Gimballed cantilevered actuating beam for micro-valve sealing

Abstract

A gimballed cantilevered actuating beam for sealing micro-valves is disclosed. The micro-valve includes an orifice plate and an orifice extending through the orifice plate. An actuating beam is disposed in spaced relation to the orifice plate. The actuating beam comprises a base portion separated from the orifice plate by a predetermined distance and a cantilevered portion extending from the base portion towards the orifice. An overlapping portion of the actuating beam overlaps the orifice and is flexibly affixed to the remainder of the cantilevered portion by at least one rib, allowing the overlapping portion to gimbal. A sealing structure is disposed at the overlapping portion, which seals the orifice when the actuating beam is in the closed position.