Abnormality detection apparatus and abnormality detection method for substrate support device

TW202629982APending Publication Date: 2026-07-16EBARA CORP
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
EBARA CORP
Filing Date
2025-10-21
Publication Date
2026-07-16

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Abstract

Provided is a technology capable of detecting abnormality in operation of support members of a substrate support device. An abnormality detection apparatus
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