Series of stacked confocal pulse stretchers for speckle reduction
TW202630093APending Publication Date: 2026-07-16CYMER INC
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- CYMER INC
- Filing Date
- 2020-10-12
- Publication Date
- 2026-07-16
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Figure TWG2TA001069112_001 
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Abstract
reflections per optical circuit configuration. The inclusion of the combination of different mirror separations and delay path lengths can result in very long pulse stretching, long optical delays, and minimal efficiency losses. Also, in the extended optical pulse stretcher, at least a beam splitter can be positioned relative to the center of curvature of the mirrors to ''flatten'' each of the circuits to enable the beam to propagate in the same plane (e.g., parallel to the floor). Also, the curvatures and sizes of the individual mirrors can be designed to position the beam splitter closer to one of the banks of mirrors to allow the optical pulse stretchers to properly fit in an allocated location in a laser system.
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