High power electrostatic chuck with features preventing he hole light-up / arcing

TW202630691APending Publication Date: 2026-07-16LAM RES CORP
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
LAM RES CORP
Filing Date
2019-10-31
Publication Date
2026-07-16

Smart Images

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    Figure TWG2TA001069334_002
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    Figure TWG2TA001069334_003
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Abstract

A spark suppression apparatus for a helium line in an electrostatic chuck in a plasma processing chamber is provided. The spark suppression apparatus comprises a dielectric multilumen plug in the helium line, wherein the dielectric multilumen plug has a plurality of lumens, wherein the plurality of lumens are numbered between
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