Electrode for manufacturing polysilicon

Abstract

The present invention relates to an electrode for manufacturing polysilicon, characterized in that it comprises: a lower electrode part (10) formed with a coolant inlet (11) and a coolant outlet (12) at a lower end, and a cooling circuit (13) extending vertically inside, each connected to the coolant inlet (11) and the coolant outlet (12); an intermediate electrode part (20) made of oxygen-free copper and having a shape with an expanded diameter from the upper end of the lower electrode part (10); an upper electrode part (30) formed of oxygen-free copper, which is provided integrally or separately on the upper end of the intermediate electrode part (20) and is detachably coupled thereto, and to which a filament wire (60) for polysilicon deposition is connected and has a diameter smaller than that of the intermediate electrode part (20); and a silver thin plate (40) press-fitted to the surfaces of the upper electrode part (30) and the intermediate electrode part (20). (Figure 1)