Liquid multi-nozzle jet-impingement cooling device

Abstract

A liquid multi-nozzle jet-impingement cooling device may include a microjet multi-nozzle plate, outlet plate, inlet plate, outlet flow plate and cover plate. The cover plate is coupled to the outlet flow plate, which is coupled to the inlet plate, which is coupled to the outlet plate, which is coupled to the microjet multi-nozzle plate. A first inlet through hole of the cover plate is fluidly and an outlet through hole of one or more sub-outlet plenums of the cover plate are respectively fluidly coupled to a chamber of the microjet multi-nozzle plate. The chamber is sealably mounted on a surface of a processor. A plurality of third inlet orifice arrays of the microjet multi-nozzle plate directs liquid coolant to the surface of the processor and a plurality of first outlet orifice arrays of the microjet multi-nozzle plate directs liquid coolant away from the surface of the processor.