Gas flow control valve, gas conveying device and gas supply method

Abstract

This invention provides a gas flow control valve, a gas delivery device, and a gas supply method. The gas flow control valve includes: a first valve body and a second valve body, which are arranged opposite to each other and parallel to each other, forming a gas flow channel for the reactant gas; the distance between the first valve body and the second valve body is defined as the valve opening of the gas flow control valve; a driving device, which is made of piezoelectric ceramic, is used to drive the second valve body to move toward or away from the first valve body, and the valve opening is adjusted by adjusting the voltage applied to the driving device; and a position sensor is used to detect the valve opening.

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