Abrasive pads, methods for manufacturing abrasive pads, and methods for abrading the surfaces of optical or semiconductor materials.

TW202629351APending Publication Date: 2026-07-16FUJIBO HLDG
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
TW114136678
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-09-25
Filing Date
2025-09-24
Publication Date
2026-07-16
Patent Text Reader

Abstract

The object of this invention is to provide a polishing pad that can shorten the start-up processing time and suppress the formation of scratches in the initial polishing stage. A polishing pad has an polishing layer comprising a polyurethane resin and a low molecular weight polyol, having bubbles in a generally teardrop shape, wherein the mass (mg) ratio of the low molecular weight polyol to the mass (g) of the polishing layer is 0.1 mg / g or more and 8.0 mg / g or less.
Need to check novelty before this filing date? Find Prior Art