Method to generate reference status data to monitor status of chamber, method and device to monitor status of chamber and non-transitory computer readable medium

Abstract

Provided is a method of monitoring a status of a chamber, the method including: acquiring a reference status data set that reflects a status of a chamber; transmitting radio waves in a specific frequency range to inside the chamber to be monitored and receiving radio waves reflected by the internal space of the chamber; generating current status data of the chamber using the received radio waves; generating monitoring information on a current status of the chamber using the reference status data set and the current status data; and providing the monitoring information.