Pressing mechanism, processing device, and processing machine

Abstract

A pressing mechanism (11-153; 171-203) includes a pressing member (11-12; 171-173), a providing unit (131-133; 181-183), a micro channel unit, and an outlet unit (151-153; 201-203). The pressing member (11-12; 171-173) has a pressing face (121; 1735) to press the electronic component and the temperature of the electronic component. The providing unit (131-133; 181-183) has a main channel (131; 181), a branch channel (132; 182), and plural inlet channel (133; 183) communicating with each other at the pressing member (11-12; 171-173). The fluid at the predetermined temperature enters the inlet channels (133; 183). The micro channel unit has plural micro channels (141-143; 191-194) at the pressing member (11-12; 171-173) to make the fluid in the inlet channels (133; 183) flow into so as to exchange heat in a large area with the pressing face (121;1735) for controlling the temperature of the electronic component. The outlet unit (151-153; 201-203) has a main outlet channel (151; 201), a converging channel (152; 202), and plural outlet channels (153; 203) at the pressing member (11-12; 171-173). The heat-exchanged fluid from the micro channels (141-143; 191-194) flows into the outlet unit to get out.