Reticle container with sensor device
NL2040696B1Active Publication Date: 2026-07-02GUDENG PRECISION IND CO LTD
View PDF 0 Cites 0 Cited by
Patent Information
- Authority / Receiving Office
- NL · NL
- Patent Type
- Patents
- Current Assignee / Owner
- GUDENG PRECISION IND CO LTD
- Filing Date
- 2025-07-01
- Publication Date
- 2026-07-02
AI Technical Summary
Technical Problem
Conventional reticle containers face challenges in monitoring the inner pod's state during transfer due to limited structural capacity and inability to promptly identify abnormal conditions such as vibrations or tilts, which affects manufacturing yield.
Method used
A reticle container with a sensor device integrated into the inner pod to continuously sense and record operating and environmental states, allowing real-time or recorded output to a monitoring device for quick identification of abnormal conditions.
Benefits of technology
Enables continuous monitoring of the reticle container's state during transfer, facilitating quick identification of issues and ensuring optimal conditions for reticle handling, thereby improving manufacturing yield.
✦ Generated by Eureka AI based on patent content.
Abstract
OF THE DISCLOSURE A reticle container with a sensor device includes an inner pod and an outer pod receiving the inner pod. The inner pod is provided with at least one sensor device. The sensor device continuously senses the state of the inner pod and outputs the sensed information.
Need to check novelty before this filing date? Find Prior Art