Method for forming electrode and method for forming capacitor using the same

TW202630787APending Publication Date: 2026-07-16JUSUNG ENG
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
JUSUNG ENG
Filing Date
2025-12-19
Publication Date
2026-07-16

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Abstract

Disclosed is a method for forming an electrode including a first layer and a second layer on a substrate comprising a step of forming the first layer on the substrate; and a step of forming the second layer on the first layer, wherein the first layer includes Ru, and the second layer includes an oxide of Ru (RuO).
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