Abrasive pads, methods for manufacturing abrasive pads, and methods for abrading the surfaces of optical or semiconductor materials.
TW202629351APending Publication Date: 2026-07-16FUJIBO HLDG
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- TW114136678
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-09-25
- Filing Date
- 2025-09-24
- Publication Date
- 2026-07-16
Abstract
The object of this invention is to provide a polishing pad that can shorten the start-up processing time and suppress the formation of scratches in the initial polishing stage. A polishing pad has an polishing layer comprising a polyurethane resin and a low molecular weight polyol, having bubbles in a generally teardrop shape, wherein the mass (mg) ratio of the low molecular weight polyol to the mass (g) of the polishing layer is 0.1 mg / g or more and 8.0 mg / g or less.
Need to check novelty before this filing date? Find Prior Art