Ranking anomalous sensor by criticality using causal inference ‎‎techniques

TW202630155APending Publication Date: 2026-07-16APPLIED MATERIALS INC
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
APPLIED MATERIALS INC
Filing Date
2025-10-15
Publication Date
2026-07-16

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Abstract

Embodiments described herein relate to a method that includes generating weighted causal graph for a tool through with an informational theory probabilistic approach and / or a statistical approach. In an embodiment, the method further includes generating a criticality score for each of a plurality of nodes within the weighted causal graph, and generating a weighted anomaly score for each of the plurality of nodes. In an embodiment, the weighted anomaly score is calculated based on the criticality score of one or more nodes within a causal group for a given node and a fault metric of the given node. In an embodiment, the method further includes ranking the plurality of nodes based on the weighted anomaly score of each of the plurality of nodes.
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