Analysis apparatus, system, method and procedure

Abstract

The present invention aims to provide an apparatus, system, method, and program for analyzing the slope of a sample surface. The analysis apparatus of the present invention comprises: a two-dimensional profile acquisition unit that acquires a two-dimensional profile of laser light reflected or diffracted from the sample surface; a spectral profile generation unit that, for a first straight line with a plurality of peaks arranged in a linear pattern and a second straight line orthogonal to the first straight line and also with a plurality of peaks arranged in a linear pattern, generates a first spectral profile by integrating a designated region containing at least a portion of each of the first and second straight lines in a direction perpendicular to the first straight line, and a second spectral profile by integrating in a direction perpendicular to the second straight line; a reflection position determination unit that determines the reflection position of the two-dimensional profile based on the first and second spectral profiles; and a slope calculation unit that calculates the slope of the sample surface based on the reflection position.