Method and apparatus for non-contact measurement of objects

Abstract

In a method for measuring an object (12; 12'), an optical coherence tomography scanner (22) uses the scanning device (26) and the optical system (38) to align a measurement beam (24) with at least one point (39; 39', 39'') on the surface (40; 40') of the object (12; 12') to obtain multiple measurements. The angular position of the stage (16) on which the object is placed is changed according to these measurements, such that the surface (40; 40') of the object (12; 12') or at least one region of the surface becomes, on average, more perpendicular to the optical axis (OA) of the optical system (38) after the angular position is changed than before the angular position is changed.

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