Device for TOC reduction in ultrapure water

TW202626526APending Publication Date: 2026-07-01OVIVO INC
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Patent Information

Application Number
TW114138564
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-10-08
Filing Date
2025-10-07
Publication Date
2026-07-01
Patent Text Reader

Abstract

For TOC reduction by UV radiation, in the production of ultrapure water, a cylindrical UV reactor surrounded by a quartz sleeve radiates through an annular water flow channel no more than 10 mm to 15 mm wide. This causes the water to circulate in the annular zone highly exposed to the 185 nm wavelength of the UV radiation, as well as all other wavelengths under 200 nm. For optimization of mixing of the water in the zone, baffles or perturbators are provided at a series of locations to effect mixing of different layers of liquid thus promoting radial movement of the water around the quartz tube.
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