Slurry, grinding method, part manufacturing method and cerium oxide particles

Abstract

The slurry of this invention contains abrasive particles and water. The abrasive particles include cerium oxide particles, the ratio of the BET diameter of the cerium oxide particles to the crystallite diameter on the (111) surface is 1.00 or more, and the cumulative value of the differential pore volume in the pore distribution curve of the cerium oxide particles, ranging from 10 to 180 nm in diameter, is 0.11 to 0.17 cm³ / g. The grinding method of this invention includes the step of grinding a workpiece using the slurry. The manufacturing method of the part of this invention includes the step of obtaining a part using a workpiece ground by the grinding method.