Sulfonium salt, chemically amplified resist composition and pattern forming process
TW202626580APending Publication Date: 2026-07-01SHIN ETSU CHEMICAL CO LTD
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Patent Information
- Application Number
- TW114140553
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-10-23
- Filing Date
- 2025-10-21
- Publication Date
- 2026-07-01
Abstract
A sulfonium salt consisting of a sulfonium cation having the following formula (1A) and an aromatic carboxylate anion having the following formula (1B).
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