Scrubbing apparatus

Abstract

A scrubbing apparatus comprises a scrubbing chamber defining a scrubbing space for scrubbing impurities contained in a gas, a first scrubbing plate disposed in the scrubbing chamber, a plurality of first scrubbing holes penetrating the first scrubbing plate in a second direction, and a scrubbing solution supply nozzle configured to supply a scrubbing solution onto an upper surface of the first scrubbing plate, wherein each of the plurality of first scrubbing holes includes an upper opening and a lower opening that opposite each other in the second direction, wherein a width in a first direction, which intersects the second direction, of the upper opening of each of the plurality of first scrubbing holes is greater than a width in the first direction of the lower opening of each of the plurality of first scrubbing holes, and wherein a portion of the impurities contained in the gas ascend through the plurality of first scrubbing holes and are dissolved in the scrubbing solution.

Claims

1. A washing device, wherein, include: The washing chamber forms a washing space for washing impurities contained in the gas; The first washing plate is disposed within the washing chamber; A plurality of first washing holes penetrate the first washing plate along a second direction; a washing solution supply nozzle supplies washing solution to the upper surface of the first washing plate; a second washing plate is disposed in the washing chamber and on the first washing plate; and a plurality of second washing holes penetrate the second washing plate along the second direction. Each of the plurality of first washing holes includes an upper opening and a lower opening located opposite each other along the second direction. The width of the upper opening of each of the plurality of first washing holes in a first direction intersecting the second direction is greater than the width of the lower opening of each of the plurality of first washing holes in the first direction. Each of the plurality of second washing holes includes an upper opening and a lower opening located opposite each other along the second direction. The width of the upper opening of each of the plurality of second washing holes in the first direction is greater than the width of the lower opening of each of the plurality of second washing holes in the first direction. A portion of the impurities contained in the gas rises through the plurality of first washing holes and dissolves in the washing solution.

2. The washing apparatus as described in claim 1, wherein, The width of each of the plurality of first washing holes in the first direction gradually decreases from the upper opening toward the lower opening.

3. The washing apparatus as described in claim 1, wherein, The first washing plate includes a first washing plate and a second washing plate on the first washing plate. The plurality of first washing holes include a plurality of first washing holes penetrating the first washing plate along the second direction and a plurality of first washing holes penetrating the first washing plate along the second direction. The plurality of first washing holes each include an upper opening and a lower opening located on opposite sides of each other along the second direction. The plurality of first washing holes each include an upper opening and a lower opening located on opposite sides of each other along the second direction. The upper opening of each of the plurality of first washing holes and the lower opening of each of the plurality of first washing holes are located on the same plane.

4. The washing apparatus as described in claim 3, wherein, The width of the plurality of first 1 washing holes in the first direction is constant, and the width of the plurality of first 2 washing holes in the first direction gradually increases from the first 1 washing hole along the second direction.

5. The washing apparatus as described in claim 4, wherein, The width of the upper opening of each of the plurality of first_1 washing holes in the first direction is the same as the width of the lower opening of each of the plurality of first_2 washing holes in the first direction.

6. The washing apparatus as described in claim 3, wherein, The width of each of the plurality of first 1 washing holes in the first direction is constant, and the width of each of the plurality of first 2 washing holes in the first direction is constant.

7. The washing apparatus as described in claim 3, wherein, The center of the upper opening of each of the plurality of first 1 washing holes and the center of the lower opening of each of the plurality of first 2 washing holes are offset in the second direction.

8. The washing apparatus as described in claim 1, wherein, The plurality of first washing holes includes a plurality of first-1 washing holes and a plurality of first-2 washing holes on the plurality of first-1 washing holes.

9. The washing apparatus as described in claim 8, wherein, At the boundaries formed by the plurality of first 1 washing holes and the plurality of first 2 washing holes, the width of each of the plurality of first 1 washing holes in the first direction is smaller than the width of each of the plurality of first 2 washing holes in the first direction.

10. The washing apparatus as described in claim 8, wherein, The width of each of the plurality of first and second washing holes in the first direction is constant, and the width of each of the plurality of first and second washing holes in the first direction gradually decreases from the plurality of first and second washing holes along the second direction.

11. The washing apparatus as described in claim 10, wherein, At the boundaries formed by the plurality of first 1 washing holes and the plurality of first 2 washing holes, the width of each of the plurality of first 1 washing holes in the first direction is the same as the width of each of the plurality of first 2 washing holes in the first direction.

12. The washing apparatus as described in claim 8, wherein, The height of each of the plurality of first 1 washing holes in the second direction is different from the height of each of the plurality of first 2 washing holes in the second direction.

13. The washing apparatus as described in claim 8, wherein, The plurality of first-1 washing holes each include a plurality of lower first-1 washing holes and a plurality of upper first-1 washing holes on the plurality of lower first-1 washing holes. The plurality of first-2 washing holes each include a plurality of lower first-2 washing holes and a plurality of upper first-2 washing holes on the plurality of lower first-2 washing holes. The volume of each of the plurality of upper first-1 washing holes is larger than the volume of each of the plurality of upper first-2 washing holes.

14. The washing apparatus as described in claim 13, wherein, The plurality of first 1_1 upper washing holes each include an upper opening, and the plurality of first 1_2 lower washing holes each include a lower opening. The upper opening of the first 1_1 upper washing hole and the lower opening of the first 1_2 lower washing hole are spaced apart from each other along the second direction.

15. The washing apparatus as described in claim 1, wherein, The shape of each of the plurality of first washing holes is different from the shape of each of the plurality of second washing holes.

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