Light transmission device for optical measurement instrument and semiconductor processing equipment

Abstract

This application provides a light transmission device for an optical measurement instrument and a semiconductor processing equipment. The device includes: an adapter assembly, which is installed in an upper space of a coil box of the semiconductor processing equipment, and is used to convert the light emitted by the optical measurement instrument in a first direction into light propagating in a second direction; the first direction and the second direction form an angle with each other; and a light-shielding component, which is installed in a lower space of the coil box and is positioned between the adapter assembly and the light-transmitting window located at the top of the process chamber of the semiconductor processing equipment. The light-shielding component is provided with a light transmission channel extending along the second direction, with both ends of the light transmission channel respectively facing the outlet end of the adapter assembly and the light-transmitting window.

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