Evaluation components, evaluation component groups

Abstract

This invention provides an evaluation element for assessing the formation defects of the pillar layer. The pillar layer 12 is formed by connecting p-layers 12A to 12E in the depth direction. In the evaluation element T1, p-layers (first evaluation-specific diffusion regions) 22B to 22E and p-layers (second evaluation-specific diffusion regions) 23B to 23E, identical to the p-layers 12B to 12E, are formed in regions different from the pillar layer 12 when viewed from above. Corresponding to the p-layer 12A, a p-type connecting layer 24 is formed to connect p-layers 22B and 23B on its underside. The same applies to evaluation elements T2 to T4. Therefore, the positional or dimensional relationships of the p-layers 12A to 12E constituting the pillar layer 12 can be indirectly investigated based on the resistance values ​​of the elements T1 to T4.