PROCESS MONITORING DEVICE, PROCESS MONITORING METHOD AND PROGRAM

Abstract

A process monitoring device, a process monitoring method, and a program capable of excluding / adding data acquired by a specific sensor from a monitored / diagnosed target without reconstructing a diagnostic model are provided. The process monitoring device includes a data collection unit, a statistical calculation unit, and a global statistical calculation unit. The data collection unit acquires two or more variables that indicate the state of the monitored target. The statistical calculation unit generates a statistic for each of all possible combinations of two of the acquired variables. The global statistical calculation unit generates an overall statistic that indicates the state of the monitored target based on the statistic generated by the statistical calculation unit.

Claims

CLAIMS 1. A process monitoring device comprising: a data collection unit that acquires two or more variables indicating the status of a monitored target; a statistics calculation unit that generates a statistic for each of all combinations in which two of the acquired variables are selected; and an overall statistics calculation unit that generates an overall statistic indicating the status of a monitored target based on a statistic generated by the statistics calculation unit.

2. The process monitoring device according to claim 1, wherein the statistical calculation unit generates a statistic Q as the statistic.

3. The process monitoring device according to claim 2, wherein the statistical calculation unit further generates a TL2 statistic for each of the variables as the statistic.

4. The process monitoring device according to claim 3, wherein the global statistics calculation unit considers the sum of a statistic Q and a statistic TΛ2 generated by the statistics calculation unit as the global statistic.

5. The process monitoring device according to claim 3, wherein the global statistics calculation unit considers a maximum value of a statistic Q and a statistic TΛ2 generated by the statistics calculation unit as the global statistic.

6. The process monitoring device according to claim 3, wherein the statistical calculation unit generates a statistic based on the TL2 statistic and a Q statistic of the variable and another variable for each of the variables, and wherein the global statistical calculation unit generates the global statistic based on a statistic, for each variable, generated by the statistical calculation unit.

7. The process monitoring device according to any of claims 1 to 6, further comprising: a display unit capable of showing global statistics generated by the global statistics calculation unit.

8. The process monitoring device according to claim 7, wherein the display unit is capable of showing a contribution rate of each statistic to an overall statistic generated by the overall statistic calculation unit.

9. The process monitoring device according to any of claims 3 to 6, further comprising: a display unit capable of showing a contribution rate of the statistic to an overall statistic generated by the overall statistic calculation unit, and a contribution rate related to the statistic TL2 for the statistic and a Q statistic of the variable and another variable.

10. The process monitoring device according to claim 8 or 9, wherein the display unit is capable of showing a contribution rate of the statistic to an overall statistic generated by the overall statistic calculation unit using one or both of a correlation coefficient and a matrix scatter plot of two statistic variables.

11. The process monitoring device according to any of claims 7 to 10, further comprising: a statistical threshold calculation unit that establishes a threshold of an overall statistic generated by the overall statistic calculation unit, the threshold indicating that an anomaly has occurred in the monitored target, wherein the display unit is capable of displaying the overall statistic normalized by a threshold, of an overall statistic, established by the statistical threshold calculation unit.

12. The process monitoring device according to claim 11, wherein the statistical threshold calculation unit is further capable of setting a threshold for a variable's contribution rate to the overall statistics, and wherein the display unit is capable of showing a variable remaining after being excluded when the contribution rate threshold is exceeded for a predetermined time or more.

13. A process monitoring method comprising: a data collection step of acquiring two or more variables that indicate a state of a monitored target; a statistic calculation step of generating a statistic for each of all combinations in which two of the variables acquired in the data collection step are selected; and an overall statistic calculation step of generating, based on the generated statistic, an overall statistic that indicates a state of a monitored target in the statistic calculation step.

14. A program that causes a computer to execute: a data collection step of acquiring two or more variables that indicate a state of a monitored target; a statistics calculation step of generating a statistic for each of all combinations in which two of the variables acquired in the data collection step are selected; and an overall statistics calculation step of generating, based on the generated statistic, an overall statistic that indicates a state of a monitored target in the statistics calculation step.

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