High-throughput multi-beam scanning microscope with hexagonal raster of beamlets

TW202630445APending Publication Date: 2026-07-16CARL ZEISS MULTISEM GMBH
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
CARL ZEISS MULTISEM GMBH
Filing Date
2025-09-22
Publication Date
2026-07-16

Smart Images

  • Figure TWG2TA001068599_001
    Figure TWG2TA001068599_001
  • Figure TWG2TA001068599_002
    Figure TWG2TA001068599_002
  • Figure TWG2TA001068599_003
    Figure TWG2TA001068599_003
Patent Text Reader

Abstract

A multi-beam charged particle system and a method of operating a multi-beam charged particle system with moving stage is provided. With the method and system configured to execute the method, a high throughput of an image acquisition is provided.
Need to check novelty before this filing date? Find Prior Art