Mechanisms for control of resolution and throughput for optical instruments, and methods of use thereof

Abstract

The disclosure provides a system and method of use for improved configurability and control of resolution and throughput of imaging spectrometers useful for monitoring optical signals in semiconductor process tools. In one aspect a resolution and throughput control system for an optical instrument is disclosed. In one example, the resolution and throughput control system includes: (1) a payload, (2) an actuator, and (3) a movement device that alters light input for the optical instrument by controlling movement of the payload along a single axis in response to the actuator. The optical instrument can be, for example, a spectrometer.