Packaging for an electro-mechanical device comprising an array of moving elements

Abstract

There are provided devices comprising an electro-mechanical device operative to generate sound waves, comprising an array of a plurality of actuator elements, each given actuator element of the plurality of actuator elements comprising at least one given electrode and a given moving element, a layer on which at least part of the electro-mechanical device is mounted and a cover, wherein the devices enables reducing or cancelling the interferences with the sound waves generated by the electro-mechanical device. Manufacturing methods of the devices are also provided.

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