Systems and methods of etching in light source
TW202628489APending Publication Date: 2026-07-01ASML NETHERLANDS BV
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Patent Information
- Application Number
- TW114133301
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-09-04
- Filing Date
- 2025-09-01
- Publication Date
- 2026-07-01
Abstract
A light source includes a vessel containing a first liner, wherein the first liner has a frustum shape, an exhaust module arranged adjacent to the first liner, an etching component arranged adjacent to the exhaust module, and a gas supply coupled to the etching component. The etching component includes at least one antenna.
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