System and method for thermal management of a laser system

TW202630517APending Publication Date: 2026-07-16APPL MATERIALS ISRAEL LTD
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
APPL MATERIALS ISRAEL LTD
Filing Date
2025-10-17
Publication Date
2026-07-16

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Abstract

A system and method for thermal management of an optical system. The system comprises at least one laser unit configured for operating in periods of at least a first high power output mode and a second low power output mode, an optical arrangement configured for receiving output beam of the at least one laser unit and for directing the input beam for generating at least one illumination spot having at least one of a selected spot location and selected spot parameters, and a thermal management system. Wherein the thermal management module is configured and operable for maintaining increased thermal conditions of the optical arrangement when the at least one laser unit is in the second low power output mode.
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