Charged particle-optical element

Abstract

A charged particle-optical element configured to operate on a plurality of charged particle beams in a beam grid, the charged particle-optical element comprises: a first surface and a second surface, wherein each of the first surface and the second surface: has a plurality of apertures defined in it for allowing the beams to pass through, is angled relative to a plane perpendicular to an axis of the beam grid; and faces another surface of the charged particle-optical element at a potential difference, such that the charged particle-optical element is configured to apply a deflection to the beams by controlling the potential difference.