Inspection device, resin molding device, cutting device, method for manufacturing resin molded article, and method for manufacturing cut article

Abstract

An inspection device (10) includes a camera (200) and a coaxial lighting unit (100). The coaxial lighting unit (100) includes a half mirror (150), a light source unit (125), a plate-shaped member (140), and an adjustment unit (160). The half mirror (150) is disposed obliquely with respect to an observation axis connecting an inspection target (300) and the camera (200) on the observation axis. The light source unit (125) is configured to emit light from a direction different from the observation axis toward the half mirror (150). The light emitted from the light source unit (125) is reflected by the half mirror (150) and the inspection target (300) is irradiated with the reflected light. The plate-shaped member (140) is disposed between the light source unit (125) and the half mirror (150). The plate-shaped member (140) is provided with a plurality of slits (142) that are substantially parallel to each other. The adjustment unit (160) is configured to adjust the arrangement of the plate-shaped member (140). (Most illustrative figure: FIG. 1)

Description

Inspection device, resin molding device, cutting device, method for manufacturing resin molded product, and method for manufacturing cut product

[0001] The present invention relates to an inspection device, a resin molding device, a cutting device, a method for manufacturing a resin molded product, and a method for manufacturing a cut product.

[0002] Japanese Patent Laid-Open Publication No. 2017-187296 (Patent Document 1) discloses a coaxial lighting device. This coaxial lighting device includes a half mirror and a light source unit that irradiates light onto the half mirror. The half mirror is disposed obliquely on an observation axis that connects a workpiece to be observed and an observation unit such as a camera. Light emitted from the light source unit is reflected by the half mirror and irradiated onto the workpiece (see Patent Document 1).

[0003] JP 2017-187296 A

[0004] In a coaxial illumination device such as that disclosed in Patent Document 1, it is desirable that the angle of light incident on the half mirror be a predetermined angle in order to irradiate the light onto the observation object as uniformly as possible. One possible method for adjusting the angle of incidence of light onto the half mirror is to place a plate-shaped member with multiple parallel slits between the light source unit and the half mirror. However, even if such a method is adopted, depending on the precision of the slits formed in the plate-shaped member, the angle of incidence of much of the light onto the half mirror will not be the predetermined angle. As a result, the light irradiated onto the observation object (inspection object) will be significantly biased.

[0005] The present invention has been made to solve such problems, and its purpose is to provide an inspection device, a resin molding device, a cutting device, a method for manufacturing a resin molded product, and a method for manufacturing a cut product that can suppress the polarization of light irradiated onto the object to be inspected.

[0006] An inspection device according to one aspect of the present invention includes a camera and a coaxial illuminator. The camera is configured to capture an image of an object to be inspected. The coaxial illuminator is configured to irradiate the object to be inspected with light. The coaxial illuminator includes a half mirror, a light source unit, a plate-like member, and an adjustment unit. The half mirror is arranged on an observation axis connecting the object to be inspected and the camera, so as to be oblique to the observation axis. The light source unit is configured to emit light toward the half mirror from a direction different from the observation axis. The light emitted by the light source unit is reflected by the half mirror and irradiated onto the object to be inspected. The plate-like member is arranged between the light source unit and the half mirror. A plurality of slits that are approximately parallel to each other are formed in the plate-like member. The adjustment unit is configured to adjust the arrangement of the plate-like member.

[0007] A resin molding apparatus according to another aspect of the present invention includes a resin molding mechanism configured to manufacture a resin molded product, and the above-described inspection apparatus.

[0008] A cutting device according to another aspect of the present invention includes a cutting mechanism configured to produce a cut product by cutting an object to be cut, and an inspection device.

[0009] A method for manufacturing a resin molded product according to another aspect of the present invention includes the steps of manufacturing a resin molded product and inspecting an object to be inspected using the inspection device. The object to be inspected includes a resin molded product.

[0010] A method for manufacturing a cut product according to another aspect of the present invention includes the steps of manufacturing the cut product by cutting a cutting object, and inspecting an inspection object using the inspection device. The inspection object includes the cutting object or the cut product.

[0011] According to the present invention, it is possible to provide an inspection device, a resin molding device, a cutting device, a method for manufacturing a resin molded product, and a method for manufacturing a cut product, which are capable of suppressing polarization of light irradiated onto an object to be inspected.

[0012] FIG. 4 is a diagram schematically showing an inspection device. FIG. 5 is a diagram for explaining problems that arise when each slit in a plate-like member is tilted more than expected. FIG. 6 is a diagram schematically showing the top surface of a coaxial illumination device. FIG. 7 is a diagram schematically showing the front surface of a coaxial illumination device. FIG. 8 is a diagram schematically showing the VV cross section of FIG. 3. FIG. 9 is a diagram schematically showing an inspection device in a state where the distance between the diffuser plate and the plate-like member is shortened. FIG. 10 is a diagram schematically showing an inspection device in a state where the angle of the plate-like member with respect to the half mirror is tilted. FIG. 11 is a block diagram schematically showing the configuration of a resin molding device. FIG. 12 is a block diagram schematically showing the configuration of a cutting device.

[0013] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference numerals and their description will not be repeated.

[0014] [1. Overview] Fig. 1 is a diagram that schematically illustrates an inspection apparatus 10 according to the present embodiment. A cross section of a coaxial illuminator 100 included in the inspection apparatus 10 is shown in Fig. 1. The directions indicated by the arrows UDFBLR are the same in all the drawings.

[0015] As shown in Fig. 1, the inspection device 10 includes a coaxial illuminator 100 and a camera 200. The coaxial illuminator 100 is disposed between the camera 200 and an inspection object 300. The coaxial illuminator 100 is configured to irradiate the inspection object 300 with light from above the inspection object 300. The camera 200 is configured to capture an image of the inspection object 300 irradiated with light from above the inspection object 300. In the inspection device 10, the surface condition of the inspection object 300 is inspected based on the image captured by the camera 200.

[0016] The inspection target 300 is, for example, a substrate to which electronic elements are connected before being resin-molded, or a package substrate after a substrate to which electronic elements are connected has been resin-molded, etc. Examples of package substrates include a ball grid array (BGA) package substrate, a land grid array (LGA) package substrate, a chip size package (CSP) package substrate, a light emitting diode (LED) package substrate, and a quad flat no-leaded (QFN) package substrate.

[0017] The coaxial lighting device 100 includes a light source unit 125, a plate-like member 140, a half mirror 150, and a housing 110. The light source unit 125 includes a substrate 121, LEDs 120, and a diffuser plate 130. The substrate 121 is substantially rectangular, and multiple LEDs 120 are mounted on the substrate 121. The substrate 121 is disposed so as to be substantially parallel to the observation axis C1 of the camera 200. Each of the multiple LEDs 120 is configured to emit light toward the half mirror 150.

[0018] The diffuser plate 130 is a thin, frosted glass plate and is disposed between the LEDs 120 and the plate-like member 140. The diffuser plate 130 is substantially rectangular in shape. The diffuser plate 130 is disposed so as to be substantially parallel to the observation axis C1 of the camera 200. The light emitted by the LEDs 120 is diffused by the diffuser plate 130. That is, the light source unit 125 emits light from a surface by diffusing the light emitted by the LEDs 120 by the diffuser plate 130.

[0019] The plate-shaped member 140 is disposed between the light source unit 125 and the half mirror 150. The plate-shaped member 140 has a substantially rectangular shape. The plate-shaped member 140 is disposed so as to be substantially parallel to the observation axis C1 of the camera 200. A plurality of slits (louvers) 142 that are substantially parallel to one another are formed in the plate-shaped member 140. The plate-shaped member 140 is configured to suppress diffusion of light emitted by the light source unit 125 and improve the parallelism of the light. For example, a light control film can be used as the plate-shaped member 140.

[0020] The half mirror 150 is disposed on the observation axis C1 of the camera 200. The reflective surface of the half mirror 150 is tilted with respect to the observation axis C1 inside the housing 110. The reflective surface of the half mirror 150 is tilted, for example, at approximately 45 degrees with respect to the observation axis C1. The half mirror 150 is made of, for example, a glass plate whose surface is coated with a dielectric multilayer film, a metal thin film, or the like. The half mirror 150 is configured, for example, to have a reflectance of approximately 50% and a transmittance of approximately 50% for light with an incident angle of 45 degrees.

[0021] The housing 110 accommodates the light source unit 125, the plate-like member 140, the half mirror 150, and the like inside. The housing 110 is made of, for example, an aluminum alloy. The housing 110 has, for example, a rectangular parallelepiped shape. Of the inner wall surfaces of the housing 110, for example, a region between the half mirror 150 and the plate-like member 140 is a mirror surface. In the housing 110, for example, a window (not shown) made of glass is formed on the surface facing the camera 200 so that the inspection object 300 can be observed by the camera 200. In addition, the housing 110 has a light exit port (not shown) for emitting light on the surface facing the inspection object 300.

[0022] Since most of the light that has passed through the plate-like member 140 is directed in a direction that is approximately perpendicular to the plate-like member 140, the light reflected by the half mirror 150 is irradiated approximately uniformly onto the entire inspection object 300. In other words, when most of the light that has passed through the plate-like member 140 is directed approximately perpendicular to the plate-like member 140, it is unlikely that the intensity of the irradiated light will vary greatly between regions of the inspection object 300.

[0023] 2. Potential Problems Due to Plate-Shaped Member In the direction of arrow FB, if each slit 142 extends in a direction approximately perpendicular to the surface of the plate-shaped member 140 that faces the diffuser plate 130, much of the light that passes through the plate-shaped member 140 will be directed in a direction approximately perpendicular to the plate-shaped member 140. However, it is difficult to control the direction in which each slit 142 extends within the plate-shaped member 140 during production of the plate-shaped member 140.

[0024] FIG. 2 is a diagram illustrating a problem caused by each slit 142 in the plate-shaped member 140 being tilted more than expected. In FIG. 2, the tilt of the slits 142 is exaggerated for ease of understanding. As shown in FIG. 2, in this plate-shaped member 140, each slit 142 does not extend in a direction substantially perpendicular to the surface of the plate-shaped member 140 facing the diffuser plate 130. Therefore, much of the light passing through the plate-shaped member 140 is not substantially perpendicular to the plate-shaped member 140. As a result, the light reflected by the half mirror 150 is not uniformly irradiated onto the entire surface of the inspection object 300. In this example, a region closer to the direction of arrow F on the top surface of the inspection object 300 is irradiated with more intense light than a region closer to the direction of arrow B. As a result of this biased light irradiating the inspection object 300, the inspection accuracy of the inspection device 10 for the surface condition of the inspection object 300 is reduced.

[0025] In order to prevent such problems, the inspection device 10 is designed to have a structure that will be described in detail below.

[0026] 3. Configuration of the Inspection Apparatus Fig. 3 is a diagram schematically showing the top surface of the coaxial illuminator 100. Fig. 4 is a diagram schematically showing the front surface of the coaxial illuminator 100. Fig. 5 is a diagram schematically showing the VV cross section of Fig. 3. For ease of explanation, each diagram shows a state in which part of the interior of the coaxial illuminator 100 is transparent.

[0027] 3 , 4 , and 5 , the coaxial lighting 100 is provided with an adjustment unit 160 at each end in the directions of the arrows LR. The adjustment unit 160 is configured to adjust the position of the plate-shaped member 140. Specifically, the adjustment unit 160 is capable of adjusting the position of the plate-shaped member 140 in the direction of the arrow FB, and is also capable of adjusting the angle of rotation of the plate-shaped member 140 around an axis (an axis member 166 described below) extending in the directions of the arrows LR. That is, the adjustment unit 160 includes a “position adjustment unit” that adjusts the position of the plate-shaped member 140, and an “angle adjustment mechanism” that adjusts the angle of rotation of the plate-shaped member 140.

[0028] The adjustment unit 160 includes a clamper 163, a support member 170 ( FIG. 5 ), a moving member 161, an operating member 162, a shaft member 166, a stopper 169 ( FIG. 5 ), and a light-shielding cover 167. Each member included in the adjustment unit 160 is made of metal or resin. In addition, each member included in the adjustment unit 160 is preferably black in color. This is to reduce the possibility that light that enters the adjustment unit 160 will be diffused and adversely affect the light irradiated onto the inspection target 300.

[0029] The position adjustment unit includes a moving member 161 configured to linearly move the plate-like member 140 between the light source unit 125 and the half mirror 150. The angle adjustment mechanism mainly includes a clamper 163 configured to hold the plate-like member 140, a shaft member 166 that serves as a rotation axis of the clamper 163, and a stopper 169 configured to stop the rotation of the shaft member 166. The angle adjustment mechanism also includes a support member 170 that supports the shaft member 166 and is attached to the moving member 161. The support member 170 includes a support member main body 165 attached to the moving member 161 and a connecting portion 164 that connects the support member main body 165 near the moving member 161 to the clamper 163. A through-hole through which the shaft member 166 passes is formed in each of the support member main body 165 and the connecting portion 164.

[0030] The clamper 163 is configured to hold the plate-like member 140 by clamping it. The clamper 163 is connected to a support member 170. The support member 170 includes a generally S-shaped connecting portion 164, a block-shaped support member main body 165, and a shaft member holding portion 168. The connecting portion 164, the support member main body 165, and the shaft member holding portion 168 may be formed integrally or separately. When the connecting portion 164, the support member main body 165, and the shaft member holding portion 168 are each formed separately, the connecting portion 164 and the support member main body 165 are fixed to each other, and the support member main body 165 and the shaft member holding portion 168 are fixed to each other.

[0031] A hole is formed near the upper end of the support member main body 165, and the hole is threaded, for example. The moving member 161 passes through the hole. The moving member 161 is, for example, configured as a ball screw extending in the direction of arrow FB. The position of the hole formed in the support member main body 165 is offset upward in the direction of arrow UD (height direction) from the position of the shaft member 166. In other words, the moving member 161 and the shaft member are offset in height. Therefore, even if the moving member 161 were a color other than black, there is little chance that light entering the adjustment unit 160 from near the connection between the shaft member 166 and the clamper 163 would be diffusely reflected by the moving member 161. The connecting portion 164 connects the support member main body 165 near the moving member 161 to the end face of the clamper 163.

[0032] An operating member 162 is attached to the moving member 161. By rotating the operating member 162, the moving member 161 rotates. As the moving member 161 rotates, the support member 170 moves in the direction of arrow FB. As a result, the plate-shaped member 140 moves in the direction of arrow FB. That is, as the moving member 161 rotates, the plate-shaped member 140 moves linearly between the diffuser plate 130 and the half mirror 150. In this way, in the inspection device 10, the position adjustment unit of the adjustment unit 160 can adjust the position of the plate-shaped member 140 between the diffuser plate 130 and the half mirror 150 by rotating the operating member 162.

[0033] A hole H1 that accommodates a portion of the shaft member 166 is formed in the end face of the clamper 163. The hole H1 is threaded. A threaded portion S1 is formed in one end of the shaft member 166. The threaded portion S1 is accommodated in the hole H1. This fixes the shaft member 166 and the clamper 163 together.

[0034] In the support member 170, a hole through which the shaft member 166 passes is formed in each of the connecting portion 164, the support member main body 165, and the shaft member holding portion 168. The support member 170 supports the shaft member 166 by passing the shaft member 166 through these holes. The holes formed in each of the connecting portion 164, the support member main body 165, and the shaft member holding portion 168 are not threaded, and the shaft member 166 is rotatable relative to each of the connecting portion 164, the support member main body 165, and the shaft member holding portion 168.

[0035] By rotating the shaft member 166, the clamper 163 rotates around the shaft member 166. As the clamper 163 rotates, the plate-like member 140 held by the clamper 163 also rotates. In this way, in the inspection device 10, the angle adjustment mechanism of the adjustment unit 160 can adjust the angle of the plate-like member 140 with respect to the half mirror 150 by rotating the shaft member 166.

[0036] A hole that accommodates a stopper 169 is formed in the shaft member holding portion 168. The hole extends in a direction approximately perpendicular to the hole through which the shaft member 166 passes. For example, the hole is threaded, and the stopper 169 is configured with a screw. In this case, by screwing the stopper 169 into the hole in the shaft member holding portion 168, friction is generated between the stopper 169 and the shaft member 166. This friction restricts the rotation of the shaft member 166. In other words, the stopper 169 stops the rotation of the shaft member 166. The stopper 169 can fix the rotation angle of the shaft member 166 and also fix the angle of the plate-like member 140 relative to the half mirror 150.

[0037] The light-shielding cover 167 is configured to cover the shaft member holding portion 168 and the stopper 169. This makes it possible to prevent light from entering the inside of the adjustment portion 160 from the vicinity of the connection portion between the shaft member 166 and the shaft member holding portion 168.

[0038] In this way, in the inspection device 10, the position of the plate-like member 140 between the diffusion plate 130 and the half mirror 150 is adjustable.

[0039] 6 is a diagram schematically illustrating the inspection device 10 in a state where the distance between the diffusion plate 130 and the plate-like member 140 is shortened. As shown in Fig. 6, in this inspection device 10, the distance between the diffusion plate 130 and the plate-like member 140 is shorter than in the example shown in Fig. 2, for example.

[0040] Even if the slits 142 do not extend in a direction approximately perpendicular to the surface of the plate-shaped member 140 facing the diffuser plate 130, if the distance between the diffuser plate 130 and the plate-shaped member 140 is short, light that is approximately perpendicular to the plate-shaped member 140 will more easily pass through the slits 142 compared to when the distance between the diffuser plate 130 and the plate-shaped member 140 is long. As a result, it becomes less likely that the intensity of the irradiated light will vary greatly between regions of the inspection object 300.

[0041] 7 is a diagram schematically showing the inspection device 10 in a state where the angle of the plate-like member 140 is tilted with respect to the half mirror 150. Note that in FIG. 7, the tilt of the slit 142 is exaggerated for ease of understanding.

[0042] 7 , in this inspection device 10, the plate-shaped member 140 is tilted so that the direction in which each slit 142 extends approaches approximately perpendicular to the surface of the plate-shaped member 140 that faces the diffuser plate 130. Because the direction in which each slit 142 extends approaches approximately perpendicular to the surface of the plate-shaped member 140 that faces the diffuser plate 130, most of the light that passes through the plate-shaped member 140 is approximately perpendicular to the plate-shaped member 140. As a result, the light reflected by the half mirror 150 is irradiated approximately uniformly onto the entire inspection object 300.

[0043] [4. Features] As described above, in the inspection device 10 according to the present embodiment, the arrangement of the plate-shaped member 140 is adjustable. Therefore, with the inspection device 10, the traveling direction of light that has passed through the plate-shaped member 140 can be adjusted by adjusting the arrangement of the plate-shaped member 140, and therefore, polarization of the light that is reflected by the half mirror 150 and irradiated onto the inspection object 300 can be suppressed.

[0044] [5. Other Embodiments] The concept of the above embodiment is not limited to the embodiment described above. Hereinafter, an example of another embodiment to which the concept of the above embodiment can be applied will be described.

[0045] In the above embodiment, an example in which the present invention is applied to an inspection device has been described, but the present invention can also be applied to other devices besides inspection devices, such as a resin molding device or a cutting device.

[0046] FIG. 8 is a block diagram schematically illustrating the configuration of a resin molding apparatus 400. As shown in FIG. 8, the resin molding apparatus 400 includes a resin molding mechanism 410 and an inspection device 10. The resin molding mechanism 410 mainly includes a molding die (not shown) and a clamping mechanism (not shown) that clamps the molding die. The resin molding mechanism 410 is configured to manufacture a resin molded product by clamping the molding die to resin mold the molding object. The inspection device 10 inspects, for example, a substrate before resin molding or a resin molded product, which is a package substrate after resin molding. In this case, the substrate before resin molding or the resin molded product, which is a package substrate after resin molding, is the inspection object 300. Examples of inspections include misalignment inspection and count inspection of electronic elements connected to the substrate before resin molding, and visual inspection of the package substrate.

[0047] FIG. 9 is a block diagram schematically illustrating the configuration of the cutting device 500. As shown in FIG. 9, the cutting device 500 includes a cutting mechanism 510 and an inspection device 10. The cutting mechanism 510 mainly includes a spindle unit (not shown) having a blade, and is configured to produce a cut product by cutting the object to be cut with the blade rotating at high speed. The inspection device 10 inspects, for example, the object to be cut or the cut product. In this case, the object to be cut or the cut product is the inspection object 300. Examples of inspections include a visual inspection of the resin-molded surface of a package substrate, which is the object to be cut, and an inspection of the non-resin-molded surface of a package substrate, which is the object to be cut.

[0048] Furthermore, in the above embodiment, the inspection device 10 is capable of adjusting the position of the plate-shaped member 140 in the direction of the arrow FB, and is also capable of adjusting the rotation angle of the plate-shaped member 140 around the shaft member 166 as its center of rotation. However, it is not necessarily necessary to be able to adjust both. In other words, it may be possible to only adjust either the position of the plate-shaped member 140 in the direction of the arrow FB or the rotation angle of the plate-shaped member 140 around the shaft member 166 as its center of rotation.

[0049] The above describes exemplary embodiments of the present invention. That is, the detailed description and the accompanying drawings are disclosed for the purpose of illustrative explanation. Therefore, some of the components described in the detailed description and the accompanying drawings may be non-essential components for solving the problems. Therefore, just because these non-essential components are described in the detailed description and the accompanying drawings, it should not be immediately recognized that these non-essential components are essential to the present invention.

[0050] Furthermore, the above-described embodiment can be improved or modified in various ways within the scope of the present invention. That is, in carrying out the present invention, specific configurations can be appropriately adopted depending on the embodiment.

[0051] 10 Inspection device, 100 Coaxial lighting, 110 Housing, 120 LED, 121 Board, 125 Light source unit, 130 Diffuser, 140 Plate-shaped member, 142 Slit, 150 Half mirror, 160 Adjustment unit, 161 Moving member, 162 Operating member, 163 Clamp, 164 Connecting unit, 165 Support member main body, 166 Shaft member, 167 Light-shielding cover, 168 Shaft member holding unit, 169 Stopper, 170 Support member, 200 Camera, 300 Inspection object, 400 Resin molding device, 410 Resin molding mechanism, 500 Cutting device, 510 Cutting mechanism, C1 Observation axis, H1 Hole portion, S1 Screw portion.

Claims

1. An inspection device comprising: a camera configured to capture an image of an object to be inspected; and a coaxial illuminator configured to irradiate light onto the object to be inspected, wherein the coaxial illuminator comprises: a half mirror arranged on an observation axis connecting the object to be inspected and the camera, the half mirror being oblique to the observation axis; a light source unit configured to emit light towards the half mirror from a direction different from the observation axis, the light emitted by the light source unit being reflected by the half mirror and irradiated onto the object to be inspected; a plate-like member arranged between the light source unit and the half mirror, the plate-like member having a plurality of slits that are approximately parallel to each other; and an adjustment unit configured to adjust the arrangement of the plate-like member.

2. The inspection device according to claim 1, wherein the adjustment unit includes an angle adjustment mechanism configured to adjust the angle of the plate-like member relative to the half mirror.

3. An inspection device as described in claim 2, wherein the angle adjustment mechanism includes a clamper configured to hold the plate-like member, an axial member that serves as the rotation axis of the clamper, and a stopper configured to stop the rotation of the axial member.

4. The inspection device according to claim 3, wherein said clamper includes a hole for receiving a portion of said shaft member.

5. An inspection device according to any one of claims 1 to 4, wherein the adjustment unit includes a position adjustment unit configured to adjust the distance between the plate-like member and the light source unit.

6. The inspection device according to claim 5, wherein the position adjustment unit includes a moving member configured to linearly move the plate-like member between the light source unit and the half mirror.

7. The inspection device described in claim 1, wherein the adjustment unit includes a position adjustment unit configured to adjust the distance between the plate-like member and the light source unit, and an angle adjustment mechanism configured to adjust the angle of the plate-like member relative to the half mirror, the position adjustment unit includes a moving member configured to linearly move the plate-like member between the light source unit and the half mirror, and the angle adjustment mechanism includes a clamper configured to hold the plate-like member and an axial member that serves as the rotation axis of the clamper, and the moving member and the axial member are offset in the height direction.

8. An inspection device as described in claim 7, wherein the angle adjustment mechanism includes a support member that supports the shaft member and is attached to the movable member, and the support member includes a support member main body portion attached to the movable member and a connecting portion that connects the support member main body portion near the movable member to the clamper, and each of the support member main body portion and the connecting portion has a through hole formed therein through which the shaft member passes.

9. An inspection device according to any one of claims 1 to 8, wherein the coaxial lighting includes a light-shielding cover configured to cover the adjustment unit.

10. A resin molding device comprising: a resin molding mechanism configured to manufacture a resin molded product; and an inspection device according to any one of claims 1 to 9.

11. A cutting device comprising: a cutting mechanism configured to produce a cut product by cutting an object to be cut; and an inspection device according to any one of claims 1 to 9.

12. A method for manufacturing a resin molded product, comprising: a step of manufacturing a resin molded product; and a step of inspecting the object to be inspected using an inspection device described in any one of claims 1 to 9, wherein the object to be inspected includes the resin molded product.

13. A method for manufacturing a cut product, comprising the steps of: manufacturing a cut product by cutting an object to be cut; and inspecting the object to be inspected using an inspection device described in any one of claims 1 to 9, wherein the object to be inspected includes the object to be cut or the cut product.