Probe card and semiconductor test device including the same
TW202630021APending Publication Date: 2026-07-16SEMICS INC
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- SEMICS INC
- Filing Date
- 2025-11-18
- Publication Date
- 2026-07-16
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Abstract
The present invention discloses a probe cards and semiconductor test device including the same. According to this technology of the probe card may include: a substrate, one surface of which faces a chuck supporting a test object; a plurality of probes disposed on the surface of the substrate and in contact with the test object; and a plurality of contact components disposed on the surface of the substrate and in contact with the chuck.
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