High conductance valve with reduced closing force

Abstract

A valve body comprising a valve base and a plurality of orifice inserts, each orifice insert having an orifice ridge, wherein the plurality of orifice ridges are substantially coplanar and positioned closely adjacent each other. An area enclosed by the plurality of orifice ridges is substantially less than the area of a single circle having a circumference equal to the sum of the circumferences of the plurality of orifice ridges. The valve base and orifice inserts may be corrosion resistant metallic materials and the assembly suited to high purity fluid distribution apparatus. A swaging assembly process is described.