Die supplier
TW202628897APending Publication Date: 2026-07-01ASML NETHERLANDS BV
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Patent Information
- Application Number
- TW114142996
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-04-07
- Filing Date
- 2025-11-05
- Publication Date
- 2026-07-01
Abstract
A die supplier comprising: a donor support configured to support and rotate a donor substrate that supports a plurality of dies; a transfer arm configured to transfer dies from the donor substrate by rotation around a first axis; and an additional transfer arm configured to transfer dies from the donor substrate by rotation around a second axis, different from the first axis, wherein the transfer arm and additional transfer arm are configured to transfer dies to substantially the same location away from the donor substrate.
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