Substrate imaging device, substrate processing apparatus, substrate imaging method and substrate processing method

Abstract

A substrate imaging device includes an illuminator, an imager and a controller. The illuminator irradiates an upper surface of a substrate held by a substrate holding device with illumination light. The imager captures an image of the upper surface of the substrate irradiated with the illumination light. Based on an output of the imager, inspection image data representing a state of at least a partial area of the upper surface of the substrate is acquired. The inspection image data corresponds to light having a wavelength, with the light being absorbed by the substrate.