L29/20; H01L29/40; H01L29/417; H01L29/778; H10W70/692

CPC: H10D64/254; H10D30/015; H10D62/8503; H10D64/257; H10D64/01; H10D64/251; H10D30/4755; H10W70/095

Inventors: BIRNER Albert; BRECH Helmut

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