Protective film

Abstract

This invention provides a protective film, particularly a protective film for EUV exposure, comprising a protective film frame 1 and an adhesive or bonding agent 10 coated on the upper and lower end faces 1a of the protective film frame for mounting the protective film and a photomask. The protective film is characterized in that the adhesive or bonding agent 10 is formed in a region W1 located three-quarters of the way from the outer side of each end face 1a of the upper and lower end faces 1a of the protective film frame 1. The protective film of this invention prevents EUV scattered light reaching the inner side of the protective film frame from directly irradiating the adhesive for the protective film and the bonding agent for the photomask.

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