Spectral range extension for laser-sustained plasma light collection

Abstract

A laser-sustained broadband light source is disclosed. The light source may include a gas containment structure, a pump laser source, and a light collector element. The gas containment structure may include a body formed from an optically transparent material, such as fused silica, and one or more windows transmissive to vacuum ultraviolet (VUV) light. The one or more windows may be bonded to one or more extension portions, thereby ensuring a sealed internal gas volume and avoiding exposure of metal components to destructive VUV radiation. The pump laser source may be configured to direct the pump beam into the gas containment structure to sustain a plasma, emitting broadband light through the one or more windows. Optional retroreflectors may be included to enhance light collection efficiency. The light source configuration extends the spectral range into the VUV and / or infrared regions, improves manufacturability, and enhances plasma stability.